CN106771606A - The online microwave phase detector device of T-shaped knot slot-coupled - Google Patents
The online microwave phase detector device of T-shaped knot slot-coupled Download PDFInfo
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- CN106771606A CN106771606A CN201710052743.7A CN201710052743A CN106771606A CN 106771606 A CN106771606 A CN 106771606A CN 201710052743 A CN201710052743 A CN 201710052743A CN 106771606 A CN106771606 A CN 106771606A
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- transmission line
- coplanar waveguide
- shaped knot
- waveguide transmission
- holding wire
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R25/00—Arrangements for measuring phase angle between a voltage and a current or between voltages or currents
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- Measurement Of Resistance Or Impedance (AREA)
Abstract
The online microwave phase detector device of T-shaped knot slot-coupled of the invention, detector is prepared on HR-Si substrate, is made up of coplanar waveguide transmission line, two gap structures, T-shaped knot and two direct-heating type microwave power detectors.Two gap structures are symmetrically arranged with the holding wire both sides of the coplanar waveguide transmission line of microwave signal transmission, the gap structure of upside is connected to direct-heating type microwave power detector, mainly for detection of the watt level of the signal being coupled out.Because upper and lower coupled structure is symmetrical, so signal power size, phase for being coupled out etc. are essentially equal.The gap structure of downside is connected to T-shaped knot and direct-heating type microwave power detector, and the online detection of microwave phase is realized by vector synthesis.Innovation of the invention is the online detection that microwave signal phase is realized using gap structure, and because the signal being coupled out is much smaller for measured signal therefore little on microwave signal influence.
Description
Technical field
The present invention proposes the online microwave phase detector device of T-shaped knot slot-coupled, belongs to microelectromechanical systems
(MEMS) technical field.
Background technology
In microwave regime, microwave signal phase measurement occupies highly important status.Microwave phase detector device extensively should
For aspects such as personal communication, military and national defense and scientific researches.With the increase of frequency, wavelength and the various units in circuit of signal
Device size is progressively approached, and voltage, electric current exist all in the form of ripple in circuit, and the phase delay of signal is caused in circuit not only
The voltage of various location, electric current are different in synchronization amplitude, and voltage, electric current at same position is when different
Carve also different.Therefore grasped in microwave frequency band and the phase of control signal is necessary, the phase of microwave signal
Just into an important measurement parameter.The present invention is based on a kind of online type micro-wave of T-shaped knot slot-coupled of Si technological designs
Phase detectors.
The content of the invention
Technical problem：The purpose of the present invention is to propose to a kind of online microwave phase detector device of T-shaped knot slot-coupled, this hair
It is bright to employ gap structure coupling microwaves signal, T-shaped knot is used in terms of power combing, in terms of the power detection of microwave signal
Using direct-heating type microwave power detector, vector synthesis are used in terms of microwave phase detector, it is achieved thereby that online
Type micro-wave phase-detection.
Technical scheme：The online microwave phase detector device of T-shaped knot slot-coupled of the invention, microwave phase detector device is by altogether
The symmetrical gap structure of coplanar waveguide transmission line, two holding wires on coplanar waveguide transmission line, T-shaped knot and two directly plus
Hot type microwave power detector is constituted, as shown in Figure 1.The phase-detection of microwave uses vector synthesis, will refer to
Signal and measured signal are calculated the phase of microwave signal by cosine function formula after being combined into by T-shaped.
Coplanar waveguide transmission line is made up of the holding wire and ground wire of coplanar waveguide transmission line, the signal of coplanar waveguide transmission line
The holding wire of the coplanar waveguide transmission line that the gap structure on the upside of line passes through direct-heating type microwave power detector connects direct
Heated microwave power sensor 1, the holding wire that the gap structure of downside passes through the first coplanar waveguide transmission line of T-shaped knot is connected
One input of T-shaped knot, the holding wire of the second coplanar waveguide transmission line that another input passes through T-shaped knot is connected with reference to letter
Number input port, the holding wire of the 3rd coplanar waveguide transmission line that the output port of T-shaped knot passes through T-shaped knot connects direct-heating type
Microwave power detector 2.
