CN1306230C - 电渗微通道冷却系统 - Google Patents

电渗微通道冷却系统 Download PDF

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Publication number
CN1306230C
CN1306230C CNB028188780A CN02818878A CN1306230C CN 1306230 C CN1306230 C CN 1306230C CN B028188780 A CNB028188780 A CN B028188780A CN 02818878 A CN02818878 A CN 02818878A CN 1306230 C CN1306230 C CN 1306230C
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CN
China
Prior art keywords
fluid
heat
microchannel
substrate
heat exchanger
Prior art date
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Expired - Fee Related
Application number
CNB028188780A
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English (en)
Chinese (zh)
Other versions
CN1636124A (zh
Inventor
肯尼斯·E·古德森
戴维·E·休伯
姜立男
托马斯·W·肯尼
具宰模
詹姆斯·C·米克尔森
胡安·G·圣地亚哥
王宁
曾树林
张联
陈传华
丹尼尔·J·莱瑟
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Leland Stanford Junior University
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Leland Stanford Junior University
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Publication date
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Publication of CN1636124A publication Critical patent/CN1636124A/zh
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Publication of CN1306230C publication Critical patent/CN1306230C/zh
Anticipated expiration legal-status Critical
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00—Details of semiconductor or other solid state devices
    • H01L23/34—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
    • H01L23/46—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements involving the transfer of heat by flowing fluids
    • H01L23/473—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements involving the transfer of heat by flowing fluids by flowing liquids
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B19/00—Machines or pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B1/00 - F04B17/00
    • F04B19/006—Micropumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F28—HEAT EXCHANGE IN GENERAL
    • F28D—HEAT-EXCHANGE APPARATUS, NOT PROVIDED FOR IN ANOTHER SUBCLASS, IN WHICH THE HEAT-EXCHANGE MEDIA DO NOT COME INTO DIRECT CONTACT
    • F28D15/00—Heat-exchange apparatus with the intermediate heat-transfer medium in closed tubes passing into or through the conduit walls ; Heat-exchange apparatus employing intermediate heat-transfer medium or bodies
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F28—HEAT EXCHANGE IN GENERAL
    • F28F—DETAILS OF HEAT-EXCHANGE AND HEAT-TRANSFER APPARATUS, OF GENERAL APPLICATION
    • F28F2260/00—Heat exchangers or heat exchange elements having special size, e.g. microstructures
    • F28F2260/02—Heat exchangers or heat exchange elements having special size, e.g. microstructures having microchannels
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/10—Bump connectors; Manufacturing methods related thereto
    • H01L2224/15—Structure, shape, material or disposition of the bump connectors after the connecting process
    • H01L2224/16—Structure, shape, material or disposition of the bump connectors after the connecting process of an individual bump connector
    • H01L2224/161—Disposition
    • H01L2224/16151—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
    • H01L2224/16221—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
    • H01L2224/16225—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/26—Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
    • H01L2224/31—Structure, shape, material or disposition of the layer connectors after the connecting process
    • H01L2224/32—Structure, shape, material or disposition of the layer connectors after the connecting process of an individual layer connector
    • H01L2224/321—Disposition
    • H01L2224/32135—Disposition the layer connector connecting between different semiconductor or solid-state bodies, i.e. chip-to-chip
    • H01L2224/32145—Disposition the layer connector connecting between different semiconductor or solid-state bodies, i.e. chip-to-chip the bodies being stacked
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/26—Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
    • H01L2224/31—Structure, shape, material or disposition of the layer connectors after the connecting process
    • H01L2224/32—Structure, shape, material or disposition of the layer connectors after the connecting process of an individual layer connector
    • H01L2224/321—Disposition
    • H01L2224/32151—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
    • H01L2224/32221—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
    • H01L2224/32225—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42—Wire connectors; Manufacturing methods related thereto
    • H01L2224/44—Structure, shape, material or disposition of the wire connectors prior to the connecting process
    • H01L2224/45—Structure, shape, material or disposition of the wire connectors prior to the connecting process of an individual wire connector
    • H01L2224/45001—Core members of the connector
    • H01L2224/45099—Material
    • H01L2224/451—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof
    • H01L2224/45163—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof the principal constituent melting at a temperature of greater than 1550°C
    • H01L2224/45169—Platinum (Pt) as principal constituent
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42—Wire connectors; Manufacturing methods related thereto
    • H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/481—Disposition
    • H01L2224/48151—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
    • H01L2224/48221—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
    • H01L2224/48225—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
    • H01L2224/48227—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation connecting the wire to a bond pad of the item
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/73—Means for bonding being of different types provided for in two or more of groups H01L2224/10, H01L2224/18, H01L2224/26, H01L2224/34, H01L2224/42, H01L2224/50, H01L2224/63, H01L2224/71
    • H01L2224/732—Location after the connecting process
    • H01L2224/73251—Location after the connecting process on different surfaces
    • H01L2224/73265—Layer and wire connectors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2225/00—Details relating to assemblies covered by the group H01L25/00 but not provided for in its subgroups
    • H01L2225/03—All the devices being of a type provided for in the same main group of the same subclass of class H10, e.g. assemblies of rectifier diodes
    • H01L2225/04—All the devices being of a type provided for in the same main group of the same subclass of class H10, e.g. assemblies of rectifier diodes the devices not having separate containers
    • H01L2225/065—All the devices being of a type provided for in the same main group of the same subclass of class H10
    • H01L2225/06503—Stacked arrangements of devices
    • H01L2225/06555—Geometry of the stack, e.g. form of the devices, geometry to facilitate stacking
    • H01L2225/06562—Geometry of the stack, e.g. form of the devices, geometry to facilitate stacking at least one device in the stack being rotated or offset
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/01—Chemical elements
    • H01L2924/01078—Platinum [Pt]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/013—Alloys
    • H01L2924/0132—Binary Alloys
    • H01L2924/01322—Eutectic Alloys, i.e. obtained by a liquid transforming into two solid phases
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/095—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00 with a principal constituent of the material being a combination of two or more materials provided in the groups H01L2924/013 - H01L2924/0715
    • H01L2924/097—Glass-ceramics, e.g. devitrified glass
    • H01L2924/09701—Low temperature co-fired ceramic [LTCC]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/10—Details of semiconductor or other solid state devices to be connected
    • H01L2924/1015—Shape
    • H01L2924/10155—Shape being other than a cuboid
    • H01L2924/10158—Shape being other than a cuboid at the passive surface
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/10—Details of semiconductor or other solid state devices to be connected
    • H01L2924/102—Material of the semiconductor or solid state bodies
    • H01L2924/1025—Semiconducting materials
    • H01L2924/10251—Elemental semiconductors, i.e. Group IV
    • H01L2924/10253—Silicon [Si]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/10—Details of semiconductor or other solid state devices to be connected
    • H01L2924/146—Mixed devices
    • H01L2924/1461—MEMS
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/30—Technical effects
    • H01L2924/301—Electrical effects
    • H01L2924/3011—Impedance

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Thermal Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Cooling Or The Like Of Electrical Apparatus (AREA)
  • Cooling Or The Like Of Semiconductors Or Solid State Devices (AREA)
  • Structures Of Non-Positive Displacement Pumps (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Micromachines (AREA)
CNB028188780A 2001-09-28 2002-09-16 电渗微通道冷却系统 Expired - Fee Related CN1306230C (zh)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US32615101P 2001-09-28 2001-09-28
US60/326,151 2001-09-28
US10/053,859 2002-01-19
US10/053,859 US6942018B2 (en) 2001-09-28 2002-01-19 Electroosmotic microchannel cooling system
PCT/US2002/029405 WO2003029731A2 (en) 2001-09-28 2002-09-16 Electroosmotic microchannel cooling system

Publications (2)

Publication Number Publication Date
CN1636124A CN1636124A (zh) 2005-07-06
CN1306230C true CN1306230C (zh) 2007-03-21

Family

ID=26732318

Family Applications (1)

Application Number Title Priority Date Filing Date
CNB028188780A Expired - Fee Related CN1306230C (zh) 2001-09-28 2002-09-16 电渗微通道冷却系统

Country Status (8)

Country Link
US (5) US6942018B2 (enExample)
EP (2) EP1576320A4 (enExample)
JP (4) JP2005525691A (enExample)
KR (1) KR20040048907A (enExample)
CN (1) CN1306230C (enExample)
AU (1) AU2002326931A1 (enExample)
TW (1) TW560238B (enExample)
WO (1) WO2003029731A2 (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI860681B (zh) * 2022-08-18 2024-11-01 緯穎科技服務股份有限公司 浸潤式冷卻系統

