CN108896827A - The direct micro-nano microwave of phase comparing method clamped beam detects demodulating system in adaption radar - Google Patents
The direct micro-nano microwave of phase comparing method clamped beam detects demodulating system in adaption radar Download PDFInfo
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Abstract
The direct micro-nano microwave of phase comparing method clamped beam detects demodulating system in adaption radar of the invention, mainly by six port clamped beam couplers, microwave frequency detection module, microwave phase detector module and microwave power detection and four part of demodulation module composition, adaption radar is detected by antenna, transmitting-receiving conversion circuit, MEMS microwave and demodulation monolithically integrated system, signal storage, signal analyzer, microwave signal reconstruct, microwave signal modulator and microwave signal power amplifier are constituted.The thermal conductivity of polysilicon nanowire cluster is far below conventional bulk, improves conversion efficiency of thermoelectric, greatly increases output voltage and sensitivity.The structure can three kinds of power, frequency, phase detection modules to microwave signal integrated, and realize the power to the microwave signal of synchronization, frequency and phase synchronous detection simultaneously, with the demodulation to modulated signal, the direct micro-nano microwave detection demodulating system of phase comparing method clamped beam in adaption radar is realized.
Description
Technical field
The invention proposes the direct micro-nano microwaves of phase comparing method clamped beam in adaption radar to detect demodulating system, belongs to micro-
The technical field of naiio-electro-meclianical systems.
Background technique
Currently, especially in the application of adaption radar, the detection to microwave signal is all in microwave communication field
Measured using some large-scale devices, that there is volumes is big, power consumption is high, frequency band is narrow and integrated level it is low a series of problems,
And the measurement of our power for focusing on microwave signal, the parameters such as phase and frequency, in addition, to microwave modulated signal
Demodulation be also one of emphasis.It is well known that the frequency range that receives of adaption radar is at ghz band mostly, with frequency
It is continuously increased, signal wavelength is closer to component sizes various in circuit, and voltage, electric current can transfer the form with wave
Statement, the phase delay of signal make voltage, electric current in circuit at different location different in the amplitude of synchronization,
It therefore is necessary in the phase that signal was grasped and controlled to microwave frequency band.In addition, being modulated for more more complex microwave
Signal, traditional mechanics of communication are demodulated using another set of system again, this can equally cause the above problem, while also increase
Many costs are added, have caused to be difficult to use in adaption radar.Furthermore in thermoelectric pile technical aspect, using nanometer thermoelectric idol as
It substitutes, material thermal conductivity used in polysilicon nanowire cluster is lower than conventional bulk, and the service efficiency of energy can be improved, subtract
The waste of few energy.Finally, in order to be able to achieve the power to microwave signal, phase and frequency integrated and to synchronization
The power of microwave signal, frequency and phase synchronous detection simultaneously, to meet the requirement that adaption radar real-time matching communicates,
It also can be carried out the demodulation to the modulated signal of input, the invention proposes phase comparing methods in the adaption radar based on silicon technology
The direct micro-nano microwave of clamped beam detects demodulating system.
Summary of the invention
Technical problem：The object of the present invention is to provide a kind of direct micro-nano microwaves of phase comparing method clamped beam in adaption radar
Demodulating system is detected, using six port clamped beam Coupler ports come microwave signal detection function module and the demodulation of being of coupled connections
Module, thus realize a chip simultaneously to the power of microwave signal, frequency, three kinds of microwave parameters of phase detection and
Demodulation to modulated signal.