T-shaped knot include the first air bridges, the second air bridges, the 3rd air bridges, the holding wire of the first coplanar waveguide transmission line,
The holding wire of the holding wire of the second coplanar waveguide transmission line, the 3rd coplanar waveguide transmission line, is three port devices, can be used for power
Synthesis, without isolation resistance, wherein the first air bridges, the second air bridges, the 3rd air bridges are used for the ground of coplanar waveguide transmission line
Interconnection between line, while the release of these three air bridges for convenience, has made one group of array of orifices thereon.
Direct-heating type microwave power detector includes semiconductor thermocouple arm, terminal resistance, direct current output block, isolation direct current
The holding wire of electric capacity, coplanar waveguide transmission line, its effect is mainly based upon Seebeck effect to detect the work(of microwave information to be measured
Rate size.
Beneficial effect：The present invention is the online microwave phase detector device of T-shaped knot slot-coupled, and microwave phase detector device is used
Can be coupled out for the microwave signal of fraction by gap structure, this structure, and using this part coupled signal micro- to realize
The online detection of wave phase, and most signal can continue to that follow-up signal treatment is propagated and carried out on co-planar waveguide.
Brief description of the drawings
Fig. 1 is the online microwave phase detector device top view of T-shaped knot slot-coupled of the invention；
Fig. 2 is the A-A ' profiles of Fig. 1 online microwave phase detector devices of T-shaped knot slot-coupled；
Fig. 3 is the B-B ' profiles of Fig. 1 online microwave phase detector devices of T-shaped knot slot-coupled；
Figure includes：HR-Si substrate 1, the holding wire 2 of coplanar waveguide transmission line, ground wire 3, gap structure 4, gap structure
5, the semiconductor thermocouple arm 6 of direct-heating type microwave power detector 1, terminal resistance 7, direct current output block 8, isolation DC capacitor
9th, the holding wire 10 of coplanar waveguide transmission line, the first air bridges 11 of T-shaped knot, the second air bridges 12, the 3rd air bridges 13, first
The holding wire 14 of coplanar waveguide transmission line, the holding wire 15 of the second coplanar waveguide transmission line, the letter of the 3rd coplanar waveguide transmission line
Number line 16, the terminal resistance 18 of semiconductor thermocouple arm 17 of direct-heating type microwave power detector 2, direct current output block 19, isolation
DC capacitor 20, SiO2Layer 21.One layer of SiO is prepared on HR-Si substrate 12Layer 21, in SiO2Layer 21 is provided with co-planar waveguide biography
Defeated line, gap structure 4 and gap structure 5, indirect Thermoelectric Microwave Power Sensor 1 and indirect Thermoelectric Microwave Power Sensor
2。
Specific embodiment
The online microwave phase detector device of T-shaped knot slot-coupled of the invention be by coplanar waveguide transmission line, two on
The symmetrical gap structure 4 of the holding wire 2 of coplanar waveguide transmission line and gap structure 5, T-shaped knot and two directly heat type micro-wave
What power sensor was constituted, as shown in Figure 1.The work(of microwave signal is detected using direct-heating type microwave power detector
Rate, the phase-detection of microwave signal is carried out using vector synthesis, after reference signal and measured signal are combined into using T-shaped by
Cosine function formula calculates the phase of microwave signal to be measured.
Coplanar waveguide transmission line is made up of the holding wire 2 and ground wire 3 of coplanar waveguide transmission line, in coplanar waveguide transmission line
The both sides of holding wire 2 are symmetrically respectively equipped with a gap structure 4 and gap structure 5, and the gap structure 4 of upside passes through direct-heating type
The connection direct-heating type microwave power detector of holding wire 10 of the coplanar waveguide transmission line of microwave power detector 1.Downside
The holding wire 14 of the first coplanar waveguide transmission line that gap structure 5 passes through T-shaped knot connects an input of T-shaped knot, another
The holding wire 15 of the second coplanar waveguide transmission line that input passes through T-shaped knot connects reference signal input port, the output of T-shaped knot
The holding wire 16 of the coplanar waveguide transmission line that end passes through T-shaped knot connects direct-heating type microwave power detector 2.
