CN108646224A - The direct MEMS microwaves of phase comparing method cantilever beam detect demodulating system in adaption radar - Google Patents

Abstract

The direct MEMS microwaves of phase comparing method cantilever beam detect demodulating system in the adaption radar of the present invention, are mainly made of six port cantilever beam couplers, microwave frequency detection module, microwave phase detector module and microwave power detection and four part of demodulation module；Adaption radar is detected by antenna, transmitting-receiving conversion circuit, MEMS microwaves and demodulation monolithically integrated system, signal storage, signal analyzer, microwave signal reconstruct, microwave signal modulator and microwave signal power amplifier are constituted.The structure can complete three kinds of power to microwave signal, frequency, phase detection modules and integrate, and power, frequency and the phase synchronous detection simultaneously of the microwave signal to synchronization, with the demodulation to modulated signal, the direct MEMS microwaves detection demodulating system of phase comparing method cantilever beam in adaption radar is realized.

Description

The direct MEMS microwaves of phase comparing method cantilever beam detect demodulating system in adaption radar

Technical field

The present invention proposes the direct MEMS microwaves detection demodulating system of phase comparing method cantilever beam in adaption radar, belongs to MEMS The technical field of electronic mechanical system.

Background technology

Modern adaption radar includes mainly two systems direction：Adaption radar is scouted and high deception true to nature, wherein certainly It refers to by Radar Signal Detection, Radar Objective Characteristics analysis, the selection of confrontation pattern, confrontation effect analysis and confrontation sample to adapt to radar-reconnaissance Links one closed-loop system of composition such as formula adjustment, and high deception true to nature refers to carrying out accurate duplication and forwarding to enemy's signal, is made Curve can with after enemy radar Signal Matching simultaneously into enemy radar signal receiving circuit to reach curve mesh Target purpose.But to the detection of microwave signal measured using some large-scale devices at present, there is volumes greatly, work( Consumption is high, frequency band is narrow and integrated level it is low a series of problems, and our power for focusing on microwave signal, phase and frequency The measurement of the parameters such as rate, in addition, being also one of emphasis to the demodulation of microwave modulated signal.In ghz band, signal wavelength and electricity Various component sizes are closer in road, and voltage, electric current can transfer to be stated with the form of wave, and the phase delay of signal makes Voltage, electric current in circuit at different location is different in the amplitude of synchronization, thus the phase of microwave signal also just at One important measurement parameter.Thermal conductivity is less than conventional bulk, improves hot spot transfer efficiency, reduces the waste of the energy. For adaption radar angle, if the power to microwave signal, phase and frequency integrated can be realized and to same a period of time Power, frequency and the phase synchronous detection simultaneously of the microwave signal at quarter, to meet the requirement of adaption radar real-time matching communication, It can also carry out the demodulation to the modulated signal of input, it will it is significant, therefore the present invention proposes oneself based on silicon technology It adapts to the direct MEMS microwaves of phase comparing method cantilever beam in radar and detects demodulating system.

Invention content

Technical problem：The object of the present invention is to provide a kind of direct MEMS microwaves of phase comparing method cantilever beam in adaption radar Demodulating system is detected, conciliates mode transfer using six port cantilever beam Coupler ports come the microwave signal detection function module that is of coupled connections Block, to realize a chip simultaneously to the power of microwave signal, frequency, the detection of three kinds of microwave parameters of phase and to The demodulation of modulated signal.

Technical solution：The direct MEMS microwaves of phase comparing method cantilever beam detect demodulating system in the adaption radar of the present invention, main It will be by six port cantilever beam couplers, microwave frequency detection module, microwave phase detector module and microwave power detection reconciliation Mode transfer block forms；

The first port of six port cantilever beam couplers is to third port, fifth port and first port to the 4th end Mouth, the power degree of coupling difference of the 6th port are identical, and measured signal is inputted through first port, and it is straight to be output to first by second port Heated microwave power detector is connect, the demodulation of microwave power detection and modulated signal is synchronously carried out；By third port and 4th port is output to two input ports of the 3rd Wilkinson power combiners of microwave frequency detection module, third The output end of Wilkinson power combiners connects the second direct-heating type microwave power detector, carries out the inspection of microwave frequency It surveys；By fifth port and the 6th port be respectively outputted to microwave phase detector module the first Wilkinson power combiners and One end of 2nd Wilkinson power combiners, and be connected respectively to by two output ends of Wilkinson power dividers The other end of first Wilkinson power combiners and the 2nd Wilkinson power combiners, and the first Wilkinson power The output end of synthesizer and the 2nd Wilkinson power combiners is connected to third direct-heating type microwave power detector and Four direct-heating type microwave power detectors carry out microwave phase detector；By the above structure, realize and meanwhile to microwave signal into Detection is synchronized while row power, frequency, phase, to meet the requirement of adaption radar real-time matching communication, and to modulated The demodulation of signal processed.

