JP2012187620A - Laser processing method and laser processing planning method - Google Patents

Abstract

PROBLEM TO BE SOLVED: To reduce processing time.SOLUTION: The laser processing method for performing processing by deflecting a laser pulse by a deflector while moving an object to be processed by a moving device and making the laser pulse incident on a processing position of the object to be processed includes a process (a) for demarcating a plurality of processing ranges Aalong a first direction on the object to be processed, a process (b) for estimating processing time tfor each of the plurality of the processing ranges A, and a process (c) for determining a moving speed for moving the object to be processed to a first direction by the moving device with the processing range Aas a unit while adding slack time slarger than zero to the processing time tfor at least one of the processing ranges A.

Description

  The present invention relates to a laser processing method performed by irradiating a workpiece with a laser beam and a processing plan method for laser processing.

  A conventional laser processing method and laser processing planning method will be described with reference to FIG. For example, in laser drilling or the like that irradiates a workpiece such as a printed circuit board with a laser beam and opens a hole at the irradiation position, the incident position of the laser beam on the workpiece is moved using an XY stage and a galvano scanner. Let

  Prior to the laser processing, a plurality of processing areas are formed on the processing target so that all the processing positions are included in any one of the processing areas as shown in FIG. 14, for example, and the number of processing areas is minimized. Define. Then, the processing order of the processing positions in each processing area is determined so that the processing time is the shortest, for example. For the determination, it is formulated as a traveling salesman problem (TSP), and the 3-opt method or the linker-Nihan method is applied. A balloon in FIG. 14 shows a part of a processing path (a line connecting processing positions in the processing order) in a certain processing area.

  In laser processing, an object to be processed is held on an XY stage, and one of the processing areas defined on the object to be processed is arranged in a scan area (processable range) of the galvano scanner. The galvano scanner is driven with the stage stopped, and the laser beam scanned by the galvano scanner is incident on the processing position in the processing area in the order determined prior to processing. Is processed.

  When the processing of one processing area is completed, the processing object is moved on the stage, and a different processing area, for example, a processing area adjacent to the processing area that has been processed, is arranged in the scan area of the galvano scanner. Similarly, with the stage stopped, the laser beam is incident on the processing position in the processing area arranged in the scan area of the galvano scanner. The processing of all processing areas defined on the processing object is performed by a so-called step-and-repeat operation that repeats this.

  An invention of a laser processing apparatus including a processing planning unit that rearranges the order of laser beam irradiation position commands on a processing target so that the order of transfer system position commands is in accordance with the purpose is disclosed (for example, Patent Document 1).

  Patent Document 1 describes a method for generating a transport system position command, but does not describe a method for generating a speed command. The form of processing performed by the laser processing apparatus described in Patent Document 1 is on the extension line of step-and-repeat, that is, by simply reducing the step width and performing processing during step movement. The order, stage trajectory, etc. are not planned at the same time.

Japanese Patent No. 3561159

  An object of the present invention is to provide a laser processing method and a laser processing planning method capable of shortening the processing time.

  According to one aspect of the present invention, (a) preparing a workpiece having a plurality of machining ranges defined along a first direction, and (b) moving the workpiece in the first direction. In the step (b), an average speed is determined in advance for each processing in the processing range. There is provided a laser processing method for moving the object to be processed in the first direction and changing a speed at which the object to be processed is moved at the time of processing in at least one of the processing ranges. .

According to another aspect of the present invention, a laser processing plan for performing processing by deflecting a laser pulse with a deflector and making it incident on a processing position of the processing target while moving the processing target with a moving device. A method comprising: (a) defining a plurality of processing ranges A _i along a first direction on the workpiece; and (b) a processing time t for each of the plurality of processing ranges A _{i. a} step of estimating _i , and (c) for at least one processing range A _i , a slack time s _i greater than 0 is added to the processing time t _i estimated in step (b), and the processing range A _i And a step of determining a moving speed for moving the object to be processed in the first direction by a moving device.

  ADVANTAGE OF THE INVENTION According to this invention, the laser processing method and laser processing plan method which can shorten processing time can be provided.

