CN108594188A - The direct MEMS microwaves of ratio method cantilever beam detect demodulating system in adaption radar - Google Patents
The direct MEMS microwaves of ratio method cantilever beam detect demodulating system in adaption radar Download PDFInfo
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- CN108594188A CN108594188A CN201810208216.5A CN201810208216A CN108594188A CN 108594188 A CN108594188 A CN 108594188A CN 201810208216 A CN201810208216 A CN 201810208216A CN 108594188 A CN108594188 A CN 108594188A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
- G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
- G01S7/02—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S13/00
- G01S7/40—Means for monitoring or calibrating
- G01S7/4004—Means for monitoring or calibrating of parts of a radar system
- G01S7/4008—Means for monitoring or calibrating of parts of a radar system of transmitters
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
- G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
- G01S7/02—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S13/00
- G01S7/40—Means for monitoring or calibrating
- G01S7/4004—Means for monitoring or calibrating of parts of a radar system
- G01S7/4021—Means for monitoring or calibrating of parts of a radar system of receivers
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- Radar, Positioning & Navigation (AREA)
- Remote Sensing (AREA)
- Computer Networks & Wireless Communication (AREA)
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- Radar Systems Or Details Thereof (AREA)
Abstract
The direct MEMS microwaves of ratio method cantilever beam detect demodulating system in the adaption radar of the present invention, are mainly made of six port cantilever beam couplers, microwave frequency and power detection module, microwave phase detector module and four part of demodulation module;Adaption radar is detected by antenna, transmitting-receiving conversion circuit, MEMS microwaves and demodulation monolithically integrated system, signal storage, signal analyzer, microwave signal reconstruct, microwave signal modulator and microwave signal power amplifier are constituted.The structure can complete three kinds of power to microwave signal, frequency, phase detection modules and integrate, and the power to the microwave signal of synchronization, frequency, with phase synchronous detection simultaneously and the demodulation to modulated signal, the direct MEMS microwaves detection demodulating system of ratio method cantilever beam in adaption radar is realized.
Description
Technical field
The present invention proposes the direct MEMS microwaves detection demodulating system of ratio method cantilever beam in adaption radar, belongs to micro-
The technical field of electronic mechanical system.
Background technology
For radar as a kind of effective sensor, the process for obtaining information is a kind of and environment interaction.But
In environment complicated and changeable, conventional radar is difficult to obtain good performance, therefore has expedited the emergence of out adaption radar.Adaptive thunder
Up to that intelligently can change information processing manner according to environmental condition, and this technology is then to the signal in microwave technology
The detection of power phases frequency proposes very high requirement.But now in microwave technology engineering, the detection to microwave signal
All be to be measured using some large-scale devices, that there is volumes is big, power consumption is high, frequency band is narrow and integrated level it is low it is a series of
Problem, and the measurement of the parameters such as our power for focusing on microwave signal, phase and frequency.In addition, brewed to microwave
The demodulation of signal is also one of emphasis.For more more complex microwave modulated signal, traditional mechanics of communication utilizes again
Another set of system is demodulated, this can equally cause the above problem, while also adding many costs.Finally, in order to realizing
It is same to the power of the power of microwave signal, the integrated of phase and frequency and microwave signal to synchronization, frequency and phase
When synchronize detection, with meet adaption radar real-time matching communication requirement, moreover it is possible to carry out to the modulated signal of input
Demodulation, the present invention propose the direct MEMS microwaves detection demodulation system of ratio method cantilever beam in the adaption radar based on silicon technology
System.
Invention content
Technical problem:The object of the present invention is to provide a kind of direct MEMS microwaves of ratio method cantilever beam in adaption radar
Demodulating system is detected, using six port cantilever beam Coupler ports come microwave signal detection function module and the demodulation of being of coupled connections
Module, to realize a chip simultaneously to the power of microwave signal, frequency, three kinds of microwave parameters of phase detection and
Demodulation to modulated signal.
