CN1203469C - 采用压电元件的致动器和采用这种致动器的磁头定位机构 - Google Patents
采用压电元件的致动器和采用这种致动器的磁头定位机构 Download PDFInfo
- Publication number
- CN1203469C CN1203469C CNB981066569A CN98106656A CN1203469C CN 1203469 C CN1203469 C CN 1203469C CN B981066569 A CNB981066569 A CN B981066569A CN 98106656 A CN98106656 A CN 98106656A CN 1203469 C CN1203469 C CN 1203469C
- Authority
- CN
- China
- Prior art keywords
- actuator
- piezoelectric element
- magnetic
- head
- electrode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 230000007246 mechanism Effects 0.000 title description 3
- 238000010276 construction Methods 0.000 claims description 189
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 claims description 36
- 230000002093 peripheral effect Effects 0.000 claims description 20
- 238000007514 turning Methods 0.000 claims description 9
- 238000000926 separation method Methods 0.000 claims description 6
- 230000010287 polarization Effects 0.000 abstract description 2
- 238000006073 displacement reaction Methods 0.000 description 32
- 238000007634 remodeling Methods 0.000 description 23
- 238000002955 isolation Methods 0.000 description 10
- 230000005611 electricity Effects 0.000 description 8
- 239000007769 metal material Substances 0.000 description 8
- 230000035945 sensitivity Effects 0.000 description 8
- 238000009413 insulation Methods 0.000 description 6
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 6
- 230000009471 action Effects 0.000 description 5
- 230000000694 effects Effects 0.000 description 5
- 230000003321 amplification Effects 0.000 description 4
- 238000010586 diagram Methods 0.000 description 4
- 230000005684 electric field Effects 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- 238000003199 nucleic acid amplification method Methods 0.000 description 4
- 230000010355 oscillation Effects 0.000 description 4
- 238000003466 welding Methods 0.000 description 4
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 3
- 229910052804 chromium Inorganic materials 0.000 description 3
- 239000011651 chromium Substances 0.000 description 3
- 230000008878 coupling Effects 0.000 description 3
- 238000010168 coupling process Methods 0.000 description 3
- 238000005859 coupling reaction Methods 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 229910052697 platinum Inorganic materials 0.000 description 3
- 230000036316 preload Effects 0.000 description 3
- 238000004458 analytical method Methods 0.000 description 2
- 230000008859 change Effects 0.000 description 2
- 239000003795 chemical substances by application Substances 0.000 description 2
- 239000004020 conductor Substances 0.000 description 2
- 238000000354 decomposition reaction Methods 0.000 description 2
- 238000009434 installation Methods 0.000 description 2
- 239000011810 insulating material Substances 0.000 description 2
- 238000003754 machining Methods 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 238000010008 shearing Methods 0.000 description 2
- 239000004642 Polyimide Substances 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 239000007767 bonding agent Substances 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000006870 function Effects 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 230000006698 induction Effects 0.000 description 1
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 229920001721 polyimide Polymers 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 125000006850 spacer group Chemical group 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/48—Disposition or mounting of heads or head supports relative to record carriers ; arrangements of heads, e.g. for scanning the record carrier to increase the relative speed
