CN106814252A - Online microwave phase detector device based on clamped beam - Google Patents
Online microwave phase detector device based on clamped beam Download PDFInfo
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- CN106814252A CN106814252A CN201710052707.0A CN201710052707A CN106814252A CN 106814252 A CN106814252 A CN 106814252A CN 201710052707 A CN201710052707 A CN 201710052707A CN 106814252 A CN106814252 A CN 106814252A
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- transmission line
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- clutch
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R25/00—Arrangements for measuring phase angle between a voltage and a current or between voltages or currents
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- Measurement Of Resistance Or Impedance (AREA)
Abstract
Online microwave phase detector device based on clamped beam, detector is prepared on HR-Si substrate, is made up of the indirect Thermoelectric Microwave Power Sensor of coplanar waveguide transmission line, fixed beam structure, work(clutch and two.Wherein coplanar waveguide transmission line includes holding wire and ground wire；Fixed beam structure includes clamped beam and anchor area, is suspended from the dielectric layer top on holding wire；Work(clutch includes asymmetric coplanar stripline ACPS holding wires, ground wire and isolation resistance；Indirect Thermoelectric Microwave Power Sensor includes terminal resistance, metal thermocouple arm, semiconductor thermocouple arm, ohmic contact regions and direct current output block.Phase detectors simple structure of the present invention, circuit size is smaller, is capable of achieving the online detection of microwave phase.
Description
Technical field
The present invention proposes the online microwave phase detector device based on clamped beam, belongs to microelectromechanical systems (MEMS)
Technical field.
Background technology
In research of microwave technology, as the microwave phase of one of the three big parameters (amplitude, frequency and phase) for characterizing signal
Position is an important parameter of microwave signal.With the development of radar and antenna technology, the detection of phase becomes more and more important,
Microwave phase detector systematic research is also increasingly paid attention to by people.At present, the design of microwave signal phase detecting system is
For the phase difference between detection same frequency signal.Existing method for detecting phases has following several：Using diode detection, profit
Phase-detection is realized with multiplier architecture and using vector calculus method, the shortcoming of above method is to be required for relative complex knot
Structure.With the development of microelectric technique, modern PCS Personal Communications System and radar system requirement microwave phase detector utensil have simply
Structure, small volume and small power consumption.MEMS system has small volume, low in energy consumption, low cost and other advantages.Mesh of the invention
Exactly to propose a kind of implementation method of the online microwave signal phase detector based on MEMS technology.
The content of the invention
Technical problem：The purpose of the present invention is to propose to a kind of online microwave phase detector device based on clamped beam, this hair
It is bright to employ fixed beam structure coupling microwaves signal, indirect thermoelectric (al) type microwave power is used in terms of the power detection of microwave signal
Sensor, uses vector synthesis in terms of microwave phase detector, it is achieved thereby that the detection of online microwave phase.
Technical scheme：Online microwave phase detector device based on clamped beam, is provided with measured signal on HR-Si substrate
The indirect Thermoelectric Microwave Power Sensor of transmission line, fixed beam structure, work(clutch and two, described coplanar waveguide transmission line
It is made up of the holding wire and ground wire of coplanar waveguide transmission line, described fixed beam structure is made up of clamped beam and anchor area, clamped beam
Structure is located at the holding wire top of coplanar waveguide transmission line, and the anchor area of the upside of fixed beam structure passes through indirect thermoelectric (al) type microwave work(
Rate sensor 1, the holding wire that the anchor area of the downside of fixed beam structure passes through the coplanar waveguide transmission line of work(clutch connects work(clutch
An input, another input of work(clutch is connected to reference by the holding wire of the coplanar waveguide transmission line of work(clutch
Signal input port, the output end of work(clutch is connected to indirect thermoelectric (al) type by the holding wire of the coplanar waveguide transmission line of work(clutch
Microwave power detector 2.
Described work(clutch includes the holding wire of isolation resistance, ACPS holding wires and coplanar waveguide transmission line；Between described
Connect Thermoelectric Microwave Power Sensor defeated including metal thermocouple arm, semiconductor thermocouple arm, ohmic contact regions, terminal resistance, direct current
Go out the holding wire of block and coplanar waveguide transmission line.