Families Citing this family (518)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6917637B2 (en) * 2001-10-12 2005-07-12 Fuji Photo Film Co., Ltd. Cooling device for laser diodes
US6575971B2 (en) * 2001-11-15 2003-06-10 Quantum Cor, Inc. Cardiac valve leaflet stapler device and methods thereof
US6606251B1 (en) 2002-02-07 2003-08-12 Cooligy Inc. Power conditioning module
CN1653297B (zh) * 2002-05-08 2010-09-29 佛森技术公司 高效固态光源及其使用和制造方法
US6988534B2 (en) * 2002-11-01 2006-01-24 Cooligy, Inc. Method and apparatus for flexible fluid delivery for cooling desired hot spots in a heat producing device
US7000691B1 (en) * 2002-07-11 2006-02-21 Raytheon Company Method and apparatus for cooling with coolant at a subambient pressure
US7235164B2 (en) 2002-10-18 2007-06-26 Eksigent Technologies, Llc Electrokinetic pump having capacitive electrodes
US7014835B2 (en) 2002-08-15 2006-03-21 Velocys, Inc. Multi-stream microchannel device
US6881039B2 (en) * 2002-09-23 2005-04-19 Cooligy, Inc. Micro-fabricated electrokinetic pump
AU2003270882A1 (en) 2002-09-23 2004-05-04 Cooligy, Inc. Micro-fabricated electrokinetic pump with on-frit electrode
US7511443B2 (en) * 2002-09-26 2009-03-31 Barrett Technology, Inc. Ultra-compact, high-performance motor controller and method of using same
DE10246540B4 (de) * 2002-09-30 2012-03-15 Rehm Thermal Systems Gmbh Vorrichtung zur Reinigung von Prozessgas einer Reflowlötanlage
US6888721B1 (en) * 2002-10-18 2005-05-03 Atec Corporation Electrohydrodynamic (EHD) thin film evaporator with splayed electrodes
US6994151B2 (en) 2002-10-22 2006-02-07 Cooligy, Inc. Vapor escape microchannel heat exchanger
US7222058B2 (en) * 2002-10-28 2007-05-22 Fisher-Rosemount Systems, Inc. Method of modeling and sizing a heat exchanger
US6988535B2 (en) * 2002-11-01 2006-01-24 Cooligy, Inc. Channeled flat plate fin heat exchange system, device and method
US20040112571A1 (en) * 2002-11-01 2004-06-17 Cooligy, Inc. Method and apparatus for efficient vertical fluid delivery for cooling a heat producing device
WO2004042306A2 (en) 2002-11-01 2004-05-21 Cooligy, Inc. Method and apparatus for achieving temperature uniformity and hot spot cooling in a heat producing device
US6986382B2 (en) 2002-11-01 2006-01-17 Cooligy Inc. Interwoven manifolds for pressure drop reduction in microchannel heat exchangers
US20050211418A1 (en) * 2002-11-01 2005-09-29 Cooligy, Inc. Method and apparatus for efficient vertical fluid delivery for cooling a heat producing device
US8464781B2 (en) 2002-11-01 2013-06-18 Cooligy Inc. Cooling systems incorporating heat exchangers and thermoelectric layers
US7836597B2 (en) * 2002-11-01 2010-11-23 Cooligy Inc. Method of fabricating high surface to volume ratio structures and their integration in microheat exchangers for liquid cooling system
US7000684B2 (en) 2002-11-01 2006-02-21 Cooligy, Inc. Method and apparatus for efficient vertical fluid delivery for cooling a heat producing device
US7156159B2 (en) 2003-03-17 2007-01-02 Cooligy, Inc. Multi-level microchannel heat exchangers
US20060249279A1 (en) * 2002-11-05 2006-11-09 Lalit Chordia Method and apparatus for electronics cooling
US20060060333A1 (en) * 2002-11-05 2006-03-23 Lalit Chordia Methods and apparatuses for electronics cooling
WO2004042307A2 (en) * 2002-11-05 2004-05-21 Thar Technologies, Inc Methods and apparatuses for electronics cooling
KR100508682B1 (ko) * 2002-11-20 2005-08-17 삼성전자주식회사 더미 와이어를 이용한 열방출형 적층 칩 패키지
DE10255325B4 (de) * 2002-11-27 2005-09-29 Robert Bosch Gmbh Vorrichtung und Verfahren zur Bestimmung eines Siedepunkts einer Flüssigkeit
US7227257B2 (en) * 2002-12-09 2007-06-05 Intel Corporation Cooling micro-channels
US6981849B2 (en) * 2002-12-18 2006-01-03 Intel Corporation Electro-osmotic pumps and micro-channels
DE10302156A1 (de) * 2003-01-21 2004-08-05 Siemens Ag Anordnung und Verfahren zur Diagnose von Verstopfungen in Kanälen eines Mikrowärmeübertragers
US7360309B2 (en) * 2003-01-28 2008-04-22 Advanced Ceramics Research, Inc. Method of manufacturing microchannel heat exchangers
US7293423B2 (en) * 2004-06-04 2007-11-13 Cooligy Inc. Method and apparatus for controlling freezing nucleation and propagation
US7090001B2 (en) 2003-01-31 2006-08-15 Cooligy, Inc. Optimized multiple heat pipe blocks for electronics cooling
US7044196B2 (en) * 2003-01-31 2006-05-16 Cooligy,Inc Decoupled spring-loaded mounting apparatus and method of manufacturing thereof
US7201012B2 (en) * 2003-01-31 2007-04-10 Cooligy, Inc. Remedies to prevent cracking in a liquid system
US20040233639A1 (en) * 2003-01-31 2004-11-25 Cooligy, Inc. Removeable heat spreader support mechanism and method of manufacturing thereof
US7017654B2 (en) 2003-03-17 2006-03-28 Cooligy, Inc. Apparatus and method of forming channels in a heat-exchanging device
JP2004276224A (ja) * 2003-03-17 2004-10-07 Toyo Technol Inc 繊維を充填した電気浸透ポンプ
US6861274B2 (en) * 2003-03-28 2005-03-01 Intel Corporation Method of making a SDI electroosmotic pump using nanoporous dielectric frit
US20040190253A1 (en) * 2003-03-31 2004-09-30 Ravi Prasher Channeled heat sink and chassis with integrated heat rejector for two-phase cooling
JP4656057B2 (ja) * 2003-04-10 2011-03-23 株式会社ニコン 液浸リソグラフィ装置用電気浸透素子
JP2005005367A (ja) * 2003-06-10 2005-01-06 Matsushita Electric Ind Co Ltd 半導体素子の冷却装置
TW591984B (en) * 2003-07-04 2004-06-11 Sentelic Corp Micro-circulating flow channel system and its manufacturing method
US7591302B1 (en) 2003-07-23 2009-09-22 Cooligy Inc. Pump and fan control concepts in a cooling system
US20050039888A1 (en) * 2003-08-21 2005-02-24 Pfahnl Andreas C. Two-phase cooling apparatus and method for automatic test equipment
US7274106B2 (en) * 2003-09-24 2007-09-25 Intel Corporation Packaged electroosmotic pumps using porous frits for cooling integrated circuits
US7723208B2 (en) * 2003-09-24 2010-05-25 Intel Corporation Integrated re-combiner for electroosmotic pumps using porous frits
US6951243B2 (en) * 2003-10-09 2005-10-04 Sandia National Laboratories Axially tapered and bilayer microchannels for evaporative coolling devices
US7084495B2 (en) * 2003-10-16 2006-08-01 Intel Corporation Electroosmotic pumps using porous frits for cooling integrated circuit stacks
US7224059B2 (en) * 2003-10-21 2007-05-29 Intel Corporation Method and apparatus for thermo-electric cooling
US7422910B2 (en) 2003-10-27 2008-09-09 Velocys Manifold designs, and flow control in multichannel microchannel devices
WO2005041632A2 (en) * 2003-10-31 2005-05-12 Phoseon Technology, Inc. Collection optics for led array with offset hemispherical or faceted surfaces
WO2005043954A2 (en) * 2003-10-31 2005-05-12 Phoseon Technology, Inc. Series wiring of highly reliable light sources
US6992381B2 (en) * 2003-10-31 2006-01-31 Intel Corporation Using external radiators with electroosmotic pumps for cooling integrated circuits
US20050099775A1 (en) * 2003-11-12 2005-05-12 Himanshu Pokharna Pumped liquid cooling for computer systems using liquid metal coolant
US7269005B2 (en) * 2003-11-21 2007-09-11 Intel Corporation Pumped loop cooling with remote heat exchanger and display cooling
US7105382B2 (en) * 2003-11-24 2006-09-12 Intel Corporation Self-aligned electrodes contained within the trenches of an electroosmotic pump
US7123479B2 (en) * 2003-12-08 2006-10-17 Intel Corporation Enhanced flow channel for component cooling in computer systems
WO2005060593A2 (en) * 2003-12-10 2005-07-07 Purdue Research Foundation Micropump for electronics cooling
US7203064B2 (en) * 2003-12-12 2007-04-10 Intel Corporation Heat exchanger with cooling channels having varying geometry
US8309112B2 (en) * 2003-12-24 2012-11-13 Advanced Cardiovascular Systems, Inc. Coatings for implantable medical devices comprising hydrophilic substances and methods for fabricating the same
JP2005191082A (ja) * 2003-12-24 2005-07-14 Toyota Motor Corp 電気機器の冷却装置
US8333569B2 (en) * 2003-12-30 2012-12-18 Intel Corporation Method and apparatus for two-phase start-up operation
US7104313B2 (en) * 2003-12-31 2006-09-12 Intel Corporation Apparatus for using fluid laden with nanoparticles for application in electronic cooling
US20050141195A1 (en) * 2003-12-31 2005-06-30 Himanshu Pokharna Folded fin microchannel heat exchanger
US7115987B2 (en) * 2003-12-31 2006-10-03 Intel Corporation Integrated stacked microchannel heat exchanger and heat spreader
JP2005242941A (ja) * 2004-02-27 2005-09-08 Hitachi Ltd 処理部材設計プログラム及びそれを用いたサービス提供システム
US20080102119A1 (en) * 2006-11-01 2008-05-01 Medtronic, Inc. Osmotic pump apparatus and associated methods
EP1735844B1 (en) 2004-03-18 2019-06-19 Phoseon Technology, Inc. Use of a high-density light emitting diode array comprising micro-reflectors for curing applications
EP1754259B1 (en) * 2004-03-18 2019-07-17 Phoseon Technology, Inc. Direct and indirect cooling of leds
US7559356B2 (en) * 2004-04-19 2009-07-14 Eksident Technologies, Inc. Electrokinetic pump driven heat transfer system
WO2005100961A2 (en) 2004-04-19 2005-10-27 Phoseon Technology, Inc. Imaging semiconductor strucutures using solid state illumination
US7265976B1 (en) 2004-04-19 2007-09-04 Isothermal Systems Research, Inc. Microchannel thermal management system
US8430156B2 (en) * 2004-04-29 2013-04-30 Hewlett-Packard Development Company, L.P. Liquid loop with multiple pump assembly
US20050262861A1 (en) * 2004-05-25 2005-12-01 Weber Richard M Method and apparatus for controlling cooling with coolant at a subambient pressure
US7212405B2 (en) * 2004-05-27 2007-05-01 Intel Corporation Method and apparatus for providing distributed fluid flows in a thermal management arrangement
US7188662B2 (en) 2004-06-04 2007-03-13 Cooligy, Inc. Apparatus and method of efficient fluid delivery for cooling a heat producing device
US20050269691A1 (en) * 2004-06-04 2005-12-08 Cooligy, Inc. Counter flow micro heat exchanger for optimal performance
US7091604B2 (en) 2004-06-04 2006-08-15 Cabot Microelectronics Corporation Three dimensional integrated circuits
US7616444B2 (en) 2004-06-04 2009-11-10 Cooligy Inc. Gimballed attachment for multiple heat exchangers
US20050274139A1 (en) * 2004-06-14 2005-12-15 Wyatt William G Sub-ambient refrigerating cycle
US7218519B2 (en) * 2004-06-15 2007-05-15 Intel Corporation Thermal management arrangement with a low heat flux channel flow coupled to high heat flux channels
US7265979B2 (en) * 2004-06-24 2007-09-04 Intel Corporation Cooling integrated circuits using a cold plate with two phase thin film evaporation
US20050285261A1 (en) * 2004-06-25 2005-12-29 Prasher Ravi S Thermal management arrangement with channels structurally adapted for varying heat flux areas
CN1713376A (zh) * 2004-06-25 2005-12-28 鸿富锦精密工业（深圳）有限公司 液冷散热装置
US7458783B1 (en) 2004-06-30 2008-12-02 Intel Corporation Method and apparatus for improved pumping medium for electro-osmotic pumps
US7250327B2 (en) * 2004-06-30 2007-07-31 Intel Corporation Silicon die substrate manufacturing process and silicon die substrate with integrated cooling mechanism
US7396479B1 (en) 2004-06-30 2008-07-08 Intel Corporation Method for manufacturing porous silicon
US7139172B2 (en) * 2004-07-01 2006-11-21 International Business Machines Corporation Apparatus and methods for microchannel cooling of semiconductor integrated circuit packages
US7190580B2 (en) * 2004-07-01 2007-03-13 International Business Machines Corporation Apparatus and methods for microchannel cooling of semiconductor integrated circuit packages
US8499367B2 (en) * 2004-07-02 2013-08-06 Createc Consulting, Llc Cooling garment having phase change material in its extremity portions
US20060064147A1 (en) * 2004-07-02 2006-03-23 Almqvist Hans O Cooling garment having phase change material in its extremity portions
CN100561602C (zh) * 2004-07-16 2009-11-18 鸿富锦精密工业（深圳）有限公司 聚热元件
JP4305311B2 (ja) * 2004-07-16 2009-07-29 ダイキン工業株式会社 マイクロ分流器
US7234514B2 (en) * 2004-08-02 2007-06-26 Asml Holding N.V. Methods and systems for compact, micro-channel laminar heat exchanging
US7799453B2 (en) * 2004-08-04 2010-09-21 The Board Of Trustees Of The Leland Stanford Junior University Fuel cell with electroosmotic pump
US7392660B2 (en) * 2004-08-05 2008-07-01 Isothermal Systems Research, Inc. Spray cooling system for narrow gap transverse evaporative spray cooling
US7104078B2 (en) * 2004-08-05 2006-09-12 Isothermal Systems Research, Inc. Spray cooling system for transverse thin-film evaporative spray cooling
