CN106771603A - The online microwave phase detector device of T-shaped knot cantilever beam - Google Patents
The online microwave phase detector device of T-shaped knot cantilever beam Download PDFInfo
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- CN106771603A CN106771603A CN201710052710.2A CN201710052710A CN106771603A CN 106771603 A CN106771603 A CN 106771603A CN 201710052710 A CN201710052710 A CN 201710052710A CN 106771603 A CN106771603 A CN 106771603A
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- 230000005540 biological transmission Effects 0.000 claims abstract description 84
- 238000010438 heat treatment Methods 0.000 claims abstract description 33
- 238000002955 isolation Methods 0.000 claims abstract description 13
- 238000001514 detection method Methods 0.000 claims abstract description 12
- 239000004065 semiconductor Substances 0.000 claims abstract description 11
- 239000000758 substrate Substances 0.000 claims abstract description 10
- 239000003990 capacitor Substances 0.000 claims abstract description 8
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 10
- 229910052681 coesite Inorganic materials 0.000 claims description 8
- 229910052906 cristobalite Inorganic materials 0.000 claims description 8
- 239000000377 silicon dioxide Substances 0.000 claims description 8
- 229910052682 stishovite Inorganic materials 0.000 claims description 8
- 229910052905 tridymite Inorganic materials 0.000 claims description 8
- 238000010276 construction Methods 0.000 claims description 4
- 235000012239 silicon dioxide Nutrition 0.000 claims 2
- 229920002120 photoresistant polymer Polymers 0.000 description 13
- 230000008878 coupling Effects 0.000 description 8
- 238000010168 coupling process Methods 0.000 description 8
- 238000005859 coupling reaction Methods 0.000 description 8
- 239000010931 gold Substances 0.000 description 6
- 238000001259 photo etching Methods 0.000 description 6
- 230000015572 biosynthetic process Effects 0.000 description 4
- 239000002131 composite material Substances 0.000 description 4
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 4
- 229920005591 polysilicon Polymers 0.000 description 4
- 238000003786 synthesis reaction Methods 0.000 description 4
- 239000004642 Polyimide Substances 0.000 description 3
- 238000011161 development Methods 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- 238000005259 measurement Methods 0.000 description 3
- 229920001721 polyimide Polymers 0.000 description 3
- 229910052581 Si3N4 Inorganic materials 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 238000005229 chemical vapour deposition Methods 0.000 description 2
- 239000011248 coating agent Substances 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 238000005566 electron beam evaporation Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 238000012360 testing method Methods 0.000 description 2
- 238000012546 transfer Methods 0.000 description 2
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 1
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- 230000005678 Seebeck effect Effects 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 230000018044 dehydration Effects 0.000 description 1
- 238000006297 dehydration reaction Methods 0.000 description 1
- 239000008367 deionised water Substances 0.000 description 1
- 229910021641 deionized water Inorganic materials 0.000 description 1
- 238000001312 dry etching Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000004070 electrodeposition Methods 0.000 description 1
- 230000003628 erosive effect Effects 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 239000003292 glue Substances 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 150000003949 imides Chemical class 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 238000004518 low pressure chemical vapour deposition Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 230000010363 phase shift Effects 0.000 description 1
- 229910052698 phosphorus Inorganic materials 0.000 description 1
- 239000011574 phosphorus Substances 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 230000000644 propagated effect Effects 0.000 description 1
- 238000011536 re-plating Methods 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 230000000717 retained effect Effects 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 230000008054 signal transmission Effects 0.000 description 1
- 238000000992 sputter etching Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R25/00—Arrangements for measuring phase angle between a voltage and a current or between voltages or currents
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R15/00—Details of measuring arrangements of the types provided for in groups G01R17/00 - G01R29/00, G01R33/00 - G01R33/26 or G01R35/00
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R21/00—Arrangements for measuring electric power or power factor
- G01R21/02—Arrangements for measuring electric power or power factor by thermal methods, e.g. calorimetric
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Abstract
The online microwave phase detector device of T-shaped knot cantilever beam, detector is prepared on HR-Si substrate, is made up of the symmetrical cantilever beam structure of coplanar waveguide transmission line, two holding wires on coplanar waveguide transmission line, T-shaped knot and two direct-heating type microwave power detectors.Wherein coplanar waveguide transmission line includes the holding wire and ground wire of coplanar waveguide transmission line；Cantilever beam structure includes cantilever beam and anchor area, is suspended from the insulating medium layer top on holding wire；T junction is made up of the holding wire of coplanar waveguide transmission line, ground wire and air bridges, is three port devices；Direct-heating type microwave power detector includes terminal resistance, semiconductor thermocouple arm, direct current output block and isolation DC capacitor.Detector arrangement of the present invention is simple, and circuit size is smaller, is capable of achieving the online detection of microwave phase.
