CN108508415A - Ratio method slot-coupled MEMS microwaves detection demodulation monolithic system in adaption radar - Google Patents

Abstract

Ratio method slot-coupled MEMS microwaves detection demodulation monolithic system, is mainly made of six port Slot couplers, microwave phase detector module, microwave frequency and power detection module and demodulation module in the adaption radar of the present invention；Adaption radar is made of antenna, transmitting-receiving conversion circuit, ratio method slot-coupled MEMS microwaves detection demodulation monolithic system, signal storage, signal analyzer, microwave signal reconstruct, microwave signal modulator and microwave signal power amplifier.By the above structure, it realizes and is integrated together three kinds of power of microwave signal, frequency, phase detection modules, to the power of the microwave signal of synchronization, frequency and phase synchronous detection simultaneously and the demodulation to modulated signal, ratio method slot-coupled MEMS microwaves detection demodulation monolithic system in adaption radar is realized.

Description

Ratio method slot-coupled MEMS microwaves detection demodulation monolithic system in adaption radar

Technical field

The present invention proposes ratio method slot-coupled MEMS microwaves detection demodulation monolithic system in adaption radar, belongs to micro- The technical field of electronic mechanical system.

Background technology

The electronic countermeasure of novel advanced adaption radar include adaption radar scout and high deception true to nature this two A critical system, adaption radar scouting refer to by Radar Signal Detection, Radar Objective Characteristics analysis, the selection of confrontation pattern, confrontation effect Fruit is analyzed and the links such as confrontation pattern adjustment constitute a closed-loop system, and high deception true to nature refers to the unknown radar signal to enemy Accurately store, replicate, brewed and forwarding, so that the feature difference of curve and enemy radar signal is as much as possible Small, curve can enter enemy radar signal receiving circuit simultaneously with enemy radar signal, and carry out matching treatment, shape At the high electronic decoy true to nature for meeting radar deception requirement." Radar Signal Detection, radar spy in two above critical system Property analysis " be actually that microwave communication signal is detected and is demodulated, and " is carried out to the unknown radar signal of enemy accurate Ground storage replicates, brewed and forwarding " it also must be microwave communication signal be detected and is demodulated into basis, it can be seen that, Microwave communication signal detection and demodulation play a very important role in adaption radar equipment.It is led by the phase delay of signal Voltage, electric current in the circuit of cause at different location is different in synchronization amplitude.Therefore, the phase of microwave signal is measured Also just at an important task.But in existing technology, all it is to utilize the larger devices such as counter to micro- The detection of the power, frequency and phase of wave signal measures, and causes that entire microwave measurement system system bulk is big, power consumption High, frequency band is relatively narrow and the disadvantages such as integrated level is low.In addition, for complicated microwave modulated signal, traditional mechanics of communication into Another set of system is utilized again when row demodulation, this can equally cause the above problem, while also add many costs.So certainly Field of radar is adapted to, if synchro measure while capable of realizing the integral measuring of the power to microwave signal, frequency and phase, with Meet the requirement of adaption radar real-time matching communication, moreover it is possible to carry out being a kind of very intentional to the demodulation of the modulated signal of input The research of justice, therefore the present invention proposes ratio method slot-coupled MEMS microwaves detection demodulation monolithic system in adaption radar.

Invention content

Technical problem：The object of the present invention is to provide ratio method slot-coupled MEMS microwaves in a kind of adaption radar to detect Monolithic system is demodulated, conciliates mode transfer using six port Slot coupler ports come the microwave signal detection function module that is of coupled connections Three kinds of power of microwave signal, frequency, phase detection modules are integrated together, to the micro- of synchronization by block to realize Power, frequency and the phase of wave signal while synchronous detection and the demodulation to modulated signal.