Wherein, the present invention towards adaption radar by dual-mode antenna, transmitting-receiving conversion circuit, adaption radar receive system With adaption radar emission system form, adaption radar receive system detected and demodulated by MEMS microwaves monolithically integrated system, Signal storage and signal analyzer cascade are constituted, and realize the detection and analysis to unknown radar signal；Adaption radar emits System is reconstructed by microwave signal, microwave signal modulator and microwave signal power amplifier are constituted, and is realized to unknown radar signal Modulation and forwarding.

Six port cantilever beam couplers are by co-planar waveguide, dielectric layer, and air layer and two pieces are symmetrically across cantilever above it Beam is constituted；Co-planar waveguide is produced on SiO₂On layer, the disposed thereon dielectric layer of lower section, that is, CPW of cantilever beam, and with air layer, outstanding Arm beam collectively forms coupled capacitor structure, and the co-planar waveguide length between two cantilever beams is λ/4.

Advantageous effect：

1) microwave is believed in the direct MEMS microwaves detection demodulating system of phase comparing method cantilever beam in adaption radar of the invention Number power, three kinds of frequency, phase detection modules integrated, complete the power to the microwave signal of synchronization, frequency Rate and phase synchronous detection simultaneously, to meet the requirement of adaption radar real-time matching communication, and the demodulation to modulated signal, Reduce power consumption and cost；

2) in adaption radar of the invention in the direct MEMS microwaves detection demodulating system of phase comparing method cantilever beam, using direct The nonlinear characteristic and low-frequency filter characteristics of heated microwave power sensor demodulate modulated signal, avoid use Influence caused by multiplier and oscillator to volume and complexity；

3) the direct MEMS microwaves detection demodulating system of phase comparing method cantilever beam passes through phase comparing method in adaption radar of the invention Measurement frequency, improves the ability of output voltage antinoise and interference, and accuracy is effectively promoted；

4) directly adding in the direct MEMS microwaves detection demodulating system of phase comparing method cantilever beam in adaption radar of the invention Hot type microwave power detector is solid state energy converter, and without movable member, reliability is high, and service life is long, Maintenance free, It not will produce noise when work.

Description of the drawings

Fig. 1 is the overall structure composition frame chart of adaption radar,

Fig. 2 detects the principle frame of demodulating system for the direct MEMS microwaves of phase comparing method cantilever beam in the adaption radar of the present invention Figure,

Fig. 3 is the vertical view of six port cantilever beam couplers,

Fig. 4 is AA ' the directional profile figures of six port cantilever beam couplers of Fig. 3,

Fig. 5 is the vertical view of Wilkinson power divider/synthesizers,

Fig. 6 is the vertical view of direct-heating type microwave power detector,

Fig. 7 is AA ' the directional profile figures of Fig. 6 direct-heating type microwave power detectors.

Figure includes：Six port cantilever beam couplers 1, microwave frequency detection module 2, microwave power detection and demodulation module 3, microwave phase detector module 4, first port 1-1, second port 1-2, third port 1-3, fifth port 1-5, the 4th port 1-4, the 6th port 1-6, July 1st port 2-1, the 8th port 2-2, the 9th port 2-3, the first direct-heating type microwave power Sensor 5-1, the second direct-heating type microwave power detector 5-2, third direct-heating type microwave power detector 5-3, the Four direct-heating type microwave power detector 5-4, the 5th direct-heating type microwave power detector 5-5, the first Wilkinson work( Rate synthesizer 6-1, the 2nd Wilkinson power combiner 6-2, Wilkinson power divider 7, Si substrates 8, dielectric layer 9, Cantilever beam 10, air layer 11, SiO₂Layer 12, co-planar waveguide 13, anchoring area 14, isolation resistance 15, air bridges 16 are asymmetric coplanar Band line 17, terminal resistance 18, semiconductor arm 19, transmission line ground wire 20, output electrode 21, hot junction 22, cold end 23, substrate film knot Structure 24, MIM capacitor 25, the detection of MEMS microwaves and demodulation monolithically integrated system 26, signal storage 27, signal analyzer 28 are micro- Wave signal reconstruction 29, microwave signal modulator 30, microwave signal power amplifier 31, adaption radar receives system 32, adaptive Radar emission system 31, antenna 34 is answered to receive and dispatch conversion circuit 35.