It is a flowchart which shows the outline of the laser processing planning method by an Example. It is a schematic diagram showing a plurality of horizontally long areas defined on a processing object and a processing path in each horizontally long area. It is a flowchart which shows the detail of step S102 of the laser processing planning method by an Example shown in FIG. It is the schematic which shows an example of the strip-shaped processing range defined in a horizontally long area. It is a graph showing an example of the processing time for every strip-shaped processing range estimated by step S202. (A) And (B) is the schematic which shows an example of the stage moving speed defined for a strip-shaped processing range as a unit. Add a slack time s _i, is a flow chart showing an example of a method of determining the approach velocity v _i to strip machining area A _i. (A)-(C) are the graphs which graphically show the magnitude relationship of v _{i + 1} ^max , v _{i + 1} ^min , and v _{i + 1} ^TRY . (A) and (B) are graphs showing the stage speed before and after the addition of slack time, respectively. (A) and (B), introducing a slack time _{s i} in a rectangular _{C i,} processing at the start of the strip-shaped working range _{A i} (during strip processing range _{A i-1} of the processing end), and at end of processing ( It is a graph which shows an example of the method of ensuring the continuity of the stage speed in the strip-shaped process range _{Ai + 1 at} the time of a process start. It is a flowchart which shows an example of the stage moving speed adjustment method. It is a graph which shows the progress example of the laser processing performed based on the plan determined by the laser processing planning method by an Example. It is a flowchart which shows the laser processing method by an Example. It is the schematic explaining the conventional laser processing method and laser processing planning method. It is a schematic top view which shows an example of the changed process path | route.

  An outline of the laser processing planning method according to the embodiment will be described with reference to FIGS. The laser processing planning method according to the embodiment is performed prior to the laser processing, and the laser processing is performed based on a plan determined by, for example, the laser processing planning method according to the embodiment.

  FIG. 1 is a flowchart showing an outline of a laser processing planning method according to an embodiment. In the laser processing planning method according to the embodiment, first, in step S101, a horizontally long area is defined (arrangement is determined) on the processing object. Next, in step S102, for each horizontally long area, the processing order of the processing positions within the area and the stage moving speed during area processing are determined. In laser processing, a laser pulse emitted from a laser light source is irradiated with a galvano scanner (beam deflector) with its emission direction changed (scanned, deflected) and irradiated on a processing position. The laser pulse irradiation is performed while moving the workpiece linearly on, for example, a stage (moving device).

  FIG. 2 is a schematic diagram showing a plurality of horizontally long areas defined on the object to be processed and a processing path in each horizontally long area. In this figure, a plurality of horizontally long areas extending in the horizontal direction of the drawing are defined along the vertical direction. The length in the length direction (horizontal direction) of the horizontally long area is, for example, several hundred mm, and the length in the width direction (vertical direction) is several tens mm, for example, 30 mm to 60 mm. This value is based on the fact that the scan area of the galvano scanner has a square shape with one side of 30 mm to 60 mm, for example.

  In this figure, the machining path in one horizontally long area is shown enlarged. When performing laser processing of one horizontally long area according to the conditions determined by the laser processing planning method according to the embodiment, the horizontally long area is galvano-scanned along one direction from one side of the length direction to the other by the stage. The scan area is moved. For example, when the range in which the positions to be processed in the horizontally long area are very dense is in the scan area, the moving (conveying) speed of the object to be processed by the stage may be 0, but the moving direction is reverse. It will not be. In addition, when performing processing in a range where the processing positions exist relatively densely, the stage moving speed (moving speed of the object to be processed by the stage) is relatively small and relatively sparse. When processing the existing range, the moving speed of the stage is relatively increased. It should be noted that the processing order (processing path) of the processing position in each horizontally long area is basically determined by applying the traveling salesman problem (TSP), for example.

  FIG. 3 is a flowchart showing details of step S102 of the laser processing planning method according to the embodiment shown in FIG. Step S102 includes, for example, steps S201 to S204.

  In step S101, a horizontally long area is defined on the workpiece, and in step S201, the longitudinal direction of the horizontally long area is divided, and a plurality of strip-shaped processing ranges are defined along the length direction in the horizontally long area. . In step S202, a path for each strip-shaped processing range is generated (the processing order of processing positions and processing paths are determined), and the processing time for each strip-shaped processing range is estimated. In step S203, the moving speed of the stage is determined based on each strip-shaped processing range. The moving speed of the stage is determined so that a series of processing is possible according to the arrangement of processing positions in each strip processing range. In step S204, the stage moving speed determined in step S203 and the (continuous) machining path determined in step S202 are adjusted.