Technical solution:The direct MEMS microwaves of ratio method cantilever beam detect demodulating system in the adaption radar of the present invention, main
It will be by six port cantilever beam couplers, microwave frequency and power detection module, microwave phase detector module and demodulation module group
At;
The first port of six port cantilever beam couplers is to third port, fifth port and first port to the 4th end
Mouth, the power degree of coupling difference of the 6th port are identical, and measured signal is inputted through first port, and first is output to by second port
Direct-heating type microwave power detector carries out the demodulation of modulated signal;It is respectively outputted to by third port and the 4th port
The the second direct-heating type microwave power detector and third direct-heating type microwave power of microwave frequency and power detection module
Sensor, into line frequency detection synchronous with power;Microwave phase detector mould is respectively outputted to by fifth port and the 6th port
One end of first Wilkinson power combiners and the 2nd Wilkinson power combiners of block, and by Wilkinson power
Two output ends of distributor are connected respectively to the first Wilkinson power combiners and the 2nd Wilkinson power combiners
The other end, and the output end of the first Wilkinson power combiners and the 2nd Wilkinson power combiners is connected to
Four direct-heating type microwave power detectors and the 5th direct-heating type microwave power detector carry out microwave phase detector;By
The above structure realizes and synchronizes detection while carrying out power, frequency, phase to microwave signal to meet adaption radar reality
When matching communication requirement, and the demodulation to modulated signal.
The present invention towards adaption radar by dual-mode antenna, transmitting-receiving conversion circuit, adaption radar receive system and from
Radar emission system composition is adapted to, adaption radar receives system and detects and demodulate monolithically integrated system, signal by MEMS microwaves
Memory and signal analyzer cascade are constituted, and realize the detection and analysis to unknown radar signal;Adaption radar emission system
It is made of microwave signal reconstruct, microwave signal modulator and microwave signal power amplifier, realizes the tune to unknown radar signal
System and forwarding.
Wherein, six port cantilever beam couplers are by co-planar waveguide, dielectric layer, and air layer and two pieces are symmetrically across on it
Square cantilever beam is constituted;Co-planar waveguide is produced on SiO2On layer, the disposed thereon dielectric layer of lower section, that is, CPW of cantilever beam, and with sky
Gas-bearing formation, cantilever beam collectively form coupled capacitor structure, and the co-planar waveguide length between two cantilever beams is λ/4.
Advantageous effect:
1) in adaption radar of the invention in the direct MEMS microwaves detection demodulating system of ratio method cantilever beam, to microwave
Three kinds of power of signal, frequency, phase detection modules are integrated, complete the power to the microwave signal of synchronization,
Frequency and phase synchronous detection simultaneously, to meet the requirement of adaption radar real-time matching communication, and to modulated signal
Demodulation, reduces power consumption and cost;
2) in adaption radar of the invention in the direct MEMS microwaves detection demodulating system of ratio method cantilever beam, using straight
The nonlinear characteristic and low-frequency filter characteristics for connecing heated microwave power sensor demodulate modulated signal, avoid
Use the influence to volume and complexity caused by multiplier and oscillator;
3) the direct MEMS microwaves detection demodulating system of ratio method cantilever beam passes through ratio method in adaption radar of the invention
Measurement frequency, improves the ability of output voltage antinoise and interference, and accuracy is effectively promoted;
4) directly adding in adaption radar phase comparing method cantilever beam MEMS microwaves of the invention detection and demodulation monolithic system
Hot type microwave power detector is solid state energy converter, and without movable member, reliability is high, and service life is long, without dimension
Shield, when work, not will produce noise.
Description of the drawings
Fig. 1 is the overall structure composition frame chart of adaption radar,
Fig. 2 detects the principle of demodulating system for the direct MEMS microwaves of ratio method cantilever beam in the adaption radar of the present invention
Block diagram,
Fig. 3 is the vertical view of six port cantilever beam couplers,
Fig. 4 is AA ' the directional profile figures of six port cantilever beam couplers of Fig. 3,
Fig. 5 is the vertical view of Wilkinson power divider/synthesizers,
Fig. 6 is the vertical view of direct-heating type microwave power detector,
Fig. 7 is AA ' the directional profile figures of direct-heating type microwave power detector.
