CN108303687A - The direct MEMS microwaves of phase comparing method clamped beam detect demodulating system in adaption radar - Google Patents

Abstract

The direct MEMS microwaves of phase comparing method clamped beam detect demodulating system in the adaption radar of the present invention, are mainly made of six port clamped beam couplers, microwave frequency detection module, microwave phase detector module and microwave power detection and four part of demodulation module；Adaption radar is detected by antenna, transmitting-receiving conversion circuit, MEMS microwaves and demodulation monolithically integrated system, signal storage, signal analyzer, microwave signal reconstruct, microwave signal modulator and microwave signal power amplifier are constituted.The structure can integrate three kinds of power of microwave signal, frequency, phase detection modules, and realize the power to the microwave signal of synchronization, frequency and phase synchronous detection simultaneously, with the demodulation to modulated signal, the direct MEMS microwaves detection demodulating system of phase comparing method clamped beam in adaption radar is realized.

Description

The direct MEMS microwaves of phase comparing method clamped beam detect demodulating system in adaption radar

Technical field

The present invention proposes the direct MEMS microwaves detection demodulating system of phase comparing method clamped beam in adaption radar, belongs to MEMS The technical field of electronic mechanical system.

Background technology

Currently, in microwave communication field, especially in the application of adaption radar, the detection to microwave signal is all profit Measured with some large-scale devices, that there is volumes is big, power consumption is high, frequency band is narrow and integrated level it is low a series of problems, and The measurement of the parameters such as our power for focusing on microwave signal, phase and frequency, in addition, the demodulation to microwave modulated signal It is also one of emphasis.It is well known that the frequency range that receives of adaption radar is at ghz band mostly, with the continuous increasing of frequency Add, signal wavelength is closer to various component sizes in circuit, and voltage, electric current can transfer to be stated with the form of wave, letter Number phase delay make voltage, electric current in circuit at different location different in the amplitude of synchronization, therefore micro- The phase that signal was grasped and controlled to wave frequency section is necessary.In addition, for more more complex microwave modulated signal, pass The mechanics of communication of system is demodulated using another set of system again, this can equally cause the above problem, while being also added very much Cost causes to be difficult to use in adaption radar.Finally, in order to realizing the collection of power to microwave signal, phase and frequency At and to synchronization the power of microwave signal, frequency and phase it is synchronous simultaneously detect, it is real-time to meet adaption radar Match the requirement of communication, moreover it is possible to carry out the demodulation to the modulated signal of input, the present invention is proposed based on the adaptive of silicon technology Answer the direct MEMS microwaves detection demodulating system of phase comparing method clamped beam in radar.

Invention content

Technical problem：The object of the present invention is to provide a kind of direct MEMS microwaves of phase comparing method clamped beam in adaption radar Demodulating system is detected, conciliates mode transfer using six port clamped beam Coupler ports come the microwave signal detection function module that is of coupled connections Block, to realize a chip simultaneously to the power of microwave signal, frequency, the detection of three kinds of microwave parameters of phase and to The demodulation of modulated signal.

Technical solution：The direct MEMS microwaves of phase comparing method clamped beam detect demodulating system in the adaption radar of the present invention, main It will be by six port clamped beam couplers, microwave frequency detection module, microwave phase detector module and microwave power detection reconciliation Mode transfer block forms；

The first port of six port clamped beam couplers is to third port, fifth port and first port to the 4th end Mouth, the power degree of coupling difference of the 6th port are identical, and measured signal is inputted through first port, and it is straight to be output to first by second port Heated microwave power detector is connect, the demodulation of microwave power detection and modulated signal is synchronously carried out；By third port and 4th port is output to two input ports of the 3rd Wilkinson power combiners of microwave frequency detection module, third The output end of Wilkinson power combiners connects the second direct-heating type microwave power detector, carries out the inspection of microwave frequency It surveys；By fifth port and the 6th port be respectively outputted to microwave phase detector module the first Wilkinson power combiners and One end of 2nd Wilkinson power combiners, and be connected respectively to by two output ends of Wilkinson power dividers The other end of first Wilkinson power combiners and the 2nd Wilkinson power combiners, and the first Wilkinson power The output end of synthesizer and the 2nd Wilkinson power combiners is connected to third direct-heating type microwave power detector and Four direct-heating type microwave power detectors carry out microwave phase detector；By the above structure, realize and meanwhile to microwave signal into Detection is synchronized while row power, frequency, phase, to meet the requirement of adaption radar real-time matching communication, and to modulated The demodulation of signal processed.