- G11B5/4806—Disposition or mounting of heads or head supports relative to record carriers ; arrangements of heads, e.g. for scanning the record carrier to increase the relative speed specially adapted for disk drive assemblies, e.g. assembly prior to operation, hard or flexible disk drives
- G11B5/4826—Mounting, aligning or attachment of the transducer head relative to the arm assembly, e.g. slider holding members, gimbals, adhesive
- G11B5/483—Piezoelectric devices between head and arm, e.g. for fine adjustment
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B21/00—Head arrangements not specific to the method of recording or reproducing
- G11B21/02—Driving or moving of heads
- G11B21/10—Track finding or aligning by moving the head ; Provisions for maintaining alignment of the head relative to the track during transducing operation, i.e. track following
- G11B21/106—Track finding or aligning by moving the head ; Provisions for maintaining alignment of the head relative to the track during transducing operation, i.e. track following on disks
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B21/00—Head arrangements not specific to the method of recording or reproducing
- G11B21/16—Supporting the heads; Supporting the sockets for plug-in heads
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/48—Disposition or mounting of heads or head supports relative to record carriers ; arrangements of heads, e.g. for scanning the record carrier to increase the relative speed
- G11B5/54—Disposition or mounting of heads or head supports relative to record carriers ; arrangements of heads, e.g. for scanning the record carrier to increase the relative speed with provision for moving the head into or out of its operative position or across tracks
- G11B5/55—Track change, selection or acquisition by displacement of the head
- G11B5/5521—Track change, selection or acquisition by displacement of the head across disk tracks
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/48—Disposition or mounting of heads or head supports relative to record carriers ; arrangements of heads, e.g. for scanning the record carrier to increase the relative speed
- G11B5/54—Disposition or mounting of heads or head supports relative to record carriers ; arrangements of heads, e.g. for scanning the record carrier to increase the relative speed with provision for moving the head into or out of its operative position or across tracks
- G11B5/55—Track change, selection or acquisition by displacement of the head
- G11B5/5521—Track change, selection or acquisition by displacement of the head across disk tracks
- G11B5/5552—Track change, selection or acquisition by displacement of the head across disk tracks using fine positioning means for track acquisition separate from the coarse (e.g. track changing) positioning means
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
- H10N30/208—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using shear or torsion displacement, e.g. d15 type devices
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B2220/00—Record carriers by type
- G11B2220/20—Disc-shaped record carriers
- G11B2220/25—Disc-shaped record carriers characterised in that the disc is based on a specific recording technology
- G11B2220/2508—Magnetic discs