Specific implementation mode

The present invention towards adaption radar system 32 and is received by antenna 34, transmitting-receiving conversion circuit 35, adaption radar Adaption radar emission system 33 forms, and adaption radar receives system 32 and detects and demodulate monolithically integrated system by MEMS microwaves 26, signal storage 27 and the cascade of signal analyzer 28 are constituted, and realize the detection and analysis to unknown radar signal；Adaptive thunder It is made of, realizes microwave signal reconstruct 29, microwave signal modulator 30 and microwave signal power amplifier 31 up to emission system 33 Modulation and forwarding to unknown radar signal.

The direct MEMS microwaves of phase comparing method cantilever beam detect demodulating system by six port cantilevers in the adaption radar of the present invention Beam coupler 1, microwave frequency detection module 2, microwave power detection and demodulation module 3, microwave phase detector module 4 cascade structure At；Six port cantilever beam couplers 1 are made of co-planar waveguide 13, dielectric layer 9, air layer 11 and cantilever beam 10；Co-planar waveguide 13 It is produced on SiO₂On layer 12, the anchoring area 14 of cantilever beam 10 is produced on co-planar waveguide 13, and the lower section deposition of cantilever beam 10 has medium Layer 9, and coupled capacitor structure is collectively formed with air layer 11, cantilever beam 10, the co-planar waveguide 13 between two cantilever beams 10 is grown Degree is λ/4；Microwave Detector 2 is sensed by the 3rd Wilkinson power combiners 6-3 and the second direct-heating type microwave power Device 5-2 is constituted, and carries out microwave frequency detection, and two input terminals of the 3rd Wilkinson power combiners 6-3 are connected to third end Mouth 1-3 and fifth port 1-5；Microwave power detection and demodulation module 3 need to be sensed by the first direct-heating type microwave power Device 5-1 can complete microwave power detection and modulated signal demodulates two functions, be connected to second port 1-2；Microwave phase Detection module 4 is by third direct-heating type microwave power detector 5-3, the 4th direct-heating type microwave power detector 5-4, the One Wilkinson power combiners 6-1, the 2nd Wilkinson power combiner 6-2, Wilkinson power divider 7 are constituted, Carry out microwave phase detector；The topological structure of Wilkinson power combiners, Wilkinson power dividers is identical, by coplanar Waveguide 13, asymmetrical coplanar stripline 17 and air bridges 16, isolation resistance 15 are constituted, and signal is from the 7th port 2-1 inputs Wilkinson power dividers, signal are input to Wilkinson power combiners from the 8th port 2-2, the 9th port 2-3；

First port 1-1 to third port 1-3, fifth port 1-5 and the first port of six port cantilever beam couplers 1 The power degree of coupling difference of 1-1 to the 4th port 1-4, the 6th port 1-6 are identical；Measured signal is through six port cantilever beam couplers 1 first port 1-1 inputs, are output to the first direct-heating type microwave power detector 5-1, by third by second port 1-2 Port 1-3 and the 4th port 1-4 is respectively outputted to the second direct-heating type microwave power detector of microwave frequency detection module 2 5-2 and third direct-heating type microwave power detector 5-3, microwave phase is output to by fifth port 1-5 and the 6th port 1-6 Position detection module 4.Detection of the chip simultaneously to the power of microwave signal, three kinds of frequency, phase microwave parameters is realized, with Meet the requirement of adaption radar real-time matching communication, and the demodulation to microwave modulated signal, there is low-power consumption, low cost The high benefit with integrated level.Wherein microwave frequency, phase, power testing principle be explained as follows：