ITMI20041652A1 (it) * 2004-08-13 2004-11-13 Bosari Thermal Man S R L Scambiatore di calore e metodo per produrlo
US7149085B2 (en) * 2004-08-26 2006-12-12 Intel Corporation Electroosmotic pump apparatus that generates low amount of hydrogen gas
US20060042785A1 (en) * 2004-08-27 2006-03-02 Cooligy, Inc. Pumped fluid cooling system and method
US7086247B2 (en) * 2004-08-31 2006-08-08 International Business Machines Corporation Cooling system and method employing auxiliary thermal capacitor unit for facilitating continuous operation of an electronics rack
AU2011203084B2 (en) * 2004-11-03 2013-09-05 Velocys, Inc. Partial boiling in mini and micro-channels
BRPI0515824B1 (pt) 2004-11-03 2015-12-15 Velocys Inc ebulição parcial em mini e microcanais
US8029186B2 (en) 2004-11-05 2011-10-04 International Business Machines Corporation Method for thermal characterization under non-uniform heat load
US7204298B2 (en) * 2004-11-24 2007-04-17 Lucent Technologies Inc. Techniques for microchannel cooling
JP2006156711A (ja) 2004-11-30 2006-06-15 Mitsubishi Electric Corp パワー半導体モジュールの冷却システム
US20060118279A1 (en) * 2004-12-07 2006-06-08 Eric Stafford Water cooling system for computer components
US7274566B2 (en) * 2004-12-09 2007-09-25 International Business Machines Corporation Cooling apparatus for an electronics subsystem employing a coolant flow drive apparatus between coolant flow paths
US7193316B2 (en) * 2004-12-16 2007-03-20 Intel Corporation Integrated circuit coolant microchannel with movable portion
JP4201762B2 (ja) * 2004-12-17 2008-12-24 富士通株式会社 電子機器
US20060131003A1 (en) * 2004-12-20 2006-06-22 Je-Young Chang Apparatus and associated method for microelectronic cooling
US7398818B2 (en) 2004-12-28 2008-07-15 California Institute Of Technology Fluidic pump for heat management
KR101288758B1 (ko) * 2004-12-30 2013-07-23 포세온 테크날러지 인코퍼레이티드 산업 공정에서 광원을 사용하는 시스템 및 방법
US7117931B2 (en) * 2004-12-31 2006-10-10 Intel Corporation Systems for low cost liquid cooling
JP2006215882A (ja) * 2005-02-04 2006-08-17 Hitachi Ltd ディスクアレイ装置及びその液冷装置
US7254957B2 (en) * 2005-02-15 2007-08-14 Raytheon Company Method and apparatus for cooling with coolant at a subambient pressure
JP4218838B2 (ja) * 2005-02-17 2009-02-04 株式会社ソニー・コンピュータエンタテインメント 電力供給システム、電力供給装置および電子回路駆動方法
JP4381998B2 (ja) * 2005-02-24 2009-12-09 株式会社日立製作所 液冷システム
US20060207752A1 (en) * 2005-03-15 2006-09-21 Inventec Corporation Micro liquid cooling device
US20090294105A1 (en) * 2005-03-22 2009-12-03 Bharat Heavy Electricals Limited Selectively Grooved Cold Plate for Electronics Cooling
WO2006106884A1 (ja) * 2005-03-30 2006-10-12 Nano Fusion Technologies, Inc. 電気浸透流ポンプ及び液体供給装置
US7073569B1 (en) * 2005-04-07 2006-07-11 Delphi Technologies, Inc. Cooling assembly with spirally wound fin
US7641865B2 (en) * 2005-04-08 2010-01-05 Velocys Flow control through plural, parallel connecting channels to/from a manifold
US7652372B2 (en) * 2005-04-11 2010-01-26 Intel Corporation Microfluidic cooling of integrated circuits
US8109324B2 (en) * 2005-04-14 2012-02-07 Illinois Institute Of Technology Microchannel heat exchanger with micro-encapsulated phase change material for high flux cooling
US7645368B2 (en) * 2005-05-10 2010-01-12 Intel Corporation Orientation independent electroosmotic pump
US7159404B2 (en) * 2005-05-26 2007-01-09 Country Pure Foods, Llc System and method for storing a product in a thermally stabilized state
US7418998B2 (en) * 2005-06-30 2008-09-02 Intel Corporation Chamber sealing valve
US20070027580A1 (en) * 2005-07-14 2007-02-01 Ligtenberg Chris A Thermal control of an electronic device for adapting to ambient conditions
US20070021734A1 (en) * 2005-07-15 2007-01-25 Sai Bhavaraju Bioelectro-osmotic engine fluid delivery device
US20070023291A1 (en) * 2005-07-15 2007-02-01 Sai Bhavaraju Metal Trap
KR100657965B1 (ko) 2005-08-10 2006-12-14 삼성전자주식회사 유체의 ｐＨ를 전기화학적으로 조절하기 위한 미세유동장치및 그를 이용하여 ｐＨ를 조절하는 방법
JP2009506579A (ja) * 2005-08-30 2009-02-12 カリフォルニア インスティチュート オブ テクノロジー マイクロ流体システム内部で気化冷却を行う方法及び装置
US20070047203A1 (en) * 2005-08-31 2007-03-01 Wen-Han Chen Integral liquid cooling computer housing
TWM284950U (en) * 2005-09-21 2006-01-01 Yen Sun Technology Corp Heat dissipating device for an electronic device
TWM284949U (en) * 2005-09-21 2006-01-01 Yen Sun Technology Corp Heat dissipating device for an electronic device
JP2007098226A (ja) * 2005-09-30 2007-04-19 Fujifilm Corp 流体デバイス
JP4196983B2 (ja) * 2005-10-07 2008-12-17 セイコーエプソン株式会社 冷却装置、プロジェクタ及び冷却方法
CN100480609C (zh) * 2005-10-11 2009-04-22 富准精密工业(深圳)有限公司 热管制造方法
US7228888B2 (en) * 2005-10-13 2007-06-12 International Business Machines Corporation Rotatable liquid reservoir for computer cooling
US7548421B2 (en) * 2005-10-25 2009-06-16 Hewlett-Packard Development Company, L.P. Impingement cooling of components in an electronic system
JP4528330B2 (ja) * 2005-11-02 2010-08-18 株式会社新潟Tlo マイクロポンプ及びマイクロ流体チップ
DE602006009687D1 (de) * 2005-11-08 2009-11-19 Byd Co Ltd Wärmeableiteinrichtung für ein batteriepack und batteriepack damit
US20070114010A1 (en) * 2005-11-09 2007-05-24 Girish Upadhya Liquid cooling for backlit displays
DK1957794T3 (da) 2005-11-23 2014-08-11 Eksigent Technologies Llc Elektrokinetiske pumpeudformninger og lægemiddelfremføringssystemer
US20070119572A1 (en) * 2005-11-30 2007-05-31 Raytheon Company System and Method for Boiling Heat Transfer Using Self-Induced Coolant Transport and Impingements
US20070119568A1 (en) * 2005-11-30 2007-05-31 Raytheon Company System and method of enhanced boiling heat transfer using pin fins
US7788073B2 (en) * 2005-12-13 2010-08-31 Linde Aktiengesellschaft Processes for determining the strength of a plate-type exchanger, for producing a plate-type heat exchanger, and for producing a process engineering system
DE102005060635A1 (de) 2005-12-13 2007-06-14 Siemens Ag Steuerungsverfahren zur Kühlung einer technischen Anlage
ES2440477T3 (es) * 2005-12-15 2014-01-29 Laboratorios Cair España, Sl Dispositivo para ajustar la temperatura de un fluido fisiológico
US7417858B2 (en) * 2005-12-21 2008-08-26 Sun Microsystems, Inc. Cooling technique using multiple magnet array for magneto-hydrodynamic cooling of multiple integrated circuits
US7245495B2 (en) * 2005-12-21 2007-07-17 Sun Microsystems, Inc. Feedback controlled magneto-hydrodynamic heat sink
US7614445B2 (en) * 2005-12-21 2009-11-10 Sun Microsystems, Inc. Enhanced heat pipe cooling with MHD fluid flow
US7628198B2 (en) * 2005-12-21 2009-12-08 Sun Microsystems, Inc. Cooling technique using a heat sink containing swirling magneto-hydrodynamic fluid
US7310231B2 (en) * 2005-12-21 2007-12-18 Sun Microsystems, Inc. Heat sink having magnet array for magneto-hydrodynamic hot spot cooling
US7642527B2 (en) * 2005-12-30 2010-01-05 Phoseon Technology, Inc. Multi-attribute light effects for use in curing and other applications involving photoreactions and processing
US20070175621A1 (en) * 2006-01-31 2007-08-02 Cooligy, Inc. Re-workable metallic TIM for efficient heat exchange
US7289326B2 (en) * 2006-02-02 2007-10-30 Sun Microsystems, Inc. Direct contact cooling liquid embedded package for a central processor unit
TW200805042A (en) 2006-02-16 2008-01-16 Cooligy Inc Liquid cooling loops for server applications
DE102006008033A1 (de) * 2006-02-21 2007-09-06 Siemens Ag Österreich Kühlkörper mit von Kühlmittel durchströmtem Rohr
TWI291752B (en) * 2006-02-27 2007-12-21 Siliconware Precision Industries Co Ltd Semiconductor package with heat dissipating device and fabrication method thereof
US7792420B2 (en) * 2006-03-01 2010-09-07 Nikon Corporation Focus adjustment device, imaging device and focus adjustment method
US20070209782A1 (en) * 2006-03-08 2007-09-13 Raytheon Company System and method for cooling a server-based data center with sub-ambient cooling
TW200810676A (en) * 2006-03-30 2008-02-16 Cooligy Inc Multi device cooling
US20070227709A1 (en) * 2006-03-30 2007-10-04 Girish Upadhya Multi device cooling
US7870893B2 (en) * 2006-04-06 2011-01-18 Oracle America, Inc. Multichannel cooling system with magnetohydrodynamic pump
TWI403883B (zh) * 2006-04-11 2013-08-01 固利吉股份有限公司 藉使用經模組匯流排型熱交換器連結之多流體熱交換迴路於個人電腦中冷卻多熱源之方法
WO2007127320A2 (en) * 2006-04-25 2007-11-08 Mehdi Hatamian Improved heat sink
US20070246106A1 (en) 2006-04-25 2007-10-25 Velocys Inc. Flow Distribution Channels To Control Flow in Process Channels
US7908874B2 (en) 2006-05-02 2011-03-22 Raytheon Company Method and apparatus for cooling electronics with a coolant at a subambient pressure
US20070256815A1 (en) * 2006-05-04 2007-11-08 Cooligy, Inc. Scalable liquid cooling system with modular radiators
US20070256825A1 (en) * 2006-05-04 2007-11-08 Conway Bruce R Methodology for the liquid cooling of heat generating components mounted on a daughter card/expansion card in a personal computer through the use of a remote drive bay heat exchanger with a flexible fluid interconnect
ATE490579T1 (de) * 2006-05-19 2010-12-15 Arges Ges Fuer Industrieplanung Und Lasertechnik M B H Verfahren zur hochpräzisen regelung von lastvariablen wärmequellen oder -senken, insbesondere von pumpdioden für festkörperlaser
WO2007144024A1 (fr) * 2006-06-15 2007-12-21 Sebalis Dispositif a echanges thermiques
US20080013278A1 (en) * 2006-06-30 2008-01-17 Fredric Landry Reservoir for liquid cooling systems used to provide make-up fluid and trap gas bubbles
US20080006396A1 (en) * 2006-06-30 2008-01-10 Girish Upadhya Multi-stage staggered radiator for high performance liquid cooling applications
KR100737162B1 (ko) * 2006-08-11 2007-07-06 동부일렉트로닉스 주식회사 반도체 소자 및 그 제조방법
US8159825B1 (en) 2006-08-25 2012-04-17 Hypres Inc. Method for fabrication of electrical contacts to superconducting circuits
DE102006040187B4 (de) * 2006-08-28 2009-12-10 Airbus Deutschland Gmbh Kühlsystem und Kühlverfahren zur Kühlung von Bauelementen einer Leistungselektronik
US20080047688A1 (en) * 2006-08-28 2008-02-28 Airbus Deutschland Gmbh Cooling System And Cooling Method For Cooling Components Of A Power Electronics
US7672129B1 (en) 2006-09-19 2010-03-02 Sun Microsystems, Inc. Intelligent microchannel cooling
US8561673B2 (en) * 2006-09-26 2013-10-22 Olantra Fund X L.L.C. Sealed self-contained fluidic cooling device
JP4893195B2 (ja) 2006-09-27 2012-03-07 カシオ計算機株式会社 送液装置の接続構造体、燃料電池型発電装置及び電子機器
US7453690B2 (en) * 2006-09-27 2008-11-18 International Business Machines Corporation Electronic component interconnection and assembly
US7999375B2 (en) * 2006-10-11 2011-08-16 Formfactor, Inc. Electronic device with integrated micromechanical contacts and cooling system
US20080087456A1 (en) * 2006-10-13 2008-04-17 Onscreen Technologies, Inc. Circuit board assemblies with combined fluid-containing heatspreader-ground plane and methods therefor
US20080093052A1 (en) * 2006-10-20 2008-04-24 Foxconn Technology Co., Ltd. Heat dissipation device with heat pipes
US8037927B2 (en) * 2006-11-16 2011-10-18 CUI Global, Inc. Cooling device for an electronic component
US8011421B2 (en) 2006-12-12 2011-09-06 Honeywell International Inc. System and method that dissipate heat from an electronic device
US8067091B2 (en) 2006-12-20 2011-11-29 Graftech International Holdings Inc. Dimensionally stable, leak-free graphite substrate
CN200994225Y (zh) * 2006-12-29 2007-12-19 帛汉股份有限公司 电路基板结构
US7969734B2 (en) * 2007-01-03 2011-06-28 General Electric Company Unique cooling scheme for advanced thermal management of high flux electronics
US8056615B2 (en) * 2007-01-17 2011-11-15 Hamilton Sundstrand Corporation Evaporative compact high intensity cooler
US7867592B2 (en) 2007-01-30 2011-01-11 Eksigent Technologies, Inc. Methods, compositions and devices, including electroosmotic pumps, comprising coated porous surfaces
US8030754B2 (en) * 2007-01-31 2011-10-04 Hewlett-Packard Development Company, L.P. Chip cooling channels formed in wafer bonding gap
JP2008191996A (ja) * 2007-02-06 2008-08-21 Hitachi Ltd ディスクアレイ装置および電子装置
JP4694514B2 (ja) * 2007-02-08 2011-06-08 トヨタ自動車株式会社 半導体素子の冷却構造
US8528628B2 (en) * 2007-02-08 2013-09-10 Olantra Fund X L.L.C. Carbon-based apparatus for cooling of electronic devices
US8651172B2 (en) * 2007-03-22 2014-02-18 Raytheon Company System and method for separating components of a fluid coolant for cooling a structure
US20120267066A1 (en) * 2007-03-27 2012-10-25 Hun Chol Kim Heat pipe, heat pipe system, and related method for long distance
KR100865718B1 (ko) * 2007-03-27 2008-10-28 김훈철 장거리 열량수송용 히트파이프
