WO2001088639A3 - Method and subsystem for generating a trajectory to be followed by a motor-driven stage - Google Patents

Method and subsystem for generating a trajectory to be followed by a motor-driven stage Download PDF

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Publication number
WO2001088639A3
WO2001088639A3 PCT/US2001/015554 US0115554W WO0188639A3 WO 2001088639 A3 WO2001088639 A3 WO 2001088639A3 US 0115554 W US0115554 W US 0115554W WO 0188639 A3 WO0188639 A3 WO 0188639A3
Authority
WO
WIPO (PCT)
Prior art keywords
trajectory
stage
subsystem
followed
possible trajectories
Prior art date
Application number
PCT/US2001/015554
Other languages
French (fr)
Other versions
WO2001088639A2 (en
Inventor
Bradley L Hunter
Christopher P Cullen
Original Assignee
Gen Scanning Inc
Bradley L Hunter
Christopher P Cullen
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Gen Scanning Inc, Bradley L Hunter, Christopher P Cullen filed Critical Gen Scanning Inc
Priority to AU2001261578A priority Critical patent/AU2001261578A1/en
Publication of WO2001088639A2 publication Critical patent/WO2001088639A2/en
Publication of WO2001088639A3 publication Critical patent/WO2001088639A3/en

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Classifications

    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06Q—INFORMATION AND COMMUNICATION TECHNOLOGY [ICT] SPECIALLY ADAPTED FOR ADMINISTRATIVE, COMMERCIAL, FINANCIAL, MANAGERIAL OR SUPERVISORY PURPOSES; SYSTEMS OR METHODS SPECIALLY ADAPTED FOR ADMINISTRATIVE, COMMERCIAL, FINANCIAL, MANAGERIAL OR SUPERVISORY PURPOSES, NOT OTHERWISE PROVIDED FOR
    • G06Q10/00—Administration; Management
    • G06Q10/04—Forecasting or optimisation specially adapted for administrative or management purposes, e.g. linear programming or "cutting stock problem"
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B13/00—Adaptive control systems, i.e. systems automatically adjusting themselves to have a performance which is optimum according to some preassigned criterion
    • G05B13/02—Adaptive control systems, i.e. systems automatically adjusting themselves to have a performance which is optimum according to some preassigned criterion electric
    • G05B13/0205—Adaptive control systems, i.e. systems automatically adjusting themselves to have a performance which is optimum according to some preassigned criterion electric not using a model or a simulator of the controlled system
    • G05B13/024—Adaptive control systems, i.e. systems automatically adjusting themselves to have a performance which is optimum according to some preassigned criterion electric not using a model or a simulator of the controlled system in which a parameter or coefficient is automatically adjusted to optimise the performance

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  • Engineering & Computer Science (AREA)
  • Business, Economics & Management (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Economics (AREA)
  • Human Resources & Organizations (AREA)
  • Strategic Management (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Medical Informatics (AREA)
  • Operations Research (AREA)
  • Quality & Reliability (AREA)
  • Tourism & Hospitality (AREA)
  • Development Economics (AREA)
  • General Business, Economics & Management (AREA)
  • Health & Medical Sciences (AREA)
  • Theoretical Computer Science (AREA)
  • Entrepreneurship & Innovation (AREA)
  • Artificial Intelligence (AREA)
  • Game Theory and Decision Science (AREA)
  • Evolutionary Computation (AREA)
  • Marketing (AREA)
  • Software Systems (AREA)
  • Automation & Control Theory (AREA)
  • Numerical Control (AREA)
  • Laser Beam Processing (AREA)
  • Control Of Position Or Direction (AREA)

Abstract

Method and subsystem are provided for generating a trajectory to be followed by a motor-driven stage when processing microstructures at a laser-processing site utilizing an estimated change in temperature of motors caused when the motors drive the stage according to a number of possible trajectories. The method includes receiving reference data which represent locations of microstructures to be processed at the site, determining a plurality of possible trajectories based on the data, and estimating a change of temperature of motors caused when the motors drive the stage based on each of the possible trajectories. The method also includes determining a substantially optimum trajectory from the possible trajectories wherein positioning accuracy of the stage is maximized by following the substantially optimum trajectory.
PCT/US2001/015554 2000-05-16 2001-05-15 Method and subsystem for generating a trajectory to be followed by a motor-driven stage WO2001088639A2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
AU2001261578A AU2001261578A1 (en) 2000-05-16 2001-05-15 Method and subsystem for generating a trajectory to be followed by a motor-driven stage when processing microstructures at a laser-processing site

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US20427500P 2000-05-16 2000-05-16
US60/204,275 2000-05-16

Publications (2)

Publication Number Publication Date
WO2001088639A2 WO2001088639A2 (en) 2001-11-22
WO2001088639A3 true WO2001088639A3 (en) 2002-06-13