Technical solution：The direct micro-nano microwave of phase comparing method clamped beam detects demodulating system in adaption radar of the invention, main
It will be by six port clamped beam couplers, microwave frequency detection module, microwave phase detector module and microwave power detection reconciliation
Mode transfer block composition；
The first port of six port clamped beam couplers is to third port, fifth port and first port to the 4th end
Mouth, the power degree of coupling difference of the 6th port are identical, and measured signal is inputted through first port, is output to first by second port
Direct-heating type microwave power detector is synchronously carried out the demodulation of microwave power detection and modulated signal；By third port
Two input ports of the 3rd Wilkinson power combiner of microwave frequency detection module, third are output to the 4th port
The output end of Wilkinson power combiner connects the second direct-heating type microwave power detector, carries out the inspection of microwave frequency
It surveys；By fifth port and the 6th port be respectively outputted to microwave phase detector module the first Wilkinson power combiner and
One end of 2nd Wilkinson power combiner, and be connected respectively to by two output ends of Wilkinson power divider
The other end of first Wilkinson power combiner and the 2nd Wilkinson power combiner, and the first Wilkinson power
The output end of synthesizer and the 2nd Wilkinson power combiner be connected to third direct-heating type microwave power detector and
4th direct-heating type microwave power detector carries out microwave phase detector；By the above structure, realizes while microwave is believed
Synchronous detection is while number carrying out power, frequency, phase to meet the requirement of adaption radar real-time matching communication and right
The demodulation of modulated signal.
The present invention towards adaption radar by dual-mode antenna, transmitting-receiving conversion circuit, adaption radar receive system and from
Radar emission system composition is adapted to, adaption radar receives system and detects and demodulate monolithically integrated system, signal by MEMS microwave
Memory and signal analyzer cascade are constituted, and realize the detection and analysis to unknown radar signal；Adaption radar emission system
It is made of microwave signal reconstruct, microwave signal modulator and microwave signal power amplifier, realizes the tune to unknown radar signal
System and forwarding.
Wherein, six port clamped beam couplers are by co-planar waveguide, dielectric layer, and air layer and two pieces are symmetrically across on it
Square clamped beam is constituted；Co-planar waveguide is produced on SiO2On layer, lower section, that is, CPW disposed thereon dielectric layer of clamped beam, and with sky
Gas-bearing formation, clamped beam collectively form coupled capacitor structure, and the co-planar waveguide length between two clamped beams is λ/4.
Beneficial effect：
1) in adaption radar of the invention in the direct micro-nano microwave detection demodulating system of phase comparing method clamped beam, to microwave
Three kinds of power of signal, frequency, phase detection modules are integrated, and are realized to the microwave signal of synchronization
Power, frequency and phase synchronous detection simultaneously, to meet the requirement of adaption radar real-time matching communication, and to brewed letter
Number demodulation, and reduce power consumption and cost；
2) in adaption radar of the invention in the direct micro-nano microwave detection demodulating system of phase comparing method clamped beam, using straight
The nonlinear characteristic and low-frequency filter characteristics for connecing heated microwave power sensor demodulate modulated signal, avoid
Use the influence brought by multiplier and oscillator to volume and complexity；
3) the direct micro-nano microwave detection demodulating system of phase comparing method clamped beam passes through phase comparing method in adaption radar of the invention
Measurement frequency, improves the ability of output voltage antinoise and interference, and accuracy is effectively promoted.
4) directly adding in the direct micro-nano microwave detection demodulating system of phase comparing method clamped beam in adaption radar of the invention
Hot type microwave power detector is solid state energy converter, without movable member, high reliablity, long service life, without dimension
Shield, when work, will not generate noise, and the thermal conductivity of used polysilicon nanowire cluster is far below conventional bulk, improves
Conversion efficiency of thermoelectric greatly increases output voltage.
Detailed description of the invention
Fig. 1 is the overall structure composition block diagram of adaption radar,
Fig. 2 is the principle that the direct micro-nano microwave of phase comparing method clamped beam detects demodulating system in adaption radar of the invention
Block diagram,
Fig. 3 is the top view of six port clamped beam couplers,
Fig. 4 is AA ' the directional profile figure of six port clamped beam coupler of Fig. 3,
Fig. 5 is the top view of Wilkinson power divider/synthesizer,
Fig. 6 is the top view of direct-heating type microwave power detector,
Fig. 7 is AA ' the directional profile figure of direct-heating type microwave power detector.