- G11B2220/2516—Hard disks
Landscapes
- Moving Of The Head To Find And Align With The Track (AREA)
- Supporting Of Heads In Record-Carrier Devices (AREA)
- Adjustment Of The Magnetic Head Position Track Following On Tapes (AREA)
Abstract
Description
Claims (24)
Applications Claiming Priority (6)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP100347/1997 | 1997-04-17 | ||
JP100347/97 | 1997-04-17 | ||
JP10034797A JP3556067B2 (ja) | 1997-04-17 | 1997-04-17 | 剪断型圧電素子を用いたアクチュエータ及びこのアクチュエータを使用したヘッド微小移動機構 |
JP18538597A JP3420915B2 (ja) | 1997-07-10 | 1997-07-10 | 圧電素子を用いたアクチュエータ及びこのアクチュエータを使用したヘッドの微小移動機構 |
JP185385/97 | 1997-07-10 | ||
JP185385/1997 | 1997-07-10 |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CNB2004100018779A Division CN100421154C (zh) | 1997-04-17 | 1998-04-17 | 采用压电元件的致动器和采用这种致动器的磁头定位机构 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN1198565A CN1198565A (zh) | 1998-11-11 |
CN1203469C true CN1203469C (zh) | 2005-05-25 |
Family
ID=26441392
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CNB981066569A Expired - Fee Related CN1203469C (zh) | 1997-04-17 | 1998-04-17 | 采用压电元件的致动器和采用这种致动器的磁头定位机构 |
CNB2004100018779A Expired - Fee Related CN100421154C (zh) | 1997-04-17 | 1998-04-17 | 采用压电元件的致动器和采用这种致动器的磁头定位机构 |
Family Applications After (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CNB2004100018779A Expired - Fee Related CN100421154C (zh) | 1997-04-17 | 1998-04-17 | 采用压电元件的致动器和采用这种致动器的磁头定位机构 |
Country Status (4)
Country | Link |
---|---|
US (2) | US6327120B1 (zh) |
KR (2) | KR100346806B1 (zh) |
CN (2) | CN1203469C (zh) |
DE (1) | DE19816909C2 (zh) |
Families Citing this family (99)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6552878B2 (en) * | 1998-08-05 | 2003-04-22 | Hitachi, Ltd. | Magnetic disk apparatus |
JP2000270574A (ja) * | 1999-03-16 | 2000-09-29 | Seiko Instruments Inc | 圧電アクチュエータおよびその製造方法 |
US6515834B1 (en) * | 1999-03-16 | 2003-02-04 | Seagate Technology Llc | Side-arm microactuator with piezoelectric adjuster |
JP2000348321A (ja) * | 1999-06-03 | 2000-12-15 | Nec Corp | 磁気ディスク装置,磁気ヘッド,磁気ヘッドの製造方法および磁気ディスク装置の製造方法 |
US6952330B1 (en) * | 1999-06-11 | 2005-10-04 | Seagate Technology Llc | Dynamic flying attitude control using augmented gimbal |
US6501625B1 (en) | 1999-06-29 | 2002-12-31 | Hutchinson Technology Incorporated | Disk drive suspension with multi-layered piezoelectric actuator controlled gram load |
JP4141685B2 (ja) * | 1999-07-21 | 2008-08-27 | 富士通株式会社 | ヘッドアクチュエータ |
DE19938954A1 (de) * | 1999-08-17 | 2001-03-08 | Pi Ceramic Gmbh Keramische Tec | Piezoelektrischer Antrieb, insbesondere zur Erzeugung von Rotations- oder Translationsbewegungen, die stetig oder schrittweise erfolgen können |
US6859345B2 (en) * | 1999-08-17 | 2005-02-22 | Seagate Technology Llc | Bending microactuator having a two-piece suspension design |
JP4418562B2 (ja) * | 1999-09-29 | 2010-02-17 | キヤノン株式会社 | 情報記録再生装置 |
US6680825B1 (en) * | 1999-10-26 | 2004-01-20 | Seagate Technology Llc | In-plane suspension-level bending microactuator for precise head positioning |
SG106598A1 (en) * | 2000-02-01 | 2004-10-29 | Matsushita Electric Ind Co Ltd | Head support mechanism and thin film piezoelectric actuator |
JP3611198B2 (ja) * | 2000-02-16 | 2005-01-19 | 松下電器産業株式会社 | アクチュエータとこれを用いた情報記録再生装置 |
US6760195B2 (en) * | 2000-04-17 | 2004-07-06 | Seagate Technology Llc | Intrinsically excitable actuator assembly |
JP3857020B2 (ja) * | 2000-05-12 | 2006-12-13 | 富士通株式会社 | 圧電アクチュエータおよび情報記憶装置 |
