CN106841798A - Gap structure couples online microwave phase detector device - Google Patents
Gap structure couples online microwave phase detector device Download PDFInfo
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- CN106841798A CN106841798A CN201710052704.7A CN201710052704A CN106841798A CN 106841798 A CN106841798 A CN 106841798A CN 201710052704 A CN201710052704 A CN 201710052704A CN 106841798 A CN106841798 A CN 106841798A
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- transmission line
- gap structure
- coplanar waveguide
- waveguide transmission
- holding wire
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R25/00—Arrangements for measuring phase angle between a voltage and a current or between voltages or currents
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R15/00—Details of measuring arrangements of the types provided for in groups G01R17/00 - G01R29/00, G01R33/00 - G01R33/26 or G01R35/00
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R21/00—Arrangements for measuring electric power or power factor
- G01R21/02—Arrangements for measuring electric power or power factor by thermal methods, e.g. calorimetric
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R3/00—Apparatus or processes specially adapted for the manufacture or maintenance of measuring instruments, e.g. of probe tips
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- Engineering & Computer Science (AREA)
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- Measurement Of Resistance Or Impedance (AREA)
Abstract
Gap structure of the invention couples online microwave phase detector device, detector is an online microwave phase detector device, detector is prepared on HR-Si substrate, is made up of coplanar waveguide transmission line, two gap structures, work(clutch and two direct-heating type microwave power detectors.Two gap structures are symmetrically arranged with the holding wire both sides of the coplanar waveguide transmission line of microwave signal transmission, the gap structure of upside is connected to direct-heating type microwave power detector, mainly for detection of the watt level of the signal being coupled out.The gap structure of downside is connected to work(clutch and direct-heating type microwave power detector, and the online detection of microwave phase is realized by vector synthesis.Innovation of the invention is the online detection that microwave signal phase is realized using gap structure, and because the signal being coupled out is much smaller for measured signal therefore little on microwave signal influence.
Description
Technical field
The present invention proposes gap structure and couples online microwave phase detector device, belongs to microelectromechanical systems (MEMS)
Technical field.
Background technology
With the development of the technologies such as radar and antenna, the measurement of microwave phase becomes more and more important, microwave phase detector
Systematic research is also for people increasingly pay attention to.At present, microwave phase detector device be widely used in personal communication, military and national defense and
The aspects such as scientific research.Current widely used microwave phase detector technology can be divided into by principle：Diode structure, gill primary
Special multiplier architecture and vector synthesis.Their advantage is high precision, broadband, but cannot realize online detection, and
And structure is relative complex, volume is relatively large.
In order to solve the problems, such as above-mentioned microwave phase detector device, the present invention devises gap structure coupling on HR-Si substrate
Close online microwave phase detector device.It make use of gap structure to realize phase-detection, and simple structure is easy to implement, while
The integrated level of system is improve, online detection can be realized, efficiency is higher.
The content of the invention
Technical problem：Online microwave phase detector device, this hair are coupled the purpose of the present invention is to propose to a kind of gap structure
It is bright to employ gap structure coupling microwaves signal, passed using direct-heating type microwave power in terms of the power detection of microwave signal
Sensor, uses vector synthesis in terms of microwave phase detector, it is achieved thereby that online microwave phase detector.
Technical scheme：Gap structure of the invention couples online microwave phase detector device, and microwave phase detector device is by altogether
The symmetrical gap structure of coplanar waveguide transmission line, two holding wires on coplanar waveguide transmission line, work(clutch and two are directly
Heated microwave power sensor is constituted.The phase-detection of microwave uses vector synthesis, by reference signal and to be measured
Signal is calculated the phase of microwave signal after work(clutch synthesizes by cosine function formula.Coplanar waveguide transmission line is by co-planar waveguide
The holding wire and ground wire of transmission line are constituted；Direct-heating type microwave power detector is by semiconductor thermocouple arm, terminal resistance, direct current
The holding wire of IOB, isolation DC capacitor and coplanar waveguide transmission line is constituted；Work(clutch is believed by asymmetric coplanar stripline ACPS
Number line, isolation resistance, the holding wire of the first coplanar waveguide transmission line, the holding wire of the second coplanar waveguide transmission line and the 3rd are coplanar
The holding wire of waveguide transmission line is constituted.
