CN103344831A - Phase detector based on micromechanical direct thermoelectric power sensors and preparation method thereof - Google Patents
Phase detector based on micromechanical direct thermoelectric power sensors and preparation method thereof Download PDFInfo
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- CN103344831A CN103344831A CN2013102442261A CN201310244226A CN103344831A CN 103344831 A CN103344831 A CN 103344831A CN 2013102442261 A CN2013102442261 A CN 2013102442261A CN 201310244226 A CN201310244226 A CN 201310244226A CN 103344831 A CN103344831 A CN 103344831A
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Abstract
The invention discloses a phase detector based on micromechanical direct thermoelectric power sensors and a preparation method of the phase detector based on the micromechanical direct thermoelectric power sensors. The phase detector comprises a substrate, a ground wire arranged on the substrate, an MEMS power combiner, a coplanar waveguide transmission line, two sets of MEMS fixed beam structures, the MEMS direct thermoelectric microwave power sensors, an external voltage controlled oscillator and a frequency meter. The MEMS power combiner is used for conducting vector synthesis on input two paths of signals, then the MEMS direct thermoelectric microwave power sensors detect the power of the synthesized microwave signals, and direct current voltage is output at last. According to the phase detector based on the micromechanical direct thermoelectric power sensors, the structure is novel, composition modules of a common phase detector are simplified, and two modules of a phase discriminator and a low pass filter are directly simplified to a module composed of the MEMS power combiner and the MEMS direct thermoelectric microwave power sensors, so that the integration level of the phase detector is improved. Besides, the phase detector can be compatible with a GaAs monolithic microwave integrated circuit.
Description
Technical field
The present invention relates to a kind of phase detectors based on the direct thermoelectric (al) type power sensor of micromechanics and preparation method thereof, belong to microelectron-mechanical (MEMS) technology.
Background technology
In research of microwave technology, be an important parameter of microwave signal as the microwave phase of one of three big parameters (amplitude, frequency and phase place) of characterization signal.Microwave signal phase detector has a wide range of applications in systems such as phased-array radar, antenna, phaselocked loop, phase measuring equipment.The principle of microwave signal phase detector is that phase differential is converted into voltage, electric current and the frequency signal of being convenient to measure, and reflects phase differential by them.Realize that at present the method that microwave phase detects mainly contains diode structure, multiplier architecture and vector calculus method, two kinds of methods of vector calculus method and front compare have low-power consumption, bandwidth, advantages of simple structure and simple.MEMS has that volume is little, low in energy consumption, low cost and other advantages, along with the development of MEMS technology and nowadays for the decline further investigation of wave power sensor of the direct thermoelectricity of MEMS, make and utilize the MEMS technology to realize becoming possibility based on the phase detectors of the direct thermoelectric (al) type power sensor of micromechanics.
Summary of the invention
Goal of the invention: in order to overcome the deficiencies in the prior art, the invention provides a kind of phase detectors based on the direct thermoelectric (al) type power sensor of micromechanics and preparation method thereof, directly with phase detector and two module reductions of low-pass filter be one and close device and the direct thermoelectricity of the MEMS module that the wave power sensor constitutes that declines by the MEMS merit, to improve the integrated level of phase detectors.