Technical solution：

Ratio method slot-coupled MEMS microwaves detection demodulation monolithic system in the adaption radar of the present invention, mainly by six ends Mouth Slot coupler, microwave frequency and power detection module, microwave phase detector module and demodulation module composition；

The first port of six port Slot couplers to third port, the 4th port and first port to fifth port, The power degree of coupling difference of 6th port is identical, and measured signal is inputted through first port, and first is output to indirectly by second port Heated microwave power detector carries out the demodulation of modulated signal；Microwave is respectively outputted to by third port and fifth port The the second indirect heating type microwave power detector and third indirect heating type microwave power of frequency and power detection module sense Device, into line frequency detection synchronous with power；Microwave phase detector module is respectively outputted to by the 4th port and the 6th port One end of first Wilkinson power combiners and the 2nd Wilkinson power combiners, and by Wilkinson power distributions Two output ends of device are connected respectively to the another of the first Wilkinson power combiners and the 2nd Wilkinson power combiners One end, and the output end of the first Wilkinson power combiners and the 2nd Wilkinson power combiners is connected to the 4th indirectly Heated microwave power detector and the 5th indirect heating type microwave power detector carry out microwave phase detector；By tying above Structure realizes and is integrated together three kinds of power of microwave signal, frequency, phase detection modules, believes the microwave of synchronization Number power, the synchronous detection simultaneously of frequency and phase, to meet the requirement that adaption radar real-time matching communicates, and to modulated The demodulation of signal processed.

Wherein, adaption radar of the invention receives system and oneself by dual-mode antenna, transmitting-receiving conversion circuit, adaption radar Radar emission system composition is adapted to, adaption radar receives system and detects demodulation monolithic system by ratio method slot-coupled MEMS microwaves System, signal storage and signal analyzer cascade are constituted, and realize the detection and analysis to unknown radar signal；Adaption radar is sent out It penetrates system to be made of microwave signal reconstruct, microwave signal modulator and microwave signal power amplifier, realizes and unknown radar is believed Number modulation and forwarding；

Six port Slot couplers are made of co-planar waveguide and slot-coupled structure；Co-planar waveguide and slot-coupled structure are equal It is produced on SiO₂On layer, the co-planar waveguide length between two slot-coupled structures is λ/4.

Advantageous effect：

1) in adaption radar of the invention ratio method slot-coupled MEMS microwaves detection demodulation monolithic system be integrated with it is micro- Three kinds of power of wave signal, frequency, phase detection modules have the advantages that low-power consumption, low cost；And it is measured using ratio method The mode of frequency significantly reduces noise and interference that output voltage is subject to, substantially increases the accuracy of measuring system；

2) detection of ratio method slot-coupled MEMS microwaves demodulates monolithic system to brewed in adaption radar of the invention The mode that signal is demodulated is to apply indirect heating type microwave power detector, and what is used in no traditional microwave measuring system multiplies Musical instruments used in a Buddhist or Taoist mass and oscillator substantially reduce the volume and its complexity of measuring system；

3) in adaption radar of the invention ratio method slot-coupled MEMS microwaves detection demodulation monolithic system realize by Three kinds of power of microwave signal, frequency, phase detection modules are integrated together, power, frequency to the microwave signal of synchronization Rate is with phase synchronous detection simultaneously to meet the requirement of adaption radar real-time matching communication, and the solution to modulated signal It adjusts, it is integrated to realize the monolithic system of the detection of ratio method slot-coupled MEMS microwaves and demodulation in adaption radar.

Description of the drawings

Fig. 1 is the overall structure composition frame chart of adaption radar,

Fig. 2 demodulates the principle of monolithic system for ratio method slot-coupled MEMS microwaves detection in the adaption radar of the present invention Block diagram,

Fig. 3 is the vertical view of six port Slot couplers,

Fig. 4 is the vertical view of Wilkinson power divider/synthesizers,

Fig. 5 is the vertical view of indirect heating type microwave power detector,

Fig. 6 is AA ' the directional profile figures of Fig. 5 indirect heating type microwave power detectors.