US8734499B2 (en) * 2007-03-29 2014-05-27 Cardiac Pacemakers, Inc. Systems and methods for thermal neuroinhibition
US8950468B2 (en) 2007-05-11 2015-02-10 The Boeing Company Cooling system for aerospace vehicle components
EP2147585B1 (en) 2007-05-15 2016-11-02 Schneider Electric IT Corporation Method and system for managing facility power and cooling
US7460369B1 (en) * 2007-06-01 2008-12-02 Advanced Micro Devices, Inc. Counterflow microchannel cooler for integrated circuits
JP4520487B2 (ja) * 2007-06-15 2010-08-04 株式会社日立製作所 電子機器用冷却装置
US20080310116A1 (en) * 2007-06-15 2008-12-18 O'connor Kurt F Heatsink having an internal plenum
WO2009009131A2 (en) 2007-07-11 2009-01-15 California Institute Of Technology Cardiac assist system using helical arrangement of contractile bands and helically-twisting cardiac assist device
BRPI0813718A2 (pt) 2007-07-13 2014-12-30 Univ Leland Stanford Junior Método e aparelho que utilizam um campo elétrico para ensaios biológicos aperfeiçoados
US7843695B2 (en) * 2007-07-20 2010-11-30 Honeywell International Inc. Apparatus and method for thermal management using vapor chamber
CN101360412B (zh) * 2007-08-03 2011-01-19 富准精密工业(深圳)有限公司 微型液体冷却装置及其所采用的微液滴产生器
TW200912621A (en) 2007-08-07 2009-03-16 Cooligy Inc Method and apparatus for providing a supplemental cooling to server racks
US9496200B2 (en) 2011-07-27 2016-11-15 Coolit Systems, Inc. Modular heat-transfer systems
US8746330B2 (en) 2007-08-09 2014-06-10 Coolit Systems Inc. Fluid heat exchanger configured to provide a split flow
US9943014B2 (en) 2013-03-15 2018-04-10 Coolit Systems, Inc. Manifolded heat exchangers and related systems
US9453691B2 (en) 2007-08-09 2016-09-27 Coolit Systems, Inc. Fluid heat exchange systems
US7712325B2 (en) * 2007-08-18 2010-05-11 Leonid A Shapiro Modular semi-conservative and self-scaling electronics cooling system
US7885063B2 (en) * 2007-08-20 2011-02-08 Nvidia Corporation Circuit board heat exchanger carrier system and method
KR101387549B1 (ko) * 2007-09-03 2014-04-24 삼성전자주식회사 인쇄회로기판 및 그의 제조 방법, 및 이를 갖는 메모리모듈 및 그의 제조 방법
KR101055932B1 (ko) * 2007-09-17 2011-08-09 바딤 아나토리에비치 포미트킨 히트 파이프 냉각기와 물 냉각기용 열 확산기
US7921655B2 (en) * 2007-09-21 2011-04-12 Raytheon Company Topping cycle for a sub-ambient cooling system
US8253076B2 (en) * 2007-10-29 2012-08-28 Smiths Medical Asd, Inc. Respiratory system heater unit
US8058724B2 (en) * 2007-11-30 2011-11-15 Ati Technologies Ulc Holistic thermal management system for a semiconductor chip
US20090139698A1 (en) * 2007-12-03 2009-06-04 Watronx, Inc. (Aka Onscreen Technologies, Inc.) Carbon-based waterlock with attached heat-exchanger for cooling of electronic devices
US8251672B2 (en) 2007-12-11 2012-08-28 Eksigent Technologies, Llc Electrokinetic pump with fixed stroke volume
US9157687B2 (en) * 2007-12-28 2015-10-13 Qcip Holdings, Llc Heat pipes incorporating microchannel heat exchangers
US7755186B2 (en) * 2007-12-31 2010-07-13 Intel Corporation Cooling solutions for die-down integrated circuit packages
US8100672B2 (en) * 2008-01-11 2012-01-24 California Institute Of Technology Autonomous electrochemical actuation of microfluidic circuits
GB0802450D0 (en) * 2008-02-08 2008-03-19 Osmotex As Electro-osmotic pump
US8173080B2 (en) 2008-02-14 2012-05-08 Illumina, Inc. Flow cells and manifolds having an electroosmotic pump
US7934386B2 (en) * 2008-02-25 2011-05-03 Raytheon Company System and method for cooling a heat generating structure
US20090225514A1 (en) * 2008-03-10 2009-09-10 Adrian Correa Device and methodology for the removal of heat from an equipment rack by means of heat exchangers mounted to a door
US9297571B1 (en) 2008-03-10 2016-03-29 Liebert Corporation Device and methodology for the removal of heat from an equipment rack by means of heat exchangers mounted to a door
US7883266B2 (en) * 2008-03-24 2011-02-08 International Business Machines Corporation Method and apparatus for defect detection in a cold plate
US7907409B2 (en) * 2008-03-25 2011-03-15 Raytheon Company Systems and methods for cooling a computing component in a computing rack
JP2009281721A (ja) * 2008-04-23 2009-12-03 Hitachi Cable Ltd 相変換冷却器及び携帯機器
EP2291599A4 (en) * 2008-04-29 2014-05-14 Carrier Corp MODULAR HEAT EXCHANGER
US20090290305A1 (en) * 2008-05-20 2009-11-26 Wei Yang Entrainment heatsink using engine bleed air
EP2131168A1 (en) * 2008-06-04 2009-12-09 Siemens Aktiengesellschaft Method and device for detecting capacity changes in a fluid and turbine
KR20100008868A (ko) * 2008-07-17 2010-01-27 삼성전자주식회사 잉크젯 타입 화상형성장치의 헤드칩
TWM348267U (en) * 2008-07-25 2009-01-01 Micro Star Int Co Ltd Heat conducting pipe and heat dissipation system using the same
US8120915B2 (en) * 2008-08-18 2012-02-21 General Electric Company Integral heat sink with spiral manifolds
US7817422B2 (en) * 2008-08-18 2010-10-19 General Electric Company Heat sink and cooling and packaging stack for press-packages
US20100052157A1 (en) * 2008-08-29 2010-03-04 Micron Technology, Inc. Channel for a semiconductor die and methods of formation
JP5610679B2 (ja) * 2008-09-01 2014-10-22 栗田工業株式会社 液体加熱器および液体加熱方法
CA2751080C (en) * 2008-09-30 2018-06-12 Forced Physics Llc Method and apparatus for control of fluid temperature and flow
CN102308090B (zh) 2008-11-26 2015-12-02 伊路敏纳公司 具有改进的气体管理的电渗泵
US20100147492A1 (en) * 2008-12-10 2010-06-17 Ronald David Conry IGBT cooling method
JP2010161184A (ja) * 2009-01-08 2010-07-22 Hitachi Ltd 半導体装置
US10066977B2 (en) * 2009-01-26 2018-09-04 Canon U.S. Life Sciences, Inc. Microfluidic flow monitoring
DE102009000514A1 (de) * 2009-01-30 2010-08-26 Robert Bosch Gmbh Verbundbauteil sowie Verfahren zum Herstellen eines Verbundbauteil
US8150668B2 (en) * 2009-02-11 2012-04-03 Livermore Software Technology Corporation Thermal fluid-structure interaction simulation in finite element analysis
US7898807B2 (en) * 2009-03-09 2011-03-01 General Electric Company Methods for making millichannel substrate, and cooling device and apparatus using the substrate
TW201036527A (en) * 2009-03-19 2010-10-01 Acbel Polytech Inc Large-area liquid-cooled heat-dissipation device
WO2010124258A2 (en) * 2009-04-24 2010-10-28 Old Dominion University Research Foundation Multiple walled nested coaxial nanostructures
US8232637B2 (en) * 2009-04-30 2012-07-31 General Electric Company Insulated metal substrates incorporating advanced cooling
US8369090B2 (en) * 2009-05-12 2013-02-05 Iceotope Limited Cooled electronic system
JP5473403B2 (ja) * 2009-05-25 2014-04-16 キヤノン株式会社 液体駆動装置
US8715875B2 (en) * 2009-05-26 2014-05-06 The Invention Science Fund I, Llc System and method of operating an electrical energy storage device or an electrochemical energy generation device using thermal conductivity materials based on mobile device states and vehicle states
US8101293B2 (en) * 2009-05-26 2012-01-24 The Invention Science Fund I, Llc System for altering temperature of an electrical energy storage device or an electrochemical energy generation device using high thermal conductivity materials based on states of the device
US8802266B2 (en) * 2009-05-26 2014-08-12 The Invention Science Fund I, Llc System for operating an electrical energy storage device or an electrochemical energy generation device using microchannels based on mobile device states and vehicle states
US20100304258A1 (en) * 2009-05-26 2010-12-02 Chan Alistair K System and method of altering temperature of an electrical energy storage device or an electrochemical energy generation device using high thermal conductivity materials
US20100304257A1 (en) * 2009-05-26 2010-12-02 Searete Llc, A Limited Liability Corporation Of The State Of Delaware System and method of operating an electrical energy storage device or an electrochemical energy generation device using microchannels and high thermal conductivity materials
US20100304259A1 (en) * 2009-05-26 2010-12-02 Searete Llc. A Limited Liability Corporation Of The State Of Delaware Method of operating an electrical energy storage device or an electrochemical energy generation device using high thermal conductivity materials during charge and discharge
US20100314093A1 (en) * 2009-06-12 2010-12-16 Gamal Refai-Ahmed Variable heat exchanger
US20100326627A1 (en) * 2009-06-30 2010-12-30 Schon Steven G Microelectronics cooling system
US8425965B2 (en) * 2009-07-29 2013-04-23 Tokitae Llc Method for heating or sterilizing a liquid stream
US9599407B2 (en) * 2009-07-29 2017-03-21 Tokitae Llc System and structure for heating or sterilizing a liquid stream
US9930898B2 (en) * 2009-07-29 2018-04-03 Tokitae Llc Pasteurization system and method
US20110024150A1 (en) * 2009-07-31 2011-02-03 General Electric Company Cooling system and method for current carrying conductor
JP5306134B2 (ja) * 2009-09-28 2013-10-02 京セラ株式会社 送液装置
US20110073292A1 (en) * 2009-09-30 2011-03-31 Madhav Datta Fabrication of high surface area, high aspect ratio mini-channels and their application in liquid cooling systems
US20110097215A1 (en) * 2009-10-23 2011-04-28 The Government Of The United States Of America, As Represented By The Secretary Of The Navy Flexible Solid-State Pump Constructed of Surface-Modified Glass Fiber Filters and Metal Mesh Electrodes
EP2610014B1 (en) * 2010-01-27 2018-01-03 Heraeus Noblelight Fusion UV Inc. Micro-channel-cooled high heat load light emitting device
CA2795837A1 (en) 2010-03-09 2011-09-15 Woonsup Shin Electro-osmotic pumps, systems, methods, and compositions
TWI395355B (zh) * 2010-05-25 2013-05-01 Ruei Jen Chen 熱電轉換模組
US8824142B2 (en) 2010-05-26 2014-09-02 Panasonic Precision Devices Co., Ltd. Electrohydrodynamic fluid mover techniques for thin, low-profile or high-aspect-ratio electronic devices
EP2395549B1 (en) * 2010-06-10 2014-06-25 Imec Device for cooling integrated circuits
US8218320B2 (en) * 2010-06-29 2012-07-10 General Electric Company Heat sinks with C-shaped manifolds and millichannel cooling
US9125655B2 (en) 2010-07-16 2015-09-08 California Institute Of Technology Correction and optimization of wave reflection in blood vessels
US8077460B1 (en) 2010-07-19 2011-12-13 Toyota Motor Engineering & Manufacturing North America, Inc. Heat exchanger fluid distribution manifolds and power electronics modules incorporating the same
US8828873B2 (en) * 2010-07-26 2014-09-09 Hamamatsu Photonics K.K. Method for manufacturing semiconductor device
IT1401386B1 (it) * 2010-07-30 2013-07-18 Eurotech S P A Dispositivo di raffreddamento a liquido per schede elettroniche, in particolare per unita' di elaborazione ad elevate prestazioni
CN103201696B (zh) 2010-08-23 2015-09-23 生命科技股份有限公司 化学检测系统的温度控制
US8659896B2 (en) 2010-09-13 2014-02-25 Toyota Motor Engineering & Manufacturing North America, Inc. Cooling apparatuses and power electronics modules
US8199505B2 (en) 2010-09-13 2012-06-12 Toyota Motor Engineering & Manufacturing Norh America, Inc. Jet impingement heat exchanger apparatuses and power electronics modules
KR101667251B1 (ko) * 2010-09-17 2016-10-18 대우조선해양 주식회사 평형수를 이용한 냉각 시스템
US8353332B2 (en) 2010-10-13 2013-01-15 Reid Aarne H Integrated electronics cooling device
WO2012064614A1 (en) 2010-11-11 2012-05-18 Tessera, Inc. Electronic system changeable to accommodate an ehd air mover or mechanical air mover
US9417013B2 (en) 2010-11-12 2016-08-16 Toyota Motor Engineering & Manufacturing North America, Inc. Heat transfer systems including heat conducting composite materials
US8427832B2 (en) 2011-01-05 2013-04-23 Toyota Motor Engineering & Manufacturing North America, Inc. Cold plate assemblies and power electronics modules
EP2665093A4 (en) * 2011-01-12 2015-05-06 Toyota Motor Co Ltd COOLER
US8712598B2 (en) * 2011-01-14 2014-04-29 Microsoft Corporation Adaptive flow for thermal cooling of devices
US8391008B2 (en) 2011-02-17 2013-03-05 Toyota Motor Engineering & Manufacturing North America, Inc. Power electronics modules and power electronics module assemblies
US9099426B2 (en) * 2011-02-23 2015-08-04 University Of Maryland, College Park Trench-assisted thermoelectric isothermalization of power switching chips
US8482919B2 (en) 2011-04-11 2013-07-09 Toyota Motor Engineering & Manufacturing North America, Inc. Power electronics card assemblies, power electronics modules, and power electronics devices
CA2834708A1 (en) 2011-05-05 2012-11-08 Eksigent Technologies, Llc Gel coupling for electrokinetic delivery systems
US8902591B2 (en) * 2011-05-11 2014-12-02 Microjet Technology Co., Ltd. Heat dissipation device