Wherein, the present invention towards adaption radar by dual-mode antenna, transmitting-receiving conversion circuit, adaption radar receive system With adaption radar emission system form, adaption radar receive system detected and demodulated by MEMS microwaves monolithically integrated system, Signal storage and signal analyzer cascade are constituted, and realize the detection and analysis to unknown radar signal；Adaption radar emits System is reconstructed by microwave signal, microwave signal modulator and microwave signal power amplifier are constituted, and is realized to unknown radar signal Modulation and forwarding.

Six port clamped beam couplers are by co-planar waveguide, dielectric layer, air layer and two pieces it is symmetrically clamped across above it Beam is constituted；Co-planar waveguide is produced on SiO₂On layer, the disposed thereon dielectric layer of lower section, that is, CPW of clamped beam, and with air layer, solid Strutbeam collectively forms coupled capacitor structure, and the co-planar waveguide length between two clamped beams is λ/4.

Advantageous effect：

1) microwave is believed in the direct MEMS microwaves detection demodulating system of phase comparing method clamped beam in adaption radar of the invention Number power, three kinds of frequency, phase detection modules are integrated, and realize the work(to the microwave signal of synchronization Rate, frequency and phase synchronous detection simultaneously, to meet the requirement of adaption radar real-time matching communication, and to modulated signal Demodulation, reduces power consumption and cost；

2) in adaption radar of the invention in the direct MEMS microwaves detection demodulating system of phase comparing method clamped beam, using direct The nonlinear characteristic and low-frequency filter characteristics of heated microwave power sensor demodulate modulated signal, avoid use Influence caused by multiplier and oscillator to volume and complexity；

3) the direct MEMS microwaves detection demodulating system of phase comparing method clamped beam passes through phase comparing method in adaption radar of the invention Measurement frequency, improves the ability of output voltage antinoise and interference, and accuracy is effectively promoted.

4) directly adding in the direct MEMS microwaves detection demodulating system of phase comparing method clamped beam in adaption radar of the invention Hot type microwave power detector is solid state energy converter, and without movable member, reliability is high, and service life is long, Maintenance free, It not will produce noise when work.

Description of the drawings

Fig. 1 is the overall structure composition frame chart of adaption radar,

Fig. 2 detects the principle frame of demodulating system for the direct MEMS microwaves of phase comparing method clamped beam in the adaption radar of the present invention Figure,

Fig. 3 is the vertical view of six port clamped beam couplers,

Fig. 4 is AA ' the directional profile figures of six port clamped beam couplers of Fig. 3,

Fig. 5 is the vertical view of Wilkinson power divider/synthesizers,

Fig. 6 is the vertical view of direct-heating type microwave power detector,

Fig. 7 is AA ' the directional profile figures of direct-heating type microwave power detector.

Figure includes：Six port clamped beam couplers 1, microwave frequency detection module 2, microwave power detection and demodulation module 3, microwave phase detector module 4, first port 1-1, second port 1-2, third port 1-3, fifth port 1-5, the 4th port 1-4, the 6th port 1-6, July 1st port 2-1, the 8th port 2-2, the 9th port 2-3, the first direct-heating type microwave power Sensor 5-1, the second direct-heating type microwave power detector 5-2, third direct-heating type microwave power detector 5-3, the Four direct-heating type microwave power detector 5-4, the 5th direct-heating type microwave power detector 5-5, the first Wilkinson work( Rate synthesizer 6-1, the 2nd Wilkinson power combiner 6-2, Wilkinson power divider 7, Si substrates 8, dielectric layer 9, Clamped beam 10, air layer 11, SiO₂Layer 12, co-planar waveguide 13, anchoring area 14, isolation resistance 15, air bridges 16 are asymmetric coplanar Band line 17, terminal resistance 18, semiconductor arm 19, transmission line ground wire 20, output electrode 21, hot junction 22, cold end 23, substrate film knot Structure 24, MIM capacitor 25, the detection of MEMS microwaves and demodulation monolithically integrated system 26, signal storage 27, signal analyzer 28 are micro- Wave signal reconstruction 29, microwave signal modulator 30, microwave signal power amplifier 31, adaption radar receives system 32, adaptive Radar emission system 33, antenna 34 is answered to receive and dispatch conversion circuit 35.