Description
Technical field
The present invention proposes the online microwave phase detector device of T-shaped knot cantilever beam, belongs to microelectromechanical systems (MEMS)
Technical field.
Background technology
Microwave signal phase measurement occupies highly important status in microwave measurement.Microwave signal phase detecting system exists
The aspects such as phase-modulator, phase-shift keying (PSK), microwave positioning, the test of antenna phase pattern and near-field diagnostic suffer from extremely wide
General application.Existing microwave phase detector technology is that they have based on diode, multiplier architecture and vector calculus principle
Low-loss, high sensitivity and wide band advantage, but its maximum shortcoming is relative complex structure, and cannot realize online
The microwave phase detector of formula.With the development of microelectric technique, modern PCS Personal Communications System and radar system are examined to microwave phase
Survey the requirement also more and more higher of device.Simple structure, small volume and small DC power turn into microwave phase detector device
Development trend.With the fast development of M EMS technologies, and to going deep into that high resistant silicon MESFET has been carried out
Research, the cantilever beam structure based on micromechanics high resistant silicon substrate is realized that the online microwave phase detector device of above-mentioned functions turns into can
Energy.
The content of the invention
Technical problem：The purpose of the present invention is to propose to a kind of online microwave phase detector device of T-shaped knot cantilever beam, the present invention
Cantilever beam coupling microwaves signal is employed, microwave signal power detection uses direct-heating type microwave power detector, microwave phase
Position detection uses vector synthesis, it is achieved thereby that the online detection of microwave phase.
Technical scheme：The online microwave phase detector device of T-shaped knot cantilever beam, is provided with co-planar waveguide biography on HR-Si substrate
The symmetrical cantilever beam structure of defeated line, two holding wires on coplanar waveguide transmission line, T-shaped knot and two directly heat and decline
Wave power sensor, coplanar waveguide transmission line is made up of the holding wire and ground wire of coplanar waveguide transmission line, and microwave signal to be measured is led to
Coplanar waveguide transmission line is crossed, two symmetrical cantilever beam structures of the holding wire on coplanar waveguide transmission line are suspended from measured signal biography
The holding wire top of defeated line, the anchor area of upside cantilever beam structure passes through the co-planar waveguide of direct-heating type microwave power detector 1
The holding wire connection direct-heating type microwave power detector 1 of transmission line, the anchor area of downside cantilever beam structure pass through T-shaped knot the
The holding wire of one coplanar waveguide transmission line connects an input of T-shaped knot, and another input is second coplanar by T-shaped knot
The holding wire connection reference signal input port of waveguide transmission line, the output end of T-shaped knot is by the 3rd coplanar waveguide transmission line
Holding wire connection direct-heating type microwave power detector 2.
T junction is by the first air bridges, the second air bridges, the 3rd air bridges, the holding wire of the first coplanar waveguide transmission line,
The holding wire of the holding wire of two coplanar waveguide transmission lines and the 3rd coplanar waveguide transmission line is constituted, and is three port devices, be can be used for
Power combing, without isolation resistance, wherein the first air bridges, the second air bridges and the 3rd air bridges are for mutual between ground wire
Even, the release of these air bridges for convenience has made one group of array of orifices thereon.
Direct-heating type microwave power detector is straight by semiconductor thermocouple arm, terminal resistance, direct current output block 11, isolation
The holding wire of stream electric capacity and coplanar waveguide transmission line is constituted, and its effect is that the size of microwave power is carried out based on Seebeck effect
Detection, and testing result is exported in the form of DC voltage.
