CN106841785B - Clamped beam directly heats online given frequency microwave phase detector device - Google Patents
Clamped beam directly heats online given frequency microwave phase detector device Download PDFInfo
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- CN106841785B CN106841785B CN201710052643.4A CN201710052643A CN106841785B CN 106841785 B CN106841785 B CN 106841785B CN 201710052643 A CN201710052643 A CN 201710052643A CN 106841785 B CN106841785 B CN 106841785B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R25/00—Arrangements for measuring phase angle between a voltage and a current or between voltages or currents
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R23/00—Arrangements for measuring frequencies; Arrangements for analysing frequency spectra
- G01R23/02—Arrangements for measuring frequency, e.g. pulse repetition rate; Arrangements for measuring period of current or voltage
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Abstract
Clamped beam of the invention directly heats online given frequency microwave phase detector device by six port clamped beam couplers, microwave phase detector device, direct-heating type microwave power detector；Six port clamped beam couplers are made of co-planar waveguide, dielectric layer, air layer and clamped beam；Co-planar waveguide is produced on SiO2On layer, the lower section metallization medium layer of clamped beam, and and air layer, clamped beam collectively form coupled capacitor structure, the co-planar waveguide length between two clamped beams be λ/4；The power degree of coupling of first port to the third port, the 4th port and first port to fifth port, the 6th port of six port clamped beam couplers is identical, measured signal is inputted through the first port of six port clamped beam couplers, direct-heating type microwave power detector is output to by third port and fifth port, microwave phase detector device is output to by the 4th port and the 6th port, junior's processing circuit is output to by second port；Finally realize the 0-360 ° of phase on-line checking to given frequency signal.
Description
Technical field
The invention proposes clamped beams to directly heat online given frequency microwave phase detector device, belongs to microelectron-mechanical
The technical field of system.
Background technique
The phase-detection of microwave signal is in phase-modulator, phase-shift keying (PSK) (PSK), phaselocked loop (PLL), antenna phase direction
The test of figure, the phase characteristic for measuring various microwave devices etc. etc., which have, to be extremely widely applied.Therefore in microwave frequency band
Grasp and control signal phase be it is necessary, the phase of microwave signal is also just at an important measurement parameter.This
Invention is that directly heat online given frequency based on a kind of clamped beam for realizing online phase-detection of Si technological design micro-
Wave phase detector.
Summary of the invention
Technical problem: the object of the present invention is to provide clamped beams to directly heat online given frequency microwave phase detector
Device couples fraction signal using six port clamped beam couplers and carries out phase-detection, and largely detecting signal can be defeated
Enter into next stage processing circuit, realizes the 0-360 ° of phase on-line checking to given frequency signal, and the benefit with low-power consumption
Place.
Technical solution: clamped beam of the invention directly heats online given frequency microwave phase detector device and is consolidated by six ports
Strutbeam coupler, microwave phase detector device, the first direct-heating type microwave power detector and second directly heat type micro-wave function
Rate sensor composition；
The first port of six port clamped beam couplers is to third port, the 4th port and arrives first port to the 5th end
Mouth, the power degree of coupling difference of the 6th port are identical, and measured signal is inputted through the first port of six port clamped beam couplers, by
Third port and fifth port are output to the first direct-heating type microwave power detector, are exported by the 4th port and the 6th port
To the first Wilkinson power combiner and the 2nd Wilkinson power combiner in microwave phase detector device, by second end
Mouth is output to junior's processing circuit；The input termination reference signal input of Wilkinson power divider, Wilkinson power
The output port of distributor connects the first Wilkinson power combiner and the 2nd Wilkinson power combiner respectively, and by
One Wilkinson power combiner and the 2nd Wilkinson power combiner are respectively outputted to third and directly heat type micro-wave function
Rate sensor and the 4th direct-heating type microwave power detector；
Wherein, the structure of six port clamped beam couplers is symmetrical set with its center line, by co-planar waveguide, medium
Layer, air layer and clamped beam are constituted；Co-planar waveguide is produced on SiO2On layer, SiO2Layer makes on a si substrate, the anchoring area of clamped beam
It is produced on co-planar waveguide, the lower section metallization medium layer of clamped beam, and collectively form coupled capacitor knot with air layer, clamped beam
Structure, the co-planar waveguide length between two clamped beams are λ/4.