Technical scheme: for achieving the above object, the technical solution used in the present invention is:
Phase detectors based on the direct thermoelectric (al) type power sensor of micromechanics, comprise substrate, be arranged on ground wire, MEMS merit on the substrate and close device, co-planar waveguide (CPW) transmission line, two groups of MEMS fixed beam structures and the direct thermoelectricity of MEMS decline wave power sensor and external voltage controlled oscillator and frequency meter, at axis of symmetry of substrate definition;
Described ground wire forms along axis of symmetry symmetrical structure, comprises that symmetry is positioned at axis of symmetry both sides and not contacted two sections side ground wires and the symmetrical one section common ground that is positioned on the axis of symmetry;
Described MEMS merit is closed device and is formed along axis of symmetry symmetrical structure, comprise that symmetry is positioned at two sections asymmetric coplanar striplines (ACPS) and the isolation resistance of axis of symmetry both sides, the input end of described two sections asymmetric coplanar striplines is connected by isolation resistance isolation, output terminal;
Described coplanar waveguide transmission line forms along axis of symmetry symmetrical structure, comprises the two sections input coplanar waveguide transmission lines and the symmetrical one section output coplanar waveguide transmission line that is positioned on the axis of symmetry that are positioned at axis of symmetry both sides and are not connected; Described two sections input coplanar waveguide transmission lines are connected with the input end of two sections asymmetric coplanar striplines respectively, respectively as first signal input port and secondary signal input port; After being connected, the output terminal of described two sections asymmetric coplanar striplines inserts the output coplanar waveguide transmission line, as signal output port;
Described two groups of MEMS fixed beam structures are separately positioned on both sides and the relative axis of symmetry symmetry of the axis of symmetry, described MEMS fixed beam structure comprises MEMS clamped beam and anchor district, and top, two ends that described MEMS clamped beam is connected across the input coplanar waveguide transmission line that is positioned at the same side are fixed on the side ground wire and common ground that is positioned at the same side by the anchor district respectively; Described MEMS clamped beam constitutes building-out capacitor with the input coplanar waveguide transmission line that is positioned at its below;
The direct thermoelectricity of the described MEMS wave power sensor that declines comprises two groups of tantalum nitride resistance, semiconductor thermocouple arm and direct current IOB, described signal output port is divided into two-way and is connected with two sections side ground wires with the semiconductor thermocouple arm by one group of tantalum nitride resistance respectively, wherein one section side ground wire inserts voltage controlled oscillator by a direct current IOB, and another section side ground wire is by another direct current IOB ground connection; Described two groups of tantalum nitride resistance and semiconductor thermocouple arm form cascaded structure;
The output signal of described voltage controlled oscillator inserts frequency meter.
Preferably, the part surface that is positioned at MEMS clamped beam below on the described input coplanar waveguide transmission line is coated with the silicon nitride medium layer.
Preferably, between the double layer of metal of the connecting line between one of them direct current IOB and the side ground wire silicon nitride medium layer is arranged.
Preferably, the direct thermoelectricity of the described MEMS power that the wave power sensor closes the synthetic microwave signal of device output based on the Seebeck principle to the MEMS merit that declines detects, and on the direct current IOB with the form output measurement result of DC voltage.
Described substrate is gallium arsenide substrate.
In the above-mentioned phase detectors, the CPW transmission line is used for realizing the transmission of microwave signal.The MEMS clamped beam constitutes building-out capacitor with the input coplanar waveguide transmission line that is positioned at its below, and the design of this building-out capacitor can be dwindled the size that the MEMS merit is closed device when realizing the circuit impedance coupling, make that the integrated level of whole phase detectors is higher.The MEMS merit close device be used for will input two paths of signals (first signal and secondary signal) to carry out vector synthetic, detect the power of the microwave signal after synthetic, last output dc voltage by the direct thermoelectricity of the MEMS wave power sensor that declines then; The DC voltage of output directly is linked into the input end of voltage controlled oscillator, produces output signal by voltage controlled oscillator; The output signal that voltage controlled oscillator produces inserts frequency meter, can extrapolate phase differential between first signal and the secondary signal by measured frequency then, thereby realizes the phase detectors based on the direct thermoelectric (al) type power sensor of micromechanics.