Figure includes:Six port cantilever beam couplers 1, microwave frequency and power detection module 2, demodulation module 3, microwave
Phase detecting module 4, first port 1-1, second port 1-2, third port 1-3, fifth port 1-5, the 4th port 1-4, the
Six port 1-6, July 1st port 2-1, the 8th port 2-2, the 9th port 2-3, the first direct-heating type microwave power detector
5-1, the second direct-heating type microwave power detector 5-2, third direct-heating type microwave power detector 5-3, the 4th directly
Heated microwave power sensor 5-4, the 5th direct-heating type microwave power detector 5-5, the first Wilkinson power close
Grow up to be a useful person 6-1, the 2nd Wilkinson power combiner 6-2, Wilkinson power divider 7, Si substrates 8, dielectric layer 9, cantilever
Beam 10, air layer 11, SiO2Layer 12, co-planar waveguide 13, anchoring area 14, isolation resistance 15, air bridges 16, asymmetrical coplanar stripline
17, terminal resistance 18, semiconductor arm 19, transmission line ground wire 20, output electrode 21, hot junction 22, cold end 23, substrate film structure
24, MIM capacitor 25, MEMS microwaves detect and demodulation monolithically integrated system 26, signal storage 27, signal analyzer 28, microwave
Signal reconstruction 29, microwave signal modulator 30, microwave signal power amplifier 31, adaption radar receive system 32, adaptively
Radar emission system 33, antenna 34 receive and dispatch conversion circuit 35.
Specific implementation mode
The present invention towards adaption radar system 32 and is received by antenna 34, transmitting-receiving conversion circuit 35, adaption radar
Adaption radar emission system 33 forms, and adaption radar receives system 32 and detects and demodulate single-chip integration system by MEMS microwaves
System 26, signal storage 27 and the cascade of signal analyzer 28 are constituted, and realize the detection and analysis to unknown radar signal;It is adaptive
Radar emission system 33 is answered to be made of microwave signal reconstruct 29, microwave signal modulator 30 and microwave signal power amplifier 31,
Realize the modulation and forwarding to unknown radar signal.
The direct MEMS microwaves of ratio method cantilever beam detect demodulating system by six port cantilevers in the adaption radar of the present invention
Beam coupler 1, microwave frequency and power detection module 2, demodulation module 3, the cascade of microwave phase detector module 4 are constituted;Six ports
Cantilever beam coupler 1 is made of co-planar waveguide 13, dielectric layer 9, air layer 11 and cantilever beam 10;Co-planar waveguide 13 is produced on
SiO2On layer 12, the anchoring area 14 of cantilever beam 10 is produced on co-planar waveguide 13, and the lower section deposition of cantilever beam 10 has dielectric layer 9, and
Collectively form coupled capacitor structure with air layer 11, cantilever beam 10,13 length of co-planar waveguide between two cantilever beams 10 be λ/
4;Microwave frequency and power detection module 2 are directly heated and are declined by the second direct-heating type microwave power detector 5-2 and third
Wave power sensor 5-3 is constituted, and into line frequency detection synchronous with power, they are connected to third port 1-3 and the 4th
Port 1-4;3 needs of demodulation module are made of the first direct-heating type microwave power detector 5-1, are connected to second port
1-2;For microwave phase detector module 4 by the 4th direct-heating type microwave power detector 5-4, the 5th directly heats type micro-wave work(
Rate sensor 5-5, the first Wilkinson power combiner 6-1, the 2nd Wilkinson power combiner 6-2, Wilkinson
Power divider 7 is constituted, and carries out microwave phase detector;Wilkinson power combiners, Wilkinson power dividers are opened up
It is identical to flutter structure, is made of co-planar waveguide 13, asymmetrical coplanar stripline 17 and air bridges 16, isolation resistance 15, signal is from the 7th
2-1 inputs in port are Wilkinson power dividers, and signal is input to from the 8th port 2-2, the 9th port 2-3
Wilkinson power combiners;
First port 1-1 to third port 1-3, fifth port 1-5 and the first end of six port cantilever beam couplers 1
The power degree of coupling difference of mouth 1-1 to the 4th port 1-4, the 6th port 1-6 are identical;Measured signal is through six port cantilever beam couplings
The first port 1-1 inputs of clutch 1, the first direct-heating type microwave power detector 5-1 is output to by second port 1-2, by
Third port 1-3 and the 4th port 1-4 is respectively outputted to the second of microwave frequency and power detection module 2 and directly heats decline