T-shaped knot includes the first air bridges 11, second air bridges 12, the 3rd air bridges 13, the first coplanar waveguide transmission line
Holding wire 14, the holding wire 15 of the second coplanar waveguide transmission line, the holding wire 16 of the 3rd coplanar waveguide transmission line, are three port devices
Part, can be used for power combing, without isolation resistance, wherein the first air bridges 11, the second air bridges 12, the 3rd air bridges 13 are used for
Interconnection between the ground wire 3 of coplanar waveguide transmission line, while the release of these three air bridges for convenience, has made one thereon
Group array of orifices.
Direct-heating type microwave power detector 1 includes semiconductor thermocouple arm 6, terminal resistance 7, direct current output block 8, isolation
The holding wire 10 of DC capacitor 9, coplanar waveguide transmission line；Direct-heating type microwave power detector 2 includes semiconductor thermocouple arm
17 terminal resistances 18, direct current output block 19, isolation DC capacitor 20.
The basic functional principle of direct-heating type microwave power detector is based on Seebeck effect, so-called Seebeck effect
Exactly closely connected together by two kinds of different conductor one end of A, B, when two contact temperatures do not wait (T>T0, T and T0It is respectively hot
End and the temperature of cold end) when, potential will be produced at 2 points of the other end, so as to form electric current, this phenomenon is also called thermoelectricity
Effect, the electromotive force is referred to as thermoelectrical potential.
The present invention proposes a kind of online microwave phase detector device of T-shaped knot slot-coupled, when microwave signal to be measured is altogether
When being transmitted on coplanar waveguide transmission line, the monosymmetric gap structure 4 of holding wire 2 and the energy of gap structure 5 of coplanar waveguide transmission line
Fraction signal is enough coupled out, the small-signal that this part is coupled out possesses and measured signal identical phase.Tie in upside gap
The signal that structure 4 will be coupled out from the holding wire 10 of the coplanar waveguide transmission line of direct-heating type microwave power detector 1 transmit to
Direct-heating type microwave power detector 1, based on Seebeck effect with VD V1Form output testing result, can
Extrapolate the power P of the coupled signal1.From symmetry, the signal power that the gap structure 5 of downside is coupled out is also P1.By
Power is P by T-shaped knot2, correspondence DC input voitage be V2Reference signal and power be P1, correspondence VD be V1
The signal that is coupled out of downside gap structure 5 carry out power vector synthesis, the signal after synthesis is using directly heating type micro-wave work(
The detection of rate sensor obtains VD V3, the synthesis power can be extrapolated for P3.Meet between them onCosine
Functional expression：
WhereinIt is the phase difference of measured signal and reference signal.May finally be derived based on formula (1):
Simultaneously as the signal power very little that gap structure 4 and gap structure 5 are coupled out, most signal can
Continue through co-planar waveguide back-propagation and carry out follow-up signal transacting, it is achieved thereby that the detection of online microwave phase.
The preparation method of the online microwave phase detector device of T-shaped knot slot-coupled of the invention is：
1) 4 inches of high resistant Si substrates are prepared, resistivity is 4000 Ω cm, and thickness is 400mm；
2) thermally grown a layer thickness is the SiO of 1.2mm2Layer；
3) chemical vapor deposition (CVD) grows one layer of polysilicon, and thickness is 0.4mm；
4) one layer of photoresist and photoetching are coated, in addition to polysilicon resistance region, other regions are photo-etched glue protection, and note
Enter phosphorus (P) ion, doping concentration is 1015cm-2, form terminal resistance；
5) one layer of photoresist of coating, one layer of photoresist of photoetching polysilicon resistance graphic application, photoetching polysilicon resistance figure,
Terminal resistance is formed by dry etching again；
6) one layer of photoresist, the photoresist at photoetching removal coplanar waveguide transmission line and output electrode are coated；
7) electron beam evaporation (EBE) forms ground floor gold (Au), and thickness is 0.3mm, on removal photoresist and photoresist
Au, stripping forms the ground floor Au of transmission line, isolation DC capacitor bottom crown, and output electrode；
8) one layer of photoresist is coated, photoetching simultaneously retains isolation DC capacitor；
9) one strata acid imide of uniform coating and litho pattern, thickness is 2mm, retains the polyimides below air bridges and makees
It is sacrifice layer；
10) photoresist, the photoresist of photoetching removal air bridges, coplanar waveguide transmission line and output electrode position are coated；
11) Seed Layer of 500/1500/300A ° of Ti/Au/Ti, the thickness of re-plating one after Ti layers at the top of removal are evaporated
Spend is Au layers of 2mm；
12) Au on photoresist and photoresist is removed, air bridges, coplanar waveguide transmission line and output electrode is formed；
13) deep reaction ion etching (DRIE) coplanar waveguide transmission line, makes gap structure；
14) deep reaction ion etching (DRIE) the backing material back side, makes the membrane structure below thermoelectric pile；
15) polyimide sacrificial layer is discharged：Developer solution soaks, the polyimide sacrificial layer under removal air bridges, deionization
Water soaks slightly, absolute ethyl alcohol dehydration, is volatilized under normal temperature, dries.