Include in figure：Six port clamped beam couplers 1, microwave frequency detection module 2, microwave power detection conciliate mode transfer
Block 3, microwave phase detector module 4, first port 1-1, second port 1-2, third port 1-3, fifth port 1-5, the 4th end
Mouth 1-4, the 6th port 1-6, July 1st port 2-1, the 8th port 2-2, the 9th port 2-3, first directly heat type micro-wave function
Rate sensor 5-1, the second direct-heating type microwave power detector 5-2, third direct-heating type microwave power detector 5-3,
4th direct-heating type microwave power detector 5-4, the 5th direct-heating type microwave power detector 5-5, first
Wilkinson power combiner 6-1, the 2nd Wilkinson power combiner 6-2, Wilkinson power divider 7, Si lining
Bottom 8, dielectric layer 9, clamped beam 10, air layer 11, SiO2Layer 12, co-planar waveguide 13, anchoring area 14, isolation resistance 15, air bridges
16, asymmetrical coplanar stripline 17, terminal resistance 18, semiconductor arm 19, transmission line ground wire 20, output electrode 21, hot end 22 is cold
End 23, substrate film structure 24, MIM capacitor 25, PMMA 26, polysilicon nanowire cluster 27, the detection of MEMS microwave and demodulation are single
Piece integrated system 28, signal storage 29, signal analyzer 30, microwave signal reconstruct 31, microwave signal modulator 32, microwave
Signal power amplifier 33, adaption radar receive system 34, adaption radar emission system 35, antenna 36, transmitting-receiving conversion electricity
Road 37.
Specific embodiment
The present invention towards adaption radar by antenna 36, transmitting-receiving conversion circuit 37, adaption radar receive 34 and of system
Adaption radar emission system 35 forms, and adaption radar receives system 34 and detects and demodulate single-chip integration system by MEMS microwave
System 28, signal storage 29 and the cascade of signal analyzer 30 are constituted, and realize the detection and analysis to unknown radar signal；It is adaptive
Radar emission system 35 is answered to be made of microwave signal reconstruct 31, microwave signal modulator 32 and microwave signal power amplifier 33,
Realize the modulation and forwarding to unknown radar signal.
The direct micro-nano microwave detection demodulating system of phase comparing method clamped beam is clamped by six ports in adaption radar of the invention
Beam coupler 1, microwave frequency detection module 2, microwave power detection and demodulation module 3, microwave phase detector module 4 cascade structure
At；Six port clamped beam couplers 1 are made of co-planar waveguide 13, dielectric layer 9, air layer 11 and clamped beam 10；Co-planar waveguide 13
It is produced on SiO2On layer 12, the anchoring area 14 of clamped beam 10 is produced on co-planar waveguide 13, and the lower section of clamped beam 10 is deposited with medium
Layer 9, and coupled capacitor structure is collectively formed with air layer 11, clamped beam 10, the co-planar waveguide 13 between two clamped beams 10 is long
Degree is λ/4；Microwave Detector 2 is passed by the 3rd Wilkinson power combiner 6-3 and the second direct-heating type microwave power
Sensor 5-2 is constituted, and carries out microwave frequency detection, and two input terminals of the 3rd Wilkinson power combiner 6-3 are connected to the
Three port 1-3 and fifth port 1-5；Microwave power detection and demodulation module 3 needs are by the first direct-heating type microwave power
Sensor 5-1 can complete microwave power detection and modulated signal demodulates two functions, be connected to second port 1-2；Microwave
Phase detecting module 4 is by third direct-heating type microwave power detector 5-3, the 4th direct-heating type microwave power detector
5-4, the first Wilkinson power combiner 6-1, the 2nd Wilkinson power combiner 6-2, Wilkinson power distribution
Device 7 is constituted, and carries out microwave phase detector；Wilkinson power combiner, the topological structure phase of Wilkinson power divider
Together, it is made of co-planar waveguide 13, asymmetrical coplanar stripline 17 and air bridges 16, isolation resistance 15, signal is from the 7th port 2-1
Input is Wilkinson power divider, and signal is input to Wilkinson power from the 8th port 2-2, the 9th port 2-3 and closes
It grows up to be a useful person；
First port 1-1 to third port 1-3, fifth port 1-5 and the first end of six port clamped beam couplers 1
The power degree of coupling difference of mouth 1-1 to the 4th port 1-4, the 6th port 1-6 are identical；Measured signal is through six port clamped beam couplings
The first port 1-1 of clutch 1 is inputted, and is output to the first direct-heating type microwave power detector 5-1 by second port 1-2, by
Third port 1-3 and the 4th port 1-4 is respectively outputted to the second direct-heating type microwave power of microwave frequency detection module 2