FIG. 4 is a schematic diagram showing an example of a strip-shaped processing range defined in the horizontally long area. Step S201 will be described in detail with reference to FIG. In step S201, a plurality of strip-shaped processing ranges are defined along the length direction in the horizontally long area so that, for example, all processing positions belong to any processing range. FIG. 4 shows four strip-shaped processing ranges A _{i−2 to} A _{i + 1} . The strip-shaped processing ranges A _{i−2 to} A _{i + 1} are rectangular ranges in which the width of the horizontally long area is set to the length and the width is set to L _{i−2 to} L _{i + 1} . In step S201, the width L _i (i = 1, 2, 3,...) Of the strip-shaped processing range A _i is generally determined. The width of the strip-shaped processing range is, for example, equal and constant, and the value L is, for example, 1/2 (20 mm to 25 mm) of one side of the square scan area of the galvano scanner. Note that the subscript _i of the strip-shaped processing range A _i indicates the processing order of the strip-shaped processing range in one horizontally long area (the order of entering the scan area of the galvano scanner). That is, the stage movement during the processing of the horizontally long area is performed in the length direction of the horizontally long area. In the horizontally long area, the strip-shaped processing range A ₁ is processed first, and the strip-shaped processing ranges A ₂ , A ₃ ,. Processing is carried out in succession subsequently. For this reason, the width L _i is the length of the strip-shaped processing range A _i along the stage moving direction.

  FIG. 5 is a graph showing an example of the processing time for each strip-shaped processing range estimated in step S202. Step S202 will be described in detail with reference to FIG. In step S202, a path (machining path) generation and machining time estimation (provisional machining time determination) in each strip-like machining range is formulated into, for example, a traveling salesman problem (TSP), and a solution is obtained. To do. For example, the pass is determined so that the processing time in each strip-shaped processing range is minimized. The processing path shown in FIG. 2 is a series of the paths generated in each strip processing range in step S202. Note that the path generated in step S202 and the estimated processing time of each strip-shaped processing range are the minimum processing time, for example, when processing of each strip-shaped processing range is performed while the stage is stopped. It is those that become.

In the graph of FIG. 5, the horizontal axis represents the processing time in the unit “μs”, and the vertical axis represents the position in the longitudinal direction of the horizontally long area in the unit “μm”. The lengths of the vertical sides of the rectangles B ₁ , B ₂ , and B ₃ indicate the widths L ₁ , L ₂ , and L ₃ of the strip-shaped processing ranges A ₁ , A ₂ , and A ₃ , respectively. shows the estimated _{t 1,} t 2, _{t 3} of the strip-shaped working range _{a 1,} a 2, _{a 3} of the machining time. The same applies to other rectangles. In addition, since the width of the strip-shaped processing range is equal to each other (= L), for example, the lengths of the vertical sides of the rectangle are also equal to each other. Moreover, the relatively dense rectangular working range is the work position, for example because the time required for processing of a strip machining area A ₃ is relatively long, rectangular corresponding to the strip-shaped working range, for example, a rectangular B ₃ is , Relatively horizontally long. In step S202, generally, an estimated time t _i (i = 1, 2, 3,...) For processing the strip-shaped processing range A _i is determined.

  Next, step S203 will be described in detail.

FIGS. 6A and 6B are schematic diagrams illustrating an example of the stage moving speed determined in units of strip-shaped processing ranges. In FIG. 6 (A), showed an average speed of the stage movement at the time of processing a strip machining area A _i. The horizontal axis of the graph in FIG. 6 (A) shows the elapsed time from the start a process for a strip-shaped working range A _1, the vertical axis represents the stage moving speed. The length of the longitudinal sides of the rectangular _{C 1} represents the average speed of the stage movement at the time of processing the strip-shaped working range _{A 1 (v (avg) 1} ). The length of the horizontal side of the rectangle C ₁ shows the estimated time t ₁ for processing a strip machining area A _1. The same applies to the other rectangles C ₂ and C ₃ .