Present invention be distinguished in that：
Present invention employs gap structure, the microwave signal coupling that this gap structure will can be propagated in co-planar waveguide
Go out sub-fraction, and the phase size of microwave signal to be measured is detected using the small-signal that this part is coupled out, it is micro- so as to realize
The online detection of wave phase；Synthesis to power uses T-shaped knot, and the detection to synthesizing signal power is used to directly heat and declined
Wave power sensor realizes heat to electricity conversion.Compared with measured signal additionally, due to the signal power being coupled out it is very small, therefore
Treat micrometer ripple effect of signals less, the microwave signal can continue to be propagated on co-planar waveguide and carry out at follow-up signal
Reason.
The structure for meeting conditions above is considered as the online microwave phase detector device of T-shaped knot slot-coupled of the invention.
Claims (3)
1. the online microwave phase detector device of a kind of T-shaped knot slot-coupled, it is characterized in that making SiO on HR-Si substrate (1)2
Layer (21), in SiO2Layer (21) is provided with the symmetrical seam of coplanar waveguide transmission line, the holding wire (2) on coplanar waveguide transmission line
Gap structure (4) and gap structure (5), T-shaped knot and direct-heating type microwave power detector 1 and direct-heating type microwave power
Sensor 2, described coplanar waveguide transmission line is made up of the holding wire (2) and ground wire (3) of coplanar waveguide transmission line, co-planar waveguide
The coplanar wave guide transmission that gap structure (4) on the upside of the holding wire (2) of transmission line passes through direct-heating type microwave power detector 1
Holding wire (10) the connection direct-heating type microwave power detector 1 of line, the gap structure (5) of downside is by the first of T-shaped knot
The holding wire (14) of coplanar waveguide transmission line connects an input of T-shaped knot, and another input is total to by the second of T-shaped knot
Holding wire (15) the connection reference signal input port of coplanar waveguide transmission line, the output port of T-shaped knot is total to by the 3rd of T-shaped knot
Holding wire (16) the connection direct-heating type microwave power detector 2 of coplanar waveguide transmission line.
2. the online microwave phase detector device of T-shaped knot slot-coupled according to claim 1, it is characterized in that using T-shaped knot
Carry out power and into described T-shaped knot includes the first air bridges (11), the second air bridges (12), the 3rd air bridges (13), first
The holding wire (14) of coplanar waveguide transmission line, the holding wire (15) of the second coplanar waveguide transmission line, the 3rd coplanar waveguide transmission line
Holding wire (16), be three port devices, can be used for power combing, without isolation resistance, wherein the first air bridges (11), second
Air bridges (12), the 3rd air bridges (13) for the interconnection between the ground wire (3) of coplanar waveguide transmission line, while for convenience this
Three releases of air bridges, have made one group of array of orifices thereon.
3. the online microwave phase detector device of T-shaped knot slot-coupled according to claim 1, it is characterized in that using directly plus
Hot type microwave power detector carries out power detection, and described direct-heating type microwave power detector 1 includes semiconductor thermocouple
Arm (6), terminal resistance (7), direct current output block (8), isolation DC capacitor (9), the holding wire (10) of coplanar waveguide transmission line；Institute
The direct-heating type microwave power detector 2 stated include semiconductor thermocouple arm (17) terminal resistance (18), direct current output block (19),
Isolation DC capacitor (20).
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710052743.7A CN106771606A (en) | 2017-01-24 | 2017-01-24 | The online microwave phase detector device of T-shaped knot slot-coupled |
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| CN201710052743.7A CN106771606A (en) | 2017-01-24 | 2017-01-24 | The online microwave phase detector device of T-shaped knot slot-coupled |
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