Sensor 5-2 and third direct-heating type microwave power detector 5-3, is output to by fifth port 1-5 and the 6th port 1-6
Microwave phase detector module 4.A chip is realized simultaneously to the power of microwave signal, frequency, phase three kinds of microwave parameters
Detection has low function to meet the requirement that adaption radar real-time matching communicates, and the demodulation to microwave modulated signal
Consumption, inexpensive and high integrated level benefit.Wherein microwave frequency, phase, the demodulation principle of the detection of power and modulated signal
It is explained as follows：
The demodulation of power detection and modulated signal：Microwave signal as shown in Figure 1 is through six port clamped beam couplers 1
Second port 1-2 is connected to the first direct-heating type microwave power detector 5-1, is declined using as shown in Figure 5 directly heating
Wave power senses the watt level for measuring microwave signal, and microwave power is inputted from input port, is input to by co-planar waveguide 13
Terminal resistance 18 is converted to heat；Terminal resistance 18 is equivalent to semiconductor arm 19 and constitutes thermocouple, and thermocouple is close to terminal electricity
18 regions are hindered as hot end 22, and thermocouple is close to 21 region of output electrode as cold end 23；According to Seebeck effect, pass through survey
It measures and inputs microwave power size known to the thermoelectrical potential of output electrode 21；Substrate thinning is constituted and is served as a contrast by 22 back of hot end of thermocouple
Bottom membrane structure 24 so far can measure the input power size of microwave signal to improve detection sensitivity；On the other hand, because
There are nonlinear characteristic and low-frequency filter characteristics for direct-heating type microwave power detector, so, when modulated signal is defeated
When entering to the first direct-heating type microwave power detector 5-1, the first direct-heating type microwave power detector 5- is utilized
The multiplication of 1 second nonlinear characteristic is used as demodulator, meanwhile, the first direct-heating type microwave power detector 5-1's
Low-frequency filter characteristics are used as low-pass filter and filter out high-frequency signal therein, and the modulated signal as low frequency signal is just
It is demodulated out, to realize the demodulation of modulated signal.
Frequency detecting：Assuming that input power Pin, then the second direct-heating type microwave power detector 5-2, third directly add
The power P that hot type microwave power detector 5-3 and the 4th direct-heating type microwave power detector 5-4 are detectedf1、Pf2And Pf3
It can be expressed as：
Wherein Sf1Indicate transmission coefficient of the first port 1-1 to the second direct-heating type microwave power detector 5-2, Sf2
Indicate transmission coefficient of the first port 1-1 to third direct-heating type microwave power detector 5-3, Sf3Indicate first port 1-1
To the transmission coefficient of the 4th direct-heating type microwave power detector 5-4.By the 3rd Wilkinson power combiner 6-3's
After synthesis, following formula can be readily available：
Wherein S31For first port 1-1 to the transmission coefficient of third port 1-3, S41For first port 1-1 to the 4th end
The transmission coefficient of mouth 1-4.It when frequency detecting, is inputted without reference to signal, therefore, the watt level at fifth port 1-5 is the
Three direct-heating type microwave power detector 5-3 measure twice of power, and the watt level of the 6th port 1-6 is the 4th direct
Heated microwave power sensor 5-4 measures twice of power, so as to obtain following transmission coefficient：
Wherein S51For first port 1-1 to the transmission coefficient of fifth port 1-5, S61For first port 1-1 to the 6th end
The transmission coefficient of mouth 1-6.Since third port 1-3 is identical as the degree of coupling of fifth port 1-5, the 4th port 1-4 and the 6th end
The degree of coupling of mouth 1-6 is identical, therefore can be obtained by formula (2) and (3)：
Sf1=Sf2+Sf3 (4)
Formula (4) modulus can be obtained：
WhereinIndicate that third direct-heating type microwave power detector 5-3 and the 4th direct-heating type microwave power are passed
The phase difference of signal between sensor 5-4, abbreviation can obtain：
Formula (1) substitution formula (6) can be obtained：
Value it is related to measured signal frequency linearity, be expressed as
The expression formula of frequency can be obtained by formula (7) and (8)：
Wherein c is expressed as the speed of electromagnetic wave in a vacuum, l be expressed as third port 1-3 to the 4th port 1-4 away from
From εerIt is expressed as SiO2Relative dielectric constant.