TWI438388B (zh) * 2011-05-20 2014-05-21 緯創資通股份有限公司 液冷式散熱裝置
US8844551B2 (en) * 2011-06-16 2014-09-30 Hamilton Sundstrand Corporation Leak detection logic for closed-volume system
US20150192368A1 (en) * 2011-06-27 2015-07-09 Ebullient, Llc Method of condensing vapor in two-phase flow within a cooling apparatus
US8564952B2 (en) 2011-07-25 2013-10-22 International Business Machines Corporation Flow boiling heat sink structure with vapor venting and condensing
US9061382B2 (en) 2011-07-25 2015-06-23 International Business Machines Corporation Heat sink structure with a vapor-permeable membrane for two-phase cooling
US9069532B2 (en) 2011-07-25 2015-06-30 International Business Machines Corporation Valve controlled, node-level vapor condensation for two-phase heat sink(s)
US10006720B2 (en) 2011-08-01 2018-06-26 Teledyne Scientific & Imaging, Llc System for using active and passive cooling for high power thermal management
WO2014141162A1 (en) 2013-03-15 2014-09-18 Coolit Systems, Inc. Sensors, multiplexed communication techniques, and related systems
US10365667B2 (en) 2011-08-11 2019-07-30 Coolit Systems, Inc. Flow-path controllers and related systems
CN102354906B (zh) * 2011-09-19 2013-04-24 重庆师范大学 大功率半导体激光器膨胀制冷系统
US9069039B1 (en) * 2011-09-30 2015-06-30 Emc Corporation Power measurement transducer
KR101225704B1 (ko) * 2011-11-04 2013-01-23 잘만테크 주식회사 루프형 히트파이프 시스템용 증발기 및 그의 제조방법
US11092977B1 (en) 2017-10-30 2021-08-17 Zane Coleman Fluid transfer component comprising a film with fluid channels
KR101354814B1 (ko) * 2011-12-14 2014-01-27 삼성전기주식회사 반도체 패키지
US8603834B2 (en) * 2011-12-15 2013-12-10 General Electric Company Actuation of valves using electroosmotic pump
US20140367073A1 (en) * 2011-12-20 2014-12-18 Osmotex Ag Liquid transport membrane
EP2795489A4 (en) 2011-12-22 2016-06-01 Schneider Electric It Corp ANALYSIS OF THE IMPACT OF TRANSITION EVENTS ON THE TEMPERATURE IN A DATA CENTER
US9142482B2 (en) * 2011-12-27 2015-09-22 Intel Corporation Transient thermal management systems for semiconductor devices
US9303925B2 (en) 2012-02-17 2016-04-05 Hussmann Corporation Microchannel suction line heat exchanger
US8913383B1 (en) * 2012-02-28 2014-12-16 Heatmine LLC Heat capture system for electrical components providing electromagnetic pulse protection
US9179575B1 (en) * 2012-03-13 2015-11-03 Rockwell Collins, Inc. MEMS based device for phase-change autonomous transport of heat (PATH)
EP2848101B1 (en) 2012-05-07 2019-04-10 Phononic Devices, Inc. Thermoelectric heat exchanger component including protective heat spreading lid and optimal thermal interface resistance
US20130291555A1 (en) 2012-05-07 2013-11-07 Phononic Devices, Inc. Thermoelectric refrigeration system control scheme for high efficiency performance
US9189037B2 (en) * 2012-06-12 2015-11-17 Globalfoundries Inc. Optimizing heat transfer in 3-D chip-stacks
KR101540146B1 (ko) * 2012-06-22 2015-07-28 삼성전기주식회사 전력 모듈용 방열 시스템
US9139416B2 (en) 2012-08-01 2015-09-22 University Of South Carolina Microfluidic devices for the generation of nano-vapor bubbles and their methods of manufacture and use
US9035452B2 (en) 2012-08-07 2015-05-19 General Electric Company Electronic device cooling with autonomous fluid routing and method of assembly
IN2015DN02848A (enExample) * 2012-09-21 2015-09-11 Schneider Electric It Corp
JP6539582B2 (ja) * 2012-10-01 2019-07-03 フォースト・フィジックス・リミテッド・ライアビリティ・カンパニーＦｏｒｃｅｄ Ｐｈｙｓｉｃｓ ＬＬＣ 温度制御のためのシステムおよび方法
US8848371B2 (en) * 2012-10-01 2014-09-30 Hamilton Sundstrand Corporation Dielectrophoretic restriction to prevent vapor backflow
US9038407B2 (en) 2012-10-03 2015-05-26 Hamilton Sundstrand Corporation Electro-hydrodynamic cooling with enhanced heat transfer surfaces
US9243726B2 (en) 2012-10-03 2016-01-26 Aarne H. Reid Vacuum insulated structure with end fitting and method of making same
US8867210B2 (en) 2012-10-31 2014-10-21 Deere & Company Cooling apparatus for an electrical substrate
US9709324B1 (en) * 2012-11-09 2017-07-18 Rockwell Collins, Inc. Liquid cooling with parasitic phase-change pumps
US9036353B2 (en) 2012-11-26 2015-05-19 Northrop Grumman Systems Corporation Flexible thermal interface for electronics
WO2014105014A1 (en) 2012-12-27 2014-07-03 Schneider Electric It Corporation Systems and methods of visualizing airflow
US8643173B1 (en) 2013-01-04 2014-02-04 Toyota Motor Engineering & Manufacturing North America, Inc. Cooling apparatuses and power electronics modules with single-phase and two-phase surface enhancement features
US8970114B2 (en) 2013-02-01 2015-03-03 Lam Research Corporation Temperature controlled window of a plasma processing chamber component
US20140262161A1 (en) * 2013-03-12 2014-09-18 David Lind Weigand Method and apparatus for dynamically cooling electronic devices
US9196935B2 (en) * 2013-03-12 2015-11-24 Gm Global Technology Operations, Llc Micro-channel cooling fin design based on an equivalent temperature gradient
US12366870B2 (en) 2013-03-15 2025-07-22 Coolit Systems, Inc. Flow-path controllers and related systems
KR101707366B1 (ko) 2013-04-02 2017-02-15 미쓰비시덴키 가부시키가이샤 반도체 장치
US9865907B2 (en) 2013-04-23 2018-01-09 Xiaodong Xiang Cooling mechanism for batteries using L-V phase change materials
KR101449293B1 (ko) * 2013-06-03 2014-10-08 현대자동차주식회사 냉온장 컵홀더
US9307680B2 (en) 2013-06-12 2016-04-05 Deere & Company Cooled electronic part enclosure
US9706655B2 (en) * 2013-07-09 2017-07-11 Oleson Convergent Solutions Llc Packaging for high power integrated circuits and infrared emitter arrays
KR101609239B1 (ko) 2013-07-31 2016-04-05 주식회사 엘지화학 상변환 물질을 이용한 전지팩 가열기 및 이를 포함하는 전지팩 온도조절 장치
US9131631B2 (en) 2013-08-08 2015-09-08 Toyota Motor Engineering & Manufacturing North America, Inc. Jet impingement cooling apparatuses having enhanced heat transfer assemblies
US20160199913A1 (en) * 2013-09-04 2016-07-14 Bae Systems Plc Conduit system
US20150068707A1 (en) * 2013-09-09 2015-03-12 Nec Corporation Electronic component cooling apparatus
US20150077937A1 (en) * 2013-09-13 2015-03-19 Alcatel Lucent Apparatus for cooling board mounted optical modules
KR101540442B1 (ko) * 2013-10-04 2015-07-30 삼성중공업 주식회사 풍력 발전기
US10148155B2 (en) 2013-12-04 2018-12-04 Barrett Technology, Llc Method and apparatus for connecting an ultracompact, high-performance motor controller to an ultracompact, high-performance brushless DC motor
US20150195951A1 (en) * 2014-01-06 2015-07-09 Ge Aviation Systems Llc Cooled electronic assembly and cooling device
US9230879B2 (en) * 2014-01-12 2016-01-05 Gerald Ho Kim Thermal management in electronic apparatus with phase-change material and silicon heat sink
CN103776215B (zh) * 2014-02-14 2015-09-30 张高博 一种基于装置侧的循环液系统优化方法
US9463918B2 (en) 2014-02-20 2016-10-11 Aarne H. Reid Vacuum insulated articles and methods of making same
US10042402B2 (en) * 2014-04-07 2018-08-07 Google Llc Systems and methods for thermal management of a chassis-coupled modular mobile electronic device
US9263366B2 (en) * 2014-05-30 2016-02-16 International Business Machines Corporation Liquid cooling of semiconductor chips utilizing small scale structures
US9320171B2 (en) 2014-06-05 2016-04-19 Toyota Motor Engineering & Manufacturing North America, Inc. Two-phase cooling systems, power electronics modules, and methods for extending maximum heat flux
JP6123741B2 (ja) * 2014-06-20 2017-05-10 トヨタ自動車株式会社 冷却器
US9593871B2 (en) 2014-07-21 2017-03-14 Phononic Devices, Inc. Systems and methods for operating a thermoelectric module to increase efficiency
US10458683B2 (en) 2014-07-21 2019-10-29 Phononic, Inc. Systems and methods for mitigating heat rejection limitations of a thermoelectric module
CN104180554B (zh) * 2014-08-26 2016-03-23 四川新健康成生物股份有限公司 一种节能型全自动生化分析仪试剂室制冷方法
US10415903B2 (en) * 2014-10-15 2019-09-17 Hamilton Sundstrand Corporation Prevention of cooling flow blockage
JP6394267B2 (ja) * 2014-10-15 2018-09-26 富士通株式会社 冷却装置及び電子機器
US20160120059A1 (en) 2014-10-27 2016-04-28 Ebullient, Llc Two-phase cooling system
US10415597B2 (en) 2014-10-27 2019-09-17 Coolit Systems, Inc. Fluid heat exchange systems
FI126380B (en) * 2014-10-27 2016-11-15 Kone Corp The drive unit
US9504186B2 (en) * 2014-11-14 2016-11-22 Caterpillar Inc. Heatpipe imbedded coldplate enhancing IGBT heat spreading
US20160150678A1 (en) * 2014-11-22 2016-05-26 Gerald Ho Kim Silicon Cooling Plate With An Integrated PCB
US20170303431A1 (en) * 2014-11-22 2017-10-19 Gerald Ho Kim Silicon Cooling Plate With An Integrated PCB
CN104655042B (zh) * 2015-01-16 2017-05-24 大连理工大学 可实现样品变温的接触式表面轮廓仪
JP6095237B2 (ja) * 2015-01-26 2017-03-15 日立金属Ｍｍｃスーパーアロイ株式会社 高温クリープ特性に優れたＮｉ基合金およびこのＮｉ基合金を用いたガスタービン用部材
US9928317B2 (en) * 2015-02-02 2018-03-27 Mentor Graphics Corporation Additive design of heat sinks
US10175005B2 (en) * 2015-03-30 2019-01-08 Infinera Corporation Low-cost nano-heat pipe
US20160330866A1 (en) * 2015-05-07 2016-11-10 Cooler Master Technology Inc. Liquid cooling system
EP3179192A1 (de) * 2015-12-10 2017-06-14 Linde Aktiengesellschaft Verfahren zum bestimmen eines zustands einer wärmetauschereinrichtung
JP6797135B2 (ja) * 2015-05-28 2020-12-09 リンデ ゲゼルシャフト ミット ベシュレンクテル ハフツングＬｉｎｄｅ ＧｍｂＨ 熱交換装置の状態を特定する方法
US9960101B2 (en) * 2015-06-04 2018-05-01 Raytheon Company Micro-hoses for integrated circuit and device level cooling
CN104930779A (zh) * 2015-06-25 2015-09-23 福建德兴节能科技有限公司 一种基于消除回水余压的低能耗循环冷却水系统及改造方法
CN104949544B (zh) * 2015-06-25 2017-08-01 北京建筑大学 一种电渗式全热交换器
CN105116009B (zh) * 2015-08-11 2017-12-08 上海原动力通信科技有限公司 一种发热模拟装置和热管散热性能检测装置
US10497908B2 (en) 2015-08-24 2019-12-03 Concept Group, Llc Sealed packages for electronic and energy storage devices
JP6107905B2 (ja) * 2015-09-09 2017-04-05 株式会社富士通ゼネラル 熱交換器
US12255123B2 (en) 2015-09-30 2025-03-18 Microfabrica Inc. Micro heat transfer arrays, micro cold plates, and thermal management systems for semiconductor devices, and methods for using and making such arrays, plates, and systems
US11003808B2 (en) * 2015-09-30 2021-05-11 Siemens Industry Software Inc. Subtractive design for heat sink improvement
US9953899B2 (en) 2015-09-30 2018-04-24 Microfabrica Inc. Micro heat transfer arrays, micro cold plates, and thermal management systems for cooling semiconductor devices, and methods for using and making such arrays, plates, and systems
US10065256B2 (en) 2015-10-30 2018-09-04 Concept Group Llc Brazing systems and methods
CN105299938B (zh) * 2015-11-06 2017-11-14 中国电子科技集团公司第二十九研究所 一种基于微通道换热器的小型压缩制冷系统
US10677536B2 (en) * 2015-12-04 2020-06-09 Teledyne Scientific & Imaging, Llc Osmotic transport system for evaporative cooling
US9847275B2 (en) 2015-12-21 2017-12-19 International Business Machines Corporation Distribution and stabilization of fluid flow for interlayer chip cooling
US9941189B2 (en) * 2015-12-21 2018-04-10 International Business Machines Corporation Counter-flow expanding channels for enhanced two-phase heat removal
US10096537B1 (en) 2015-12-31 2018-10-09 Microfabrica Inc. Thermal management systems, methods for making, and methods for using
TWI582924B (zh) * 2016-02-02 2017-05-11 宏碁股份有限公司 散熱模組與電子裝置
WO2017135983A1 (en) * 2016-02-07 2017-08-10 Display Logic USA Inc. Display device with optically clear fluid disposed between display panel and display cover
EP3423854A4 (en) 2016-03-04 2020-01-01 Concept Group LLC VACUUM-INSULATED ARTICLES WITH IMPROVEMENT OF REFLECTIVE MATERIAL
US10020243B2 (en) * 2016-03-08 2018-07-10 Toyota Motor Engineering & Manufacturing North America, Inc. Power electronics assemblies having a wide bandgap semiconductor device and an integrated fluid channel system
US10674641B2 (en) * 2016-04-04 2020-06-02 Hamilton Sundstrand Corporation Immersion cooling systems and methods
WO2017176262A1 (en) 2016-04-06 2017-10-12 Hewlett-Packard Development Company, L.P. Cover for devices
US20170325327A1 (en) * 2016-04-07 2017-11-09 Massachusetts Institute Of Technology Printed circuit board for high power components
CN106016882B (zh) * 2016-07-14 2018-10-23 汪辉 一种防干燥自动水冷降温结构
US10753228B2 (en) 2016-08-11 2020-08-25 General Electric Company System for removing heat from turbomachinery components
EP3504948B1 (en) 2016-08-26 2022-11-09 Inertech IP LLC Cooling systems and methods using single-phase fluid and a flat tube heat exchanger with counter-flow circuiting
US10018427B2 (en) * 2016-09-08 2018-07-10 Taiwan Microloops Corp. Vapor chamber structure
CN106328615B (zh) * 2016-09-22 2019-01-08 嘉兴学院 一种用于冷却微电子芯片的气凝胶电渗泵