The utility model has the advantages that
1) clamped beam of the invention directly heat online given frequency microwave phase detector device by the phase of microwave signal,
Frequency is surveyed module and is integrated together, and fraction signal is coupled using six port clamped beam couplers and carries out frequency detecting and phase
Detection, and most of signal can be input in next stage processing circuit, realization exists to 0-360 ° of phase of given frequency signal
Line detection.
2) clamped beam of the invention directly heats online given frequency microwave phase detector device and is declined using directly heating
Wave power sensor detects the power of microwave signal, sensitivity with higher and without DC power；
3) the microwave phase detector module in the present invention uses two Wilkinson power combiners, a Wilkinson
Power divider and two direct-heating type microwave power detectors realize 0-360 ° of phase-detection.
Detailed description of the invention
Fig. 1 is that clamped beam of the present invention directly heats online given frequency microwave phase detector device functional block diagram
Fig. 2 is the top view of six port clamped beam couplers
Fig. 3 is AA ' the directional profile figure of six port clamped beam coupler of Fig. 2
Fig. 4 is the top view of Wilkinson power divider/synthesizer
Fig. 5 is the top view of direct-heating type microwave power detector
Fig. 6 is AA ' the directional profile figure of Fig. 5 direct-heating type microwave power detector
Fig. 7 is BB ' the directional profile figure of Fig. 5 direct-heating type microwave power detector
It include: six port clamped beam couplers 1, microwave phase detector device 2, the first direct-heating type microwave power biography in figure
Sensor 3-1, the second direct-heating type microwave power detector 3-2, third direct-heating type microwave power detector 3-3, the 4th
Direct-heating type microwave power detector 3-4, the first Wilkinson power combiner 4-1, the 2nd Wilkinson power combing
Device 4-2, Wilkinson power divider 5, Si substrate 6, SiO2Layer 7, co-planar waveguide 8, anchoring area 9, dielectric layer 10, clamped beam 11,
Air layer 12, air bridges 13, asymmetrical coplanar stripline 14, isolation resistance 15, capacitance top crown 16, output electrode 17, half
Conductor arm 18, metal arm 19, hot end 20, cold end 21, capacitance bottom crown 22, substrate film structure 23, terminal resistance 24, the
Single port 1-1, second port 1-2, third port 1-3, the 4th port 1-4, fifth port 1-5, the 6th port 1-6, the 7th end
Mouth 4-1, the 8th port 4-2, the 9th port 4-3.
Specific embodiment
Clamped beam of the present invention directly heats online given frequency microwave phase detector device by six port clamped beam couplers
1, microwave phase detector device 2, the first direct-heating type microwave power detector 3-1 and the second direct-heating type microwave power sensing
Device 3-2 cascade is constituted；
First port 1-1 to third port 1-3, the 4th port 1-4 and the first port 1- of six port clamped beam couplers 1
1 to fifth port 1-5, the power degree of coupling difference of the 6th port 1-6 is identical, and measured signal is through six port clamped beam couplers 1
First port 1-1 input, by third port 1-3 and fifth port 1-5 be output to the first direct-heating type microwave power sensing
Device 3-1 and the second direct-heating type microwave power detector 3-2, is output to microwave phase by the 4th port 1-4 and the 6th port 1-6
Bit detector 2 is output to junior's processing circuit by second port 1-2, realizes the phase-detection to given frequency signal, and examine
Signal after survey can be used for other processing circuits.
For microwave phase detector device 2 by third direct-heating type microwave power detector 3-3, the 4th directly heats type micro-wave function
Rate sensor 3-4, the first Wilkinson power combiner 4-1, the 2nd Wilkinson power combiner 4-2, Wilkinson function
Rate distributor 5 is constituted；First Wilkinson power combiner 4-1, the 2nd Wilkinson power combiner 4-2, and
The topological structure of Wilkinson power divider 5 is identical, by co-planar waveguide 8, asymmetrical coplanar stripline 14 and air bridges 13, every
Constituted from resistance 15, be Wilkinson power divider 5 when signal input from the 7th port 4-1, signal from the 8th port 4-2,
It is the first Wilkinson power combiner 4-1 or the 2nd Wilkinson power combiner 4-2 when 9th port 4-3 is inputted；The
One Wilkinson power combiner 4-1, the 2nd Wilkinson power combiner 4-2 is by Si substrate 6, SiO2Layer 7, co-planar waveguide
8, terminal resistance 16, P-type semiconductor arm 17, N-type semiconductor arm 18, the composition of output electrode 19.Its direct-heating type microwave power
The testing principle of sensor and microwave phase can be explained as follows:
Direct-heating type microwave power detector: microwave power as shown in Figure 5 is inputted from input port, passes through co-planar waveguide
8, which are input to the consumption of terminal resistance 24, is converted to heat；Semiconductor arm 18 and metal arm 19 constitute thermocouple, the middle area of thermocouple
Domain is as hot end 20, and the fringe region of thermocouple is as cold end 21；According to Seebeck effect, pass through measurement output electrode 17
Microwave power size is inputted known to thermoelectrical potential；Capacitance top crown 16, capacitance bottom crown 22 and dielectric layer 10 constitute every
Straight capacitor prevents the output electrode 17 short-circuit；Substrate thinning is constituted substrate film structure 23 to mention by 20 back of hot end of thermocouple
High detection sensitivity.