Figure includes：Six port Slot couplers 1, microwave frequency and power detection module 2, demodulation module 3, microwave phase Detection module 4, the first indirect heating type microwave power detector 5-1, the second indirect heating type microwave power detector 5-2, the Three indirect heating type microwave power detector 5-3, the 4th indirect heating type microwave power detector 5-4, the 5th indirect heating type Microwave power detector 5-5, the first Wilkinson power combiner 6-1, the 2nd Wilkinson power combiner 6-2, Wilkinson power dividers 7, Si substrates 8, SiO₂Layer 9, co-planar waveguide 10, slot-coupled structure 11, air bridges 12 are non-right Claim coplanar striplines 13, isolation resistance 14, terminal resistance 15, P-type semiconductor arm 16, N-type semiconductor arm 17, output electrode 18, heat End 19, cold end 20, substrate film structure 21, ratio method slot-coupled MEMS microwaves detection demodulation monolithic system 22, signal storage Device 23, signal analyzer 24, microwave signal reconstruct 25, microwave signal modulator 26, microwave signal power amplifier 27, adaptively Radar Receiver System 28, adaption radar emission system 29 receive and dispatch conversion circuit 30, antenna 31, first port 1-1, second end Mouth 1-2, third port 1-3, the 4th port 1-4, fifth port 1-5, the 6th port 1-6, July 1st port 2-1, the 8th port 2-2, the 9th port 2-3.

Specific implementation mode

The adaption radar of the present invention receives system 28 and adaptive by antenna 31, transmitting-receiving conversion circuit 30, adaption radar Radar emission system 29 is answered to form, adaption radar receives system 28 and detects demodulation monolithic by ratio method slot-coupled MEMS microwaves System 22, signal storage 23 and the cascade of signal analyzer 24 are constituted, and realize the detection and analysis to unknown radar signal；It is adaptive Radar emission system 29 is answered to be made of microwave signal reconstruct 25, microwave signal modulator 26 and microwave signal power amplifier 27, Realize the modulation and forwarding to unknown radar signal；

Ratio method slot-coupled MEMS microwaves detection demodulation monolithic system is stitched by six ports in the adaption radar of the present invention Gap coupler 1, microwave frequency and power detection module 2, demodulation module 3, the cascade of microwave phase detector module 4 are constituted；Six ports Slot coupler 1 is made of co-planar waveguide 10 and slot-coupled structure 11；Co-planar waveguide 10 is produced on SiO₂On layer 9, two seams 10 length of co-planar waveguide between gap coupled structure 11 is λ/4；Microwave frequency and power detection module 2 are by the second indirect heating type Microwave power detector 5-2 and third indirect heating type microwave power detector 5-3 are constituted, into line frequency inspection synchronous with power It surveys, they are connected to third port 1-3 and fifth port 1-5；Demodulation module 3 is needed by the first indirectly heat type micro-wave Power sensor 5-1 compositions, are connected to second port 1-2；Microwave phase detector module 4 is by the 4th indirect heating type microwave power Sensor 5-4, the 5th indirect heating type microwave power detector 5-5, the first Wilkinson power combiner 6-1, second Wilkinson power combiners 6-2, Wilkinson power divider 7 is constituted, and carries out microwave phase detector；Wilkinson work( The topological structure of rate synthesizer, Wilkinson power dividers is identical, by co-planar waveguide 11, asymmetrical coplanar stripline 13 and sky Air bridge 12, isolation resistance 14 are constituted, and signal is Wilkinson power dividers from the 7th port 2-1 inputs, and signal is from the 8th end Mouth 2-2, the 9th port 2-3 are input to Wilkinson power combiners；

First port 1-1 to third port 1-3, the 4th port 1-4 and the first port 1- of six port Slot couplers 1 1 to fifth port 1-5, the power degree of coupling difference of the 6th port 1-6 is identical；Measured signal is through six port Slot couplers 1 First port 1-1 inputs, are output to the first indirect heating type microwave power detector 5-1, by third port by second port 1-2 1-3 and fifth port 1-5 is respectively outputted to the second indirect heating type microwave power sensing of microwave frequency and power detection module 2 Device 5-2 and third indirect heating type microwave power detector 5-3, microwave phase is output to by the 4th port 1-4 and the 6th port 1-6 Position detection module 4.It realizes and is integrated together three kinds of power of microwave signal, frequency, phase detection modules, to synchronization The synchronous detection simultaneously of the power of microwave signal, frequency and phase, to meet the requirement that adaption radar real-time matching communicates, with And the demodulation to modulated signal, with low-power consumption, low cost and the high benefit of integrated level.Wherein microwave power, frequency, phase Detection and modulated signal demodulation principle is explained as follows：