Specific implementation mode

The present invention towards adaption radar system 32 and is received by antenna 34, transmitting-receiving conversion circuit 35, adaption radar Adaption radar emission system 33 forms, and adaption radar receives system 32 and detects and demodulate monolithically integrated system by MEMS microwaves 26, signal storage 27 and the cascade of signal analyzer 28 are constituted, and realize the detection and analysis to unknown radar signal；Adaptive thunder It is made of, realizes microwave signal reconstruct 29, microwave signal modulator 30 and microwave signal power amplifier 31 up to emission system 33 Modulation and forwarding to unknown radar signal.

The direct MEMS microwaves detection demodulating system of phase comparing method clamped beam is clamped by six ports in the adaption radar of the present invention Beam coupler 1, microwave frequency detection module 2, microwave power detection and demodulation module 3, microwave phase detector module 4 cascade structure At；Six port clamped beam couplers 1 are made of co-planar waveguide 13, dielectric layer 9, air layer 11 and clamped beam 10；Co-planar waveguide 13 It is produced on SiO₂On layer 12, the anchoring area 14 of clamped beam 10 is produced on co-planar waveguide 13, and the lower section deposition of clamped beam 10 has medium Layer 9, and coupled capacitor structure is collectively formed with air layer 11, clamped beam 10, the co-planar waveguide 13 between two clamped beams 10 is grown Degree is λ/4；Microwave Detector 2 is sensed by the 3rd Wilkinson power combiners 6-3 and the second direct-heating type microwave power Device 5-2 is constituted, and carries out microwave frequency detection, and two input terminals of the 3rd Wilkinson power combiners 6-3 are connected to third end Mouth 1-3 and fifth port 1-5；Microwave power detection and demodulation module 3 need to be sensed by the first direct-heating type microwave power Device 5-1 can complete microwave power detection and modulated signal demodulates two functions, be connected to second port 1-2；Microwave phase Detection module 4 is by third direct-heating type microwave power detector 5-3, the 4th direct-heating type microwave power detector 5-4, the One Wilkinson power combiners 6-1, the 2nd Wilkinson power combiner 6-2, Wilkinson power divider 7 are constituted, Carry out microwave phase detector；The topological structure of Wilkinson power combiners, Wilkinson power dividers is identical, by coplanar Waveguide 13, asymmetrical coplanar stripline 17 and air bridges 16, isolation resistance 15 are constituted, and signal is from the 7th port 2-1 inputs Wilkinson power dividers, signal are input to Wilkinson power combiners from the 8th port 2-2, the 9th port 2-3；

First port 1-1 to third port 1-3, fifth port 1-5 and the first port of six port clamped beam couplers 1 The power degree of coupling difference of 1-1 to the 4th port 1-4, the 6th port 1-6 are identical；Measured signal is through six port clamped beam couplers 1 first port 1-1 inputs, are output to the first direct-heating type microwave power detector 5-1, by third by second port 1-2 Port 1-3 and the 4th port 1-4 is respectively outputted to the second direct-heating type microwave power detector of microwave frequency detection module 2 5-2 and third direct-heating type microwave power detector 5-3, microwave phase is output to by fifth port 1-5 and the 6th port 1-6 Position detection module 4.Detection of the chip simultaneously to the power of microwave signal, three kinds of frequency, phase microwave parameters is realized, with Meet the requirement of adaption radar real-time matching communication, and the demodulation to microwave modulated signal, there is low-power consumption, low cost The high benefit with integrated level.The demodulation principle of wherein microwave frequency, phase, the detection of power and modulated signal is explained as follows：

The demodulation of power detection and modulated signal：Microwave signal as shown in Figure 1 is through six port clamped beam couplers 1 Second port 1-2 is connected to the first direct-heating type microwave power detector 5-1, is declined using as shown in Figure 5 directly heating Wave power senses the watt level for measuring microwave signal, and microwave power is inputted from input port, is input to by co-planar waveguide 13 Terminal resistance 18 is converted to heat；Terminal resistance 18 is equivalent to semiconductor arm 19 and constitutes thermocouple, and thermocouple is close to terminal electricity 18 regions are hindered as hot junction 22, and thermocouple is close to 21 region of output electrode as cold end 23；According to Seebeck effects, pass through survey It measures and inputs microwave power size known to the thermoelectrical potential of output electrode 21；Substrate thinning is constituted substrate by 22 back of hot junction of thermocouple Membrane structure 24 so far can measure the input power size of microwave signal to improve detection sensitivity；On the other hand, because directly Connecing heated microwave power sensor has nonlinear characteristic and low-frequency filter characteristics, so, when modulated signal is input to the When one direct heated microwave power sensor 5-1, the two of the first direct-heating type microwave power detector 5-1 are utilized The multiplication of rank nonlinear characteristic is used as demodulator, meanwhile, the low pass filtered of the first direct-heating type microwave power detector 5-1 Wave property is used as low-pass filter and filters out high-frequency signal therein, and the modulated signal as low frequency signal is just demodulated out Come, to realize the demodulation of modulated signal.