US6618220B2 (en) * | 2000-07-04 | 2003-09-09 | Matsushita Electric Industrial Co., Ltd. | Head actuator and hard disc drive including the same |
JP3663345B2 (ja) * | 2000-09-04 | 2005-06-22 | アルプス電気株式会社 | 磁気ヘッド装置 |
US7256968B1 (en) | 2000-09-11 | 2007-08-14 | Hutchinson Technology Incorporated | Microactuated dimple for head suspensions |
SG92742A1 (en) * | 2000-09-26 | 2002-11-19 | Inst Data Storage | Head suspension assembly for magnetic disk drives |
WO2002035695A1 (fr) * | 2000-10-20 | 2002-05-02 | Fujitsu Limited | Organe de commande piezo-electrique, procede d'entrainement et dispositif de stockage d'informations |
JP2002141576A (ja) * | 2000-11-02 | 2002-05-17 | Fujitsu Ltd | ピエゾ素子と電極との接合方法及び該接合方法を使用したピエゾマイクロアクチュエータ |
JP4003860B2 (ja) * | 2000-11-02 | 2007-11-07 | 富士通株式会社 | マイクロアクチュエータ及びその製造方法 |
CN1937037A (zh) * | 2000-11-28 | 2007-03-28 | 新科实业有限公司 | 带有压电微驱动机构的磁头弹簧片组件 |
JP2002279654A (ja) * | 2001-01-11 | 2002-09-27 | Sony Computer Entertainment Inc | 光ディスク装置、対物レンズ移動制御方法 |
US6624983B1 (en) * | 2001-02-28 | 2003-09-23 | Western Digital Technologies, Inc. | Mechanical dual stage actuator linkage for a hard disk drive |
JP2002329375A (ja) * | 2001-04-23 | 2002-11-15 | Shinka Jitsugyo Kk | ヘッド素子の微小位置決め用アクチュエータを備えたヘッドジンバルアセンブリ |
CN100337281C (zh) * | 2001-06-29 | 2007-09-12 | 松下电器产业株式会社 | 微量移动装置及其制造方法 |
JP2003061371A (ja) | 2001-08-10 | 2003-02-28 | Fujitsu Ltd | 圧電アクチュエータ |
JP2003059218A (ja) * | 2001-08-17 | 2003-02-28 | Fujitsu Ltd | 情報記録及び/又は再生装置及びポジショニング方法 |
SG103367A1 (en) * | 2001-11-02 | 2004-04-29 | Matsushita Electric Ind Co Ltd | Piezoelectric driving device |
JP3917409B2 (ja) * | 2001-11-16 | 2007-05-23 | 富士通株式会社 | ヘッドスライダ及びディスク装置 |
JP3756109B2 (ja) * | 2001-11-28 | 2006-03-15 | 富士通メディアデバイス株式会社 | 磁気ヘッド支持機構及び磁気ヘッド位置決め制御機構 |
US6807030B1 (en) * | 2001-12-18 | 2004-10-19 | Western Digital (Fremont), Inc. | Enclosed piezoelectric microactuators coupled between head and suspension |
US6961221B1 (en) * | 2001-12-18 | 2005-11-01 | Western Digital (Fremont), Inc. | Piezoelectric microactuators with substantially fixed axis of rotation and magnified stroke |
JP4146127B2 (ja) * | 2002-01-16 | 2008-09-03 | セイコーインスツル株式会社 | 圧電アクチュエータ及びそれを備えた電子機器 |
JP4117723B2 (ja) * | 2002-01-31 | 2008-07-16 | 富士通株式会社 | ディスクに記録再生を施すヘッドを微小移動させる機構及びそれを有するディスク装置 |
US6930860B1 (en) * | 2002-02-12 | 2005-08-16 | Maxtor Corporation | Micro-flexure suspension including piezoelectric elements for secondary actuation |
US7057858B2 (en) * | 2002-04-24 | 2006-06-06 | International Business Machines Corporation | Slide microactuator using C-shaped piezoelectric element |
US20040061969A1 (en) * | 2002-10-01 | 2004-04-01 | Kr Precision Public Company Limited | Method and structure for operating high density hard disk drive head using piezo electric drive |
WO2004034384A1 (en) * | 2002-10-09 | 2004-04-22 | Sae Magnetics (H.K.) Ltd. | An integrated method and device for a dual stage micro-actuator and suspension design for the hard disk driver |
JP4321034B2 (ja) * | 2002-10-16 | 2009-08-26 | パナソニック株式会社 | 圧電アクチュエータおよびディスク装置 |
US7289285B2 (en) * | 2002-10-24 | 2007-10-30 | Charles Frederick James Barnes | Information storage systems |
WO2004061988A1 (ja) * | 2002-12-27 | 2004-07-22 | Fujitsu Limited | 微小駆動ユニットおよび記録媒体駆動装置 |
BRPI0415321A (pt) * | 2003-10-02 | 2006-12-05 | Albany Int Corp | dispositivo de seleção para uma máquina do tipo jacquard |
JP2005158111A (ja) * | 2003-11-21 | 2005-06-16 | Fujitsu Ltd | 加速度センサ、及びこれを用いたディスク装置 |