Power detection：Third port 1-3 and fifth port of the microwave signal as shown in Figure 2 through six port Slot couplers 1 1-5 is respectively outputted to the second indirect heating type microwave power detector 5-2 and third indirect heating type microwave power detector 5- 3, it is assumed that the degree of coupling is respectively C_o1And C_o2, then it is coupled to the coupled power such as formula (1) of third port 1-3 and fifth port 1-5 It is shown, so as to the anti-size for releasing input signal power；And the size P of coupled power₃And P₅It can be by as shown in FIG. 6 Indirect heating type microwave power sensing measures, and microwave power is inputted from input port, and terminal electricity is input to by co-planar waveguide 10 Resistance 15 is converted to heat；P-type semiconductor arm 16 and N-type semiconductor arm 17 constitute thermocouple, and thermocouple is close to terminal resistance 15 Region is as hot junction 19, and thermocouple is close to 18 region of output electrode as cold end 20；It is defeated by measuring according to Seebeck effects Go out and inputs microwave power size known to the thermoelectrical potential of electrode 18；Substrate thinning is constituted substrate film by 19 back of hot junction of thermocouple Structure 21 is to improve detection sensitivity；So far the input power size of microwave signal can be measured.

Frequency detecting：Frequency and power synchronize detection, due to degree of coupling C_o1And C_o2Be it is with frequency change, Therefore by the P in formula (1)₃And P₅It carries out comparing operation, obtains formula (2).

Wherein a₀, a₁, a₂For constant, f indicates frequency size, it is possible thereby to find coupled power P₃And P₅Ratio only and frequency Rate is related, and unrelated with its dependent variable, therefore need to only measure the second indirect heating type microwave power detector 5-2 and third is indirect The output of heated microwave power sensor 5-3, is then compared, and can obtain the frequency size of former microwave signal.

Phase-detection：Fourth port 1-4 and sixth port of the microwave signal as shown in Figure 2 through six port Slot couplers 1 1-6 is input to microwave phase detector module 4 and carries out phase-detection；Two slot-coupled structures 11 of six port Slot couplers 1 Between 10 length of co-planar waveguide be λ/4, pass through the two way microwave signals phase of the 4th port 1-4 and the 6th port 1-6 at this time Difference is 90 °；Assuming that input power P_r, the reference of f (microwave frequency and power detection module 2 measure) identical as measured signal frequency Signal, reference signal are divided into two-way power and the identical signal of phase through Wilkinson power dividers 7, with the 4th port 1-4 It is closed through the first Wilkinson power combiners 6-1 and the 2nd Wilkinson power with the two-way measured signal of the 6th port 1-6 The 6-2 that grows up to be a useful person carries out power combing；4th indirect heating type microwave power detector 5-4 and the 5th indirect heating type microwave power pass Sensor 5-5 is to the power P after the synthesis of left and right two-way_cs1, P_cs2It is detected, and to be measured and reference signal is obtained by formula (3) Between phase difference

P₄, P₆For the power that the 4th port 1-4 is coupled with the 6th port 1-6, and because third port 1-3 and the 4th end The degree of coupling of mouth 1-4 is identical, and fifth port 1-5 is identical as the degree of coupling of the 6th port 1-6, then there is P₄=P₃, P₆=P₅。

Phase difference can be released from formula (3)Relational expression it is as follows：

P₄, P₆For the power that the 4th port 1-4 is coupled with the 6th port 1-6, and because third port 1-3 and the 4th end The degree of coupling of mouth 1-4 is identical, and fifth port 1-5 is identical as the degree of coupling of the 6th port 1-6, then there is P₄=P₃, P₆=P₅.By Formula (4) can uniquely determine phase differenceValue.

Modulated signal demodulates：Because indirect heating type microwave power detector has nonlinear characteristic and low pass filtered baud Property, so, when modulated signal is input to the first indirect heating type microwave power detector 5-1, indirectly using first The multiplication of the second nonlinear characteristic of heated microwave power detector 5-1 is used as demodulator, meanwhile, the first indirectly heat The low-frequency filter characteristics of type micro-wave power detector 5-1 are used as low-pass filter and filter out high-frequency signal therein, and conduct The modulated signal of low frequency signal just is demodulated out, to realize the demodulation of modulated signal.

