WO2001088638A3 - Method and subsystem for determining a sequence in which microstructures are to be processed - Google Patents

Method and subsystem for determining a sequence in which microstructures are to be processed Download PDF

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Publication number
WO2001088638A3
WO2001088638A3 PCT/US2001/015553 US0115553W WO0188638A3 WO 2001088638 A3 WO2001088638 A3 WO 2001088638A3 US 0115553 W US0115553 W US 0115553W WO 0188638 A3 WO0188638 A3 WO 0188638A3
Authority
WO
WIPO (PCT)
Prior art keywords
microstructures
processed
site
cluster
sequence
Prior art date
Application number
PCT/US2001/015553
Other languages
French (fr)
Other versions
WO2001088638A2 (en
Inventor
Bradley L Hunter
Paul Andrei
Original Assignee
Gen Scanning Inc
Bradley L Hunter
Paul Andrei
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Gen Scanning Inc, Bradley L Hunter, Paul Andrei filed Critical Gen Scanning Inc
Priority to AU2001261577A priority Critical patent/AU2001261577A1/en
Publication of WO2001088638A2 publication Critical patent/WO2001088638A2/en
Publication of WO2001088638A3 publication Critical patent/WO2001088638A3/en

Links

Classifications

    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06Q—INFORMATION AND COMMUNICATION TECHNOLOGY [ICT] SPECIALLY ADAPTED FOR ADMINISTRATIVE, COMMERCIAL, FINANCIAL, MANAGERIAL OR SUPERVISORY PURPOSES; SYSTEMS OR METHODS SPECIALLY ADAPTED FOR ADMINISTRATIVE, COMMERCIAL, FINANCIAL, MANAGERIAL OR SUPERVISORY PURPOSES, NOT OTHERWISE PROVIDED FOR
    • G06Q10/00—Administration; Management
    • G06Q10/04—Forecasting or optimisation specially adapted for administrative or management purposes, e.g. linear programming or "cutting stock problem"
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B13/00—Adaptive control systems, i.e. systems automatically adjusting themselves to have a performance which is optimum according to some preassigned criterion
    • G05B13/02—Adaptive control systems, i.e. systems automatically adjusting themselves to have a performance which is optimum according to some preassigned criterion electric
    • G05B13/0205—Adaptive control systems, i.e. systems automatically adjusting themselves to have a performance which is optimum according to some preassigned criterion electric not using a model or a simulator of the controlled system
    • G05B13/024—Adaptive control systems, i.e. systems automatically adjusting themselves to have a performance which is optimum according to some preassigned criterion electric not using a model or a simulator of the controlled system in which a parameter or coefficient is automatically adjusted to optimise the performance

Abstract

Method and subsystem are provided for determining a sequence in which microstructures are to be processed at a laser-processing site by taking into account microstructures located near travel limits of a motor-driven stage. The method includes receiving reference data which represent locations of microstructures to be processed at the site and coalescing adjacent groups of microstructures into clusters of microstructures including edge clusters which contain the microstructures located near the travel limits of the motor-driven stage which moves the microstructures relative to a laser beam at the site. The method also includes dividing a cluster fragment from each edge cluster. The cluster fragments contain the microstructures located near the travel limits. The method then includes sorting the clusters and cluster fragments to obtain data which represent a substantially optimum sequence in which the microstructures are to be processed to increase throughput at the site.
PCT/US2001/015553 2000-05-16 2001-05-15 Method and subsystem for determining a sequence in which microstructures are to be processed WO2001088638A2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
AU2001261577A AU2001261577A1 (en) 2000-05-16 2001-05-15 Method and subsystem for determining a sequence in which microstructures are to be processed at a laser-processing site

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US20427500P 2000-05-16 2000-05-16
US60/204,275 2000-05-16

Publications (2)

Publication Number Publication Date
WO2001088638A2 WO2001088638A2 (en) 2001-11-22
WO2001088638A3 true WO2001088638A3 (en) 2002-06-13

Family

ID=22757294

Family Applications (2)

Application Number Title Priority Date Filing Date
PCT/US2001/015553 WO2001088638A2 (en) 2000-05-16 2001-05-15 Method and subsystem for determining a sequence in which microstructures are to be processed
PCT/US2001/015554 WO2001088639A2 (en) 2000-05-16 2001-05-15 Method and subsystem for generating a trajectory to be followed by a motor-driven stage

Family Applications After (1)