A kind of preparation method of the phase detectors based on the direct thermoelectric (al) type power sensor of micromechanics comprises the steps:
(1) prepares gallium arsenide substrate: select the semi-insulating GaAs substrate of extension for use, wherein extension N
+The doping content of gallium arsenide is 10
18Cm
-3, its square resistance is 100～130 Ω/;
(2) photoetching and isolate extension N
+Gallium arsenide, the figure of the semiconductor thermocouple arm of formation thermoelectric pile;
(3) anti-carve N
+Gallium arsenide, forming doping content is 10
17Cm
-3The semiconductor thermocouple arm of thermoelectric pile;
(4) photoetching: removal will keep the photoresist in tantalum nitride place;
(5) sputter tantalum nitride, thickness are 1 μ m;
(6) peel off;
(7) photoetching: removal will keep the photoresist in the place of ground floor gold;
(8) evaporation ground floor gold, thickness is 0.3 μ m;
(9) peel off, form coplanar waveguide transmission line and ground wire, the anchor district of MEMS clamped beam;
(10) anti-carve tantalum nitride, form tantalum nitride resistance and isolation resistance, its square resistance is 25 Ω/;
(11) deposit silicon nitride: with the growth of plasma-enhanced chemical vapour deposition technology
Thick silicon nitride medium layer;
(12) photoetching and etch silicon nitride dielectric layer: be retained in the silicon nitride medium layer on the coplanar waveguide transmission line of MEMS clamped beam below, and the silicon nitride medium layer of isolating MEMS direct thermoelectric (al) type power sensor output terminal and ground wire junction;
(13) deposit and photoetching polyimide sacrificial layer: apply the thick polyimide sacrificial layer of 1.6 μ m in gallium arsenide substrate, require to fill up pit, by the thickness decision MEMS clamped beam of polyimide sacrificial layer and the distance between its below silicon nitride medium layer; The photoetching polyimide sacrificial layer only keeps the sacrifice layer of MEMS clamped beam below;
(14) evaporation titanium/gold/titanium, thickness is
Evaporation is used for the down payment of plating;
(15) photoetching: removal will be electroplated local photoresist;
(16) electrogilding, thickness are 2 μ m;
(17) remove photoresist: removing does not need to electroplate local photoresist;
(18) anti-carve titanium/gold/titanium, the corrosion down payment forms coplanar waveguide transmission line, ground wire, MEMS clamped beam, direct current IOB;
(19) with this gallium arsenide substrate thinning back side to 100 μ m;
(20) discharge polyimide sacrificial layer: developer solution soaks, and removes the polyimide sacrificial layer under the MEMS clamped beam, and deionized water soaks slightly, and the absolute ethyl alcohol dehydration is volatilized under the normal temperature, dries;
(21) external voltage controlled oscillator and frequency meter.
Beneficial effect: the phase detectors based on the direct thermoelectric (al) type power sensor of micromechanics provided by the invention not only have novel structure, and simplified the composition module of general phase detectors, it directly with phase detector and two module reductions of low-pass filter is one and closes device and the direct thermoelectricity of the MEMS module that the wave power sensor constitutes that declines by the MEMS merit, improved the integrated level of phase detectors, and can with GaAs monolithic integrated microwave circuit compatibility.
Description of drawings
Fig. 1 is plan structure synoptic diagram of the present invention;
Fig. 2 is that the A-A' of Fig. 1 is to sectional view;
Fig. 3 is that the B-B' of Fig. 1 is to sectional view.
Embodiment
Below in conjunction with accompanying drawing the present invention is done further explanation.
As Fig. 1, Fig. 2, Figure 3 shows that the phase detectors based on the direct thermoelectric (al) type power sensor of micromechanics, comprise substrate 1, be arranged on ground wire 2, MEMS merit on the substrate 1 and close device, coplanar waveguide transmission line 3, two groups of MEMS fixed beam structures and the direct thermoelectricity of MEMS decline wave power sensor and external voltage controlled oscillator and frequency meter, at axis of symmetry of substrate 1 definition; Specified with regard to each ingredient below.
Described ground wire 2 forms along axis of symmetry symmetrical structure, comprises that symmetry is positioned at axis of symmetry both sides and not contacted two sections side ground wires and the symmetrical one section common ground that is positioned on the axis of symmetry.
Described MEMS merit close device be used for will input two paths of signals (reference signal and feedback signal) to carry out vector synthetic, it forms along axis of symmetry symmetrical structure, comprise that symmetry is positioned at two sections asymmetric coplanar striplines 4 and the isolation resistance 5 of axis of symmetry both sides, the input end of described two sections asymmetric coplanar striplines 4 by isolation resistance 5 isolate, output terminal is connected.