Phase-detection：Fifth port 1-5 and sixth end of the microwave signal as shown in Figure 1 through six port clamped beam couplers 1
Mouth 1-6 is input to microwave phase detector module 4 and carries out phase-detection；Two clamped beams 10 of six port clamped beam couplers 1 it
Between 13 length of co-planar waveguide be λ/4, at this time by the two way microwave signals phase difference of fifth port 1-5 and the 6th port 1-6
It is 90 °；Assuming that input power Pr, the reference of f (microwave frequency and power detection module 2 measure) identical as measured signal frequency
Signal, reference signal are divided into two-way power and the identical signal of phase through Wilkinson power divider 7, with fifth port 1-
5 and the 6th port 1-6 two-way measured signal through the first Wilkinson power combiner 6-1 and the 2nd Wilkinson power
Synthesizer 6-2 carries out power combing；Third direct-heating type microwave power detector 5-3 and the 4th directly heats type micro-wave function
Rate sensor 5-4 is to the power P after the synthesis of left and right two-waycs1, Pcs2It is detected, and obtains to be measured and ginseng by formula (10)
Examine the phase difference between signal
P5, P6For the power that fifth port 1-5 is coupled with the 6th port 1-6, and because third port 1-3 and the 5th end
The degree of coupling of mouth 1-5 is identical, and the 4th port 1-4 is identical as the degree of coupling of the 6th port 1-6, then there is P3=P5, P4=P6。
Phase difference can be released from formula (10)Relational expression it is as follows：
P5, P6For the power that fifth port 1-5 is coupled with the 6th port 1-6, and because third port 1-3 and the 5th end
The degree of coupling of mouth 1-5 is identical, and the 4th port 1-4 is identical as the degree of coupling of the 6th port 1-6, then there is P3=P5, P4=P6.By
Formula (11) can uniquely determine phase differenceValue.