Wave power sensor 5-2 and third direct-heating type microwave power detector 5-3, by fifth port 1-5 and the 6th port 1-6
It is output to microwave phase detector module 4.A chip is realized simultaneously to three kinds of power of microwave signal, frequency, phase microwaves
The detection of parameter, to meet the requirement of adaption radar real-time matching communication, and the demodulation to microwave modulated signal, tool
There are low-power consumption, low cost and the high benefit of integrated level.Wherein microwave power, frequency, the detection of phase and modulated signal demodulation
Principle is explained as follows:
Power detection:Third port 1-3 and fourth end of the microwave signal as shown in Figure 1 through six port cantilever beam couplers 1
Mouth 1-4 is respectively outputted to the second direct-heating type microwave power detector 5-2 and third direct-heating type microwave power detector
5-3, it is assumed that the degree of coupling is respectively Co1And Co2, then it is coupled to the coupled power such as formula of third port 1-3 and the 4th port 1-4
(1) shown in, so as to the anti-size for releasing input signal power;And the size P of coupled power3And P4It can be by such as Fig. 5 institutes
The direct-heating type microwave power sensing shown measures, and microwave power is inputted from input port, and end is input to by co-planar waveguide 13
End resistance 18 is converted to heat;Terminal resistance 18 is equivalent to semiconductor arm 19 and constitutes thermocouple, and thermocouple is close to terminal resistance
18 regions are as hot junction 22, and thermocouple is close to 21 region of output electrode as cold end 23;According to Seebeck effects, pass through measurement
Microwave power size is inputted known to the thermoelectrical potential of output electrode 21;Substrate thinning is constituted substrate by 22 back of hot junction of thermocouple
Membrane structure 24 is to improve detection sensitivity;So far the input power size of microwave signal can be measured.
Frequency detecting:Frequency and power synchronize detection, due to degree of coupling Co1And Co2Be it is with frequency change,
Therefore by the P in formula (1)3And P4It carries out comparing operation, obtains formula (2).
Wherein a0, a1, a2For constant, f indicates frequency size, it is possible thereby to find coupled power P3And P4Ratio only with
Frequency is related, and unrelated with its dependent variable, therefore need to only measure the second direct-heating type microwave power detector 5-2 and third
The output of direct-heating type microwave power detector 5-3, is then compared, and can obtain the frequency size of former microwave signal.
Phase-detection:Fifth port 1-5 and sixth end of the microwave signal as shown in Figure 1 through six port cantilever beam couplers 1
Mouth 1-6 is input to microwave phase detector module 4 and carries out phase-detection;Two cantilever beams 10 of six port cantilever beam couplers 1 it
Between 13 length of co-planar waveguide be λ/4, pass through the two way microwave signals phase difference of fifth port 1-5 and the 6th port 1-6 at this time
It is 90 °;Assuming that input power Pr, the reference of f (microwave frequency and power detection module 2 measure) identical as measured signal frequency
Signal, reference signal are divided into two-way power and the identical signal of phase through Wilkinson power dividers 7, with fifth port 1-
5 and the 6th port 1-6 two-way measured signal through the first Wilkinson power combiners 6-1 and the 2nd Wilkinson power
Synthesizer 6-2 carries out power combing;4th direct-heating type microwave power detector 5-4 and the 5th directly heats type micro-wave work(
Rate sensor 5-5 is to the power P after the synthesis of left and right two-waycs1, Pcs2It is detected, and to be measured and ginseng is obtained by formula (3)
Examine the phase difference between signal
P5, P6For the power that fifth port 1-5 is coupled with the 6th port 1-6, and because third port 1-3 and the 5th end
The degree of coupling of mouth 1-5 is identical, and the 4th port 1-4 is identical as the degree of coupling of the 6th port 1-6, then there is P3=P5, P4=P6。
Phase difference can be released from formula (3)Relational expression it is as follows:
P5, P6For the power that fifth port 1-4 is coupled with the 6th port 1-6, and because third port 1-3 and the 5th end
The degree of coupling of mouth 1-5 is identical, and the 4th port 1-4 is identical as the degree of coupling of the 6th port 1-6, then there is P3=P5, P4=P6.By
Formula (4) can uniquely determine phase differenceValue.