Frequency detecting：Assuming that input power P_in, then the second direct-heating type microwave power detector 5-2, third directly add The power P that hot type microwave power detector 5-3 and the 4th direct-heating type microwave power detector 5-4 are detected_f1、P_f2And P_f3 It can be expressed as：

Wherein S_f1Indicate first port 1-1 to the transmission coefficient of the second direct-heating type microwave power detector 5-2, S_f2 Indicate first port 1-1 to the transmission coefficient of third direct-heating type microwave power detector 5-3, S_f3Indicate first port 1-1 To the transmission coefficient of the 4th direct-heating type microwave power detector 5-4.By the 3rd Wilkinson power combiners 6-3's After synthesis, following formula can be readily available：

Wherein S₃₁For first port 1-1 to the transmission coefficient of third port 1-3, S₄₁For first port 1-1 to the 4th port The transmission coefficient of 1-4.When frequency detecting, inputted without reference to signal, therefore, the watt level at fifth port 1-5 is third Twice of direct-heating type microwave power detector 5-3 record powers, the watt level of the 6th port 1-6 are the 4th to directly heat Twice of type micro-wave power sensor 5-4 record powers, so as to obtain following transmission coefficient：

Wherein S₅₁For first port 1-1 to the transmission coefficient of fifth port 1-5, S₆₁For first port 1-1 to the 6th port The transmission coefficient of 1-6.Since third port 1-3 is identical as the degree of coupling of fifth port 1-5, the 4th port 1-4 and the 6th port The degree of coupling of 1-6 is identical, therefore can be obtained by formula (2) and (3)：

S_f1=S_f2+S_f3 (4)

Formula (4) modulus can be obtained：

WhereinIndicate that third direct-heating type microwave power detector 5-3 and the 4th direct-heating type microwave power are passed The phase difference of signal between sensor 5-4, abbreviation can obtain：

Formula (1), which is substituted into formula (6), to be obtained：

Value it is related to measured signal frequency linearity, be expressed as

The expression formula of frequency can be obtained by formula (7) and (8)：

Wherein c is expressed as the speed of electromagnetic wave in a vacuum, l be expressed as third port 1-3 to the 4th port 1-4 away from From ε_erIt is expressed as SiO₂Relative dielectric constant.

Phase-detection：Fifth port 1-5 and sixth end of the microwave signal as shown in Figure 1 through six port clamped beam couplers 1 Mouth 1-6 is input to microwave phase detector module 4 and carries out phase-detection；Two clamped beams 10 of six port clamped beam couplers 1 it Between 13 length of co-planar waveguide be λ/4, pass through the two way microwave signals phase difference of fifth port 1-5 and the 6th port 1-6 at this time It is 90 °；Assuming that input power P_r, the reference letter of f (microwave frequency and power detection module 2 measure) identical as measured signal frequency Number, reference signal is divided into two-way power and the identical signal of phase through Wilkinson power dividers 7, with fifth port 1-5 It is closed through the first Wilkinson power combiners 6-1 and the 2nd Wilkinson power with the two-way measured signal of the 6th port 1-6 The 6-2 that grows up to be a useful person carries out power combing；Third direct-heating type microwave power detector 5-3 and the 4th direct-heating type microwave power pass Sensor 5-4 is to the power P after the synthesis of left and right two-way_cs1, P_cs2It is detected, and to be measured and reference signal is obtained by formula (10) Between phase difference

P₅, P₆For the power that fifth port 1-5 is coupled with the 6th port 1-6, and because third port 1-3 and the 5th end The degree of coupling of mouth 1-5 is identical, and the 4th port 1-4 is identical as the degree of coupling of the 6th port 1-6, then there is P₃=P₅, P₄=P₆。

Phase difference can be released from formula (10)Relational expression it is as follows：

P₅, P₆For the power that fifth port 1-5 is coupled with the 6th port 1-6, and because third port 1-3 and the 5th end The degree of coupling of mouth 1-5 is identical, and the 4th port 1-4 is identical as the degree of coupling of the 6th port 1-6, then there is P₃=P₅, P₄=P₆.By Formula (11) can uniquely determine phase differenceValue.

