WO2001088638A3 - Method and subsystem for determining a sequence in which microstructures are to be processed - Google Patents
Method and subsystem for determining a sequence in which microstructures are to be processed Download PDFInfo
- Publication number
- WO2001088638A3 WO2001088638A3 PCT/US2001/015553 US0115553W WO0188638A3 WO 2001088638 A3 WO2001088638 A3 WO 2001088638A3 US 0115553 W US0115553 W US 0115553W WO 0188638 A3 WO0188638 A3 WO 0188638A3
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- microstructures
- processed
- site
- cluster
- sequence
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06Q—INFORMATION AND COMMUNICATION TECHNOLOGY [ICT] SPECIALLY ADAPTED FOR ADMINISTRATIVE, COMMERCIAL, FINANCIAL, MANAGERIAL OR SUPERVISORY PURPOSES; SYSTEMS OR METHODS SPECIALLY ADAPTED FOR ADMINISTRATIVE, COMMERCIAL, FINANCIAL, MANAGERIAL OR SUPERVISORY PURPOSES, NOT OTHERWISE PROVIDED FOR
- G06Q10/00—Administration; Management
- G06Q10/04—Forecasting or optimisation specially adapted for administrative or management purposes, e.g. linear programming or "cutting stock problem"
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B13/00—Adaptive control systems, i.e. systems automatically adjusting themselves to have a performance which is optimum according to some preassigned criterion
- G05B13/02—Adaptive control systems, i.e. systems automatically adjusting themselves to have a performance which is optimum according to some preassigned criterion electric
- G05B13/0205—Adaptive control systems, i.e. systems automatically adjusting themselves to have a performance which is optimum according to some preassigned criterion electric not using a model or a simulator of the controlled system
- G05B13/024—Adaptive control systems, i.e. systems automatically adjusting themselves to have a performance which is optimum according to some preassigned criterion electric not using a model or a simulator of the controlled system in which a parameter or coefficient is automatically adjusted to optimise the performance
Abstract
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
AU2001261577A AU2001261577A1 (en) | 2000-05-16 | 2001-05-15 | Method and subsystem for determining a sequence in which microstructures are to be processed at a laser-processing site |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US20427500P | 2000-05-16 | 2000-05-16 | |
US60/204,275 | 2000-05-16 |
Publications (2)
Publication Number | Publication Date |
---|---|
WO2001088638A2 WO2001088638A2 (en) | 2001-11-22 |
WO2001088638A3 true WO2001088638A3 (en) | 2002-06-13 |
Family
ID=22757294
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/US2001/015553 WO2001088638A2 (en) | 2000-05-16 | 2001-05-15 | Method and subsystem for determining a sequence in which microstructures are to be processed |
PCT/US2001/015554 WO2001088639A2 (en) | 2000-05-16 | 2001-05-15 | Method and subsystem for generating a trajectory to be followed by a motor-driven stage |
Family Applications After (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/US2001/015554 WO2001088639A2 (en) | 2000-05-16 | 2001-05-15 | Method and subsystem for generating a trajectory to be followed by a motor-driven stage |
Country Status (3)
Country | Link |
---|---|
AU (2) | AU2001261577A1 (en) |
TW (2) | TW507120B (en) |
WO (2) | WO2001088638A2 (en) |
Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7341822B2 (en) * | 2003-02-25 | 2008-03-11 | Asml Netherlands B.V. | Time-optimal setpoint generator in a lithographic apparatus |
EP1452920A3 (en) * | 2003-02-25 | 2006-06-21 | ASML Netherlands B.V. | Device manufacturing method,device manufactured thereby,computer program for performing the method,lithographic apparatus, and robotics system |
AT505245B1 (en) | 2007-05-25 | 2011-02-15 | Krieger Martin Mag | ELECTRONICALLY CONTROLLED CLOCK |
GB2498943A (en) * | 2012-01-31 | 2013-08-07 | Ibm | Evaluating and optimizing a trajectory function |