Modulated signal demodulates:Because direct-heating type microwave power detector has nonlinear characteristic and low-pass filtering
Characteristic, so, it is straight using first when modulated signal is input to the first direct-heating type microwave power detector 5-1
The multiplication for connecing the second nonlinear characteristic of heated microwave power detector 5-1 is used as demodulator, meanwhile, first directly
The low-frequency filter characteristics of heated microwave power detector 5-1 are used as low-pass filter and filter out high-frequency signal therein, and
Modulated signal as low frequency signal just is demodulated out, to realize the demodulation of modulated signal.
The preparation method of the direct MEMS microwaves detection demodulating system of ratio method cantilever beam includes following several in adaption radar
A step:
1) prepare 4 inches of high resistant Si substrates 8, resistivity is 4000 Ω cm, thickness 400um;
2) thermally grown a layer thickness is the SiO of 1.2um2Layer 12;
3) chemical vapor deposition (CVD) grows one layer of polysilicon, thickness 0.4um;
4) one layer photoresist of coating and photoetching, in addition to polysilicon resistance region, other regions are photo-etched glue protection, and
Inject phosphorus (P) ion, doping concentration 1015cm-2, form isolation resistance 15 and terminal resistance 18;
5) layer photoresist is coated, P is used+Photolithography plate carries out photoetching, in addition to 20 region of P-type semiconductor arm, other regions
It is photo-etched glue protection, is then poured into boron (B) ion, doping concentration 1016cm-2, form the P-type semiconductor arm 20 of thermocouple;
6) layer photoresist is coated, N is used+Photolithography plate carries out photoetching, in addition to 19 region of N-type semiconductor arm, other regions
It is photo-etched glue protection, is then poured into phosphorus (P) ion, doping concentration 1016cm-2, form the N-type semiconductor arm 19 of thermocouple;
7) layer photoresist, photoetching thermoelectric pile and polysilicon resistance figure are coated, then thermocouple is formed by dry etching
Arm and polysilicon resistance;
8) layer photoresist is coated, photoetching removes co-planar waveguide 13, asymmetrical coplanar stripline 17, metal interconnecting wires output
Photoresist at electrode 21;
9) electron beam evaporation (EBE) forms first layer gold (Au), and thickness 0.3um is removed on photoresist and photoresist
Au, stripping formed co-planar waveguide 13 and asymmetric coplanar strip 17 first layer Au, output electrode 21 and thermoelectric pile metal it is mutual
Line;
10) (LPCVD) one layer of Si is deposited3N4, thickness 0.1um;
11) layer photoresist, photoetching and the photoresist for retaining 10 lower section of cantilever beam, dry etching Si are coated3N4, formed and be situated between
Matter layer 9;
12) uniformly one layer of air layer 11 of coating and litho pattern, thickness 2um, the polyamides for retaining 10 lower section of cantilever beam are sub-
Amine is as sacrificial layer;
13) coat photoresist, photoetching remove cantilever beam 10, anchoring area 14, co-planar waveguide 13, asymmetrical coplanar stripline 17 and
The photoresist of 21 position of output electrode;
14) seed layer for evaporating 500/1500/300A ° of Ti/Au/Ti, removes one thickness of re-plating after the Ti layers at top
Degree is the Au layers of 2um;
15) Au on photoresist and photoresist is removed, cantilever beam 10, anchoring area 14, co-planar waveguide 13, asymmetric is formed
Coplanar striplines 17 and output electrode 21;
16) deep reaction ion etching (DRIE) the substrate material back side makes membrane structure 24;
Discharge polyimide sacrificial layer:Developer solution impregnates, and removes the polyimide sacrificial layer under cantilever beam, deionized water
It impregnates slightly, absolute ethyl alcohol dehydration, volatilizees, dry under room temperature.Difference with the prior art of the present invention is:
Present invention employs six port cantilever beam coupled structures, this cantilever beam coupled structure is transmitted from co-planar waveguide
Microwave signal in be coupled out a part, and using the signal being coupled out come power, frequency and the phase of integrated detection microwave signal
Position size, the power of microwave signal is detected using direct-heating type microwave power detector, have preferable microwave property,
Zero DC power and high integration;And measured using ratio method in measurement frequency, efficiently avoid noise and
The influence to output voltage is interfered, accuracy is greatly improved.Moreover, ratio method in adaption radar of the invention
The nonlinear characteristic and low pass of the direct MEMS microwaves detection demodulating system application direct-heating type microwave power detector of cantilever beam
The nonlinear characteristic of filtering characteristic application direct-heating type microwave power detector and low-frequency filter characteristics to modulated signal into
Row demodulation, is not necessarily to multiplier and oscillator, substantially reduces volume and complexity.The present invention realizes the work(to microwave signal
Three kinds of rate, frequency, phase detection modules are integrated, and the microwave signal to synchronization power, frequency and phase
Position synchronous detection simultaneously, to meet the requirement of adaption radar real-time matching communication, and the demodulation to modulated signal.