The preparation method of the direct MEMS microwaves detection demodulating system of phase comparing method clamped beam includes following several in adaption radar A step：

1) prepare 4 inches of high resistant Si substrates 8, resistivity is 4000 Ω cm, thickness 400um；

2) thermally grown a layer thickness is the SiO of 1.2um₂Layer 12；

3) chemical vapor deposition (CVD) grows one layer of polysilicon, thickness 0.4um；

4) one layer photoresist of coating and photoetching, in addition to polysilicon resistance region, other regions are photo-etched glue protection, and note Enter phosphorus (P) ion, doping concentration 10¹⁵cm^-2, form isolation resistance 15 and terminal resistance 18；

5) layer photoresist is coated, P is used⁺Photolithography plate carries out photoetching, in addition to 20 region of P-type semiconductor arm, other regions It is photo-etched glue protection, is then poured into boron (B) ion, doping concentration 10¹⁶cm^-2, form the P-type semiconductor arm 20 of thermocouple；

6) layer photoresist is coated, N is used⁺Photolithography plate carries out photoetching, in addition to 19 region of N-type semiconductor arm, other regions It is photo-etched glue protection, is then poured into phosphorus (P) ion, doping concentration 10¹⁶cm^-2, form the N-type semiconductor arm 19 of thermocouple；

7) layer photoresist, photoetching thermoelectric pile and polysilicon resistance figure are coated, then thermocouple is formed by dry etching Arm and polysilicon resistance；

8) layer photoresist is coated, photoetching removes co-planar waveguide 13, asymmetrical coplanar stripline 17, metal interconnecting wires output electricity Photoresist at pole 21；

9) electron beam evaporation (EBE) forms first layer gold (Au), and thickness 0.3um is removed on photoresist and photoresist Au, stripping formed co-planar waveguide 13 and asymmetric coplanar strip 17 first layer Au, output electrode 21 and thermoelectric pile metal it is mutual Line；

10) (LPCVD) one layer of Si is deposited₃N₄, thickness 0.1um；

11) layer photoresist, photoetching and the photoresist for retaining 10 lower section of clamped beam, dry etching Si are coated₃N₄, formed and be situated between Matter layer 9；

12) uniformly one layer of air layer 11 of coating and litho pattern, thickness 2um, the polyamides for retaining 10 lower section of clamped beam are sub- Amine is as sacrificial layer；

13) coat photoresist, photoetching remove clamped beam 10, anchoring area 14, co-planar waveguide 13, asymmetrical coplanar stripline 17 and The photoresist of 21 position of output electrode；

14) seed layer for evaporating 500/1500/300A ° of Ti/Au/Ti, removes one thickness of re-plating after the Ti layers at top Degree is the Au layers of 2um；

15) Au on photoresist and photoresist is removed, clamped beam 10, anchoring area 14, co-planar waveguide 13, asymmetric total is formed Face band line 17 and output electrode 21；

16) deep reaction ion etching (DRIE) the substrate material back side makes membrane structure 24；

17) polyimide sacrificial layer is discharged：Developer solution impregnates, and removes the polyimide sacrificial layer under clamped beam, deionization Water impregnates slightly, absolute ethyl alcohol dehydration, volatilizees, dries under room temperature.

Difference with the prior art of the present invention is：

Present invention employs six port clamped beam coupled structures, what this clamped beam coupled structure was transmitted from co-planar waveguide A part is coupled out in microwave signal, and using the signal being coupled out come power, frequency and the phase of integrated detection microwave signal Size detects the power of microwave signal using direct-heating type microwave power detector, has preferable microwave property, zero directly Flow power consumption and high integration；And it is measured using phase comparing method in measurement frequency, efficiently avoids noise and interference Influence to output voltage, greatly improves accuracy.Moreover, phase comparing method clamped beam in adaption radar of the invention The nonlinear characteristic and low pass filtered baud of direct MEMS microwaves detection demodulating system application direct-heating type microwave power detector Property modulated signal is demodulated, be not necessarily to multiplier and oscillator, substantially reduce volume and complexity.The present invention is to micro- Three kinds of power of wave signal, frequency, phase detection modules are integrated, and are realized to the microwave signal of synchronization Power, frequency and phase synchronous detection simultaneously, to meet the requirement of adaption radar real-time matching communication, and to modulated signal Demodulation, realize the direct MEMS microwaves detection demodulating system of phase comparing method clamped beam in adaption radar.