When microwave signal to be measured is passed through from the middle of the holding wire of coplanar waveguide transmission line, it is micro- that clamped beam is coupled out part online
Ripple signal.The microwave signal being coupled out is divided into two-way, indirect Thermoelectric Microwave Power Sensor 1 is input into all the way and detects clamped beam
Power P of the microwave signal being coupled out in its one end1, another road input work clutch, with known power P2Reference signal sweared
Amount synthesis, then the microwave signal power P after synthesizing is detected by indirect Thermoelectric Microwave Power Sensor 23, measured signal with reference
The phase difference of signal isComposite signal and phase differenceBetween there is the relation of cosine function：
May finally be derived based on formula (1):
The invention provides a kind of online microwave phase detector device based on clamped beam, on coplanar waveguide transmission line
The clamped beam of side is coupled out part microwave signal online, and clamped beam one end connects indirect Thermoelectric Microwave Power Sensor 1 and detects
Watt level, other end input work clutch carries out Vector modulation with reference signal.According to indirect Thermoelectric Microwave Power Sensor 2
The size of VD, calculates the phase of measured signal.Online microwave phase inspection based on clamped beam of the invention
Survey device, not only there is to be easy to measurement, and the online detection to microwave signal phase can be realized, it is easy to it is integrated with
And the advantage compatible with High Resistivity Si monolithic integrated microwave circuit.
Simultaneously as the signal power very little that clamped beam is coupled out, most signal can continue to by coplanar ripple
Lead transmission line back-propagation and carry out follow-up signal transacting, it is achieved thereby that the detection of online microwave phase.
Beneficial effect：The present invention is the online microwave phase detector device based on clamped beam, employs consolidating for simple structure
Strutbeam structure Coupling microwave signal, due to the signal power very little being coupled out, most signal can continue to by coplanar
Waveguide transmission line back-propagation simultaneously carries out follow-up signal transacting, it is achieved thereby that the detection of online microwave phase.
Brief description of the drawings
Fig. 1 is the online microwave phase detector device top view based on clamped beam of the invention；
Fig. 2 is the A-A ' profiles of the online microwave phase detector device that Fig. 1 is based on clamped beam；
Fig. 3 is the B-B ' profiles of the online microwave phase detector device that Fig. 1 is based on clamped beam；
Figure includes：HR-Si substrate 1, the holding wire 2 of coplanar waveguide transmission line, ground wire 3, the clamped beam of fixed beam structure
4th, the first anchor area 5 and the second anchor area 6, insulating medium layer 7, the isolation resistance 8 of work(clutch, ACPS holding wires 9, the first co-planar waveguide
The holding wire 12 of the holding wire 10 of transmission line, the coplanar waveguide transmission line of holding wire 11 and the 3rd of the second coplanar waveguide transmission line,
Metal thermocouple arm 13, semiconductor thermocouple arm 14, the ohmic contact regions 15, terminal resistance of indirect Thermoelectric Microwave Power Sensor 1
16th, the holding wire 18 of direct current output block 17 and coplanar waveguide transmission line, the metal thermocouple of indirect Thermoelectric Microwave Power Sensor 2
Arm 19, semiconductor thermocouple arm 20, ohmic contact regions 21, terminal resistance 22 and direct current output block 23, SiO2Layer 24.In High Resistivity Si lining
A SiO is prepared on bottom 12Layer 24, in SiO2Layer 24 be provided with coplanar waveguide transmission line, fixed beam structure, work(clutch and indirectly
Thermoelectric Microwave Power Sensor 1 and indirect Thermoelectric Microwave Power Sensor 2.
Specific embodiment
Online microwave phase detector device based on clamped beam of the invention is produced on HR-Si substrate 1, in High Resistivity Si
Being prepared on substrate has one layer of SiO2Layer 24, in SiO2Layer 24 be provided with coplanar waveguide transmission line, fixed beam structure, work(clutch and
Indirect Thermoelectric Microwave Power Sensor 1 and indirect Thermoelectric Microwave Power Sensor 2.Coplanar waveguide transmission line is by co-planar waveguide
The holding wire 2 and ground wire 3 of transmission line are constituted.
Coplanar waveguide transmission line is made up of the holding wire 2 and ground wire 3 of coplanar waveguide transmission line；Fixed beam structure is by clamped beam
The clamped beam 4 of structure, the first anchor area 5 and the second anchor area 6 are constituted；Work(clutch is coplanar by isolation resistance 8, ACPS holding wires 9, first
The holding wire of the holding wire 10 of waveguide transmission line, the coplanar waveguide transmission line of holding wire 11 and the 3rd of the second coplanar waveguide transmission line
(12) constitute；Indirect Thermoelectric Microwave Power Sensor 1 by metal thermocouple arm 13, semiconductor thermocouple arm 14, ohmic contact regions 15,
The holding wire 18 of terminal resistance 16, direct current output block 17 and coplanar waveguide transmission line is constituted；Indirect thermoelectric (al) type microwave power sensing
Device 2 is made up of metal thermocouple arm 19, semiconductor thermocouple arm 20, ohmic contact regions 21, terminal resistance 22 and direct current output block 23.