Phase detectors: third port 1-3 and fiveth of the microwave signal as shown in Figure 1 through six port clamped beam couplers 1
Port 1-5 is separately input to the first direct-heating type microwave power detector 3-1 and the second direct-heating type microwave power sensing
Device 3-2 carries out coupled power detection, fourth port 1-4 and sixth port 1-6 of the microwave signal through six port clamped beam couplers 1
It is input to microwave phase detector device 2 and carries out phase-detection；It is coplanar between two clamped beams 11 of six port clamped beam couplers 1
8 length of waveguide is λ/4, is at this time 90 ° by the two way microwave signals phase difference of the 4th port 1-4 and the 6th port 1-6；Input
Power is known as Pr, the reference signal of f (known to frequency) identical as measured signal frequency, reference signal is through Wilkinson power
Distributor 5 is divided into two-way power and the identical signal of phase and the two-way measured signal point of the 4th port 1-4 and the 6th port 1-6
Power combing is not carried out through the first Wilkinson power combiner 4-1 and the 2nd Wilkinson power combiner 4-2；Third is straight
After heated microwave power sensor 3-3 and the 4th direct-heating type microwave power detector 3-4 are met to the synthesis of left and right two-way
Power Pcs1, Pcs2It is detected, and the phase difference between measured signal and reference signal is obtained by formula (1)
P4, P6For the power that port 4 is coupled with port 6, and P4=P3, P6=P5。
Clamped beam directly heats the preparation method of online given frequency microwave phase detector device including the following steps:
1) prepare 4 inches of high resistant Si substrates 6, resistivity is 4000 Ω cm, with a thickness of 400mm；
2) thermally grown a layer thickness is the SiO of 1.2mm2Layer 7；
3) chemical vapor deposition (CVD) grows one layer of polysilicon, with a thickness of 0.4mm；
4) coating photoresist and photoetching, in addition to polysilicon resistance region, other regions are photo-etched glue protection, and inject phosphorus
(P) ion, doping concentration 1015cm-2, form isolation resistance 15 and terminal resistance 24；
5) one layer photoresist of coating, one layer photoresist of photoetching polysilicon resistance graphic application, photoetching polysilicon resistance figure,
15 terminal resistance 24 of isolation resistance and semiconductor arm 18 are formed by dry etching again；
6) layer photoresist is coated, photoetching removes co-planar waveguide 8, asymmetrical coplanar stripline 14, metal interconnecting wires and defeated
Photoresist at electrode 17 out；
7) electron beam evaporation (EBE) forms first layer gold (Au), with a thickness of 0.3mm, removes on photoresist and photoresist
Au, removing forms first layer Au, the thermoelectric pile metal interconnecting wires of co-planar waveguide and asymmetrical coplanar stripline, pole under capacitance
Plate 22 and output electrode 17；
8) (LPCVD) one layer of Si is deposited3N4, with a thickness of 0.1mm；
9) layer photoresist is coated, photoetching simultaneously retains capacitance, the photoresist of 11 lower section of clamped beam, dry etching
Si3N4, form dielectric layer 10；
10) one layer of air layer 12 and litho pattern are uniformly coated, with a thickness of 2mm, the polyamides for retaining 11 lower section of clamped beam is sub-
Amine is as sacrificial layer；
11) photoresist is coated, photoetching removes clamped beam 12, anchoring area 9, co-planar waveguide 8, asymmetrical coplanar stripline 14, blocking
The photoresist of 17 position of capacitor top crown 16 and output electrode；
12) seed layer for evaporating 500/1500/300A ° of Ti/Au/Ti, removes one thickness of re-plating after the Ti layer at top
Degree is the Au layer of 2mm；
13) Au on photoresist and photoresist is removed, clamped beam 12, anchoring area 9, co-planar waveguide 8, asymmetric coplanar is formed
Band line 14, capacitance top crown 16 and output electrode 17；
14) deep reaction ion etching (DRIE) the substrate material back side makes membrane structure 21；
15) discharge polyimide sacrificial layer: developer solution impregnates, and removes the polyimide sacrificial layer under clamped beam, deionization
Water impregnates slightly, dehydrated alcohol dehydration, volatilizees, dries under room temperature.