US7277257B2 (en) * | 2003-12-05 | 2007-10-02 | Seagate Technology Llc | Transducer-level microactuator for a magnetic recording system |
JP4585223B2 (ja) * | 2004-04-22 | 2010-11-24 | 東芝ストレージデバイス株式会社 | 圧電アクチュエータ及び圧電アクチュエータを用いたヘッドサスペンション装置 |
US7382583B2 (en) * | 2004-08-26 | 2008-06-03 | Hitachi Global Storage Technologies Netherlands B.V. | Rotary piezoelectric microactuator and disk drive head-suspension assembly |
US7345851B2 (en) * | 2004-08-26 | 2008-03-18 | Hitachi Global Storage Technologies Netherlands B.V. | Disk drive with rotary piezoelectric microactuator |
US7312956B2 (en) * | 2004-09-08 | 2007-12-25 | Sae Magnetics (H.K.) Ltd | Micro-actuator, head gimbal assembly, and disk drive unit with the same |
US7280319B1 (en) | 2005-01-31 | 2007-10-09 | Western Digital Technologies, Inc. | Suspension assembly with piezoelectric microactuators electrically connected to a folded flex circuit segment |
JP2006309822A (ja) * | 2005-04-26 | 2006-11-09 | Hitachi Global Storage Technologies Netherlands Bv | 磁気ディスク装置及び記録方法 |
JP4793568B2 (ja) * | 2005-07-08 | 2011-10-12 | セイコーエプソン株式会社 | アクチュエータ装置、液体噴射ヘッド及び液体噴射装置 |
CN1967663A (zh) * | 2005-11-16 | 2007-05-23 | 新科实业有限公司 | 薄膜压电微驱动器及其磁头折片组合和磁盘驱动单元 |
JP2007158276A (ja) * | 2005-12-08 | 2007-06-21 | Ngk Insulators Ltd | 圧電/電歪デバイス及び圧電/電歪デバイスの駆動方法 |
JP4069160B2 (ja) * | 2006-01-23 | 2008-04-02 | 松下電器産業株式会社 | 超音波アクチュエータ |
US7459835B1 (en) | 2006-03-06 | 2008-12-02 | Magnecomp Corporation | Loading-protected bending microactuator in additive suspensions |
JP2008004764A (ja) * | 2006-06-22 | 2008-01-10 | Fujitsu Ltd | 圧電アクチュエータおよびその製造方法、磁気ディスク装置 |
US7474495B2 (en) * | 2007-02-20 | 2009-01-06 | Quantum Corporation | Piezoelectric micro-actuator for magnetic tape read/write head |
US8125741B2 (en) * | 2007-07-20 | 2012-02-28 | Magnecomp Corporation | Rotational, shear mode, piezoelectric motor integrated into a collocated, rotational, shear mode, piezoelectric micro-actuated suspension, head or head/gimbal assembly for improved tracking in disk drives and disk drive equipment |
CN101388218B (zh) * | 2007-09-12 | 2012-09-19 | 新科实业有限公司 | 磁头折片组合、挠性印制线缆、磁头驱动臂组合以及磁盘驱动单元 |
JP2009076132A (ja) * | 2007-09-19 | 2009-04-09 | Hitachi Global Storage Technologies Netherlands Bv | マイクロアクチュエータ、ヘッドジンバルアセンブリ及び磁気ディスク装置 |
JP4840788B2 (ja) * | 2007-10-05 | 2011-12-21 | 東芝ストレージデバイス株式会社 | マイクロアクチュエータ装置並びにヘッドサスペンションアセンブリおよび記憶媒体駆動装置 |
US7940490B2 (en) * | 2008-04-26 | 2011-05-10 | Magnecomp Corporation | Apparatus and method for improving bandwidth of a fine positioning mechanism data storage manufacturing and test equipment |
JP5100589B2 (ja) * | 2008-09-19 | 2012-12-19 | 日本発條株式会社 | ヘッドサスペンション |
CN101714359B (zh) | 2008-10-03 | 2012-05-02 | 日本发条株式会社 | 头悬架及制造头悬架的方法 |
US8149545B1 (en) | 2008-10-23 | 2012-04-03 | Magnecomp Corporation | Low profile load beam with etched cavity for PZT microactuator |
JP4907675B2 (ja) * | 2009-01-15 | 2012-04-04 | 日本発條株式会社 | 圧電素子の配線接続部構造、圧電アクチュエータ、及びヘッドサスペンション |
JP4993625B2 (ja) * | 2009-02-04 | 2012-08-08 | 日本発條株式会社 | 圧電素子の電極構造、圧電素子の電極形成方法、圧電アクチュエータ及びヘッドサスペンション |
JPWO2010109825A1 (ja) * | 2009-03-24 | 2012-09-27 | 株式会社ニコン | アクチュエータ、駆動装置、レンズユニット、及び撮像装置 |
JP5291535B2 (ja) * | 2009-05-25 | 2013-09-18 | 日本発條株式会社 | ヘッドサスペンション |
JP5500872B2 (ja) * | 2009-05-29 | 2014-05-21 | 日本発條株式会社 | 電極付き圧電素子及びヘッドサスペンション |
US8059355B2 (en) * | 2009-06-08 | 2011-11-15 | Quantum Corporation | Dual stage head actuator assembly for tape drive |
US8228641B2 (en) * | 2009-11-03 | 2012-07-24 | Seagate Technology Llc | Controlling mechanical distortion in a member |