Two holding wire both sides of the symmetrical branch office's coplanar waveguide transmission line of gap structure, the holding wire of coplanar waveguide transmission line
The holding wire of the coplanar waveguide transmission line that the gap structure of upside passes through direct-heating type microwave power detector 1 is connected and directly added
Hot type microwave power detector 1, gap structure on the downside of the holding wire of coplanar waveguide transmission line is first coplanar by work(clutch
The holding wire of waveguide transmission line connects the input of work(clutch, and another input of work(clutch is second coplanar by work(clutch
The holding wire connection reference signal input port of waveguide transmission line, the 3rd co-planar waveguide that work(clutch output port passes through work(clutch
The holding wire connection direct-heating type microwave power detector 2 of transmission line.
Beneficial effect：The present invention is that gap structure couples online microwave phase detector device, and microwave phase detector device is used
Can be coupled out for the microwave signal of fraction by gap structure, this structure, and using this part coupled signal micro- to realize
The online detection of wave phase, and most signal can continue to that follow-up signal treatment is propagated and carried out on co-planar waveguide.
Brief description of the drawings
Fig. 1 is that gap structure of the invention couples online microwave phase detector device top view；
Fig. 2 is the A-A ' profiles that Fig. 1 gap structures couple online microwave phase detector device；
Fig. 3 is the B-B ' profiles that Fig. 1 gap structures couple online microwave phase detector device；
Figure includes：HR-Si substrate 1, the holding wire 2 of co-planar waveguide, ground wire 3, gap structure 4, gap structure 5, work(is closed
The ACPS holding wires 6 of device, isolation resistance 7, the holding wire 8 of the first co-planar waveguide, the holding wire the 9, the 3rd of the second co-planar waveguide are total to
The holding wire 10 of face waveguide, the semiconductor thermocouple arm 11 of direct-heating type microwave power detector 1, terminal resistance 12, direct current are defeated
Go out block 13, the holding wire 15 of isolation DC capacitor 14, co-planar waveguide, the semiconductor heat of direct-heating type microwave power detector 2
Even arm 16, terminal resistance 17, direct current output block 18, isolation DC capacitor 19, SiO2Layer 20.One is prepared on HR-Si substrate 1
Layer SiO2Layer 16, in SiO2Layer 16 is provided with coplanar waveguide transmission line, gap structure 4, gap structure 5, work(clutch and directly adds
Hot type microwave power detector.
Specific embodiment
It is on altogether by coplanar waveguide transmission line, two that gap structure of the invention couples online microwave phase detector device
The holding wire 2 of coplanar waveguide transmission line symmetrical gap structure 4 and gap structure 5, work(clutch and direct-heating type microwave power
What sensor 1 and direct-heating type microwave power detector 2 were constituted, as shown in Figure 1.Using direct-heating type microwave power
Sensor detects the power of microwave signal, and the phase-detection of microwave signal is carried out using vector synthesis, reference signal and will treat
Survey the phase for calculating microwave signal to be measured after signal is synthesized using work(clutch by cosine function formula.
Coplanar waveguide transmission line is made up of the holding wire 2 and ground wire 3 of coplanar waveguide transmission line, in coplanar waveguide transmission line
The both sides of holding wire 2 are symmetrically respectively equipped with a gap structure 4 and gap structure 5, the microwave signal of the coupling of gap structure 4 of upside
Transmitted to direct-heating type microwave power from the holding wire 15 of the coplanar waveguide transmission line of direct-heating type microwave power detector
Sensor 1, the holding wire 8 that the gap structure 5 of downside passes through the coplanar waveguide transmission line of work(clutch is connected to microwave phase detector
System.Microwave phase detector system is made up of coplanar waveguide transmission line, work(clutch and direct-heating type microwave power detector.
Work(clutch is by ACPS holding wires 6, isolation resistance 7, the holding wire 8 of the first coplanar waveguide transmission line, the second coplanar ripple
The holding wire 10 for leading the coplanar waveguide transmission line of holding wire 9 and the 3rd of transmission line is constituted；Direct-heating type microwave power detector 1
By the signal of semiconductor thermocouple arm 11, terminal resistance 12, direct current output block 13 and isolation DC capacitor 14, coplanar waveguide transmission line
Line 15 is constituted；Direct-heating type microwave power detector 2 is by semiconductor thermocouple arm 16, terminal resistance 17, the and of direct current output block 18
Isolation DC capacitor 19 is constituted.