US10139168B2 (en) * 2016-09-26 2018-11-27 International Business Machines Corporation Cold plate with radial expanding channels for two-phase cooling
US10058007B2 (en) * 2016-09-26 2018-08-21 Asia Vital Components Co., Ltd. Water-cooling radiator unit and water-cooling module using same
US10004159B2 (en) * 2016-09-26 2018-06-19 Asia Vital Components Co., Ltd. Water-cooling radiator unit and device thereof
US9986661B2 (en) * 2016-09-26 2018-05-29 Asia Vital Components Co., Ltd. Water cooling heat radiation device and module thereof
US10371461B2 (en) 2016-10-11 2019-08-06 International Business Machines Corporation Multi-layered counterflow expanding microchannel cooling architecture and system thereof
JP7202766B2 (ja) 2016-11-15 2023-01-12 コンセプト グループ エルエルシー 微小孔構造の絶縁体によって強化された真空絶縁物品
WO2018093773A1 (en) 2016-11-15 2018-05-24 Reid Aarne H Multiply-insulated assemblies
US10076065B2 (en) * 2017-01-04 2018-09-11 Dell Products, Lp Liquid cooling system with a displacement appendage for an information handling system
TWI650839B (zh) * 2017-01-05 2019-02-11 研能科技股份有限公司 三維晶片積體電路冷卻系統
CN108281401A (zh) * 2017-01-05 2018-07-13 研能科技股份有限公司 三维芯片集成电路冷却系统
CN110024500B (zh) * 2017-02-03 2020-11-17 惠普发展公司，有限责任合伙企业 利用蒸汽和隔离腔室的热学控制
US10436521B2 (en) 2017-02-10 2019-10-08 Hamilton Sundstrand Corporation Dual-mode thermal management loop
CN108419385A (zh) * 2017-02-10 2018-08-17 天津市松正电动汽车技术股份有限公司 电动车控制器
US10119767B2 (en) 2017-02-10 2018-11-06 Hamilton Sundstrand Corporation Two-phase thermal loop with membrane separation
US10295271B2 (en) 2017-02-10 2019-05-21 Hamilton Sundstrand Corporation Two-phase thermal loop with rotary separation
US10915674B2 (en) * 2017-03-14 2021-02-09 International Business Machines Corporation Autonomous development of two-phase cooling architecture
FR3066355B1 (fr) * 2017-05-11 2020-02-07 Mersen France Sb Sas Module de refroidissement et convertisseur de puissance comprenant un tel module de refroidissement
WO2019015805A1 (en) * 2017-07-19 2019-01-24 Linde Aktiengesellschaft METHOD FOR DETERMINING STRAIN LEVELS IN MATERIAL OF PROCESS ENGINEERING APPARATUS
US11022206B1 (en) 2017-07-20 2021-06-01 Massachusetts Institute Of Technology Antagonistically driven differential for mechanical actuator
CN107270980B (zh) * 2017-07-21 2019-08-23 西安交通大学 一种垂直管内气液两相环状流液膜厚度及流量的测量方法
CN111094888B (zh) 2017-07-28 2021-12-10 达纳加拿大公司 用于热管理的超薄热交换器
WO2019018945A1 (en) 2017-07-28 2019-01-31 Dana Canada Corporation DEVICE AND METHOD FOR ALIGNING PARTS FOR LASER WELDING
TWI650520B (zh) * 2017-08-02 2019-02-11 萬在工業股份有限公司 相變化蒸發器及相變化散熱裝置
CN107591380B (zh) * 2017-08-03 2019-08-13 电子科技大学 一种集成温度传感器的微流道散热器
JP2020531764A (ja) 2017-08-25 2020-11-05 コンセプト グループ エルエルシー 複合的ジオメトリおよび複合的材料の断熱部品
US20190069443A1 (en) * 2017-08-31 2019-02-28 Ling Long Liquid-cooling termination structure having temperature sensing function
TWI694563B (zh) * 2017-09-28 2020-05-21 雙鴻科技股份有限公司 雙迴路液冷系統
US11452243B2 (en) 2017-10-12 2022-09-20 Coolit Systems, Inc. Cooling system, controllers and methods
US10881034B2 (en) * 2017-11-21 2020-12-29 Syracuse University Passive nano-heat pipes for cooling and thermal management of electronics and power conversion devices
US10356950B2 (en) 2017-12-18 2019-07-16 Ge Aviation Systems, Llc Avionics heat exchanger
US10727160B2 (en) * 2017-12-29 2020-07-28 Intel Corporation Thermal management component
US10225955B1 (en) * 2018-02-23 2019-03-05 Microsoft Technology Licensing, Llc Enclosure thermal short
US10749539B2 (en) * 2018-03-26 2020-08-18 Honeywell International Inc. Apparatus and method for a vapor cell atomic frequency reference
CN108509001B (zh) * 2018-04-02 2021-01-15 联想(北京)有限公司 电子设备及其水冷服务器
US10969841B2 (en) * 2018-04-13 2021-04-06 Dell Products L.P. Information handling system housing integrated vapor chamber
US10431524B1 (en) * 2018-04-23 2019-10-01 Asia Vital Components Co., Ltd. Water cooling module
US11568098B2 (en) * 2018-05-16 2023-01-31 Autodesk, Inc Designing convective cooling channels
CN108882636B (zh) * 2018-06-29 2021-06-15 联想长风科技(北京)有限公司 一种电子设备
CN112262462B (zh) * 2018-07-11 2023-12-05 Lot Ces有限公司 有害气体处理配管装置、设计方法及有害气体处理设备
US10901161B2 (en) 2018-09-14 2021-01-26 Toyota Motor Engineering & Manufacturing North America, Inc. Optical power transfer devices with an embedded active cooling chip
US11948861B2 (en) 2018-09-17 2024-04-02 Agency For Science, Technology And Research Liquid cooling module and method of forming the same
US11177192B2 (en) * 2018-09-27 2021-11-16 Taiwan Semiconductor Manufacturing Company, Ltd. Semiconductor device including heat dissipation structure and fabricating method of the same
US10962298B2 (en) * 2018-09-28 2021-03-30 Microsoft Technology Licensing, Llc Two-phase thermodynamic system having a porous microstructure sheet to increase an aggregate thin-film evaporation area of a working fluid
US10935325B2 (en) 2018-09-28 2021-03-02 Microsoft Technology Licensing, Llc Two-phase thermodynamic system having a porous microstructure sheet with varying surface energy to optimize utilization of a working fluid
BR112021006342B1 (pt) 2018-10-05 2023-10-17 S.A. Armstrong Limited Controle de manutenção e de fluxo automático de trocador de calor
EP3861272B1 (en) 2018-10-05 2024-04-10 S.A. Armstrong Limited Feed forward flow control of heat transfer system
CN120643121A (zh) * 2018-10-15 2025-09-16 里奇产品有限公司 拆卸分配器的方法和组装分配器的方法
US10840167B2 (en) 2018-11-19 2020-11-17 Advanced Micro Devices, Inc. Integrated heat spreader with configurable heat fins
US11778779B2 (en) * 2018-11-22 2023-10-03 Denso Corporation Electronic component cooling device
CN109496115B (zh) * 2018-12-27 2024-02-09 南昌大学 一种局部自调节的微通道换热器
US11662037B2 (en) 2019-01-18 2023-05-30 Coolit Systems, Inc. Fluid flow control valve for fluid flow systems, and methods
SE543734C2 (en) * 2019-03-11 2021-07-06 Apr Tech Ab Cooling of electronic components with an electrohydrodynamic flow unit
KR102247484B1 (ko) * 2019-04-23 2021-05-03 (주) 제이엔엠 메카텍 반도체 소자의 냉각을 위한 냉각장치용 증발기 및 이를 포함하는 냉각장치
US11473860B2 (en) 2019-04-25 2022-10-18 Coolit Systems, Inc. Cooling module with leak detector and related systems
JP2020183815A (ja) * 2019-04-26 2020-11-12 トヨタ自動車株式会社 冷却システム
TWI699079B (zh) * 2019-04-29 2020-07-11 品法設計國際有限公司 可調控溫度的液體載具
EP3976726B1 (en) * 2019-05-28 2025-09-10 Magic Leap, Inc. Thermal management system for portable electronic devices
CN110208312B (zh) * 2019-05-29 2021-07-02 东北电力大学 一种用于电场干扰下并联小通道临界热流密度的预测方法
US10939592B2 (en) * 2019-06-14 2021-03-02 Intel Corporation Liquid cooling system with sub atmospheric pressure coolant
US11493687B1 (en) 2019-07-02 2022-11-08 Psiquantum, Corp. Cryogenic microfluidic cooling for photonic integrated circuits
CN110534488B (zh) * 2019-08-25 2020-11-13 大连理工大学 一种用于igbt散热的磁流体泵装置及测试方法
CN110755699A (zh) * 2019-09-18 2020-02-07 浙江省北大信息技术高等研究院 可植入的电渗微泵装置
US10874037B1 (en) 2019-09-23 2020-12-22 Ford Global Technologies, Llc Power-module assembly with cooling arrangement
US11515233B2 (en) * 2019-09-26 2022-11-29 Taiwan Semiconductor Manufacturing Company, Ltd. Semiconductor component with cooling structure
US12040695B2 (en) 2019-12-19 2024-07-16 Tmeic Corporation Power conversion device and method for manufacturing the same
US11291143B2 (en) * 2019-12-27 2022-03-29 Baidu Usa Llc Cooling design for electronics enclosure
CN111141096A (zh) * 2020-01-20 2020-05-12 中国科学院上海光学精密机械研究所 集成化反射式光栅主动冷却装置
WO2021229365A1 (en) 2020-05-11 2021-11-18 Coolit Systems, Inc. Liquid pumping units, and related systems and methods
US11977004B2 (en) * 2020-06-03 2024-05-07 Becton, Dickinson And Company Capillary-based pressure threshold sensor for liquids and methods and apparatuses using same
CN112103252B (zh) * 2020-08-07 2022-12-09 西安电子科技大学 一种基于金属微流道的制冷型ltcc微系统及其制备方法
CN112113995B (zh) * 2020-08-19 2024-01-23 扬州船用电子仪器研究所(中国船舶重工集团公司第七二三研究所) 一种低压微通道气-液两相流散热试验系统及方法
CN114158232A (zh) * 2020-09-08 2022-03-08 英业达科技有限公司 散热片与散热系统
US12100541B2 (en) * 2020-09-14 2024-09-24 Intel Corporation Embedded cooling channel in magnetics
WO2022066318A1 (en) * 2020-09-28 2022-03-31 Lewis Tom Iii Systems and methods for producing saturated oxygen water
US11326836B1 (en) * 2020-10-22 2022-05-10 Asia Vital Components Co., Ltd. Vapor/liquid condensation system
US11356542B2 (en) * 2020-11-11 2022-06-07 Frore Systems Inc. Mobile device having a high coefficient of thermal spreading
CN112384040B (zh) * 2020-11-12 2022-05-24 中国电子科技集团公司第二十九研究所 一种蒙皮换热旁路控制系统及其控制方法
US12185511B2 (en) * 2020-12-16 2024-12-31 Toyota Motor Engineering & Manufacturing North America, Inc. Power electronics systems comprising a two-phase cold plate housing a vaporization structure
RU2755608C1 (ru) * 2020-12-18 2021-09-17 Федеральное государственное автономное образовательное учреждение высшего образования "Новосибирский национальный исследовательский государственный университет" (Новосибирский государственный университет, НГУ) Способ охлаждения электронного оборудования
US11395438B1 (en) * 2021-01-08 2022-07-19 Baidu Usa Llc Localized fluid acceleration in immersed environment
US12477696B2 (en) * 2021-01-21 2025-11-18 Nvidia Corporation Intelligent cold plate system with active and passive features for a datacenter cooling system
US11721608B2 (en) 2021-02-02 2023-08-08 Toyota Motor Engineering & Manufacturing North America, Inc. Power electronics assemblies having vapor chambers with integrated pedestals
US11988471B2 (en) 2021-03-27 2024-05-21 Massachusetts Institute Of Technology Devices and methods for fabrication of components of a multiscale porous high-temperature heat exchanger
US12238895B2 (en) * 2021-04-07 2025-02-25 Nvidia Corporation Intelligent low pressure two-phase cold plate with flow stabilization for datacenter cooling systems
US11725886B2 (en) 2021-05-20 2023-08-15 Coolit Systems, Inc. Modular fluid heat exchange systems
WO2022271745A1 (en) * 2021-06-21 2022-12-29 Parris Graeme Sidney Liquor distillation system and method thereof
US11917744B2 (en) * 2021-07-22 2024-02-27 Perkinelmer Scientific Canada Ulc Heat management for inductively coupled plasma systems
US11910578B2 (en) * 2021-09-23 2024-02-20 Contitech Techno-Chemie Gmbh Vehicle electronics cooling systems and methods
US20230091720A1 (en) * 2021-09-23 2023-03-23 Intel Corporation Integrated, configurable micro heat pump and microchannels
US11968803B2 (en) * 2021-12-22 2024-04-23 Baidu Usa Llc Two phase immersion system with local fluid accelerations
US12200914B2 (en) 2022-01-24 2025-01-14 Coolit Systems, Inc. Smart components, systems and methods for transferring heat
CN118339419A (zh) * 2022-02-04 2024-07-12 维兰德波威特斯有限责任公司 改进的微通道蒸发器
US12031553B2 (en) 2022-02-07 2024-07-09 L3Harris Technologies, Inc. Electronic device and cooling device with fan blade and related method
CN114449875B (zh) * 2022-03-29 2022-12-02 黑龙江三联丰实通信技术服务有限公司 一种5g通信网络基站用主动式散热装置及散热方法
CN114701100B (zh) * 2022-03-30 2023-06-02 贵州省工程复合材料中心有限公司 一种适应智能化制造的精密深腔型产品注塑模具的制造方法
US12120851B2 (en) 2022-04-20 2024-10-15 Microsoft Technology Licensing, Llc 3-D structured two-phase cooling boilers with nano structured boiling enhancement coating
US12189441B2 (en) * 2022-04-20 2025-01-07 Microsoft Technology Licensing, Llc 3-D structured two-phase microfluidic cooling with nano structured boiling enhancement coating
US12453048B2 (en) * 2022-06-25 2025-10-21 EvansWerks, Inc. Cooling system and methods
US12101909B2 (en) 2022-06-25 2024-09-24 EvansWerks, Inc. Cooling system and methods
US20230417227A1 (en) * 2022-06-25 2023-12-28 EvansWerks, Inc. Pumping systems and methods
US12452991B2 (en) 2022-06-25 2025-10-21 EvansWerks, Inc. Cooling system and methods
US12490411B2 (en) 2022-06-25 2025-12-02 EvansWerks, Inc. Cooling system and methods
US12200908B2 (en) * 2022-06-25 2025-01-14 EvansWerks, Inc. Cooling system and methods
US12133365B2 (en) * 2022-06-25 2024-10-29 EvansWerks, Inc. Cooling system and methods
US12363864B2 (en) * 2022-06-25 2025-07-15 EvansWerks, Inc. Cooling system and methods
US12349325B2 (en) * 2022-08-10 2025-07-01 Raytheon Company Two-phase liquid-cooled electrical power apparatus
CN116119602A (zh) * 2023-03-05 2023-05-16 嘉兴兴瓷新材料科技有限公司 一种具有微流道的mems封装陶瓷基板及其制备方法、微系统和应用
US12435732B1 (en) 2024-09-19 2025-10-07 Microsoft Technology Licensing, Llc Centrifugal blower housing
CN120164857B (zh) * 2025-03-31 2025-10-28 深圳市华创盛世电子有限公司 一种芯片散热封装结构
CN119997466B (zh) * 2025-04-14 2025-07-01 四川航天烽火伺服控制技术有限公司 一种设备壳体的热控系统及方法
CN120048809A (zh) * 2025-04-24 2025-05-27 深圳市冠禹半导体有限公司 基于微通道液冷技术的半导体功率器件高效散热结构及制造方法