US8717713B1 (en) * | 2010-10-25 | 2014-05-06 | Hutchinson Technology Incorporated | Differentially driven piezoelectric transducers for dual stage actuated disk drive head suspension |
JP5881288B2 (ja) * | 2010-11-24 | 2016-03-09 | 日本発條株式会社 | 圧電素子組付判別方法及びヘッド・サスペンション |
US8947831B1 (en) | 2011-11-30 | 2015-02-03 | Magnecomp Corporation | GSA suspension with microactuators extending to gimbal through flexible connectors |
US8879210B1 (en) | 2011-11-30 | 2014-11-04 | Magnecomp Corporation | DSA suspension with microactuators extending to gimbal through flexible connectors |
US9190086B1 (en) | 2011-11-30 | 2015-11-17 | Magnecomp Corporation | GSA suspension having slider clearance for shock performance |
US10607642B2 (en) | 2013-03-18 | 2020-03-31 | Magnecomp Corporation | Multi-layer PZT microactuator with active PZT constraining layers for a DSA suspension |
US11205449B2 (en) | 2013-03-18 | 2021-12-21 | Magnecomp Corporation | Multi-layer PZT microacuator with active PZT constraining layers for a DSA suspension |
US9330698B1 (en) | 2013-03-18 | 2016-05-03 | Magnecomp Corporation | DSA suspension having multi-layer PZT microactuator with active PZT constraining layers |
US9741376B1 (en) | 2013-03-18 | 2017-08-22 | Magnecomp Corporation | Multi-layer PZT microactuator having a poled but inactive PZT constraining layer |
US9070394B1 (en) | 2013-03-18 | 2015-06-30 | Magnecomp Corporation | Suspension microactuator with wrap-around electrode on inactive constraining layer |
US9117468B1 (en) | 2013-03-18 | 2015-08-25 | Magnecomp Corporation | Hard drive suspension microactuator with restraining layer for control of bending |
US9330694B1 (en) | 2013-03-18 | 2016-05-03 | Magnecomp Corporation | HDD microactuator having reverse poling and active restraining layer |
US8810971B1 (en) * | 2013-04-08 | 2014-08-19 | HGST Netherlands B.V. | Single sheet differential-poled piezoelectric microactuator for a hard disk drive |
WO2014172617A1 (en) * | 2013-04-18 | 2014-10-23 | Cornell University | Monolithic pzt actuator, stage, and method for making |
JP6491837B2 (ja) | 2013-09-03 | 2019-03-27 | ハッチンソン テクノロジー インコーポレイテッドHutchinson Technology Incorporated | 二段作動式ディスク駆動装置ヘッドサスペンションのモータ極性試験 |
KR102247501B1 (ko) * | 2014-05-09 | 2021-05-03 | 삼성전자주식회사 | 압전 구동 장치 및 이를 이용한 움직임 측정 방법 |
CN104849851B (zh) * | 2015-05-22 | 2017-11-03 | 哈尔滨工业大学 | 一种基于剪切式压电驱动的微型二维移动工作台 |
US10128431B1 (en) | 2015-06-20 | 2018-11-13 | Magnecomp Corporation | Method of manufacturing a multi-layer PZT microactuator using wafer-level processing |
US9875759B1 (en) * | 2015-09-10 | 2018-01-23 | Magnecomp Corporation | Dual stage actuated suspension having shear-mode PZT actuators for rotating gimbal tongue |
US10134431B2 (en) * | 2016-04-27 | 2018-11-20 | Magnecomp Corporation | Multi-layer shear mode PZT microactuator for a disk drive suspension, and method of manufacturing same |
USD857020S1 (en) * | 2016-05-25 | 2019-08-20 | Tdk Corporation | Piezoelectric element |
JP1565481S (zh) * | 2016-05-25 | 2016-12-19 | ||
CN106199949B (zh) * | 2016-08-31 | 2018-12-28 | 北京越音速科技有限公司 | 一种压电致动器及变形镜 |
US11152024B1 (en) * | 2020-03-30 | 2021-10-19 | Western Digital Technologies, Inc. | Piezoelectric-based microactuator arrangement for mitigating out-of-plane force and phase variation of flexure vibration |
US10964345B1 (en) | 2020-05-22 | 2021-03-30 | Seagate Technology Llc | Parallel servo control in a data storage device |