The demodulation of power detection and modulated signal：Microwave signal as shown in Figure 1 is through six port cantilever beam couplers 1 Second port 1-2 is connected to the first direct-heating type microwave power detector 5-1, is declined using as shown in Figure 5 directly heating Wave power senses the watt level for measuring microwave signal, and microwave power is inputted from input port, is input to by co-planar waveguide 13 Terminal resistance 18 is converted to heat；Terminal resistance 18 is equivalent to semiconductor arm 19 and constitutes thermocouple, and thermocouple is close to terminal electricity 18 regions are hindered as hot junction 22, and thermocouple is close to 21 region of output electrode as cold end 23；According to Seebeck effects, pass through survey It measures and inputs microwave power size known to the thermoelectrical potential of output electrode 21；Substrate thinning is constituted substrate by 22 back of hot junction of thermocouple Membrane structure 24 so far can measure the input power size of microwave signal to improve detection sensitivity；On the other hand, because directly Connecing heated microwave power sensor has nonlinear characteristic and low-frequency filter characteristics, so, when modulated signal is input to the When one direct heated microwave power sensor 5-1, the two of the first direct-heating type microwave power detector 5-1 are utilized The multiplication of rank nonlinear characteristic is used as demodulator, meanwhile, the low pass filtered of the first direct-heating type microwave power detector 5-1 Wave property is used as low-pass filter and filters out high-frequency signal therein, and the modulated signal as low frequency signal is just demodulated out Come, to realize the demodulation of modulated signal.

Frequency detecting：Assuming that input power P_in, then the second direct-heating type microwave power detector 5-2, third directly add The power P that hot type microwave power detector 5-3 and the 4th direct-heating type microwave power detector 5-4 are detected_f1、P_f2And P_f3 It can be expressed as：

Wherein S_f1Indicate first port 1-1 to the transmission coefficient of the second direct-heating type microwave power detector 5-2, S_f2 Indicate first port 1-1 to the transmission coefficient of third direct-heating type microwave power detector 5-3, S_f3Indicate first port 1-1 To the transmission coefficient of the 4th direct-heating type microwave power detector 5-4.By the 3rd Wilkinson power combiners 6-3's After synthesis, following formula can be readily available：

Wherein S₃₁For first port 1-1 to the transmission coefficient of third port 1-3, S₄₁For first port 1-1 to the 4th port The transmission coefficient of 1-4.When frequency detecting, inputted without reference to signal, therefore, the watt level at fifth port 1-5 is third Twice of direct-heating type microwave power detector 5-3 record powers, the watt level of the 6th port 1-6 are the 4th to directly heat Twice of type micro-wave power sensor 5-4 record powers, so as to obtain following transmission coefficient：

Wherein S₅₁For first port 1-1 to the transmission coefficient of fifth port 1-5, S₆₁For first port 1-1 to the 6th port The transmission coefficient of 1-6.Since third port 1-3 is identical as the degree of coupling of fifth port 1-5, the 4th port 1-4 and the 6th port The degree of coupling of 1-6 is identical, therefore can be obtained by formula (2) and (3)：

S_f1=S_f2+S_f3 (4)

Formula (4) modulus can be obtained：

WhereinIndicate that third direct-heating type microwave power detector 5-3 and the 4th direct-heating type microwave power are passed The phase difference of signal between sensor 5-4, abbreviation can obtain：

Formula (1), which is substituted into formula (6), to be obtained：

Value it is related to measured signal frequency linearity, be expressed as

The expression formula of frequency can be obtained by formula (6) and (7)：

Wherein c is expressed as the speed of electromagnetic wave in a vacuum, l be expressed as third port 1-3 to the 4th port 1-4 away from From ε_erIt is expressed as SiO₂Relative dielectric constant.

Phase-detection：Fifth port 1-5 and sixth end of the microwave signal as shown in Figure 1 through six port cantilever beam couplers 1 Mouth 1-6 is input to microwave phase detector module 4 and carries out phase-detection；Two cantilever beams 10 of six port cantilever beam couplers 1 it Between 13 length of co-planar waveguide be λ/4, pass through the two way microwave signals phase difference of fifth port 1-5 and the 6th port 1-6 at this time It is 90 °；Assuming that input power P_r, the reference letter of f (microwave frequency and power detection module 2 measure) identical as measured signal frequency Number, reference signal is divided into two-way power and the identical signal of phase through Wilkinson power dividers 7, with fifth port 1-5 It is closed through the first Wilkinson power combiners 6-1 and the 2nd Wilkinson power with the two-way measured signal of the 6th port 1-6 The 6-2 that grows up to be a useful person carries out power combing；Third direct-heating type microwave power detector 5-3 and the 4th direct-heating type microwave power pass Sensor 5-4 is to the power P after the synthesis of left and right two-way_cs1, P_cs2It is detected, and to be measured and reference signal is obtained by formula (10) Between phase difference

P₅, P₆For the power that fifth port 1-5 is coupled with the 6th port 1-6, and because third port 1-3 and the 5th end The degree of coupling of mouth 1-5 is identical, and the 4th port 1-4 is identical as the degree of coupling of the 6th port 1-6, then there is P₃=P₅, P₄=P₆。

Phase difference can be released from formula (10)Relational expression it is as follows：

P₅, P₆For the power that fifth port 1-5 is coupled with the 6th port 1-6, and because third port 1-3 and the 5th end The degree of coupling of mouth 1-5 is identical, and the 4th port 1-4 is identical as the degree of coupling of the 6th port 1-6, then there is P₃=P₅, P₄=P₆.By Formula (11) can uniquely determine phase differenceValue.