Incidentally, resulting estimated average velocity _{v (avg) i} of stage movement at the time of processing a strip machining area _{A i} is obtained in step S201, the width _{L i} of the strip-shaped working range _{A i,} and in step S202 was, by using the estimated time t _i for processing a strip machining area a _i, can be calculated by the following equation (1).

v _{(avg) i} = L _i / t _i (1)

In step S203, to determine the stage speed of the strip-shaped working range _{A i} machining start time (rate of entry into the strip-shaped machining area _{A i) v i (v (} in) i). Here, when the stage speed at the end of the strip-shaped processing range A _i (the exit speed from the strip-shaped processing range A _{i )} is expressed as v _{(out) i} , from the continuity of the speed,

v _{(in) i + 1} = v _{(out) i} (2)

There is a relationship. In addition, under the condition that the stage moving speed during each strip-shaped processing range A _i is changed at a constant acceleration,

L _i = (v _{(in) i} + v _{(out) i} ) × t _i / 2 (3)

There is a relationship.

Therefore, when the stage in the strip-shaped processing range A _{i is} moved at the same acceleration with the same or different acceleration for each processing in each strip-shaped processing range, based on L _i and t _i , for example, FIG. It is possible to determine the stage moving speed pattern shown in FIG. The meanings of both axes in the graph of FIG. 6B are the same as those in the graph of FIG. By performing the stage moving at a speed pattern shown in FIG. 6 (B), it is possible to perform processing of the strip-shaped working range A _i an estimated processing time t _i. Pattern shown in the figure, if approach speed v _i is determined for each strip machining area A _i, that uniquely determined will be apparent.

However, in determining the stage moving speed in step S203, restrictions on the stage moving speed are taken into consideration. As a restriction on the stage moving speed, it is conceivable that the stage speed is limited by a possible range or a stage speed change (acceleration) is possible. For example, when the average speed v _(avg) of stage movement during processing differs greatly between the strip-shaped processing ranges A _i and A _{i + 1} , the condition of the above equation (2) is not satisfied due to the limitation of the acceleration range There is. In this case, for example, estimate the time _{t i,} the dead time is added (slack time) _{s i,} strip-shaped working range _A processing time for processing the _i, sum _t i + s of estimated time _{t i} and slack time _{s i By} correcting to _i , the condition of the above equation (2) is satisfied. In step S203, a slack time larger than 0 is added to the estimated processing time for at least one strip processing range.

Figure 7 adds a slack time s _i, is a flow chart showing an example of a method of determining the approach velocity v _i to strip machining area A _i. In the determination method shown in a flowchart of FIG. 7, to determine the approach speed v _i to strip machining area A _i, according to a machining order, to determine the rate of entry into the v i _{+ 1, v i} + ₂ of the strip-shaped working range in order .

First, in step S301, when the slack time s _{i is set} to 0, the upper limit value v _i ^max and the lower limit value v _i ^min of the approach speed v _i to each strip processing range A _i are calculated. The upper limit value v _i ^max and the lower limit value v _i ^min of the approach speed v _i can be obtained by the following equations (4) and (5), respectively.

v _i ^max = min {L _i / t _i + At _i / 2, V} (4)

v _i ^min = max {L _i / t _i -At _i / 2,0} (5)

Here, A represents the maximum value of the acceleration and deceleration of the stage, and V represents the maximum value of the stage speed. Further, max {p, q} and min {p, q} mean values that are not small and not large, respectively, of p and q. The approach speeds v ₁ and v ₂ for the strip-shaped processing ranges A ₁ and A ₂ are determined in advance to appropriate values.

In steps S302 to S306, the approach speed v _{i + 1} to the strip-shaped processing range A _{i + 1} (i ≧ 2) is determined as follows.

In step S302,

v _{i + 1} ^TRY = 2L _i / t _i −vi _i (6)

Calculate v _{i + 1} ^TRY is a value calculated based on L _i / t _i (= v _{(avg) i} ) and at least tentatively determined v _i .

Subsequently, in step S303, v _{i + 1} ^TRY is compared with v _{i + 1} ^max and v _{i + 1} ^min .

FIGS. 8A to 8C are graphs that graphically show the magnitude relationship between v _{i + 1} ^max , v _{i + 1} ^min , and v _{i + 1} ^TRY . The horizontal axis of the graph indicates time, and the vertical axis indicates speed. The subsequent steps will be described with reference to this figure.