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1201578A (en) * 1968-11-28 1970-08-12 Dornier System Gmbh Improvements in and relating to hydraulic actuating devices
US4862708A (en) * 1988-05-10 1989-09-05 Hughes Aircraft Company Osmotic thermal engine
CN2286429Y (zh) * 1997-03-04 1998-07-22 中国科学技术大学 多孔芯柱电渗泵
US5901037A (en) * 1997-06-18 1999-05-04 Northrop Grumman Corporation Closed loop liquid cooling for semiconductor RF amplifier modules
US6129826A (en) * 1997-04-04 2000-10-10 Caliper Technologies Corp. Methods and systems for enhanced fluid transport

Family Cites Families (213)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2102254B2 (de) * 1971-01-19 1973-05-30 Robert Bosch Gmbh, 7000 Stuttgart Kuehlvorrichtung fuer leistungshalbleiterbauelemente
DE2330722A1 (de) * 1973-06-16 1975-01-16 Nikolaus Laing Vorrichtung zur rueckfuehrung von kondensat in waermegleichrichterplatten
US3923426A (en) 1974-08-15 1975-12-02 Alza Corp Electroosmotic pump and fluid dispenser including same
US4009423A (en) 1975-07-02 1977-02-22 Honeywell Information Systems, Inc. Liquid cooled heat exchanger for electronic power supplies
JPS568238Y2 (enExample) 1976-02-14 1981-02-23
US4067237A (en) 1976-08-10 1978-01-10 Westinghouse Electric Corporation Novel heat pipe combination
DE2640000C2 (de) 1976-09-04 1986-09-18 Brown, Boveri & Cie Ag, 6800 Mannheim Zylindrische Kühldose mit gegenüberliegenden Ein- und Ausflußöffnungen für flüssigkeitsgekühlte Leistungshalbleiterbauelemente und Verfahren zur Herstellung derselben
US4312012A (en) 1977-11-25 1982-01-19 International Business Machines Corp. Nucleate boiling surface for increasing the heat transfer from a silicon device to a liquid coolant
US4392362A (en) * 1979-03-23 1983-07-12 The Board Of Trustees Of The Leland Stanford Junior University Micro miniature refrigerators
US4365664A (en) * 1980-10-20 1982-12-28 Hughes Aircraft Company Osmotically pumped heat pipe with passive mixing
US4450472A (en) 1981-03-02 1984-05-22 The Board Of Trustees Of The Leland Stanford Junior University Method and means for improved heat removal in compact semiconductor integrated circuits and similar devices utilizing coolant chambers and microscopic channels
US4573067A (en) 1981-03-02 1986-02-25 The Board Of Trustees Of The Leland Stanford Junior University Method and means for improved heat removal in compact semiconductor integrated circuits
US4516632A (en) 1982-08-31 1985-05-14 The United States Of America As Represented By The United States Deparment Of Energy Microchannel crossflow fluid heat exchanger and method for its fabrication
US4638854A (en) 1983-06-15 1987-01-27 Noren Don W Heat pipe assembly
JPS6057956A (ja) 1983-09-09 1985-04-03 Furukawa Electric Co Ltd:The 半導体用ヒ−トパイプ放熱器
DE3334159A1 (de) 1983-09-21 1985-04-04 Sauer, Otto, 6800 Mannheim Magnetventil
US4567505A (en) 1983-10-27 1986-01-28 The Board Of Trustees Of The Leland Stanford Junior University Heat sink and method of attaching heat sink to a semiconductor integrated circuit and the like
US4561040A (en) 1984-07-12 1985-12-24 Ibm Corporation Cooling system for VLSI circuit chips
JPS61126771A (ja) * 1984-11-22 1986-06-14 Toshiba Corp 燃料電池
US4593534A (en) * 1985-02-21 1986-06-10 Analytic Power Corporation Electrochemically driven heat pump
US4886514A (en) * 1985-05-02 1989-12-12 Ivac Corporation Electrochemically driven drug dispenser
US4697427A (en) 1985-05-10 1987-10-06 Sundstrand Corporation Forced flow evaporator for unusual gravity conditions
US4758926A (en) 1986-03-31 1988-07-19 Microelectronics And Computer Technology Corporation Fluid-cooled integrated circuit package
US4868712A (en) 1987-02-04 1989-09-19 Woodman John K Three dimensional integrated circuit package
US5016138A (en) 1987-10-27 1991-05-14 Woodman John K Three dimensional integrated circuit package
US4829432A (en) 1987-12-28 1989-05-09 Eastman Kodak Company Apparatus for shielding an electrical circuit from electromagnetic interference
US4894709A (en) 1988-03-09 1990-01-16 Massachusetts Institute Of Technology Forced-convection, liquid-cooled, microchannel heat sinks
US4908112A (en) 1988-06-16 1990-03-13 E. I. Du Pont De Nemours & Co. Silicon semiconductor wafer for analyzing micronic biological samples
US4951740A (en) 1988-06-27 1990-08-28 Texas A & M University System Bellows heat pipe for thermal control of electronic components
US4938280A (en) 1988-11-07 1990-07-03 Clark William E Liquid-cooled, flat plate heat exchanger
CA2002213C (en) 1988-11-10 1999-03-30 Iwona Turlik High performance integrated circuit chip package and method of making same
US4858093A (en) 1988-12-12 1989-08-15 Qualitron, Inc. Integrated magnetic power converter
US5021364A (en) * 1989-10-31 1991-06-04 The Board Of Trustees Of The Leland Stanford Junior University Microcantilever with integral self-aligned sharp tetrahedral tip
CH681168A5 (en) 1989-11-10 1993-01-29 Westonbridge Int Ltd Micro-pump for medicinal dosing
US5010292A (en) 1989-12-12 1991-04-23 North American Philips Corporation Voltage regulator with reduced semiconductor power dissipation
JPH03208365A (ja) 1990-01-10 1991-09-11 Hitachi Ltd 電子装置の冷却機構及びその使用方法
US5083194A (en) 1990-01-16 1992-01-21 Cray Research, Inc. Air jet impingement on miniature pin-fin heat sinks for cooling electronic components
US4975825A (en) 1990-01-16 1990-12-04 Sundstrand Corporation Stacked power converter
US5229915A (en) 1990-02-07 1993-07-20 Ngk Insulators, Ltd. Power semiconductor device with heat dissipating property
DE4006152A1 (de) 1990-02-27 1991-08-29 Fraunhofer Ges Forschung Mikrominiaturisierte pumpe
US5858188A (en) 1990-02-28 1999-01-12 Aclara Biosciences, Inc. Acrylic microchannels and their use in electrophoretic applications
US6054034A (en) 1990-02-28 2000-04-25 Aclara Biosciences, Inc. Acrylic microchannels and their use in electrophoretic applications
US6176962B1 (en) 1990-02-28 2001-01-23 Aclara Biosciences, Inc. Methods for fabricating enclosed microchannel structures
US5070040A (en) 1990-03-09 1991-12-03 University Of Colorado Foundation, Inc. Method and apparatus for semiconductor circuit chip cooling
US5096388A (en) 1990-03-22 1992-03-17 The Charles Stark Draper Laboratory, Inc. Microfabricated pump
US5203401A (en) 1990-06-29 1993-04-20 Digital Equipment Corporation Wet micro-channel wafer chuck and cooling method
US5057908A (en) 1990-07-10 1991-10-15 Iowa State University Research Foundation, Inc. High power semiconductor device with integral heat sink
US5420067A (en) 1990-09-28 1995-05-30 The United States Of America As Represented By The Secretary Of The Navy Method of fabricatring sub-half-micron trenches and holes
CA2053055C (en) * 1990-10-11 1997-02-25 Tsukasa Mizuno Liquid cooling system for lsi packages
JPH04196395A (ja) 1990-11-28 1992-07-16 Hitachi Ltd 冷却装置を備えた電子計算機
US5099910A (en) * 1991-01-15 1992-03-31 Massachusetts Institute Of Technology Microchannel heat sink with alternating flow directions
US5099311A (en) 1991-01-17 1992-03-24 The United States Of America As Represented By The United States Department Of Energy Microchannel heat sink assembly
IL97099A0 (en) * 1991-01-30 1992-03-29 Scient Innovations Ltd Infusion pump with safety means controlling the electrolytic cell
JPH06342990A (ja) 1991-02-04 1994-12-13 Internatl Business Mach Corp <Ibm> 統合冷却システム
US5131859A (en) 1991-03-08 1992-07-21 Cray Research, Inc. Quick disconnect system for circuit board modules
US5131233A (en) 1991-03-08 1992-07-21 Cray Computer Corporation Gas-liquid forced turbulence cooling
JP2626326B2 (ja) 1991-07-31 1997-07-02 三菱電機株式会社 モータ制御ユニット
US5125451A (en) 1991-04-02 1992-06-30 Microunity Systems Engineering, Inc. Heat exchanger for solid-state electronic devices
US5263251A (en) 1991-04-02 1993-11-23 Microunity Systems Engineering Method of fabricating a heat exchanger for solid-state electronic devices
US5232047A (en) 1991-04-02 1993-08-03 Microunity Systems Engineering, Inc. Heat exchanger for solid-state electronic devices
US5162974A (en) 1991-04-15 1992-11-10 Unisys Corporation Heat sink assembly for cooling electronic components
US5239200A (en) 1991-08-21 1993-08-24 International Business Machines Corporation Apparatus for cooling integrated circuit chips
US5199165A (en) 1991-12-13 1993-04-06 Hewlett-Packard Company Heat pipe-electrical interconnect integration method for chip modules
US5386720A (en) * 1992-01-09 1995-02-07 Olympus Optical Co., Ltd. Integrated AFM sensor
US5216580A (en) 1992-01-14 1993-06-01 Sun Microsystems, Inc. Optimized integral heat pipe and electronic circuit module arrangement
US5218515A (en) 1992-03-13 1993-06-08 The United States Of America As Represented By The United States Department Of Energy Microchannel cooling of face down bonded chips
US5230564A (en) 1992-03-20 1993-07-27 Cray Research, Inc. Temperature monitoring system for air-cooled electric components
US5317805A (en) 1992-04-28 1994-06-07 Minnesota Mining And Manufacturing Company Method of making microchanneled heat exchangers utilizing sacrificial cores
JP3069819B2 (ja) 1992-05-28 2000-07-24 富士通株式会社 ヒートシンク並びに該ヒートシンクに用いるヒートシンク取付具及びヒートシンクを用いた可搬型電子装置
US5406807A (en) * 1992-06-17 1995-04-18 Hitachi, Ltd. Apparatus for cooling semiconductor device and computer having the same
US5311397A (en) 1992-08-06 1994-05-10 Logistics Management Inc. Computer with modules readily replaceable by unskilled personnel
US5453641A (en) * 1992-12-16 1995-09-26 Sdl, Inc. Waste heat removal system
US5520244A (en) * 1992-12-16 1996-05-28 Sdl, Inc. Micropost waste heat removal system
US5339214A (en) 1993-02-12 1994-08-16 Intel Corporation Multiple-fan microprocessor cooling through a finned heat pipe
US5313099A (en) 1993-03-04 1994-05-17 Square Head, Inc. Heat sink assembly for solid state devices
US5436793A (en) 1993-03-31 1995-07-25 Ncr Corporation Apparatus for containing and cooling an integrated circuit device having a thermally insulative positioning member
US5427174A (en) 1993-04-30 1995-06-27 Heat Transfer Devices, Inc. Method and apparatus for a self contained heat exchanger
JPH06343967A (ja) * 1993-06-07 1994-12-20 Matsushita Electric Ind Co Ltd 水処理用殺菌方法及び殺菌装置
US5471850A (en) 1993-07-09 1995-12-05 Acurex Corporation Refrigeration system and method for very large scale integrated circuits
US5727618A (en) * 1993-08-23 1998-03-17 Sdl Inc Modular microchannel heat exchanger
US5704416A (en) 1993-09-10 1998-01-06 Aavid Laboratories, Inc. Two phase component cooler
JPH07108273A (ja) * 1993-10-13 1995-04-25 Matsushita Electric Ind Co Ltd 循環水路殺菌方法及び循環水路殺菌装置
US5514906A (en) 1993-11-10 1996-05-07 Fujitsu Limited Apparatus for cooling semiconductor chips in multichip modules
US5365749A (en) 1993-12-23 1994-11-22 Ncr Corporation Computer component cooling system with local evaporation of refrigerant
CH689836A5 (fr) 1994-01-14 1999-12-15 Westonbridge Int Ltd Micropompe.
US5461541A (en) 1994-02-22 1995-10-24 Dana Corporation Enclosure for an electronic circuit module
US5383340A (en) 1994-03-24 1995-01-24 Aavid Laboratories, Inc. Two-phase cooling system for laptop computers
US5565705A (en) 1994-05-02 1996-10-15 Motorola, Inc. Electronic module for removing heat from a semiconductor die
US5544412A (en) 1994-05-24 1996-08-13 Motorola, Inc. Method for coupling a power lead to a bond pad in an electronic module
JPH07335798A (ja) * 1994-06-14 1995-12-22 Fujitsu Ltd Ｌｓｉ冷却構造
US5560423A (en) 1994-07-28 1996-10-01 Aavid Laboratories, Inc. Flexible heat pipe for integrated circuit cooling apparatus
US5611214A (en) * 1994-07-29 1997-03-18 Battelle Memorial Institute Microcomponent sheet architecture
US5863671A (en) * 1994-10-12 1999-01-26 H Power Corporation Plastic platelet fuel cells employing integrated fluid management
US5641400A (en) 1994-10-19 1997-06-24 Hewlett-Packard Company Use of temperature control devices in miniaturized planar column devices and miniaturized total analysis systems
US5508234A (en) 1994-10-31 1996-04-16 International Business Machines Corporation Microcavity structures, fabrication processes, and applications thereof
US5585069A (en) 1994-11-10 1996-12-17 David Sarnoff Research Center, Inc. Partitioned microelectronic and fluidic device array for clinical diagnostics and chemical synthesis
US5513070A (en) 1994-12-16 1996-04-30 Intel Corporation Dissipation of heat through keyboard using a heat pipe
TW373308B (en) 1995-02-24 1999-11-01 Agere Systems Inc Thin packaging of multi-chip modules with enhanced thermal/power management
US5608262A (en) 1995-02-24 1997-03-04 Lucent Technologies Inc. Packaging multi-chip modules without wire-bond interconnection
US5621635A (en) 1995-03-03 1997-04-15 National Semiconductor Corporation Integrated circuit packaged power supply
US5598320A (en) 1995-03-06 1997-01-28 Ast Research, Inc. Rotable and slideble heat pipe apparatus for reducing heat build up in electronic devices
US6227809B1 (en) 1995-03-09 2001-05-08 University Of Washington Method for making micropumps
US5506067A (en) * 1995-04-04 1996-04-09 Aer Energy Resources, Inc. Rechargeable electrochemical cell and cell case therefor with vent for use in internal recombination of hydrogen and oxygen
DE19514548C1 (de) 1995-04-20 1996-10-02 Daimler Benz Ag Verfahren zur Herstellung einer Mikrokühleinrichtung
JPH08313541A (ja) * 1995-05-16 1996-11-29 Olympus Optical Co Ltd 走査型プローブ顕微鏡用カンチレバー及びその製造方法
US5575929A (en) 1995-06-05 1996-11-19 The Regents Of The University Of California Method for making circular tubular channels with two silicon wafers