The preparation method of the direct micro-nano microwave detection demodulating system of phase comparing method clamped beam includes following several in adaption radar
A step：
1) prepare 4 inches of high resistant Si substrates 8, resistivity is 4000 Ω cm, with a thickness of 400um；
2) thermally grown a layer thickness is the SiO of 1.2um2Layer 12；
3) chemical vapor deposition (CVD) grows one layer of polysilicon, with a thickness of 0.4um；
4) one layer photoresist of coating and photoetching, in addition to polysilicon resistance region, other regions are photo-etched glue protection, and
Inject phosphorus (P) ion, doping concentration 1015cm-2, form isolation resistance 15 and terminal resistance 18；
5) deep-UV lithography polysilicon nanowire.One layer of SiO2 is grown using LPCVD technique, DUV (deep ultraviolet) is photo-etched into
Type forms polysilicon nanometer cable architecture 27；
6) one layer of PMMA 26 of spin coating fills the gap between silicon nanowires 27, improves the stability of structure；
7) layer photoresist is coated, photoetching removes co-planar waveguide 13, asymmetrical coplanar stripline 17, metal interconnecting wires output
Photoresist at electrode 21；
8) electron beam evaporation (EBE) forms first layer gold (Au), with a thickness of 0.3um, removes on photoresist and photoresist
Au, removing forms first layer Au, output electrode 21, MIM capacitor 25 and the heat of co-planar waveguide 13 and asymmetric coplanar strip 17
Pile metal interconnecting wires；
9) layer photoresist, photoetching and the photoresist for retaining 10 lower section of clamped beam, dry etching Si are coated3N4, formed and be situated between
Matter layer 9；
10) one layer of air layer 11 and litho pattern are uniformly coated, with a thickness of 2um, the polyamides for retaining 10 lower section of clamped beam is sub-
Amine is as sacrificial layer；
11) coat photoresist, photoetching remove clamped beam 10, anchoring area 14, co-planar waveguide 13, asymmetrical coplanar stripline 17 and
The photoresist of 21 position of output electrode；
12) 500/1500/300A is evaporated°Ti/Au/Ti seed layer, remove top Ti layer after one thickness of re-plating
Degree is the Au layer of 2um；
13) Au on photoresist and photoresist is removed, clamped beam 10, anchoring area 14, co-planar waveguide 13, asymmetric is formed
Coplanar striplines 17 and output electrode 21；
14) deep reaction ion etching (DRIE) the substrate material back side makes membrane structure 24；
15) polyimide sacrificial layer is discharged：Developer solution impregnates, and removes the polyimide sacrificial layer under clamped beam, deionization
Water impregnates slightly, dehydrated alcohol dehydration, volatilizees, dries under room temperature.
Difference with the prior art of the present invention is：
Present invention employs six port clamped beam coupled structures, this clamped beam coupled structure is transmitted from co-planar waveguide
Microwave signal in be coupled out a part, and using the signal being coupled out come power, frequency and the phase of integrated detection microwave signal
Position size, the power of microwave signal is detected using direct-heating type microwave power detector, have preferable microwave property,
Zero DC power and high integration；And in measurement frequency measured using phase comparing method, efficiently avoid noise and
The influence to output voltage is interfered, accuracy is greatly improved.Moreover, phase comparing method in adaption radar of the invention
The nonlinear characteristic and low pass of the direct micro-nano microwave detection demodulating system application direct-heating type microwave power detector of clamped beam
Filtering characteristic demodulates modulated signal, is not necessarily to multiplier and oscillator, substantially reduces volume and complexity.This
Outside, thermoelectric pile constitutes the semiconductor arm of thermocouple, the polysilicon nanowire using the type polysilicon nanowire cluster of nanostructure
Material thermal conductivity used in cluster is lower than conventional bulk, occasionally can effectively improve conversion efficiency of thermoelectric using nanometer thermoelectric, significantly
Improve the sensitivity of microwave detection system.The present invention carries out three kinds of power of microwave signal, frequency, phase detection modules
It is integrated, and the power to the microwave signal of synchronization, frequency and phase synchronous detection simultaneously are realized, it is adaptive to meet
The requirement for answering radar real-time matching to communicate, and the demodulation to modulated signal, realize phase comparing method clamped beam in adaption radar
Direct micro-nano microwave detects demodulating system.
The structure for meeting conditions above is considered as the direct micro-nano microwave of phase comparing method clamped beam in adaption radar of the invention
Detect demodulating system.