When v _{i + 1} ^min ≦ v _{i + 1} ^TRY ≦ v _{i + 1} ^max , the process proceeds to step S304, where the value of v _{i + 1} is

v _{i + 1} = v _{i + 1} ^TRY (7)

And

FIG. 8A is a graph corresponding to step S304. When v _{i + 1} ^TRY obtained by L _i / t _i (= v _{(avg) i} ) and v _i satisfies v _{i + 1} ^min ≦ v _{i + 1} ^TRY ≦ v _{i + 1} ^max , strip processing range A _i and A _Since the continuity of the stage moving speed during _{i + 1} processing is ensured, v _{i + 1} is determined by equation (7).

If v _{i + 1} ^TRY <v _{i + 1} ^min (undershoot), the process proceeds to step S305. Processing in this case, considered an exit speed from the strip-shaped working range A _i-1 (approach speed v _i to strip machining area A _i) was excessive, for processing a strip-shaped working range A _i-1 Set or reset the slack time s _i-1 to the time. By this process, the approach speed v _{i + 1} to the strip-shaped processing range A _{i + 1} is obtained.

v _{i + 1} = v _{i + 1} ^min (8)

And the approach speed v _i and the slack time s _i-1 to the strip-shaped processing range A _i are sequentially updated as follows.

v _i = 2L _i / (t _i + s _i ) −v _{i + 1} ... (9)

_{s i-1 = 2L i-} 1 / (v i-1 + v i) -t i-1 ·· (10)

FIG. 8B is a graph corresponding to step S305. When v _{i + 1} ^TRY is less than v _{i + 1} ^min , the continuity of the stage moving speed between the strip-shaped processing range A _i processing and A _{i + 1} processing is ensured by determining v _{i + 1 according} to equation (8). At the same time, slack time can be minimized and increase in machining time can be suppressed.

If v _{i + 1} ^TRY > v _{i + 1} ^max (overshoot), the process proceeds to step S306. In this case, it is considered that the withdrawal speed from the strip-shaped processing range A _i is excessive, and the slack time s _i is set or reset to the processing time for processing the strip-shaped processing range A _i . At this time, the approach speed v _{i + 1} and slack time s _i to the strip-shaped processing range A _{i + 1} are determined by the following equations (11) and (12).

v _{i + 1} = v _{i + 1} ^max (11)

s _i = 2L _i / (v _i + v _{i + 1} ) −t _i (12)

FIG. 8C is a graph corresponding to step S306. When v _{i + 1} ^TRY is larger than v _{i + 1} ^max , the continuity of the stage moving speed between the strip-shaped machining range A _i machining and A _{i + 1} machining is ensured by determining v _{i + 1 according} to equation (11). , Slack time can be minimized, and increase in processing time can be suppressed.

When the processes in steps S304 to S306 are completed, the process proceeds to step S307. In step S307, the value of i is increased by 1. Thereafter, the process returns to step S302, and thereafter, the processing of step S302 to step S306 is repeated for all the strip-shaped processing ranges, and v _i and s _i are determined for all the strip-shaped processing ranges. Incidentally, _{v i} and the _{s i,} if all the _{s i} for strip processing range Sadamare _{v i} is Sadamari, a relationship that _{v i} is _{s i} is determined if Sadamare.

  9A and 9B are graphs showing the stage speed before and after the addition of slack time, respectively. In both figures, the horizontal axis represents time, and the vertical axis represents stage speed. FIG. 9A is the same as FIG. FIG. 9B is a stage speed pattern created based on the slack time and the approach speed to each strip-shaped processing range determined using the determination method shown in the flowchart of FIG.

With the determination method shown in a flowchart of FIG. 7, slack time s _i the sum of _(i = 1,2,3 ··) so as to minimize the appropriate slack time s _i to each strip machining area A _i by adding, to determine the approach speed v _i to strip machining area a _i, as shown in FIG. 9 (B), it is possible to generate a stage speed pattern when landscape area processing.

Note that the determination of the stage moving speed in step S203 can be formulated as a problem of minimizing the total slack time under a predetermined condition, in addition to the method shown in the flowchart of FIG. For example,

0 ≦ s _i (13)

0 ≦ v _i ≦ V (14)

v _i −A (t _i + s _i ) ≦ v _{i + 1} ≦ v _i + A (t _i + s _i ) (15)

(V _i + v _{i + 1} ) (t _i + s _i ) / 2 = L _i ... (16)

Under the conditions of

(17)

Can be formulated as a problem of minimizing. The minimum set of variables to be determined here may be considered as v ₁ , v ₂ ,..., V _{n + 1} (v ₁ , s ₁ ,..., _{N for n} strip-shaped processing ranges. N) of n + 1.