The structure for meeting conditions above is considered as the direct MEMS microwaves of phase comparing method clamped beam in the adaption radar of the present invention Detect demodulating system.

Claims (3)

1. the direct MEMS microwaves of phase comparing method clamped beam detect demodulating system in a kind of adaption radar, it is characterised in that the detection solution Adjusting system includes six port clamped beam couplers (1), microwave frequency detection module (2), microwave power detection and demodulation module (3), microwave phase detector module (4)；Wherein the first port (1-1) of six port clamped beam couplers (1) arrives third port (1- 3) identical with the degree of coupling of fifth port (1-5), to the power degree of coupling also phase of the 4th port (1-4), the 6th port (1-6) Together；Measured signal is inputted through first port (1-1), and the inspection of the first direct-heating type microwave power is output to by second port (1-2) Device (5-1) is surveyed, microwave power detection is carried out；And the first direct-heating type microwave power detector (5-1) of application is non-linear Characteristic and low-frequency filter characteristics demodulate modulated signal；Third port (1-3) and the 4th port (1-4) are respectively outputted to Two input ports of the 3rd Wilkinson power combiners (6-3) of microwave frequency detection module (2), the 3rd Wilkinson The output end of power combiner (6-3) connects the second direct-heating type microwave power detector (5-2), carries out microwave frequency inspection It surveys；The first Wilkinson of microwave phase detector module (4) is respectively outputted to by fifth port (1-5) and the 6th port (1-6) One end of power combiner (6-1) and the 2nd Wilkinson power combiners (6-2), and by Wilkinson power dividers (7) two output ends are connected respectively to the first Wilkinson power combiners (6-1) and the 2nd Wilkinson power combings The other end of device (6-2), and the first Wilkinson power combiners (6-1) and the 2nd Wilkinson power combiners (6-2) Output end be connected to third direct-heating type microwave power detector (5-3) and the 4th direct-heating type microwave power detector (5-4) carries out microwave phase detector；The structure is to collecting three kinds of power of microwave signal, frequency, phase detection modules At, and the power to the microwave signal of synchronization, frequency and phase synchronous detection simultaneously are realized, to meet adaptive thunder The requirement communicated up to real-time matching, and the demodulation to modulated signal；

Si substrates (8) in adaption radar in the direct MEMS microwaves detection demodulating system of phase comparing method clamped beam, SiO₂Layer (12), Co-planar waveguide (13), terminal resistance (18), transmission line ground wire (20), semiconductor arm (19), output electrode (21), which is constituted, directly to be added Hot type microwave work(sensor；Microwave power is input to terminal resistance (18) by CPW, that is, co-planar waveguide (13) and is converted to thermal energy；Heat Pile inputs microwave power size according to Seebeck effects, by measuring known to the thermoelectrical potential of output electrode (21).

2. the direct MEMS microwaves of phase comparing method clamped beam detect demodulating system, feature in adaption radar according to claim 1 It is that the adaption radar receives system (32) and adaptive thunder by antenna (34), transmitting-receiving conversion circuit (35), adaption radar It is formed up to emission system (33), adaption radar receives system (32) and detects and demodulate monolithically integrated system by MEMS microwaves (26), signal storage (27) and signal analyzer (28) cascade are constituted, and realize the detection and analysis to unknown radar signal；From Radar emission system (33) is adapted to by microwave signal reconstruct (29), microwave signal modulator (30) and microwave signal power amplifier (31) it constitutes, realizes the modulation and forwarding to unknown radar signal.

3. the direct MEMS microwaves of phase comparing method clamped beam detect demodulating system, feature in adaption radar according to claim 1 It is that six port clamped beam couplers (1) are solid by co-planar waveguide (13), dielectric layer (9), air layer (11) and across above it Strutbeam (10) is constituted；Co-planar waveguide (13) is produced on SiO₂On layer (12), anchoring area (14) is produced on co-planar waveguide (13), clamped The lower section metallization medium layer (9) of beam (10), and collectively form coupled capacitor structure with air layer (11), clamped beam (10), two CPW length of transmission line between clamped beam (10) is λ/4.