The invention provides a kind of online microwave phase detector device of T-shaped knot cantilever beam, positioned at coplanar waveguide transmission line
Two full symmetric cantilever beams above holding wire are coupled out part microwave signal, the anchor area of the cantilever beam structure of upside online
Connection direct-heating type microwave power detector detection watt level, be input into for coupled signal by the anchor area of the cantilever beam structure of downside
T-shaped knot simultaneously carries out Vector modulation with reference signal, and T-shaped knot output end connects a direct-heating type microwave power detector and checks
Composite signal watt level.According to the size of direct-heating type microwave power detector VD, letter to be measured is inferred to
Number phase.The online microwave phase detector device of T-shaped knot cantilever beam of the invention, not only has the advantages that to be easy to measurement, and
The online detection to microwave signal phase can be realized, it is easy to integrated and compatible with High Resistivity Si monolithic integrated microwave circuit
Advantage.
Simultaneously as the signal power very little that cantilever beam is coupled out, most signal can continue to by coplanar ripple
Lead transmission line back-propagation and carry out follow-up signal transacting, it is achieved thereby that the detection of online microwave phase.
Beneficial effect：The present invention is the online microwave phase detector device of T-shaped knot cantilever beam, employs the cantilever of simple structure
Girder construction coupling microwaves signal, and the online detection of microwave phase is realized using this part coupling small-signal, and it is most
Signal can continue to that follow-up signal treatment is propagated and carried out on co-planar waveguide.
Brief description of the drawings
Fig. 1 is the online microwave phase detector device top view of T-shaped knot cantilever beam of the invention；
Fig. 2 is the A-A ' profiles of Fig. 1 online microwave phase detector devices of T-shaped knot cantilever beam；
Fig. 3 is the B-B ' profiles of Fig. 1 online microwave phase detector devices of T-shaped knot cantilever beam；
Figure includes：HR-Si substrate 1, the holding wire 2 and ground wire 3 of coplanar waveguide transmission line, the cantilever of cantilever beam structure 1
Beam 4 and anchor area 5, the cantilever beam 6 of cantilever beam structure 2 and anchor area 7, insulating medium layer 8, direct-heating type microwave power detector 1
Semiconductor thermocouple arm 9, terminal resistance 10, direct current output block 11, isolation DC capacitor 12 and coplanar waveguide transmission line letter
Number line 13, the first air bridges 14 of T-shaped knot, the second air bridges 15, the 3rd air bridges 16, the signal of the first coplanar waveguide transmission line
The holding wire 19 of line 17, the coplanar waveguide transmission line of holding wire 18 and the 3rd of the second coplanar waveguide transmission line, directly heats and declines
The semiconductor thermocouple arm 20 of wave power sensor 2, terminal resistance 21, direct current output block 22, isolation DC capacitor 23, SiO2Layer
24.A SiO is prepared on HR-Si substrate 12Layer 24, in SiO2Layer 24 is provided with coplanar waveguide transmission line, two on coplanar
The holding wire of waveguide transmission line symmetrical cantilever beam structure 1 and cantilever beam structure 2, T-shaped knot and direct-heating type microwave power
Sensor 1 and direct-heating type microwave power detector 2.
Specific embodiment
The online microwave phase detector device of T-shaped knot cantilever beam of the invention is produced on HR-Si substrate 1, in High Resistivity Si lining
Being prepared on bottom has one layer of SiO2Layer 24, in SiO2Layer 24 is provided with coplanar waveguide transmission line, two on coplanar waveguide transmission line
The symmetrical cantilever beam structure 1 of holding wire and cantilever beam structure 2, T-shaped knot and direct-heating type microwave power detector 1 and directly
Heated microwave power sensor 2.Coplanar waveguide transmission line as phase detectors of the present invention signal transmssion line, for be measured
The transmission of microwave signal, coplanar waveguide transmission line by coplanar waveguide transmission line holding wire holding wire 2 and ground wire 3 constitute.It is outstanding
Arm girder construction 1 and cantilever beam structure 2 are suspended from the top of the insulating medium layer 8 on the holding wire 2 of coplanar waveguide transmission line.Cantilever beam
Structure 1 includes cantilever beam 4 and anchor area 5, and cantilever beam structure 2 includes cantilever beam 6 and anchor area 7.The holding wire 2 of coplanar waveguide transmission line
The holding wire of the coplanar waveguide transmission line that the anchor area 5 of the cantilever beam structure 1 of upside passes through direct-heating type microwave power detector 1
13 connection direct-heating type microwave power detectors 1, the anchor of the cantilever beam structure 2 of the downside of holding wire 2 of coplanar waveguide transmission line
The holding wire 1 that area 7 passes through the first coplanar waveguide transmission line of T-shaped knot) connection T-shaped knot an input port, another input
The holding wire 18 of the second coplanar waveguide transmission line that port passes through T-shaped knot is connected to reference signal input port, the output of T-shaped knot
The holding wire 19 of the 3rd coplanar waveguide transmission line that end passes through T-shaped knot connects direct-heating type microwave power detector 2.