The basic functional principle of direct-heating type microwave power detector is based on Seebeck effect, so-called Seebeck effect
Exactly closely connected together by two kinds of different conductor one end of A, B, when two contact temperatures do not wait (T>T0, T and T0It is respectively hot
End and the temperature of cold end) when, potential will be produced at 2 points of the other end, so as to form electric current, this phenomenon is also called thermoelectricity
Effect, the electromotive force is referred to as thermoelectrical potential.
Online microwave phase detector device is coupled the invention provides a kind of gap structure, when microwave signal to be measured is coplanar
When being transmitted on waveguide transmission line, the monosymmetric gap structure 4 of holding wire 2 and gap structure 5 of coplanar waveguide transmission line can
Part signal is coupled out, the signal that this part is coupled out possesses and measured signal identical phase.Upside gap structure 4 is by coupling
The holding wire 15 of the coplanar waveguide transmission line that the signal for closing out passes through direct-heating type microwave power detector 1 is transmitted and added to direct
Hot type microwave power detector 1, based on Seebeck effect with VD V1Form output testing result, can extrapolate
The power P of the coupled signal1.From symmetry, the signal power that the gap structure 5 of downside is coupled out is also P1.By work(clutch
The power that will be input into from reference signal input port is P2, correspondence DC input voitage be V2Reference signal and power be P1, it is right
It is V to answer VD1The signal that is coupled out of downside gap structure 5 carry out power vector synthesis, the signal profit after synthesis
Detected with direct-heating type microwave power detector 2 and obtain VD V3, the synthesis power can be extrapolated for P3.They
Between meet onCosine function formula：
WhereinIt is the phase difference of measured signal and reference signal.May finally be derived based on formula (1):
Simultaneously as the signal power very little that gap structure 4 and gap structure 5 are coupled out, most signal can
Continue through co-planar waveguide back-propagation and carry out follow-up signal transacting, it is achieved thereby that the detection of online microwave phase.
The preparation method that gap structure of the invention couples online microwave phase detector device is：
1) 4 inches of high resistant Si substrates are prepared, resistivity is 4000 Ω cm, and thickness is 400mm；
2) thermally grown a layer thickness is the SiO of 1.2mm2Layer；
3) chemical vapor deposition (CVD) grows one layer of polysilicon, and thickness is 0.4mm；
4) one layer of photoresist and photoetching are coated, in addition to polysilicon resistance region, other regions are photo-etched glue protection, and note
Enter phosphorus (P) ion, doping concentration is 1015cm-2, form isolation resistance and terminal resistance；
5) one layer of photoresist of coating, one layer of photoresist of photoetching polysilicon resistance graphic application, photoetching polysilicon resistance figure,
Isolation resistance and terminal resistance are formed by dry etching again；
6) one layer of photoresist, the photoetching at photoetching removal coplanar waveguide transmission line, ACPS holding wires and output electrode are coated
Glue；
7) electron beam evaporation (EBE) forms ground floor gold (Au), and thickness is 0.3mm, on removal photoresist and photoresist
Au, stripping forms the ground floor Au of transmission line, isolation DC capacitor bottom crown, and output electrode；
8) one layer of photoresist is coated, photoetching simultaneously retains isolation DC capacitor；
9) photoresist, photoetching removal coplanar waveguide transmission line, ACPS holding wires, isolation DC capacitor and output electricity are coated
The photoresist of pole position；
10) Seed Layer of 500/1500/300A ° of Ti/Au/Ti, the thickness of re-plating one after Ti layers at the top of removal are evaporated
Spend is Au layers of 2mm；
11) Au on photoresist and photoresist is removed, coplanar waveguide transmission line, ACPS holding wires, isolation direct current is formed
Electric capacity top crown and output electrode；
12) deep reaction ion etching (DRIE) coplanar waveguide transmission line, makes gap structure；
13) deep reaction ion etching (DRIE) the backing material back side, makes the membrane structure below thermoelectric pile；
14) deionized water is soaked slightly, absolute ethyl alcohol dehydration, is volatilized under normal temperature, is dried.
Present invention be distinguished in that：
Present invention employs gap structure, the microwave signal coupling that this gap structure will can be propagated in co-planar waveguide
Go out sub-fraction, and the phase size of microwave signal to be measured is detected using the small-signal that this part is coupled out, it is micro- so as to realize
The online detection of wave phase；Detection to synthesizing signal power realizes thermoelectricity using direct-heating type microwave power detector
Conversion.Compared with measured signal additionally, due to the signal power being coupled out it is very small, therefore treat micrometer ripple effect of signals less,
The microwave signal can continue that follow-up signal transacting is propagated and carried out on co-planar waveguide.