Family Cites Families (42)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5524485A (en) | 1978-08-10 | 1980-02-21 | Toray Ind Inc | Film-type piezo-electric device and pressure detector |
US4188645A (en) * | 1978-11-02 | 1980-02-12 | Burroughs Corporation | Piezoelectric servo for disk drive |
JPS60111315A (ja) * | 1983-11-18 | 1985-06-17 | Olympus Optical Co Ltd | 磁気ヘツド装置 |
JPH06101595B2 (ja) * | 1984-09-21 | 1994-12-12 | 関西日本電気株式会社 | 変位拡大機構 |
JPS62281126A (ja) | 1986-05-30 | 1987-12-07 | Nec Home Electronics Ltd | 多層光デイスク装置 |
US4879568A (en) * | 1987-01-10 | 1989-11-07 | Am International, Inc. | Droplet deposition apparatus |
US4868447A (en) * | 1987-09-11 | 1989-09-19 | Cornell Research Foundation, Inc. | Piezoelectric polymer laminates for torsional and bending modal control |
JP2690907B2 (ja) * | 1987-09-25 | 1997-12-17 | 株式会社日立製作所 | 複合型圧電モータ |
US4905107A (en) * | 1988-02-05 | 1990-02-27 | Klein Enrique J | Torsion transducer for magnetic storage disk drives |
JP2631297B2 (ja) | 1988-02-23 | 1997-07-16 | セイコー電子工業株式会社 | 圧電アクチュエーター |
US4825227A (en) * | 1988-02-29 | 1989-04-25 | Spectra, Inc. | Shear mode transducer for ink jet systems |
US4928030A (en) | 1988-09-30 | 1990-05-22 | Rockwell International Corporation | Piezoelectric actuator |
JP3064336B2 (ja) * | 1989-06-28 | 2000-07-12 | 株式会社日立製作所 | 情報取扱い装置およびデイスク装置 |
JPH0412677A (ja) | 1990-04-27 | 1992-01-17 | Olympus Optical Co Ltd | 積層型アクチュエータの製造方法 |
JP2712599B2 (ja) | 1989-08-05 | 1998-02-16 | 富士通株式会社 | ヘッド位置決め機構 |
JPH0397174A (ja) * | 1989-09-11 | 1991-04-23 | Fujitsu Ltd | 磁気ヘッド組立体 |
JPH04221475A (ja) * | 1990-12-20 | 1992-08-11 | Fujitsu Ltd | ヘッド位置決め機構 |
US5764444A (en) * | 1991-07-23 | 1998-06-09 | Fujitsu Limited | Mechanism for minute movement of a head |
WO1993002451A1 (en) * | 1991-07-23 | 1993-02-04 | Fujitsu Limited | Mechanism for finely moving head |
US5159225A (en) * | 1991-10-18 | 1992-10-27 | Aura Systems, Inc. | Piezoelectric actuator |
US5268611A (en) * | 1992-03-16 | 1993-12-07 | Rockwell International Corporation | Anisotropic transducer |
JP2905643B2 (ja) * | 1992-05-29 | 1999-06-14 | 住友重機械工業株式会社 | 圧電リニアアクチュエータ |
JPH05346304A (ja) | 1992-06-15 | 1993-12-27 | Jeol Ltd | 走査トンネル顕微鏡の探針移動装置 |
JPH06259905A (ja) | 1993-03-03 | 1994-09-16 | Toshiba Corp | 記録再生装置用アクチュエータ及びこれを用いた記録再生装置 |
EP0591885B1 (en) * | 1992-10-06 | 1998-01-28 | Matsushita Electric Industrial Co., Ltd. | Piezoelectric head actuator |
JPH0741207B2 (ja) * | 1993-02-18 | 1995-05-10 | インターナショナル・ビジネス・マシーンズ・コーポレイション | マイクロアクチュエータ |
KR970009117B1 (en) * | 1993-05-31 | 1997-06-05 | Samsung Electronics Co Ltd | Ink-jet print head |
JP3114434B2 (ja) * | 1993-06-30 | 2000-12-04 | ブラザー工業株式会社 | 圧電アクチュエータの駆動方法 |
US5682076A (en) * | 1993-08-03 | 1997-10-28 | Nanomotion Ltd. | Ceramic disc-drive actuator |
DE4332966A1 (de) | 1993-09-28 | 1995-03-30 | Philips Patentverwaltung | Torsionsaktuator und ein Verfahren zu dessen Herstellung |
JP3373032B2 (ja) | 1994-03-15 | 2003-02-04 | 富士通株式会社 | 加速度センサ |
JPH07272235A (ja) | 1994-03-25 | 1995-10-20 | Sony Corp | 電気−機械変換装置 |
JP3342180B2 (ja) | 1994-06-07 | 2002-11-05 | キヤノン株式会社 | すべり歪み素子および振動装置 |
US5521778A (en) * | 1994-08-30 | 1996-05-28 | International Business Machines Corporation | Disk drive with primary and secondary actuator drives |
DE19510249C1 (de) * | 1995-03-21 | 1996-05-23 | Siemens Ag | Magnetostriktiver Aktor |
US5898541A (en) * | 1996-12-04 | 1999-04-27 | Seagate Technology, Inc. | Leading surface slider microactuator |
JP2001503552A (ja) * | 1996-12-16 | 2001-03-13 | シーゲイト テクノロジー エルエルシー | バイモルフ圧電マイクロアクチュエータのヘッドとフレクシャとの組立体 |