Application Number Title Priority Date Filing Date
PCT/US2001/015554 WO2001088639A2 (en) 2000-05-16 2001-05-15 Method and subsystem for generating a trajectory to be followed by a motor-driven stage

Country Status (3)

Country Link
AU (2) AU2001261577A1 (en)
TW (2) TW507120B (en)
WO (2) WO2001088638A2 (en)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7341822B2 (en) * 2003-02-25 2008-03-11 Asml Netherlands B.V. Time-optimal setpoint generator in a lithographic apparatus
EP1452920A3 (en) * 2003-02-25 2006-06-21 ASML Netherlands B.V. Device manufacturing method,device manufactured thereby,computer program for performing the method,lithographic apparatus, and robotics system
AT505245B1 (en) 2007-05-25 2011-02-15 Krieger Martin Mag ELECTRONICALLY CONTROLLED CLOCK
GB2498943A (en) * 2012-01-31 2013-08-07 Ibm Evaluating and optimizing a trajectory function
US9678499B2 (en) 2012-06-27 2017-06-13 Mitsubishi Electric Research Laboratories, Inc. Method for controlling redundantly actuated machines for cutting a pattern of disconnected contours
US9104192B2 (en) * 2012-06-27 2015-08-11 Mitsubishi Electric Research Laboratories, Inc. System and method for controlling machines according to pattern of contours
TWI511820B (en) * 2013-12-02 2015-12-11 Ardentec Corp Parameter loading method of laser process machine
CN112787551A (en) * 2019-11-02 2021-05-11 天津职业技术师范大学(中国职业培训指导教师进修中心) Method for improving robustness and contour performance of double-shaft or three-shaft feed driving system

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5200677A (en) * 1991-07-18 1993-04-06 International Business Machines Corporation Method and apparatus for controlling positioning means
EP0862089A2 (en) * 1997-02-28 1998-09-02 Nikon Corporation Method of determining movement sequence and apparatus for realizing it
US5808887A (en) * 1987-11-20 1998-09-15 Philips Electronics North America Corporation Animation of path planning
EP0864929A2 (en) * 1997-03-11 1998-09-16 Nikon Corporation Determining method of movement sequence and alignment apparatus for executing the same
US5871805A (en) * 1996-04-08 1999-02-16 Lemelson; Jerome Computer controlled vapor deposition processes
WO1999028798A2 (en) * 1997-12-02 1999-06-10 Lacent Technologies Inc. Gantry-mounted laser nozzle and method for controlling laser positioning
WO2000017724A1 (en) * 1998-09-18 2000-03-30 General Scanning, Inc. High-speed precision positioning apparatus

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5808887A (en) * 1987-11-20 1998-09-15 Philips Electronics North America Corporation Animation of path planning
US5200677A (en) * 1991-07-18 1993-04-06 International Business Machines Corporation Method and apparatus for controlling positioning means
US5871805A (en) * 1996-04-08 1999-02-16 Lemelson; Jerome Computer controlled vapor deposition processes
EP0862089A2 (en) * 1997-02-28 1998-09-02 Nikon Corporation Method of determining movement sequence and apparatus for realizing it
EP0864929A2 (en) * 1997-03-11 1998-09-16 Nikon Corporation Determining method of movement sequence and alignment apparatus for executing the same
WO1999028798A2 (en) * 1997-12-02 1999-06-10 Lacent Technologies Inc. Gantry-mounted laser nozzle and method for controlling laser positioning
WO2000017724A1 (en) * 1998-09-18 2000-03-30 General Scanning, Inc. High-speed precision positioning apparatus

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
KOHNO Y: "PATH PLANNING IN WAFER TRANSFER SYSTEM WITH MOBILE ROBOT", PROCEEDINGS OF THE INTERNATIONAL CONFERENCE ON INDUSTRIAL ELECTRONICS,CONTROL AND INSTRUMENTATION. (IECON). INDUSTRIAL APPLICATIONS OF MINI, MICRO & PERSONAL COMPUTERS. MILWAUKEE, SEPT. 29 - OCT. 3, 1986, NEW YORK, IEEE, US, vol. 2, 29 September 1986 (1986-09-29), pages 811 - 816, XP000044825 *

Also Published As

Publication number Publication date
TW505956B (en) 2002-10-11
WO2001088639A2 (en) 2001-11-22
AU2001261577A1 (en) 2001-11-26
WO2001088638A2 (en) 2001-11-22
AU2001261578A1 (en) 2001-11-26
WO2001088639A3 (en) 2002-06-13
TW507120B (en) 2002-10-21

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