When microwave signal to be measured passes through measured signal transmission line, cantilever beam structure 1 and cantilever beam structure 2 are coupled out part
Microwave signal, and exported by the anchor area 5 of cantilever beam structure 1 and the anchor area 7 of cantilever beam structure 2 respectively.Upside cantilever beam structure 1
Anchor area 5 it is by the holding wire 13 of the coplanar waveguide transmission line of direct-heating type microwave power detector that coupling microwaves signal is defeated
To direct-heating type microwave power detector 1, and detect that its power is P1；The anchor area 7 of downside cantilever beam structure 2 passes through T-shaped
Coupling microwaves signal is transferred to T-shaped knot by the holding wire 17 of the first coplanar waveguide transmission line of knot, and it is P that it passes through T-shaped knot with power2
Reference signal vector synthesis, signal power after synthesis is P3.The phase difference for remembering microwave signal to be measured and reference signal is
The power and phase difference of the composite signal for then being exported through T-shaped knotThere is cosine function relationship, micrometer is treated by calculating final realization
The online detection of ripple signal phase.
The specific embodiment of the online microwave phase detector device of T-shaped knot cantilever beam of the invention is as follows：
Such as Fig. 1, Fig. 2, shown in Fig. 3, including HR-Si substrate 1, the holding wire 2 and ground wire 3 of coplanar waveguide transmission line, cantilever
The cantilever beam 4 of girder construction 1 and anchor area 5, the cantilever beam 6 of cantilever beam structure 2 and anchor area 7, insulating medium layer 8, directly heat and decline
The semiconductor thermocouple arm 9 of wave power sensor 1, terminal resistance 10, direct current output block 11, isolation DC capacitor 12 and coplanar ripple
Lead the holding wire 13 of transmission line, the first air bridges 14 of T-shaped knot, the second air bridges 15, the 3rd air bridges 16, the first co-planar waveguide
The holding wire 19 of the holding wire 17 of transmission line, the coplanar waveguide transmission line of holding wire 18 and the 3rd of the second coplanar waveguide transmission line,
The semiconductor thermocouple arm 20 of direct-heating type microwave power detector 2, terminal resistance 21, direct current output block 22, isolation direct current
Electric capacity 23, SiO2Layer 24.A SiO is prepared on HR-Si substrate 12Layer 24, in SiO2Layer 24 is provided with coplanar wave guide transmission
The symmetrical cantilever beam structure 1 of line, two holding wires on coplanar waveguide transmission line and cantilever beam structure 2, T-shaped knot and directly
Heated microwave power sensor 1 and direct-heating type microwave power detector 2.
Cantilever beam structure 1 includes cantilever beam 4 and anchor area 5, and cantilever beam structure 2 includes cantilever beam 6 and anchor area 7, cantilever beam knot
Structure 1 and cantilever beam structure 2 are suspended from the top of insulating medium layer 8 on the holding wire 2 of coplanar waveguide transmission line.
T-shaped knot is by the first air bridges (14), the second air bridges (15), the 3rd air bridges (16), the first coplanar wave guide transmission
The holding wire (17) of line, the holding wire (18) of the second coplanar waveguide transmission line and the holding wire (19) of the 3rd coplanar waveguide transmission line
Constitute, be three port devices, can be used for power combing, without isolation resistance, wherein the first air bridges (14), the second air bridges
(15), the 3rd air bridges (16) are for the interconnection between the ground wire (3) of coplanar waveguide transmission line, while these three are empty for convenience
The release of air bridge, has made one group of array of orifices thereon.
Direct-heating type microwave power detector 1 is by semiconductor thermocouple arm (9), terminal resistance (10), direct current output block
(11), the holding wire (13) of isolation DC capacitor (12) and coplanar waveguide transmission line is constituted；Described directly heats type micro-wave work(
Rate sensor 2 is made up of semiconductor thermocouple arm (20) terminal resistance (21), direct current output block (22), isolation DC capacitor (23).