Claims (3)
1. the direct micro-nano microwave of phase comparing method clamped beam detects demodulating system in a kind of adaption radar, it is characterised in that the detection solution
Adjusting system includes six port clamped beam couplers (1), microwave frequency detection module (2), microwave power detection and demodulation module
(3), microwave phase detector module (4)；Wherein the first port (1-1) of six port clamped beam couplers (1) arrives third port (1-
3) identical with the degree of coupling of fifth port (1-5), to the power degree of coupling also phase of the 4th port (1-4), the 6th port (1-6)
Together；Measured signal is inputted through first port (1-1), is output to the inspection of the first direct-heating type microwave power by second port (1-2)
It surveys device (5-1), carries out microwave power detection；And the first direct-heating type microwave power detector (5-1) of application is non-linear
Characteristic and low-frequency filter characteristics demodulate modulated signal；Third port (1-3) and the 4th port (1-4) are respectively outputted to
Two input ports of the 3rd Wilkinson power combiner (6-3) of microwave frequency detection module (2), the 3rd Wilkinson
The output end of power combiner (6-3) connects the second direct-heating type microwave power detector (5-2), carries out microwave frequency inspection
It surveys；The first Wilkinson of microwave phase detector module (4) is respectively outputted to by fifth port (1-5) and the 6th port (1-6)
One end of power combiner (6-1) and the 2nd Wilkinson power combiner (6-2), and by Wilkinson power divider
(7) two output ends are connected respectively to the first Wilkinson power combiner (6-1) and the 2nd Wilkinson power combing
The other end of device (6-2), and the first Wilkinson power combiner (6-1) and the 2nd Wilkinson power combiner (6-2)
Output end be connected to third direct-heating type microwave power detector (5-3) and the 4th direct-heating type microwave power detector
(5-4) carries out microwave phase detector；The structure collects three kinds of power to microwave signal, frequency, phase detection modules
At, and the power to the microwave signal of synchronization, frequency and phase synchronous detection simultaneously are realized, to meet adaptive thunder
The requirement communicated up to real-time matching, and the demodulation to modulated signal；
Si substrate (8) in adaption radar in the direct micro-nano microwave detection demodulating system of phase comparing method clamped beam, SiO2Layer (12),
Co-planar waveguide (13), terminal resistance (18), transmission line ground wire (20), semiconductor arm (19), output electrode (21), which is constituted, directly to be added
Hot type microwave function sensor；Microwave power is input to terminal resistance (18) by CPW, that is, co-planar waveguide (13) and is converted to thermal energy；Heat
Pile constitutes the semiconductor arm of thermocouple, polysilicon nanowire cluster (27) using the polysilicon nanowire cluster (27) of nanostructure
It is formed by deep-UV lithography, diameter 1-100nm, is highly 2-10um, the thermal conductivity of the polysilicon nanowire cluster (27) is lower than
Conventional bulk occasionally can effectively improve conversion efficiency of thermoelectric using nanometer thermoelectric, greatly improve sensitivity；According to Seebeck
Effect inputs microwave power size by measuring known to the thermoelectrical potential of output electrode (21).
2. the direct micro-nano microwave of phase comparing method clamped beam detects demodulating system, feature in adaption radar according to claim 1
It is that the adaption radar receives system (34) and adaptive thunder by antenna (36), transmitting-receiving conversion circuit (37), adaption radar
It is formed up to emission system (35), adaption radar receives system (34) and detects and demodulate monolithically integrated system by MEMS microwave
(28), signal storage (29) and signal analyzer (30) cascade are constituted, and realize the detection and analysis to unknown radar signal；From
Radar emission system (35) are adapted to by microwave signal reconstruct (31), microwave signal modulator (32) and microwave signal power amplifier
(33) it constitutes, realizes the modulation and forwarding to unknown radar signal.
3. in adaption radar according to claim 1 in the direct micro-nano microwave detection demodulating system of phase comparing method clamped beam, six ends
Mouth clamped beam coupler (1) is by co-planar waveguide (13), dielectric layer (9), air layer (11) and across clamped beam above it (10)
It constitutes；Co-planar waveguide (13) is produced on SiO2On layer (12), anchoring area (14) is produced on co-planar waveguide (13), clamped beam (10)
Lower section metallization medium layer (9), and coupled capacitor structure, two clamped beams are collectively formed with air layer (11), clamped beam (10)
(10) the CPW length of transmission line between is λ/4.
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| CN201810208078.0A CN108896827A (en) | 2018-03-14 | 2018-03-14 | The direct micro-nano microwave of phase comparing method clamped beam detects demodulating system in adaption radar |
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