The above equation (13) represents a condition that the slack time to be set is 0 or more. Equation (14) is approach speed v _i to strip machining area A _i is 0 or more, showing a condition that is less than or equal to the maximum value V of the stage moving speed. Equation (15) shows a condition for securing the continuity of speed using the maximum value A of the acceleration of the stage. Expression (16) corresponds to Expression (3) when slack time is taken into consideration. V and A are based on stage performance.

For example, by the use of a suitable commercial solver, by using a program of applying the exact or heuristic solution, suitable slack time s _i to be added to the estimated processing time t _i of each rectangular working range A _i, and strip processing The approach speed v _i into the range A _i can be determined.

10A and 10B, the slack time s _i is introduced to the rectangle C _i , the processing of the strip-shaped processing range A _i is started (at the end of processing of the strip-shaped processing range A _i-1 ), and the processing is finished. It is a graph which shows an example of the method of ensuring the continuity of the stage speed at the time (at the time of the process start of strip-shaped process range _{Ai + 1} ). The horizontal axis in both figures represents time, and the vertical axis represents speed.

Reference is made to FIG. The length of the horizontal side of the rectangle C _i denotes the processing time t _i which is estimated in step S202, the length of the vertical side shows the estimate stage moving average velocity v _{(avg) i} obtained by the equation (1) . The strip-shaped processing ranges A _i-1 and A _{i + 1} have relatively dense processing positions, while the strip-shaped processing ranges A _i have sparse processing positions, and the stage acceleration and deceleration are low. by the constraints of the maximum value, in the processing beginning and at end of processing of the strip-shaped working range a _i, stage velocity is not continuous.

Reference is made to FIG. Therefore, the slack time s _i is introduced into the rectangle C _i, and the processing time of the strip-shaped processing range A _{i in which} the processing positions exist sparsely is increased by the slack time s _i, so that the strip-shaped processing range A _{i is} processed. moving average of the stage to reduce the velocity v _{(avg) i,} in the processing at the start and at the machining end of a _i, is continuous stage speed. Slack time s _i, for example stage moving average speed during strip processing range A _i machining, fits into a strip machining area A _i-1 machining end time in the speed range, and strip-shaped machining area A _{i + 1} processing start Introduce it within the speed range of the hour. Introducing a slack time s _i such that the sum is minimized for all strip processing range A _i, given a approach speed v ₁ of the strip-shaped working range A ₁ suitably, for example, in FIG. 9 (B) The stage speed pattern shown can be uniquely obtained.

  Next, step S204 will be described in detail with reference to FIG. After the stage moving speed is determined in step S203, the determined stage moving speed is adjusted in step S204.

  In step S202, the minimum processing time is estimated when processing in each strip-shaped processing range is performed in a state where the stage is stopped. However, this time does not exactly match the processing time when processing while moving the stage. For example, when processing while moving the stage, the positioning time of the galvano scanner with respect to the direction parallel to the stage moving direction, even when positioning at an equal distance in the moving direction and the opposite direction, This is because the time required is different. The stage moving speed is adjusted in step S204 because, for example, the processing time obtained in step S202 is an estimate in the stage stop state.

FIG. 11 is a flowchart illustrating an example of the stage moving speed adjustment method. In adjusting the stage moving speed, first, the stage speed at the scanning (positioning) start timing of the galvano scanner at each processing position is taken into consideration to simulate whether or not the processing is possible with the speed pattern calculated in step S203. (Step S401). When the processing at the time of strip machining area A _i processing becomes impossible, for example by increasing the slack time s _i to reduce the average velocity v _{(avg) i} of stage movement, so that the approach speed v _{i + 1} becomes smaller , S _i and v _{i + 1} are changed.

Next, at the end of processing in each strip-shaped processing range, the average speed of stage movement is increased for the strip-shaped processing range that has time allowance, and the average speed of stage movement for the strip-shaped processing range that has no allowance. (Step S402). In step S402, for example, for each strip-shaped processing range A _i , a simulation is performed in a separate process to calculate a reference value u _i , and this is compared with t _i + s _i . When the latter is larger than a certain value (threshold) than the former, it is considered that “there is enough time”, and when smaller than the other certain value (threshold), it is considered that “there is no time”. With the change of the average speed of the stage movement, v _i and s _i obtained in step S203 are updated.