Described coplanar waveguide transmission line 3 is used for realizing the transmission of microwave signal, it forms along axis of symmetry symmetrical structure, comprises the two sections input coplanar waveguide transmission lines and the symmetrical one section output coplanar waveguide transmission line that is positioned on the axis of symmetry that are positioned at axis of symmetry both sides and are not connected; Described two sections input coplanar waveguide transmission lines are connected with the input end of two sections asymmetric coplanar striplines 4 respectively, respectively as first signal input port and secondary signal input port; After being connected, the output terminal of described two sections asymmetric coplanar striplines 4 inserts the output coplanar waveguide transmission line, as signal output port.
Described two groups of MEMS fixed beam structures are separately positioned on both sides and the relative axis of symmetry symmetry of the axis of symmetry, described MEMS fixed beam structure comprises MEMS clamped beam 10 and anchor district 11, and top, two ends that described MEMS clamped beam 10 is connected across the input coplanar waveguide transmission line that is positioned at the same side are fixed on the side ground wire and common ground that is positioned at the same side by anchor district 11 respectively; The part surface that is positioned at MEMS clamped beam 10 belows on the described input coplanar waveguide transmission line is coated with silicon nitride medium layer 9, described MEMS clamped beam 10 constitutes building-out capacitor with the input coplanar waveguide transmission line that is positioned at its below, the design of this building-out capacitor can be dwindled the MEMS power splitter when realizing the circuit impedance coupling size makes that the integrated level of whole phase detectors is higher.
The direct thermoelectricity of the described MEMS power that the wave power sensor is used for the MEMS merit is closed the microwave signal of device after synthetic that declines detects and output dc voltage, it comprises two groups of tantalum nitride resistance 7, semiconductor thermocouple arm 6 and direct current IOB 8, described signal output port is divided into two-way and is connected with two sections side ground wires with semiconductor thermocouple arm 6 by one group of tantalum nitride resistance 7 respectively, wherein one section side ground wire inserts voltage controlled oscillator by a direct current IOB 8, and another section side ground wire is by another direct current IOB 8 ground connection; Described two groups of tantalum nitride resistance 7 and semiconductor thermocouple arm 6 form cascaded structure; Between the double layer of metal of the connecting line between one of them direct current IOB 8 and the side ground wire silicon nitride medium layer 9 is arranged.The direct thermoelectricity of the described MEMS power that the wave power sensor closes the synthetic microwave signal of device output based on the Seebeck principle to the MEMS merit that declines detects, and on direct current IOB 8 with the form output measurement result of DC voltage.
The output signal of described voltage controlled oscillator inserts frequency meter, can extrapolate phase differential between first signal and the secondary signal by measured frequency then, thereby realizes the phase detectors based on the direct thermoelectric (al) type power sensor of micromechanics.
A kind of preparation method of the phase detectors based on the direct thermoelectric (al) type power sensor of micromechanics comprises the steps:
(1) prepares gallium arsenide substrate: select the semi-insulating GaAs substrate of extension for use, wherein extension N
+The doping content of gallium arsenide is 10
18Cm
-3, its square resistance is 100～130 Ω/;
(2) photoetching and isolate extension N
+Gallium arsenide, the figure of the semiconductor thermocouple arm of formation thermoelectric pile;
(3) anti-carve N
+Gallium arsenide, forming doping content is 10
17Cm
-3The semiconductor thermocouple arm of thermoelectric pile;
(4) photoetching: removal will keep the photoresist in tantalum nitride place;
(5) sputter tantalum nitride, thickness are 1 μ m;
(6) peel off;
(7) photoetching: removal will keep the photoresist in the place of ground floor gold;
(8) evaporation ground floor gold, thickness is 0.3 μ m;
(9) peel off, form coplanar waveguide transmission line and ground wire, the anchor district of MEMS clamped beam;
(10) anti-carve tantalum nitride, form tantalum nitride resistance and isolation resistance, its square resistance is 25 Ω/;
(11) deposit silicon nitride: with the growth of plasma-enhanced chemical vapour deposition technology
Thick silicon nitride medium layer;
(12) photoetching and etch silicon nitride dielectric layer: be retained in the silicon nitride medium layer on the coplanar waveguide transmission line of MEMS clamped beam below, and the silicon nitride medium layer of isolating MEMS direct thermoelectric (al) type power sensor output terminal and ground wire junction;