When measured signal passes through from the holding wire 2 of coplanar waveguide transmission line, cantilever beam structure 1 and cantilever beam structure 2 exist
Line is coupled out part microwave signal.In order to detect its power being coupled out, the anchor area 5 of upside cantilever beam structure 1 is by directly adding
The connection direct-heating type of holding wire 13 microwave power detector 1 of the coplanar waveguide transmission line of hot type microwave power detector 1, and
Detect its power P1；The holding wire 17 of the first coplanar waveguide transmission line that the anchor area 7 of downside cantilever beam structure 2 passes through T-shaped knot
An input of T-shaped knot is connected, another input is connected with reference to letter by the holding wire 18 of the second coplanar waveguide transmission line
Number input port, power is P2Reference signal be input into from reference signal input port, signal after synthesis pass through T-shaped knot the
The holding wire 19 of three coplanar waveguide transmission lines is transmitted to direct-heating type microwave power detector 2, and examines record power for P3.Note
The phase difference of microwave signal to be measured and reference signal isThe power P of the composite signal for then being exported through T-shaped knot3With phase differenceDeposit
In cosine function relationship：
May finally be derived based on formula (1):
Simultaneously as the signal power very little that cantilever beam is coupled out, most signal can continue to by coplanar ripple
Lead transmission line back-propagation and carry out follow-up signal transacting, it is achieved thereby that the detection of online microwave phase.
The preparation method of the online microwave phase detector device of T-shaped knot cantilever beam of the invention is：
1) 4 inches of high resistant Si substrates are prepared, resistivity is 4000 Ω cm, and thickness is 400mm；
2) thermally grown a layer thickness is the SiO of 1.2mm2Layer；
3) chemical vapor deposition (CVD) grows one layer of polysilicon, and thickness is 0.4mm；
4) one layer of photoresist and photoetching are coated, in addition to polysilicon resistance region, other regions are photo-etched glue protection, and note
Enter phosphorus (P) ion, doping concentration is 1015cm-2, form terminal resistance；
5) one layer of photoresist of coating, one layer of photoresist of photoetching polysilicon resistance graphic application, photoetching polysilicon resistance figure,
Terminal resistance is formed by dry etching again；
6) one layer of photoresist, the photoresist at photoetching removal coplanar waveguide transmission line and output electrode are coated；
7) electron beam evaporation (EBE) forms ground floor gold (Au), and thickness is 0.3mm, on removal photoresist and photoresist
Au, stripping form coplanar waveguide transmission line, capacitance bottom crown and output electrode；
8) (LPCVD) one layer of Si is deposited3N4, thickness is 0.1mm；
9) one layer of photoresist is coated, photoetching simultaneously retains the photoresist below air bridges, capacitance and cantilever beam, dry method is carved
Erosion Si3N4, form Si3N4Dielectric layer；
10) one strata acid imide of uniform coating and litho pattern, thickness is 2mm, is retained below air bridges and cantilever beam
Polyimides is used as sacrifice layer；
11) coat photoresist, photoetching removal air bridges, cantilever beam, the anchor area of cantilever beam structure, coplanar waveguide transmission line,
Capacitance and the photoresist of output electrode position；
12) Seed Layer of the Ti/Au/Ti of A ° of evaporation 500/1500/300, the thickness of re-plating one after Ti layers at the top of removal
Spend is Au layers of 2mm；
13) Au on removal photoresist and photoresist, forms air bridges, cantilever beam, the anchor area of cantilever beam structure, coplanar
Waveguide transmission line, capacitance top crown and output electrode；
14) deep reaction ion etching (DRIE) the backing material back side, makes thin below terminal resistance, semiconductor thermocouple arm
Membrane structure；
15) polyimide sacrificial layer is discharged：Developer solution soaks, the polyimides sacrifice under removal air bridges and cantilever beam
Layer, deionized water is soaked slightly, absolute ethyl alcohol dehydration, is volatilized under normal temperature, is dried.