US9678499B2 (en) | 2012-06-27 | 2017-06-13 | Mitsubishi Electric Research Laboratories, Inc. | Method for controlling redundantly actuated machines for cutting a pattern of disconnected contours |
US9104192B2 (en) * | 2012-06-27 | 2015-08-11 | Mitsubishi Electric Research Laboratories, Inc. | System and method for controlling machines according to pattern of contours |
TWI511820B (en) * | 2013-12-02 | 2015-12-11 | Ardentec Corp | Parameter loading method of laser process machine |
CN112787551A (en) * | 2019-11-02 | 2021-05-11 | 天津职业技术师范大学(中国职业培训指导教师进修中心) | Method for improving robustness and contour performance of double-shaft or three-shaft feed driving system |
Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5200677A (en) * | 1991-07-18 | 1993-04-06 | International Business Machines Corporation | Method and apparatus for controlling positioning means |
EP0862089A2 (en) * | 1997-02-28 | 1998-09-02 | Nikon Corporation | Method of determining movement sequence and apparatus for realizing it |
US5808887A (en) * | 1987-11-20 | 1998-09-15 | Philips Electronics North America Corporation | Animation of path planning |
EP0864929A2 (en) * | 1997-03-11 | 1998-09-16 | Nikon Corporation | Determining method of movement sequence and alignment apparatus for executing the same |
US5871805A (en) * | 1996-04-08 | 1999-02-16 | Lemelson; Jerome | Computer controlled vapor deposition processes |
WO1999028798A2 (en) * | 1997-12-02 | 1999-06-10 | Lacent Technologies Inc. | Gantry-mounted laser nozzle and method for controlling laser positioning |
WO2000017724A1 (en) * | 1998-09-18 | 2000-03-30 | General Scanning, Inc. | High-speed precision positioning apparatus |
-
2001
- 2001-05-15 WO PCT/US2001/015553 patent/WO2001088638A2/en active Application Filing
- 2001-05-15 AU AU2001261577A patent/AU2001261577A1/en not_active Abandoned
- 2001-05-15 TW TW90111549A patent/TW507120B/en not_active IP Right Cessation
- 2001-05-15 TW TW90111553A patent/TW505956B/en not_active IP Right Cessation
- 2001-05-15 AU AU2001261578A patent/AU2001261578A1/en not_active Abandoned
- 2001-05-15 WO PCT/US2001/015554 patent/WO2001088639A2/en active Application Filing
Patent Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5808887A (en) * | 1987-11-20 | 1998-09-15 | Philips Electronics North America Corporation | Animation of path planning |
US5200677A (en) * | 1991-07-18 | 1993-04-06 | International Business Machines Corporation | Method and apparatus for controlling positioning means |
US5871805A (en) * | 1996-04-08 | 1999-02-16 | Lemelson; Jerome | Computer controlled vapor deposition processes |
EP0862089A2 (en) * | 1997-02-28 | 1998-09-02 | Nikon Corporation | Method of determining movement sequence and apparatus for realizing it |
EP0864929A2 (en) * | 1997-03-11 | 1998-09-16 | Nikon Corporation | Determining method of movement sequence and alignment apparatus for executing the same |
WO1999028798A2 (en) * | 1997-12-02 | 1999-06-10 | Lacent Technologies Inc. | Gantry-mounted laser nozzle and method for controlling laser positioning |
WO2000017724A1 (en) * | 1998-09-18 | 2000-03-30 | General Scanning, Inc. | High-speed precision positioning apparatus |
Non-Patent Citations (1)
Title |
---|
KOHNO Y: "PATH PLANNING IN WAFER TRANSFER SYSTEM WITH MOBILE ROBOT", PROCEEDINGS OF THE INTERNATIONAL CONFERENCE ON INDUSTRIAL ELECTRONICS,CONTROL AND INSTRUMENTATION. (IECON). INDUSTRIAL APPLICATIONS OF MINI, MICRO & PERSONAL COMPUTERS. MILWAUKEE, SEPT. 29 - OCT. 3, 1986, NEW YORK, IEEE, US, vol. 2, 29 September 1986 (1986-09-29), pages 811 - 816, XP000044825 * |
Also Published As
Publication number | Publication date |
---|---|
TW505956B (en) | 2002-10-11 |
WO2001088639A2 (en) | 2001-11-22 |
AU2001261577A1 (en) | 2001-11-26 |
WO2001088638A2 (en) | 2001-11-22 |
AU2001261578A1 (en) | 2001-11-26 |
WO2001088639A3 (en) | 2002-06-13 |
TW507120B (en) | 2002-10-21 |
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