(13) deposit and photoetching polyimide sacrificial layer: apply the thick polyimide sacrificial layer of 1.6 μ m in gallium arsenide substrate, require to fill up pit, by the thickness decision MEMS clamped beam of polyimide sacrificial layer and the distance between its below silicon nitride medium layer; The photoetching polyimide sacrificial layer only keeps the sacrifice layer of MEMS clamped beam below;
(14) evaporation titanium/gold/titanium, thickness is
Evaporation is used for the down payment of plating;
(15) photoetching: removal will be electroplated local photoresist;
(16) electrogilding, thickness are 2 μ m;
(17) remove photoresist: removing does not need to electroplate local photoresist;
(18) anti-carve titanium/gold/titanium, the corrosion down payment forms coplanar waveguide transmission line, ground wire, MEMS clamped beam, direct current IOB;
(19) with this gallium arsenide substrate thinning back side to 100 μ m;
(20) discharge polyimide sacrificial layer: developer solution soaks, and removes the polyimide sacrificial layer under the MEMS clamped beam, and deionized water soaks slightly, and the absolute ethyl alcohol dehydration is volatilized under the normal temperature, dries;
(21) external voltage controlled oscillator and frequency meter.
The above only is preferred implementation of the present invention; be noted that for those skilled in the art; under the prerequisite that does not break away from the principle of the invention, can also make some improvements and modifications, these improvements and modifications also should be considered as protection scope of the present invention.
Claims (5)
1. based on the phase detectors of the direct thermoelectric (al) type power sensor of micromechanics, it is characterized in that: comprise substrate (1), be arranged on ground wire (2), MEMS merit on the substrate (1) and close device, coplanar waveguide transmission line (3), two groups of MEMS fixed beam structures and the direct thermoelectricity of MEMS decline wave power sensor and external voltage controlled oscillator and frequency meter, at axis of symmetry of substrate (1) definition;
Described ground wire (2) forms along axis of symmetry symmetrical structure, comprises that symmetry is positioned at axis of symmetry both sides and not contacted two sections side ground wires and the symmetrical one section common ground that is positioned on the axis of symmetry;
Described MEMS merit is closed device and is formed along axis of symmetry symmetrical structure, comprise that symmetry is positioned at two sections asymmetric coplanar striplines (4) and the isolation resistance (5) of axis of symmetry both sides, the input end of described two sections asymmetric coplanar striplines (4) is connected by isolation resistance (5) isolation, output terminal;
Described coplanar waveguide transmission line (3) forms along axis of symmetry symmetrical structure, comprises the two sections input coplanar waveguide transmission lines and the symmetrical one section output coplanar waveguide transmission line that is positioned on the axis of symmetry that are positioned at axis of symmetry both sides and are not connected; Described two sections input coplanar waveguide transmission lines are connected with the input end of two sections asymmetric coplanar striplines (4) respectively, respectively as first signal input port and secondary signal input port; After being connected, the output terminal of described two sections asymmetric coplanar striplines (4) inserts the output coplanar waveguide transmission line, as signal output port;
Described two groups of MEMS fixed beam structures are separately positioned on both sides and the relative axis of symmetry symmetry of the axis of symmetry, described MEMS fixed beam structure comprises MEMS clamped beam (10) and anchor district (11), and top, two ends that described MEMS clamped beam (10) is connected across the input coplanar waveguide transmission line that is positioned at the same side are fixed on the side ground wire and common ground that is positioned at the same side by anchor district (11) respectively; Described MEMS clamped beam (10) and the input coplanar waveguide transmission line that is positioned at its below constitute building-out capacitor;
The direct thermoelectricity of the described MEMS wave power sensor that declines comprises two groups of tantalum nitride resistance (7), semiconductor thermocouple arm (6) and direct current IOB (8), described signal output port is divided into two-way and is connected with two sections side ground wires with semiconductor thermocouple arm (6) by one group of tantalum nitride resistance (7) respectively, wherein one section side ground wire inserts voltage controlled oscillator by a direct current IOB (8), and another section side ground wire is by another direct current IOB (8) ground connection; Described two groups of tantalum nitride resistance (7) and semiconductor thermocouple arm (6) form cascaded structure;
The output signal of described voltage controlled oscillator inserts frequency meter.