The preparation method of the direct MEMS microwaves detection demodulating system of phase comparing method cantilever beam includes following several in adaption radar A step：

1) prepare 4 inches of high resistant Si substrates 8, resistivity is 4000 Ω cm, thickness 400um；

2) thermally grown a layer thickness is the SiO of 1.2um₂Layer 12；

3) chemical vapor deposition (CVD) grows one layer of polysilicon, thickness 0.4um；

4) one layer photoresist of coating and photoetching, in addition to polysilicon resistance region, other regions are photo-etched glue protection, and note Enter phosphorus (P) ion, doping concentration 10¹⁵cm^-2, form isolation resistance 15 and terminal resistance 18；

5) layer photoresist is coated, P is used⁺Photolithography plate carries out photoetching, in addition to 20 region of P-type semiconductor arm, other regions It is photo-etched glue protection, is then poured into boron (B) ion, doping concentration 10¹⁶cm^-2, form the P-type semiconductor arm 20 of thermocouple；

6) layer photoresist is coated, N is used⁺Photolithography plate carries out photoetching, in addition to 19 region of N-type semiconductor arm, other regions It is photo-etched glue protection, is then poured into phosphorus (P) ion, doping concentration 10¹⁶cm^-2, form the N-type semiconductor arm 19 of thermocouple；

7) layer photoresist, photoetching thermoelectric pile and polysilicon resistance figure are coated, then thermocouple is formed by dry etching Arm and polysilicon resistance；

8) layer photoresist is coated, photoetching removes co-planar waveguide 13, asymmetrical coplanar stripline 17, metal interconnecting wires output electricity Photoresist at pole 21；

9) electron beam evaporation (EBE) forms first layer gold (Au), and thickness 0.3um is removed on photoresist and photoresist Au, stripping formed co-planar waveguide 13 and asymmetric coplanar strip 17 first layer Au, output electrode 21 and thermoelectric pile metal it is mutual Line；

10) (LPCVD) one layer of Si is deposited₃N₄, thickness 0.1um；

11) layer photoresist, photoetching and the photoresist for retaining 10 lower section of cantilever beam, dry etching Si are coated₃N₄, formed and be situated between Matter layer 9；

12) uniformly one layer of air layer 11 of coating and litho pattern, thickness 2um, the polyamides for retaining 10 lower section of cantilever beam are sub- Amine is as sacrificial layer；

13) coat photoresist, photoetching remove cantilever beam 10, anchoring area 14, co-planar waveguide 13, asymmetrical coplanar stripline 17 and The photoresist of 21 position of output electrode；

14) seed layer for evaporating 500/1500/300A ° of Ti/Au/Ti, removes one thickness of re-plating after the Ti layers at top Degree is the Au layers of 2um；

15) Au on photoresist and photoresist is removed, cantilever beam 10, anchoring area 14, co-planar waveguide 13, asymmetric total is formed Face band line 17 and output electrode 21；

16) deep reaction ion etching (DRIE) the substrate material back side makes membrane structure 24；

17) polyimide sacrificial layer is discharged：Developer solution impregnates, and removes the polyimide sacrificial layer under cantilever beam, deionization Water impregnates slightly, absolute ethyl alcohol dehydration, volatilizees, dries under room temperature.

Difference with the prior art of the present invention is：

Present invention employs six port cantilever beam coupled structures, what this cantilever beam coupled structure was transmitted from co-planar waveguide A part is coupled out in microwave signal, and using the signal being coupled out come power, frequency and the phase of integrated detection microwave signal Size detects the power of microwave signal using direct-heating type microwave power detector, has preferable microwave property, zero directly Flow power consumption and high integration；And it is measured using phase comparing method in measurement frequency, efficiently avoids noise and interference Influence to output voltage, greatly improves accuracy.Moreover, phase comparing method cantilever beam in adaption radar of the invention The nonlinear characteristic and low pass filtered baud of direct MEMS microwaves detection demodulating system application direct-heating type microwave power detector Property modulated signal is demodulated, be not necessarily to multiplier and oscillator, substantially reduce volume and complexity.The present invention is to micro- Three kinds of power of wave signal, frequency, phase detection modules are integrated, and to the power of the microwave signal of synchronization, Frequency and phase synchronous detection simultaneously, to meet the requirement of adaption radar real-time matching communication, and the solution to modulated signal It adjusts, realizes the direct MEMS microwaves detection demodulating system of phase comparing method cantilever beam in adaption radar.