JP2001517349A (ja) * | 1997-03-31 | 2001-10-02 | シーゲイト テクノロジー エルエルシー | 可撓性マイクロアクチュエータ |
JP3420915B2 (ja) * | 1997-07-10 | 2003-06-30 | 富士通株式会社 | 圧電素子を用いたアクチュエータ及びこのアクチュエータを使用したヘッドの微小移動機構 |
US5898544A (en) * | 1997-06-13 | 1999-04-27 | Hutchinson Technology Incorporated | Base plate-mounted microactuator for a suspension |
US6166890A (en) * | 1998-07-24 | 2000-12-26 | Seagate Technology Llc | In plane, push-pull parallel force microactuator |
US6233124B1 (en) * | 1998-11-18 | 2001-05-15 | Seagate Technology Llc | Piezoelectric microactuator suspension assembly with improved stroke length |
-
1998
- 1998-04-08 US US09/057,174 patent/US6327120B1/en not_active Expired - Fee Related
- 1998-04-16 DE DE19816909A patent/DE19816909C2/de not_active Expired - Fee Related
- 1998-04-17 CN CNB981066569A patent/CN1203469C/zh not_active Expired - Fee Related
- 1998-04-17 CN CNB2004100018779A patent/CN100421154C/zh not_active Expired - Fee Related
- 1998-04-17 KR KR1019980013833A patent/KR100346806B1/ko not_active IP Right Cessation
-
2001
- 2001-06-01 US US09/872,037 patent/US6538854B2/en not_active Expired - Fee Related
- 2001-08-16 KR KR1020010049369A patent/KR100349731B1/ko not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
DE19816909C2 (de) | 2003-04-17 |
CN1523577A (zh) | 2004-08-25 |
US6538854B2 (en) | 2003-03-25 |
US6327120B1 (en) | 2001-12-04 |
CN100421154C (zh) | 2008-09-24 |
CN1198565A (zh) | 1998-11-11 |
KR19980081517A (ko) | 1998-11-25 |
KR100349731B1 (ko) | 2002-08-24 |
DE19816909A1 (de) | 1998-11-12 |
KR100346806B1 (ko) | 2002-11-08 |
US20010038515A1 (en) | 2001-11-08 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
CN1203469C (zh) | 采用压电元件的致动器和采用这种致动器的磁头定位机构 | |
CN1279538C (zh) | 磁头的引线导体部件、万向架组件及其测试和制造方法 | |
CN1145957C (zh) | 读/写头、读/写头定位机构和读/写系统 | |
CN1221965C (zh) | 盘片驱动装置 | |
CN1286407A (zh) | 用于光学拾取的物镜和光学拾取装置 | |
CN1163781C (zh) | 有源矩阵型液晶显示器件的驱动电路 | |
CN1508793A (zh) | 头支承装置及其驱动方法和采用它的盘装置 | |
CN1280791C (zh) | 光学记录介质读出设备 | |
CN101032164A (zh) | 运动画面数据编辑设备和运动画面数据编辑方法 | |
CN1271633C (zh) | 磁头定位器和信息记录/再现设备 | |
CN1485828A (zh) | 光拾取头装置、光信息装置及光信息再现方法 | |
CN1146866C (zh) | 浮起式磁头的冠顶形成方法及冠顶形成装置 | |
CN1639955A (zh) | 转动/移动转换致动器 | |
CN1655071A (zh) | 显影设备、图像形成装置和系统及制造显影设备的方法 | |
CN1790528A (zh) | 重放装置及其方法、记录介质和程序 | |
CN1822113A (zh) | 磁记录介质,磁记录/再现设备,以及制作磁记录介质的压模 | |
CN1914536A (zh) | 透镜筒和配备透镜筒的成像装置以及透镜筒的装配方法 | |
CN1841568A (zh) | 倾斜装置和电子设备 | |
CN1511319A (zh) | 光学记录和 /或再现装置、光学再现装置、光学记录和 /或再现介质、光学记录和 /或再现方法、光学记录方法、 | |
CN1993748A (zh) | 液晶透镜元件及光学拾取头装置 | |
CN1232891C (zh) | 表用的二极式步进电机 | |
CN1886749A (zh) | 记录装置 | |
CN1934641A (zh) | 信息处理设备和方法、程序记录介质、和程序 | |
CN1132912A (zh) | 可更换式存储装置及记录媒体和记录再生头驱动调节器 | |
CN1492435A (zh) | 盘驱动器和盘驱动器控制方法 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
C06 | Publication | ||
PB01 | Publication | ||
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
ASS | Succession or assignment of patent right |
Owner name: TOSHIBA STORAGE DEVICE CO., LTD. Free format text: FORMER OWNER: FUJITSU LIMITED Effective date: 20091204 |
|
C41 | Transfer of patent application or patent right or utility model | ||
TR01 | Transfer of patent right |
Effective date of registration: 20091204 Address after: Tokyo, Japan Patentee after: Fujitsu Ltd. Patentee after: Fuji Denki Kagaku K. K. Address before: Kanagawa, Japan Patentee before: Fujitsu Ltd. Patentee before: Fuji Denki Kagaku K. K. |
|
C17 | Cessation of patent right | ||
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20050525 Termination date: 20100417 |