  In step S402, a process for improving the machining path simultaneously may be added. For example, when there is time allowance, the path may be changed so as to process the machining position in the adjacent processing range. When there is no time allowance, processing is performed at the main processing in the adjacent processing range. You may change the route.

FIG. 15 shows an example of the changed machining path. The FIG. 15 shows the case where there is enough time during the processing end of the strip-shaped working range A _i. In this case, for example, the processing path is updated so that the processing position <p> included in the strip-shaped processing range A _{i + 1} is processed first. However, as the stage moves, the scanable range on the workpiece changes from moment to moment, so at the machining timing, it is attempted to improve the machining path while confirming by simulation that the position to be machined can be machined.

  FIG. 12 is a graph illustrating a progress example of laser processing performed based on a plan determined by the laser processing planning method according to the embodiment. The horizontal axis of the graph indicates the elapsed time from the start of processing of one horizontal area in the unit “μs”, and the vertical axis indicates the position in the longitudinal direction of the horizontal area in the unit “μm”. The plot of “irradiation position” in the graph represents the relationship between the irradiation time of the laser pulse and the irradiation position.

  When processing is performed based on the plan determined by the laser processing planning method according to the embodiment, it can be understood that processing of one horizontally long area can be performed in a time longer than 3.5 s. Further, the processing of all the horizontally long areas defined on the processing object shown in FIG. 2 can be completed in, for example, 30.8 s. In addition, when all the processing positions of the processing target shown in FIG. 2 are processed by the step-and-repeat method, the processing time is, for example, 52.4 s.

In the processing performed by determining the stage moving speed pattern by the laser processing planning method according to the embodiment, the stage operation and the operation of the galvano scanner are coordinated and the laser pulse is irradiated to the processing target while performing the stage movement. In addition to being able to shorten the processing time by deflecting the laser pulse with a galvano scanner and making it incident on the processing position while moving the object to be processed on the stage, using the laser processing planning method according to the embodiment, slack can be achieved. The processing time can also be determined by determining the entry speed v _i into the strip-shaped processing range A _i so that the sum of the times s _i is minimized and changing the stage moving speed in processing at least one strip-shaped processing range. Shortened. The machining time can be shortened compared to the step-and-repeat method or the case where machining is performed by moving the stage at a constant speed.

  FIG. 13 is a flowchart illustrating a laser processing method according to the embodiment. The laser processing method according to the embodiment is performed based on, for example, a processing plan determined by the laser processing planning method according to the embodiment.

  First, in step S501, a processing object in which a plurality of strip-shaped processing ranges are defined along one direction is prepared.

  Next, in step S502, while moving the workpiece in a direction in which a plurality of strip-shaped processing ranges are defined, the laser pulse is changed in the emission direction by a galvano scanner, and the processing position on the processing object is changed. For example, processing is sequentially performed for each strip-shaped processing range. In step S502, the stage moving speed is changed, for example, the constant acceleration is changed during processing of at least one strip-shaped processing range. Further, for example, for each processing in the strip-shaped processing range, the processing target is moved on the stage so that the average speed becomes a predetermined value.

  Furthermore, the average speed of the stage movement when processing each strip-shaped processing range is set to a value corresponding to the density of processing positions included in the strip-shaped processing range. For example, in the processing of a strip-shaped processing range where the positions to be processed exist relatively densely, the average speed of the stage movement is relatively reduced, and In processing, the average speed of stage movement is relatively increased.

  Moreover, the average speed of the stage movement when processing each strip-shaped processing range is orthogonal to the stage moving direction (the direction in which the plurality of strip-shaped processing ranges are defined) at the processing position included in the strip-shaped processing range. The value depends on the variation in direction. For example, in the strip-shaped machining range where the variation of the processing position in the direction orthogonal to the stage moving direction is relatively large, the average speed of the stage movement is relatively small, and the strip-shaped machining range is relatively small. In this processing, the average speed of stage movement is relatively increased.