The structure for meeting conditions above is considered as the direct MEMS microwaves of ratio method cantilever beam in the adaption radar of the present invention
Detect demodulating system.
Claims (3)
1. the direct MEMS microwaves of ratio method cantilever beam detect demodulating system in a kind of adaption radar, it is characterised in that the monolithic system
System includes six port cantilever beam couplers (1), microwave frequency and power detection module (2), demodulation module (3), microwave phase inspection
Survey module (4);Wherein the first port (1-1) of six port cantilever beam couplers (1) arrives third port (1-3) and fifth port
The degree of coupling of (1-5) is identical, also identical to the 4th port (1-4), the power degree of coupling of the 6th port (1-6);Measured signal passes through
First port (1-1) inputs, and the first indirect heating type microwave power detector (5-1) is output to by second port (1-2), utilizes
The multiplication of the second nonlinear characteristic of first indirect heating type microwave power detector (5-1) acts on and low-frequency filter characteristics, into
The demodulation of row modulated signal;Microwave frequency and power detection are respectively outputted to by third port (1-3) and the 4th port (1-4)
The the second indirect heating type microwave power detector (5-2) and third indirect heating type microwave power detector (5- of module (2)
3), into line frequency detection synchronous with power;Microwave phase is respectively outputted to by fifth port (1-5) and the 6th port (1-6)
First Wilkinson power combiners (6-1) of detection module (4) and the one of the 2nd Wilkinson power combiners (6-2)
End, and it is connected respectively to the first Wilkinson power combiners (6- by two output ends of Wilkinson power dividers (7)
1) and the other end of the 2nd Wilkinson power combiners (6-2), the first Wilkinson power combiners (6-1) and second
The output end of Wilkinson power combiners (6-2) is connected to the 4th indirect heating type microwave power detector (5-4) and the 5th
Indirect heating type microwave power detector (5-5) carries out phase-detection;By the above structure, the microwave to synchronization is realized
Power, frequency and the phase synchronous detection simultaneously of signal, to meet the requirement of adaption radar real-time matching communication, and to
The demodulation of modulated signal;
Si substrates (8), SiO2Layer (12), co-planar waveguide (13), terminal resistance (18), transmission line ground wire (20), semiconductor arm
(19), output electrode (21) composition directly heats type micro-wave work(sensor;Microwave power is inputted by CPW, that is, co-planar waveguide (13)
Thermal energy is converted to terminal resistance (18);According to Seebeck effects, by measuring input known to the thermoelectrical potential of output electrode (21)
Microwave power size.
2. the direct MEMS microwaves of ratio method cantilever beam detect demodulating system, feature in adaption radar according to claim 1
It is that the adaption radar receives system (32) and adaptive thunder by antenna (34), transmitting-receiving conversion circuit (35), adaption radar
It is formed up to emission system (33), adaption radar receives system (32) and detects and demodulate monolithically integrated system by MEMS microwaves
(26), signal storage (27) and signal analyzer (28) cascade are constituted, and realize the detection and analysis to unknown radar signal;From
Radar emission system (33) is adapted to by microwave signal reconstruct (29), microwave signal modulator (30) and microwave signal power amplifier
(31) it constitutes, realizes the modulation and forwarding to unknown radar signal.
3. the direct MEMS microwaves of ratio method cantilever beam detect demodulating system, feature in adaption radar according to claim 1
It is, six port cantilever beam couplers (1) are by co-planar waveguide (13), dielectric layer (9), air layer (11) and hanged across above it
Arm beam (10) is constituted;Co-planar waveguide (13) is produced on SiO2On layer (12), anchoring area (14) is produced on co-planar waveguide (13), cantilever
The lower section metallization medium layer (9) of beam (10), and collectively form coupled capacitor structure with air layer (11), cantilever beam (10), two
CPW length of transmission line between cantilever beam (10) is λ/4.
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