Family

ID=22757294

Family Applications (2)

Application Number Title Priority Date Filing Date
PCT/US2001/015554 WO2001088639A2 (en) 2000-05-16 2001-05-15 Method and subsystem for generating a trajectory to be followed by a motor-driven stage
PCT/US2001/015553 WO2001088638A2 (en) 2000-05-16 2001-05-15 Method and subsystem for determining a sequence in which microstructures are to be processed

Family Applications After (1)

Application Number Title Priority Date Filing Date
PCT/US2001/015553 WO2001088638A2 (en) 2000-05-16 2001-05-15 Method and subsystem for determining a sequence in which microstructures are to be processed

Country Status (3)

Country Link
AU (2) AU2001261578A1 (en)
TW (2) TW505956B (en)
WO (2) WO2001088639A2 (en)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7341822B2 (en) * 2003-02-25 2008-03-11 Asml Netherlands B.V. Time-optimal setpoint generator in a lithographic apparatus
EP1452920A3 (en) * 2003-02-25 2006-06-21 ASML Netherlands B.V. Device manufacturing method,device manufactured thereby,computer program for performing the method,lithographic apparatus, and robotics system
AT505245B1 (en) 2007-05-25 2011-02-15 Krieger Martin Mag ELECTRONICALLY CONTROLLED CLOCK
GB2498943A (en) 2012-01-31 2013-08-07 Ibm Evaluating and optimizing a trajectory function
US9678499B2 (en) 2012-06-27 2017-06-13 Mitsubishi Electric Research Laboratories, Inc. Method for controlling redundantly actuated machines for cutting a pattern of disconnected contours
US9104192B2 (en) * 2012-06-27 2015-08-11 Mitsubishi Electric Research Laboratories, Inc. System and method for controlling machines according to pattern of contours
TWI511820B (en) * 2013-12-02 2015-12-11 Ardentec Corp Parameter loading method of laser process machine
CN112787551A (en) * 2019-11-02 2021-05-11 天津职业技术师范大学(中国职业培训指导教师进修中心) Method for improving robustness and contour performance of double-shaft or three-shaft feed driving system

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0862089A2 (en) * 1997-02-28 1998-09-02 Nikon Corporation Method of determining movement sequence and apparatus for realizing it
US5808887A (en) * 1987-11-20 1998-09-15 Philips Electronics North America Corporation Animation of path planning
EP0864929A2 (en) * 1997-03-11 1998-09-16 Nikon Corporation Determining method of movement sequence and alignment apparatus for executing the same
US5871805A (en) * 1996-04-08 1999-02-16 Lemelson; Jerome Computer controlled vapor deposition processes
WO1999028798A2 (en) * 1997-12-02 1999-06-10 Lacent Technologies Inc. Gantry-mounted laser nozzle and method for controlling laser positioning
WO2000017724A1 (en) * 1998-09-18 2000-03-30 General Scanning, Inc. High-speed precision positioning apparatus

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0523270A1 (en) * 1991-07-18 1993-01-20 International Business Machines Corporation Method to control a positioning system

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5808887A (en) * 1987-11-20 1998-09-15 Philips Electronics North America Corporation Animation of path planning
US5871805A (en) * 1996-04-08 1999-02-16 Lemelson; Jerome Computer controlled vapor deposition processes
EP0862089A2 (en) * 1997-02-28 1998-09-02 Nikon Corporation Method of determining movement sequence and apparatus for realizing it
EP0864929A2 (en) * 1997-03-11 1998-09-16 Nikon Corporation Determining method of movement sequence and alignment apparatus for executing the same
WO1999028798A2 (en) * 1997-12-02 1999-06-10 Lacent Technologies Inc. Gantry-mounted laser nozzle and method for controlling laser positioning
WO2000017724A1 (en) * 1998-09-18 2000-03-30 General Scanning, Inc. High-speed precision positioning apparatus

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
KOHNO Y: "PATH PLANNING IN WAFER TRANSFER SYSTEM WITH MOBILE ROBOT", PROCEEDINGS OF THE INTERNATIONAL CONFERENCE ON INDUSTRIAL ELECTRONICS,CONTROL AND INSTRUMENTATION. (IECON). INDUSTRIAL APPLICATIONS OF MINI, MICRO & PERSONAL COMPUTERS. MILWAUKEE, SEPT. 29 - OCT. 3, 1986, NEW YORK, IEEE, US, vol. 2, 29 September 1986 (1986-09-29), pages 811 - 816, XP000044825 *

Also Published As

Publication number Publication date
WO2001088638A2 (en) 2001-11-22
WO2001088638A3 (en) 2002-06-13
WO2001088639A2 (en) 2001-11-22
AU2001261578A1 (en) 2001-11-26
TW507120B (en) 2002-10-21
TW505956B (en) 2002-10-11
AU2001261577A1 (en) 2001-11-26

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