2. phase detectors based on the direct thermoelectric (al) type power sensor of micromechanics according to claim 1 is characterized in that: the part surface that is positioned at MEMS clamped beam (10) below on the described input coplanar waveguide transmission line is coated with silicon nitride medium layer (9).
3. the phase detectors based on the direct thermoelectric (al) type power sensor of micromechanics according to claim 1 is characterized in that: between the double layer of metal of the connecting line between one of them direct current IOB (8) and the side ground wire silicon nitride medium layer (9) is arranged.
4. phase detectors based on the direct thermoelectric (al) type power sensor of micromechanics according to claim 1, it is characterized in that: the direct thermoelectricity of the described MEMS power that the wave power sensor closes the synthetic microwave signal of device output based on the Seebeck principle to the MEMS merit that declines detects, and goes up form output measurement result with DC voltage in direct current IOB (8).
5. the preparation method based on the phase detectors of the direct thermoelectric (al) type power sensor of micromechanics is characterized in that: comprise the steps:
(1) prepares gallium arsenide substrate: select the semi-insulating GaAs substrate of extension for use, wherein extension N
+The doping content of gallium arsenide is 10
18Cm
-3, its square resistance is 100～130 Ω/;
(2) photoetching and isolate extension N
+Gallium arsenide, the figure of the semiconductor thermocouple arm of formation thermoelectric pile;
(3) anti-carve N
+Gallium arsenide, forming doping content is 10
17Cm
-3The semiconductor thermocouple arm of thermoelectric pile;
(4) photoetching: removal will keep the photoresist in tantalum nitride place;
(5) sputter tantalum nitride, thickness are 1 μ m;
(6) peel off;
(7) photoetching: removal will keep the photoresist in the place of ground floor gold;
(8) evaporation ground floor gold, thickness is 0.3 μ m;
(9) peel off, form coplanar waveguide transmission line and ground wire, the anchor district of MEMS clamped beam;
(10) anti-carve tantalum nitride, form tantalum nitride resistance and isolation resistance, its square resistance is 25 Ω/;
(11) deposit silicon nitride: with the growth of plasma-enhanced chemical vapour deposition technology
Thick silicon nitride medium layer;
(12) photoetching and etch silicon nitride dielectric layer: be retained in the silicon nitride medium layer on the coplanar waveguide transmission line of MEMS clamped beam below, and the silicon nitride medium layer of isolating MEMS direct thermoelectric (al) type power sensor output terminal and ground wire junction;
(13) deposit and photoetching polyimide sacrificial layer: apply the thick polyimide sacrificial layer of 1.6 μ m in gallium arsenide substrate, require to fill up pit, by the thickness decision MEMS clamped beam of polyimide sacrificial layer and the distance between its below silicon nitride medium layer; The photoetching polyimide sacrificial layer only keeps the sacrifice layer of MEMS clamped beam below;
(14) evaporation titanium/gold/titanium, thickness is
Evaporation is used for the down payment of plating;
(15) photoetching: removal will be electroplated local photoresist;
(16) electrogilding, thickness are 2 μ m;
(17) remove photoresist: removing does not need to electroplate local photoresist;
(18) anti-carve titanium/gold/titanium, the corrosion down payment forms coplanar waveguide transmission line, ground wire, MEMS clamped beam, direct current IOB;
(19) with this gallium arsenide substrate thinning back side to 100 μ m;
(20) discharge polyimide sacrificial layer: developer solution soaks, and removes the polyimide sacrificial layer under the MEMS clamped beam, and deionized water soaks slightly, and the absolute ethyl alcohol dehydration is volatilized under the normal temperature, dries;
(21) external voltage controlled oscillator and frequency meter.
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