The preparation method of ratio method slot-coupled MEMS microwaves detection demodulation monolithic system includes following in adaption radar Several steps：

1) prepare 4 inches of high resistant Si substrates 8, resistivity 4000, Ω cm, thickness is 400 μm；

2) SiO that thermally grown a layer thickness is 1.2 μm₂Layer 9；

3) chemical vapor deposition (CVD) grows one layer of polysilicon, and thickness is 0.4 μm；

4) one layer photoresist of coating and photoetching, in addition to polysilicon resistance region, other regions are photo-etched glue protection, and note Enter phosphorus (P) ion, doping concentration 10¹⁵cm^-2, form isolation resistance 14 and terminal resistance 15；

5) layer photoresist is coated, P is used⁺Photolithography plate carries out photoetching, in addition to 16 region of P-type semiconductor arm, other regions It is photo-etched glue protection, is then poured into boron (B) ion, doping concentration 10¹⁶cm^-2, form the P-type semiconductor arm 16 of thermocouple；

6) layer photoresist is coated, N is used⁺Photolithography plate carries out photoetching, in addition to 17 region of N-type semiconductor arm, other regions It is photo-etched glue protection, is then poured into phosphorus (P) ion, doping concentration 10¹⁶cm^-2, form the N-type semiconductor arm 17 of thermocouple；

7) layer photoresist, photoetching thermoelectric pile and polysilicon resistance figure are coated, then thermocouple is formed by dry etching Arm and polysilicon resistance；

8) layer photoresist is coated, photoetching removes co-planar waveguide 10, asymmetrical coplanar stripline 13, metal interconnecting wires output electricity Photoresist at pole 18；

9) electron beam evaporation (EBE) forms first layer gold (Au), and thickness is 0.3 μm, is removed on photoresist and photoresist Au, stripping formed co-planar waveguide 10 and asymmetric coplanar strip 13 first layer Au, output electrode 18 and thermoelectric pile metal it is mutual Line；

10) uniformly one layer of air layer of coating and litho pattern, thickness are 2 μm, retain the polyimides of 12 lower section of air bridges As sacrificial layer；

11) photoresist is coated, photoetching removes slot-coupled structure 11, co-planar waveguide 10, asymmetrical coplanar stripline 13 and defeated Go out the photoresist of 18 position of electrode；

12) the Au layers that plating a layer thickness is 2 μm are used as second layer Au；

13) Au on photoresist and photoresist, slot-coupled structure 11, co-planar waveguide 10, asymmetric coplanar strip are removed Line 13 and output electrode 18；

14) deep reaction ion etching (DRIE) the substrate material back side makes membrane structure 21；

15) polyimide sacrificial layer is discharged：Developer solution impregnates, and removes the polyimide sacrificial layer under air bridges, deionization Water impregnates slightly, absolute ethyl alcohol dehydration, volatilizees, dries under room temperature.

Difference with the prior art of the present invention is：

Present invention employs six port slot-coupled structures, the microwave that this slot-coupled structure will be transmitted in co-planar waveguide A part for signal goes out a part by slot-coupled structure Coupling and comes, and the microwave signal by being coupled out is integrated detects microwave The power of signal, the size of frequency and phase, when detecting microwave signal, using indirect heating type microwave power detector, With preferable microwave property, high integration and zero DC power；And ratio method measurement frequency is utilized, output is effectively made Voltage avoids the influence of noise and interference, greatly improves accuracy.Meanwhile ratio method in adaption radar of the invention The slot-coupled MEMS microwaves detection demodulation nonlinear characteristic of monolithic system application indirect heating type microwave power detector and low Pass filter characteristic, which demodulates modulated signal, demodulates modulated signal, is not necessarily to multiplier and oscillator so that body Product and complexity greatly reduce.Three kinds of power of microwave signal, frequency, phase detection modules are integrated together by the present invention, It is logical to meet adaption radar real-time matching to the power of the microwave signal of synchronization, frequency and phase synchronous detection simultaneously The requirement of news, and the demodulation to modulated signal realize ratio method slot-coupled MEMS microwaves in adaption radar and detect With the system integration of demodulation monolithic.