The structure for meeting conditions above is considered as the direct MEMS microwaves of phase comparing method cantilever beam in the adaption radar of the present invention Detect demodulating system.

Claims (3)

1. the direct MEMS microwaves of phase comparing method cantilever beam detect demodulating system in a kind of adaption radar, it is characterised in that the detection solution Adjusting system includes six port cantilever beam couplers (1), microwave frequency detection module (2), microwave power detection and demodulation module (3), microwave phase detector module (4)；Wherein the first port (1-1) of six port cantilever beam couplers (1) arrives third port (1- 3) identical with the degree of coupling of fifth port (1-5), to the power degree of coupling also phase of the 4th port (1-4), the 6th port (1-6) Together；Measured signal is inputted through first port (1-1), and the inspection of the first direct-heating type microwave power is output to by second port (1-2) Device (5-1) is surveyed, microwave power detection is carried out；And the first direct-heating type microwave power detector (5-1) of application is non-linear Characteristic and low-frequency filter characteristics demodulate modulated signal；Third port (1-3) and the 4th port (1-4) are respectively outputted to Two input ports of the 3rd Wilkinson power combiners (6-3) of microwave frequency detection module (2), the 3rd Wilkinson The output end of power combiner (6-3) connects the second direct-heating type microwave power detector (5-2), carries out microwave frequency inspection It surveys；The first Wilkinson of microwave phase detector module (4) is respectively outputted to by fifth port (1-5) and the 6th port (1-6) One end of power combiner (6-1) and the 2nd Wilkinson power combiners (6-2), and by Wilkinson power dividers (7) two output ends are connected respectively to the first Wilkinson power combiners (6-1) and the 2nd Wilkinson power combings The other end of device (6-2), and the first Wilkinson power combiners (6-1) and the 2nd Wilkinson power combiners (6-2) Output end be connected to third direct-heating type microwave power detector (5-3) and the 4th direct-heating type microwave power detector (5-4) carries out microwave phase detector；The structure collects three kinds of power of microwave signal, frequency, phase detection modules At, the synchronous detection simultaneously of the power to the microwave signal of synchronization, frequency and phase is completed, it is real to meet adaption radar When matching communication requirement, and the demodulation to modulated signal；

Si substrates (8), SiO₂Layer (12), co-planar waveguide (13), terminal resistance (18), transmission line ground wire (20), semiconductor arm (19), output electrode (21) composition directly heats type micro-wave work(sensor；Microwave power is inputted by CPW, that is, co-planar waveguide (13) Thermal energy is converted to terminal resistance (18)；Microwave power size is inputted known to the thermoelectrical potential of output electrode (21) by measuring.

2. the direct MEMS microwaves of phase comparing method cantilever beam detect demodulating system, feature in adaption radar according to claim 1 It is that the adaption radar receives system (32) and adaptive thunder by antenna (34), transmitting-receiving conversion circuit (35), adaption radar It is formed up to emission system (33), adaption radar receives system (32) and detects and demodulate monolithically integrated system by MEMS microwaves (26), signal storage (27) and signal analyzer (28) cascade are constituted, and realize the detection and analysis to unknown radar signal；From Radar emission system (33) is adapted to by microwave signal reconstruct (29), microwave signal modulator (30) and microwave signal power to be amplified Device (31) is constituted, and realizes modulation and forwarding to unknown radar signal.

3. the direct MEMS microwaves of phase comparing method cantilever beam detect demodulating system, feature in adaption radar according to claim 1 It is, six port cantilever beam couplers (1) are by co-planar waveguide (13), dielectric layer (9), air layer (11) and hanged across above it Arm beam (10) is constituted；Co-planar waveguide (13) is produced on SiO₂On layer (12), anchoring area (14) is produced on co-planar waveguide (13), cantilever The lower section metallization medium layer (9) of beam (10), and collectively form coupled capacitor structure with air layer (11), cantilever beam (10), two CPW length of transmission line between cantilever beam (10) is λ/4.