JPH09196504A (ja) * 1995-07-24 1997-07-31 Mitsubishi Electric Corp 電解反応による水蒸発式冷却方法およびその冷却装置
US6057149A (en) 1995-09-15 2000-05-02 The University Of Michigan Microscale devices and reactions in microscale devices
US5696405A (en) 1995-10-13 1997-12-09 Lucent Technologies Inc. Microelectronic package with device cooling
US5826646A (en) * 1995-10-26 1998-10-27 Heatcraft Inc. Flat-tubed heat exchanger
US5579827A (en) 1995-11-13 1996-12-03 Us Micro Lab, Inc. Heat sink arrangement for central processing unit
US5705018A (en) 1995-12-13 1998-01-06 Hartley; Frank T. Micromachined peristaltic pump
US6010316A (en) 1996-01-16 2000-01-04 The Board Of Trustees Of The Leland Stanford Junior University Acoustic micropump
US5768906A (en) * 1996-01-16 1998-06-23 Borst, Inc. Electrochemical heat exchanger
US5703536A (en) 1996-04-08 1997-12-30 Harris Corporation Liquid cooling system for high power solid state AM transmitter
US5885470A (en) 1997-04-14 1999-03-23 Caliper Technologies Corporation Controlled fluid transport in microfabricated polymeric substrates
US5907095A (en) * 1996-06-17 1999-05-25 Industrial Technology Research Institute High-sensitivity strain probe
US5779868A (en) 1996-06-28 1998-07-14 Caliper Technologies Corporation Electropipettor and compensation means for electrophoretic bias
US5800690A (en) 1996-07-03 1998-09-01 Caliper Technologies Corporation Variable control of electroosmotic and/or electrophoretic forces within a fluid-containing structure via electrical forces
WO1998003997A1 (en) * 1996-07-22 1998-01-29 Northrop Grumman Corporation Closed loop liquid cooling within rf modules
US5763951A (en) 1996-07-22 1998-06-09 Northrop Grumman Corporation Non-mechanical magnetic pump for liquid cooling
US5692558A (en) 1996-07-22 1997-12-02 Northrop Grumman Corporation Microchannel cooling using aviation fuels for airborne electronics
US5801442A (en) * 1996-07-22 1998-09-01 Northrop Grumman Corporation Microchannel cooling of high power semiconductor devices
US5835345A (en) 1996-10-02 1998-11-10 Sdl, Inc. Cooler for removing heat from a heated region
DE19643717A1 (de) 1996-10-23 1998-04-30 Asea Brown Boveri Flüssigkeits-Kühlvorrichtung für ein Hochleistungshalbleitermodul
US5774779A (en) 1996-11-06 1998-06-30 Materials And Electrochemical Research (Mer) Corporation Multi-channel structures and processes for making such structures
US5870823A (en) 1996-11-27 1999-02-16 International Business Machines Corporation Method of forming a multilayer electronic packaging substrate with integral cooling channels
US5964092A (en) * 1996-12-13 1999-10-12 Nippon Sigmax, Co., Ltd. Electronic cooling apparatus
SE9700205D0 (sv) 1997-01-24 1997-01-24 Peter Lindberg Integrated microfluidic element
KR100351531B1 (ko) 1997-04-25 2002-09-11 캘리퍼 테크놀로지스 코포레이션 기하형상이 개선된 채널을 채용하는 미소 유체 장치
US6020209A (en) * 1997-04-28 2000-02-01 The United States Of America As Represented By The Secretary Of The Navy Microcapillary-based flow-through immunosensor and displacement immunoassay using the same
US5880524A (en) 1997-05-05 1999-03-09 Intel Corporation Heat pipe lid for electronic packages
JP2002512737A (ja) 1997-05-08 2002-04-23 ナノシステムズ，インコーポレイテッド マイクロチャンネルプレートを製造するためのシリコンエッチング方法
US6133631A (en) 1997-05-30 2000-10-17 Hewlett-Packard Company Semiconductor package lid with internal heat pipe
US6090251A (en) 1997-06-06 2000-07-18 Caliper Technologies, Inc. Microfabricated structures for facilitating fluid introduction into microfluidic devices
US5942093A (en) 1997-06-18 1999-08-24 Sandia Corporation Electro-osmotically driven liquid delivery method and apparatus
US6019882A (en) 1997-06-25 2000-02-01 Sandia Corporation Electrokinetic high pressure hydraulic system
US6013164A (en) 1997-06-25 2000-01-11 Sandia Corporation Electokinetic high pressure hydraulic system
US6277257B1 (en) 1997-06-25 2001-08-21 Sandia Corporation Electrokinetic high pressure hydraulic system
US6001231A (en) 1997-07-15 1999-12-14 Caliper Technologies Corp. Methods and systems for monitoring and controlling fluid flow rates in microfluidic systems
US6034872A (en) * 1997-07-16 2000-03-07 International Business Machines Corporation Cooling computer systems
US5869894A (en) 1997-07-18 1999-02-09 Lucent Technologies Inc. RF IC package
US6191945B1 (en) 1997-07-30 2001-02-20 Hewlett-Packard Company Cold plate arrangement for cooling processor and companion voltage regulator
US5901040A (en) 1997-07-30 1999-05-04 Hewlett-Packard Company Heat sink and Faraday Cage assembly for a semiconductor module and a power converter
US6907921B2 (en) * 1998-06-18 2005-06-21 3M Innovative Properties Company Microchanneled active fluid heat exchanger
US6025208A (en) 1997-08-27 2000-02-15 The Board Of Trustees Of The Leland Stanford Junior University Method of making electrical elements on the sidewalls of micromechanical structures
JP4048579B2 (ja) 1997-08-28 2008-02-20 住友電気工業株式会社 冷媒流路を含む熱消散体とその製造方法
US5940240A (en) 1997-08-29 1999-08-17 Western Digital Corporation Constant velocity servo linearity calibration method for MR head
JP3353053B2 (ja) * 1997-09-18 2002-12-03 ファナック株式会社 半導体用冷却部品の製造方法及び半導体レーザ用冷却部品の製造方法
US6012902A (en) 1997-09-25 2000-01-11 Caliper Technologies Corp. Micropump
US5842787A (en) 1997-10-09 1998-12-01 Caliper Technologies Corporation Microfluidic systems incorporating varied channel dimensions
US5836750A (en) 1997-10-09 1998-11-17 Honeywell Inc. Electrostatically actuated mesopump having a plurality of elementary cells
US6174675B1 (en) 1997-11-25 2001-01-16 Caliper Technologies Corp. Electrical current for controlling fluid parameters in microchannels
US6052287A (en) 1997-12-09 2000-04-18 Sandia Corporation Silicon ball grid array chip carrier
US6167910B1 (en) 1998-01-20 2001-01-02 Caliper Technologies Corp. Multi-layer microfluidic devices
US6100541A (en) 1998-02-24 2000-08-08 Caliper Technologies Corporation Microfluidic devices and systems incorporating integrated optical elements
US6223810B1 (en) * 1998-03-31 2001-05-01 International Business Machines Extended air cooling with heat loop for dense or compact configurations of electronic components
US6019165A (en) * 1998-05-18 2000-02-01 Batchelder; John Samuel Heat exchange apparatus
US5940270A (en) 1998-07-08 1999-08-17 Puckett; John Christopher Two-phase constant-pressure closed-loop water cooling system for a heat producing device
US6167721B1 (en) * 1998-07-14 2001-01-02 Borst, Inc. Electrochemical hydrogen pump and uses thereof for heat exchange applications
US6154370A (en) 1998-07-21 2000-11-28 Lucent Technologies Inc. Recessed flip-chip package
US5965813A (en) 1998-07-23 1999-10-12 Industry Technology Research Institute Integrated flow sensor
US6137693A (en) 1998-07-31 2000-10-24 Agilent Technologies Inc. High-frequency electronic package with arbitrarily-shaped interconnects and integral shielding
US6146103A (en) 1998-10-09 2000-11-14 The Regents Of The University Of California Micromachined magnetohydrodynamic actuators and sensors
US6572830B1 (en) * 1998-10-09 2003-06-03 Motorola, Inc. Integrated multilayered microfludic devices and methods for making the same
US6148635A (en) * 1998-10-19 2000-11-21 The Board Of Trustees Of The University Of Illinois Active compressor vapor compression cycle integrated heat transfer device
US6313992B1 (en) 1998-12-22 2001-11-06 James J. Hildebrandt Method and apparatus for increasing the power density of integrated circuit boards and their components
KR100470386B1 (ko) 1998-12-26 2005-05-19 주식회사 하이닉스반도체 멀티-칩패키지
US6201302B1 (en) 1998-12-31 2001-03-13 Sampo Semiconductor Corporation Semiconductor package having multi-dies
JP3782912B2 (ja) * 1999-01-29 2006-06-07 ヒューレット・パッカード・カンパニー プロセッサとコンパニオン電圧調整器用の冷却装置及び冷却方法
JP2000223645A (ja) 1999-02-01 2000-08-11 Mitsubishi Electric Corp 半導体装置
US6204562B1 (en) 1999-02-11 2001-03-20 United Microelectronics Corp. Wafer-level chip scale package
JP2000252414A (ja) 1999-03-04 2000-09-14 Mitsubishi Electric Corp 半導体装置
US6268660B1 (en) 1999-03-05 2001-07-31 International Business Machines Corporation Silicon packaging with through wafer interconnects
US6034425A (en) 1999-03-17 2000-03-07 Chipmos Technologies Inc. Flat multiple-chip module micro ball grid array packaging
US6215193B1 (en) 1999-04-21 2001-04-10 Advanced Semiconductor Engineering, Inc. Multichip modules and manufacturing method therefor
US6458259B1 (en) * 1999-05-11 2002-10-01 Caliper Technologies Corp. Prevention of surface adsorption in microchannels by application of electric current during pressure-induced flow
US6127726A (en) 1999-05-27 2000-10-03 Lsi Logic Corporation Cavity down plastic ball grid array multi-chip module
WO2000079592A1 (fr) 1999-06-17 2000-12-28 Hitachi, Ltd. Composant a semiconducteur et dispositif electronique
US6287440B1 (en) 1999-06-18 2001-09-11 Sandia Corporation Method for eliminating gas blocking in electrokinetic pumping systems
US6096656A (en) 1999-06-24 2000-08-01 Sandia Corporation Formation of microchannels from low-temperature plasma-deposited silicon oxynitride
US6234240B1 (en) 1999-07-01 2001-05-22 Kioan Cheon Fanless cooling system for computer
US6425440B1 (en) * 1999-07-06 2002-07-30 Borst, Inc. Reciprocal heat exchanger
US6457515B1 (en) * 1999-08-06 2002-10-01 The Ohio State University Two-layered micro channel heat sink, devices and systems incorporating same
JP3518434B2 (ja) 1999-08-11 2004-04-12 株式会社日立製作所 マルチチップモジュールの冷却装置
US6216343B1 (en) 1999-09-02 2001-04-17 The United States Of America As Represented By The Secretary Of The Air Force Method of making micro channel heat pipe having corrugated fin elements
US6297551B1 (en) 1999-09-22 2001-10-02 Agere Systems Guardian Corp. Integrated circuit packages with improved EMI characteristics
US6210986B1 (en) 1999-09-23 2001-04-03 Sandia Corporation Microfluidic channel fabrication method
US6875619B2 (en) * 1999-11-12 2005-04-05 Motorola, Inc. Microfluidic devices comprising biochannels
US6408884B1 (en) * 1999-12-15 2002-06-25 University Of Washington Magnetically actuated fluid handling devices for microfluidic applications
US6154363A (en) 1999-12-29 2000-11-28 Chang; Neng Chao Electronic device cooling arrangement
US6285550B1 (en) 2000-01-04 2001-09-04 Hewlett Packard Company Sub-cooled processor and companion voltage regulator
US6415860B1 (en) * 2000-02-09 2002-07-09 Board Of Supervisors Of Louisiana State University And Agricultural And Mechanical College Crossflow micro heat exchanger
DE60032113T2 (de) 2000-02-11 2007-06-28 Stmicroelectronics S.R.L., Agrate Brianza Integrierte Vorrichtung zur mikrofluidischen Temperaturregelung und dessen Herstellungsverfahren
US6301109B1 (en) * 2000-02-11 2001-10-09 International Business Machines Corporation Isothermal heat sink with cross-flow openings between channels
US6337794B1 (en) 2000-02-11 2002-01-08 International Business Machines Corporation Isothermal heat sink with tiered cooling channels
US6519955B2 (en) * 2000-04-04 2003-02-18 Thermal Form & Function Pumped liquid cooling system using a phase change refrigerant
US6290909B1 (en) 2000-04-13 2001-09-18 Sandia Corporation Sample injector for high pressure liquid chromatography
US6382309B1 (en) * 2000-05-16 2002-05-07 Swales Aerospace Loop heat pipe incorporating an evaporator having a wick that is liquid superheat tolerant and is resistant to back-conduction
FR2809281B1 (fr) 2000-05-22 2002-07-12 Alstom Dispositif electronique de puissance
DE60103415D1 (de) * 2000-09-29 2004-06-24 Nanostream Inc Mikrofluidische vorrichtung zur wärmeübertragung
US6324058B1 (en) 2000-10-25 2001-11-27 Chieh-Jen Hsiao Heat-dissipating apparatus for an integrated circuit device
US6437981B1 (en) * 2000-11-30 2002-08-20 Harris Corporation Thermally enhanced microcircuit package and method of forming same
US6553771B2 (en) * 2000-12-01 2003-04-29 Borst Inc. Electrochemical heat pump system
JP2002188876A (ja) * 2000-12-20 2002-07-05 Hitachi Ltd 液冷システムおよびこれを用いたパーソナルコンピュータ
US6939632B2 (en) * 2001-08-06 2005-09-06 Massachusetts Institute Of Technology Thermally efficient micromachined device
US6529377B1 (en) * 2001-09-05 2003-03-04 Microelectronic & Computer Technology Corporation Integrated cooling system
US20030175947A1 (en) * 2001-11-05 2003-09-18 Liu Robin Hui Enhanced mixing in microfluidic devices
US6631077B2 (en) * 2002-02-11 2003-10-07 Thermal Corp. Heat spreader with oscillating flow
US6994151B2 (en) * 2002-10-22 2006-02-07 Cooligy, Inc. Vapor escape microchannel heat exchanger
US6981849B2 (en) * 2002-12-18 2006-01-03 Intel Corporation Electro-osmotic pumps and micro-channels
US7723208B2 (en) * 2003-09-24 2010-05-25 Intel Corporation Integrated re-combiner for electroosmotic pumps using porous frits
US6992381B2 (en) * 2003-10-31 2006-01-31 Intel Corporation Using external radiators with electroosmotic pumps for cooling integrated circuits

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1201578A (en) * 1968-11-28 1970-08-12 Dornier System Gmbh Improvements in and relating to hydraulic actuating devices
US4862708A (en) * 1988-05-10 1989-09-05 Hughes Aircraft Company Osmotic thermal engine
CN2286429Y (zh) * 1997-03-04 1998-07-22 中国科学技术大学 多孔芯柱电渗泵
US6129826A (en) * 1997-04-04 2000-10-10 Caliper Technologies Corp. Methods and systems for enhanced fluid transport
US5901037A (en) * 1997-06-18 1999-05-04 Northrop Grumman Corporation Closed loop liquid cooling for semiconductor RF amplifier modules

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI860681B (zh) * 2022-08-18 2024-11-01 緯穎科技服務股份有限公司 浸潤式冷卻系統

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