The structure for meeting conditions above is considered as ratio method slot-coupled MEMS microwaves inspection in the adaption radar of the present invention Survey demodulation monolithic system.

Claims (4)

1. ratio method slot-coupled MEMS microwaves detection demodulation monolithic system in a kind of adaption radar, it is characterised in that：This is System is by six port Slot couplers (1), microwave frequency and power detection module (2), demodulation module (3), microwave phase detector mould Block (4) cascade is constituted；The first port (1-1) of six port Slot couplers to third port (1-3), the 4th port (1-4) with And first port (1-1) is identical to fifth port (1-5), the power degree of coupling of the 6th port (1-6) difference；By the 4th port (1-4) and the 6th port (1-6) are respectively outputted to the first Wilkinson power combiners (6- of microwave phase detector module (4) 1) and one end of the 2nd Wilkinson power combiners (6-2), and by two output ends of Wilkinson power dividers (7) It is connected respectively to the other end of the first Wilkinson power combiners (6-1) and the 2nd Wilkinson power combiners (6-2), And the output end of the first Wilkinson power combiners (6-1) and the 2nd Wilkinson power combiners (6-2) is connected to Four indirect heating type microwave power detectors (5-4) and the 5th indirect heating type microwave power detector (5-5)；By third port (1-3) and fifth port (1-5) are respectively outputted to the second indirectly heat type micro-wave work(of microwave frequency and power detection module (2) Rate sensor (5-2) and third indirect heating type microwave power detector (5-3), thus allow for microwave frequency and power Synchronous detection；Microwave signal is input to micro- through the 4th port (1-4) of six port Slot couplers 1 and the 6th port (1-6) Wave phase detection module (4) carries out phase-detection；Using indirect heating type microwave power detector (5-1) nonlinear characteristic and Low-frequency filter characteristics demodulate modulated signal；By the above structure, by three kinds of power of microwave signal, frequency, phase inspections Module is surveyed to be integrated together, it is adaptive to meet to the power of the microwave signal of synchronization, frequency and phase synchronous detection simultaneously The requirement for answering radar real-time matching to communicate, and the demodulation to modulated signal, realize ratio method gap in adaption radar Couple the system integration of the detection of MEMS microwaves and demodulation monolithic.

2. ratio method slot-coupled MEMS microwaves detection demodulation monolithic system in adaption radar according to claim 1, It is characterized in that：Adaption radar receives system (27) and adaptive by antenna (31), transmitting-receiving conversion circuit (30), adaption radar Radar emission system (29) is answered to form, adaption radar receives system (28) and detects demodulation by ratio method slot-coupled MEMS microwaves Monolithic system (22), signal storage (23) and signal analyzer (24) cascade are constituted, and realize the detection to unknown radar signal And analysis；Adaption radar emission system (29) is by microwave signal reconstruct (25), microwave signal modulator (26) and microwave signal Power amplifier (27) is constituted, and realizes modulation and forwarding to unknown radar signal.

3. ratio method slot-coupled MEMS microwaves detection demodulation monolithic system in adaption radar according to claim 1, It is characterized in that：Six port Slot couplers (1) are made of co-planar waveguide (10) and slot-coupled structure (11)；Co-planar waveguide (10) and slot-coupled structure (11) is produced on SiO₂On layer (9), the co-planar waveguide between two slot-coupled structures (11) is long Degree is λ/4.

4. ratio method slot-coupled MEMS microwaves detection demodulation monolithic system in adaption radar according to claim 1, It is characterized in that：Indirectly heat type micro-wave work(sensor is by Si substrates (8), SiO₂Layer (9), co-planar waveguide (10), terminal resistance (15), P-type semiconductor arm (16), N-type semiconductor arm (17), output electrode (18) are constituted；Microwave power passes through co-planar waveguide (10) it is input to terminal resistance (15) and is converted to the heat that can be measured；P-type semiconductor arm (16) and N-type semiconductor arm (17) thermocouple is constituted；According to Seebeck effects, the thermoelectrical potential by measuring output electrode (18) can extrapolate input microwave Watt level.