Difference whether be structure of the present invention standard it is as follows：
The online microwave phase detector device of T-shaped knot cantilever beam of the invention uses two full symmetric cantilever beam structure couplings
Microwave signal is closed, while possessing coplanar waveguide transmission line, T-shaped knot and two direct-heating type microwave power detectors.When to be measured
When microwave signal passes through coplanar waveguide transmission line, cantilever beam structure is coupled out part microwave signal, and respectively by cantilever beam knot
The two side anchor areas output of structure.The anchor area of upside cantilever beam structure is by the holding wire of coplanar waveguide transmission line by coupling microwaves signal
Transfer to direct-heating type microwave power detector；The holding wire that the anchor area of downside cantilever beam structure passes through coplanar waveguide transmission line will
Coupling microwaves signal transfers to T-shaped knot, and it passes through T-shaped knot and synthesizes with reference signal vector.The power and microwave signal of composite signal
Between phase difference there is cosine function relationship, the final online inspection that microwave signal phase is realized using Vector modulation principle
Survey.
The structure for meeting conditions above is considered as the online microwave phase detector device of T-shaped knot cantilever beam of the invention.
Claims (3)
1. the online microwave phase detector device of a kind of T-shaped knot cantilever beam, it is characterized in that making SiO2 layers on HR-Si substrate (1)
(24), be provided with SiO2 layers (24) coplanar waveguide transmission line, cantilever beam structure 1 and cantilever beam structure 2, T-shaped knot and directly
Heated microwave power sensor 1 and direct-heating type microwave power detector 2, described coplanar waveguide transmission line is by coplanar ripple
The holding wire (2) and ground wire (3) for leading transmission line are constituted, and described cantilever beam structure 1 includes cantilever beam (4) and anchor area (5), cantilever
Girder construction 2 includes cantilever beam (6) and anchor area (7), and cantilever beam structure 1 and cantilever beam structure 2 are suspended from the letter of coplanar waveguide transmission line
The top of the insulating medium layer (7) on number line (2), the anchor of the cantilever beam structure 1 on the upside of the holding wire (2) of coplanar waveguide transmission line
Area (5) connects direct-heating type by the holding wire (13) of the coplanar waveguide transmission line of direct-heating type microwave power detector 1
Microwave power detector 1, the anchor area (7) of the cantilever beam structure 2 on the downside of the holding wire (2) of coplanar waveguide transmission line is by T-shaped knot
The first coplanar waveguide transmission line holding wire (17) connect T-shaped knot an input port, another input port pass through T-shaped
The holding wire (18) of the second coplanar waveguide transmission line of knot is connected to reference signal input port, and the output end of T-shaped knot passes through T-shaped
Holding wire (19) the connection direct-heating type microwave power detector 2 of the 3rd coplanar waveguide transmission line of knot.
2. the online microwave phase detector device of T-shaped knot cantilever beam according to claim 1, it is characterized in that being entered using T-shaped knot
Row power combing, described T-shaped knot is by the first air bridges (14), the second air bridges (15), the 3rd air bridges (16), first coplanar
The holding wire (17) of waveguide transmission line, the holding wire (18) of the second coplanar waveguide transmission line and the letter of the 3rd coplanar waveguide transmission line
Number line (19) is constituted, and is three port devices, can be used for power combing, without isolation resistance, wherein the first air bridges (14), second
Air bridges (15), the 3rd air bridges (16) for the interconnection between the ground wire (3) of coplanar waveguide transmission line, while for convenience this
Three releases of air bridges, have made one group of array of orifices thereon.
3. the online microwave phase detector device of T-shaped knot cantilever beam according to claim 1, its spy is to use direct-heating type
Microwave power detector carries out power detection, and described direct-heating type microwave power detector 1 includes semiconductor thermocouple arm
(9), the holding wire (13) of terminal resistance (10), direct current output block (11), isolation DC capacitor (12) and coplanar waveguide transmission line；
Described direct-heating type microwave power detector 2 includes semiconductor thermocouple arm (20) terminal resistance (21), direct current output block
(22), isolation DC capacitor (23).
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| Application Number | Priority Date | Filing Date | Title |
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| CN201710052710.2A CN106771603A (en) | 2017-01-24 | 2017-01-24 | The online microwave phase detector device of T-shaped knot cantilever beam |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201710052710.2A CN106771603A (en) | 2017-01-24 | 2017-01-24 | The online microwave phase detector device of T-shaped knot cantilever beam |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107632193A (en) * | 2017-09-28 | 2018-01-26 | 东南大学 | A kind of microwave power detector based on metamaterial structure |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN102735934A (en) * | 2012-06-20 | 2012-10-17 | 东南大学 | Phase detector based on micro-mechanical gallium arsenide-based cantilever beam and detection method |
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