  Furthermore, the stage moving speed may be increased (accelerated) in processing in a certain strip processing range, and the stage moving speed may be decreased (decelerated) in processing in the next strip processing range. It is also possible to alternately repeat the increase / decrease in stage movement speed (acceleration and deceleration of stage movement) for each strip-shaped processing range. For example, processing of a processing object in which strip-shaped processing ranges where processing positions are relatively dense and strip-shaped processing ranges where sparsely exist are alternately defined along the stage moving direction It is effective for.

  According to the laser processing method according to the embodiment, laser processing can be performed in a short processing time.

    Although the present invention has been described with reference to the embodiments, the present invention is not limited thereto.

For example, in a laser processing planning method according to the embodiment, although the stage speed at the time of each strip machining area A _i processing to determine the stage speed pattern so as to change constant acceleration, a strip machining area A _i stage acceleration during processing May not be constant.

In step S203, for each strip-shaped processing range A _i , the stage speed when the processing start time of the strip-shaped processing range A _i is set to time 0 is v _i (t), and the width of the strip-shaped processing range A _i is L _i. When

(18)

Next, and, for any strip processing range _{A i} and _{A i + 1} adjacent to each other, the strip-shaped machining area _{A i} exit velocity from _{v i (t i + s i} ), entering the strip machining area _{A i + 1} The approach speed v _i (0) to each strip-shaped processing range A _i may be determined while appropriately adding the slack time s _i so that the speed v _{i + 1} (0) matches. Here, t _i is the minimum value of the processing time of the strip-shaped processing range A _i estimated in step S202.

  It will be apparent to those skilled in the art that other various modifications, improvements, combinations, and the like are possible.

  Laser processing is generally available. This is particularly effective for processing a processing object having a large difference in density between processing positions along the stage moving direction.

S101, S102, S201 to S204, S301 to S307, S401, S402, S501, S502 Steps

Claims (8)

(A) preparing a processing object having a plurality of processing ranges defined along a first direction;
(B) performing a process by causing a laser pulse to be incident on a processing position on the processing object while moving the processing object in the first direction;
In the step (b), the processing object is moved in the first direction so that the average speed becomes a predetermined value for each processing in the processing range, and at least one of the processing A laser processing method for changing a moving speed of the object to be processed during processing of a range.   2. The laser processing method according to claim 1, wherein in the step (b), at the time of processing in at least one of the processing ranges, a speed at which the processing target is moved is changed at a constant acceleration.   In the step (b), at the time of machining in the machining range where the machining positions exist relatively densely, the average speed for moving the workpiece is relatively small and relatively sparsely exists. The laser processing method according to claim 1, wherein an average speed for moving the object to be processed is relatively increased during processing in the processing range.   In the step (b), when processing in the processing range in which the variation in the processing position in the direction orthogonal to the first direction is relatively large, the average speed for moving the workpiece is relatively small. And the laser processing method of any one of Claims 1-3 which makes relatively large the average speed which moves the said process target object at the time of the process of the said relatively small process range.   The laser processing method according to any one of claims 1 to 4, wherein in the step (b), the moving speed of the processing object during processing is alternately increased or decreased for each processing range. A laser processing planning method in which a laser beam is deflected by a deflector while being moved by a moving device and is incident on a position to be processed of the processing object, and processing is performed.
(A) defining a plurality of processing ranges A _i along a first direction on the processing object;
(B) estimating a machining time t _i for each of the plurality of machining ranges A _i ;
(C) For at least one processing range A _i , a slack time s _i greater than 0 is added to the processing time t _i estimated in the step (b), and the moving device is used with the processing range A _i as a unit. And a step of determining a moving speed for moving the object to be processed in the first direction. In the step (c), for each processing range A _i , the moving speed when the processing start time of the processing range A _i is set to 0 is v _i (t), and the first of the processing range A _i when the width along the direction was set to L _i,


And for any processing range A _i and A _{i + 1} that are adjacent to each other along the first direction, the moving speed v _i (t _i + s _i ) at the time when the processing of the processing range A _i ends. And the slack time s _i are determined so that the moving speed v _{i + 1} (0) at the time of starting the processing of the processing range A _{i + 1} coincides, and the processing of the processing range A _i is started. The laser processing planning method according to claim 6, wherein the moving speed v _i (0) is determined. In the step (c), the moving speed when machining each said machining area A _i, on condition that is respectively such acceleration change, for each of said machining area A _i, to begin processing of the machining area A _i The laser processing planning method according to claim 6, wherein a movement speed v _i (0) at the time is determined.