The structure for meeting conditions above is considered as the online microwave phase detector device of gap structure coupling of the invention.
Claims (4)
1. a kind of gap structure couples online microwave phase detector device, it is characterized in that making SiO on HR-Si substrate (1)2Layer
(20), in SiO2It is symmetrical that layer (20) is provided with coplanar waveguide transmission line, two holding wires (2) on coplanar waveguide transmission line
Gap structure (4) and gap structure (5), work(clutch and direct-heating type microwave power detector 1 and directly heat type micro-wave
Power sensor 2, coplanar waveguide transmission line is made up of the holding wire (2) and ground wire (3) of coplanar waveguide transmission line, and co-planar waveguide is passed
The coplanar waveguide transmission line that gap structure (4) on the upside of the holding wire (2) of defeated line passes through direct-heating type microwave power detector 1
Holding wire (15) connection direct-heating type microwave power detector 1, the gap on the downside of the holding wire (2) of coplanar waveguide transmission line
The holding wire (8) of the first coplanar waveguide transmission line that structure (5) passes through work(clutch connects the input of work(clutch, work(clutch it is another
The holding wire (9) of the second coplanar waveguide transmission line that one input passes through work(clutch connects reference signal input port, and work(is closed
The holding wire (10) of the 3rd coplanar waveguide transmission line that device output port passes through work(clutch connects direct-heating type microwave power and passes
Sensor 2.
2. gap structure according to claim 1 couples online microwave phase detector device, it is characterized in that using directly adding
Hot type microwave power detector checks microwave power, and described direct-heating type microwave power detector 1 includes semiconductor thermocouple
The holding wire of arm (11), terminal resistance (12), direct current output block (13), isolation DC capacitor (14) and coplanar waveguide transmission line
(15)；Direct-heating type microwave power detector 2 includes semiconductor thermocouple arm (16), terminal resistance (17), direct current output block
(18) and isolation DC capacitor (19).
3. gap structure according to claim 1 couples online microwave phase detector device, it is characterized in that using work(clutch
Power combing is carried out, described work(clutch is by asymmetric coplanar stripline ACPS holding wires (6), isolation resistance (7), the first coplanar ripple
Lead the holding wire (8) of transmission line, the holding wire (9) of the second coplanar waveguide transmission line and the holding wire of the 3rd coplanar waveguide transmission line
(10) constitute.
4. gap structure according to claim 1 couples online microwave phase detector device, it is characterized in that being tied using gap
Structure (4) and gap structure (5) coupling microwaves signal, coupled microwave can be adjusted by controlling the physical dimension of gap structure
The size of signal.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710052704.7A CN106841798A (en) | 2017-01-24 | 2017-01-24 | Gap structure couples online microwave phase detector device |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710052704.7A CN106841798A (en) | 2017-01-24 | 2017-01-24 | Gap structure couples online microwave phase detector device |
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Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102735932A (en) * | 2012-06-20 | 2012-10-17 | 东南大学 | Micromechanical gallium arsenide-based clamped beam-based phase detector and detection method |
| CN103048540A (en) * | 2013-01-18 | 2013-04-17 | 东南大学 | Online microwave frequency detector and detecting method thereof based on cantilever beam and direct-type power sensor |
| CN103063918A (en) * | 2012-12-26 | 2013-04-24 | 东南大学 | Phase detecting device based on clamped beam capacity type micromechanical microwave power sensor |
-
2017
- 2017-01-24 CN CN201710052704.7A patent/CN106841798A/en active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102735932A (en) * | 2012-06-20 | 2012-10-17 | 东南大学 | Micromechanical gallium arsenide-based clamped beam-based phase detector and detection method |
| CN103063918A (en) * | 2012-12-26 | 2013-04-24 | 东南大学 | Phase detecting device based on clamped beam capacity type micromechanical microwave power sensor |
| CN103048540A (en) * | 2013-01-18 | 2013-04-17 | 东南大学 | Online microwave frequency detector and detecting method thereof based on cantilever beam and direct-type power sensor |
Non-Patent Citations (2)
| Title |
|---|
| 朱健: "《微米纳米技术丛书 MEMS与微系统系列 RF MEMS器件设计、加工和应用》", 31 December 2012, 国防工业出版社 * |
| 林成鲁: "《SOI-纳米技术时代的高端硅基材料》", 30 June 2009, 中国科学技术大学出版社 * |
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Application publication date: 20170613 |