Difference with the prior art of the present invention is:
Present invention employs novel six ports clamped beam coupled structures, wherein the first end of six port clamped beam couplers
The power degree of coupling of mouth to third port, the 4th port and first port to fifth port, the 6th port is identical；It is this clamped
It is big come the phase for detecting microwave signal that beam coupled structure is coupled out the signal of fraction from the microwave signal of coplanar wave guide transmission
It is small, and most of signal can be input in next stage processing circuit；It is realized using Wilkinson and the power of microwave signal is closed
At with distribution, avoid influence of the processing of isolation resistance in traditional Wilkinson power divider to microwave property；Using straight
Heated microwave power sensor is connect to detect the microwave power of signal, sensitivity with higher and without DC power；This hair
Bright clamped beam directly heats online given frequency microwave phase detector device, realizes the 0-360 ° of phase to given frequency signal
Position on-line checking.
The structure for meeting conditions above is considered as clamped beam of the invention and directly heats online given frequency microwave phase
Detector.
Claims (2)
1. a kind of clamped beam directly heats online given frequency microwave phase detector device, it is characterised in that the phase detectors by
Six port clamped beam couplers (1), microwave phase detector device (2), the first direct-heating type microwave power detector (3-1) and
The cascade of two direct-heating type microwave power detectors (3-2) is constituted；Wherein, the first port of six port clamped beam couplers (1)
(1-1) arrives third port (1-3), the 4th port (1-4) and arrives fifth port (1-5), the 6th port to first port (1-1)
The power degree of coupling difference of (1-6) is identical, and measured signal is inputted through the first port (1-1) of six port clamped beam couplers, by
Third port (1-3) and fifth port (1-5) are respectively outputted to the first direct-heating type microwave power detector (3-1) and second
Direct-heating type microwave power detector (3-2) is output to microwave phase inspection by the 4th port (1-4) and the 6th port (1-6)
The first Wilkinson power combiner (4-1) and the 2nd Wilkinson power combiner (4-2) in device (2) are surveyed, by second
(1-2) is output to junior's processing circuit for port；The input termination reference signal input of Wilkinson power divider (5),
The output port of Wilkinson power divider (5) connects the first Wilkinson power combiner (4-1) and second respectively
Wilkinson power combiner (4-2), and by the first Wilkinson power combiner (4-1) and the 2nd Wilkinson power
Synthesizer (4-2) is respectively outputted to third direct-heating type microwave power detector (3-3) and the 4th and directly heats type micro-wave function
Rate sensor (3-4)；
Wherein, the structure of six port clamped beam couplers (1) is symmetrical set with its center line, by co-planar waveguide (8), medium
Layer (10), air layer (12) and clamped beam (11) are constituted；Co-planar waveguide (8) is produced on SiO2On layer (7), SiO2Layer (7) is produced on
On Si substrate (6), the anchoring area (9) of clamped beam (11) is produced on co-planar waveguide (8), the lower section deposition medium of clamped beam (11)
Layer (10), and coupled capacitor structure is collectively formed with air layer (12), clamped beam (11), it is coplanar between two clamped beams (11)
Waveguide (8) length is λ/4.
2. clamped beam as described in claim 1 directly heats online given frequency microwave phase detector device, it is characterised in that
Direct-heating type microwave power detector is by Si substrate (6), SiO2Layer (7), co-planar waveguide (8), semiconductor arm (18), metal arm
(19), terminal resistance (24) is constituted；Microwave power is inputted from port 1, is input to terminal resistance (24) quilt by co-planar waveguide (8)
It is converted to heat；Semiconductor arm (18) and metal arm (19) constitute thermocouple, according to Seebeck effect, pass through measurement output electricity
Microwave power size is inputted known to the thermoelectrical potential of pole (17).
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