Fixed beam structure is located at the top of the insulating medium layer 7 on the holding wire 2 of coplanar waveguide transmission line.When microwave to be measured
When signal passes through coplanar waveguide transmission line, fixed beam structure is coupled out part microwave signal, and respectively by fixed beam structure
First anchor area and the second anchor area 6 export.First anchor area 5 of fixed beam structure is by indirect Thermoelectric Microwave Power Sensor 1
Coupling microwaves signal is transferred to indirect Thermoelectric Microwave Power Sensor 1 by the holding wire 18 of coplanar waveguide transmission line, and is detected
Its power P1；The holding wire 10 of the first coplanar waveguide transmission line that the second anchor area 6 of fixed beam structure passes through work(clutch will be coupled
Microwave signal transfers to the input of work(clutch, and it is P that it passes through work(clutch with power2Reference signal vector synthesis, after synthesis
Signal power is P3.The phase difference for remembering microwave signal to be measured and reference signal isThe work(of the composite signal for then being exported through work(clutch
Rate and phase differenceThere is cosine function relationship：
May finally be derived based on formula (1):
Simultaneously as the signal power very little that clamped beam is coupled out, most signal can continue to by coplanar ripple
Lead transmission line back-propagation and carry out follow-up signal transacting, it is achieved thereby that the detection of online microwave phase.
The preparation method of the online microwave phase detector device based on clamped beam of the invention is：
1) 4 inches of high resistant Si substrates are prepared, resistivity is 4000 Ω cm, and thickness is 400mm；
2) thermally grown a layer thickness is the SiO of 1.2mm2Layer；
3) chemical vapor deposition (CVD) grows one layer of polysilicon, and thickness is 0.4mm；
4) photoetching and the N of extension is isolated+High Resistivity Si, forms the figure and Ohmic contact of the semiconductor thermocouple arm of thermoelectric pile
Area；
5) N is anti-carved+High Resistivity Si, it is 10 to form its doping concentration17cm-3Thermoelectric pile semiconductor thermocouple arm；
6) photoetching：Removal will retain the photoresist in gold germanium ni au place；
7) peel off, form the metal thermocouple arm of thermoelectric pile；
8) photoetching：Removal will retain the photoresist in tantalum nitride place；
9) tantalum nitride is sputtered, its thickness is 1 μm；
10) peel off；
11) one layer of photoresist, photoetching removal coplanar waveguide transmission line, ACPS holding wires, thermoelectric pile metal interconnecting wires are coated
And the photoresist at output electrode；
12) electron beam evaporation (EBE) forms ground floor gold (Au), and thickness is 0.3mm, on removal photoresist and photoresist
Au, stripping forms ground floor Au, thermoelectric pile metal interconnecting wires and the output electrode of transmission line；
13) (LPCVD) one layer of Si is deposited3N4, thickness is 0.1mm；
14) one layer of photoresist is coated, photoetching simultaneously retains the photoresist below clamped beam, dry etching Si3N4, form Si3N4
Dielectric layer；
15) one strata acid imide of uniform coating and litho pattern, thickness is 2mm, retains the polyimides below clamped beam
As sacrifice layer；
16) coat photoresist, photoetching removal clamped beam, clamped beam anchor area, coplanar waveguide transmission line, ACPS holding wires and
The photoresist of output electrode position；
17) 500/1500/300A is evaporated°Ti/Au/Ti Seed Layer, the thickness of re-plating one after Ti layers at the top of removal
Spend is Au layers of 2mm；
18) removal photoresist and photoresist on Au, formed clamped beam, clamped beam anchor area, coplanar waveguide transmission line,
ACPS holding wires and output electrode；
19) deep reaction ion etching (DRIE) the backing material back side, makes the membrane structure below thermoelectric pile；
20) polyimide sacrificial layer is discharged：Developer solution soaks, the polyimide sacrificial layer under removal clamped beam, deionization
Water soaks slightly, absolute ethyl alcohol dehydration, is volatilized under normal temperature, dries.
Difference whether be structure of the present invention standard it is as follows：
Online microwave phase detector device based on clamped beam of the invention uses clamped beam coupling microwaves signal, there is two
Indirect Thermoelectric Microwave Power Sensor and a work(clutch.It is clamped when microwave signal to be measured passes through coplanar waveguide transmission line
Beam is coupled out sub-fraction microwave signal, and respectively by the two ends anchor area output of fixed beam structure.One end anchor area is by coplanar
Coupling microwaves signal is transferred to indirect Thermoelectric Microwave Power Sensor by the holding wire of waveguide transmission line；The other end passes through coplanar ripple
Coupling microwaves signal is transferred to work(clutch by the holding wire for leading transmission line, and it passes through work(clutch and synthesizes with reference signal vector.Synthesis
There is cosine function relationship in the phase difference between the power and microwave signal of signal.Finally microwave is realized using Vector modulation principle
The online detection of signal phase.
The structure for meeting conditions above is considered as the online microwave phase detector device based on clamped beam of the invention.
Claims (3)
1. a kind of online microwave phase detector device based on clamped beam, it is characterized in that (1) makes SiO on HR-Si substrate2Layer
(24), in SiO2Layer (24) is provided with coplanar waveguide transmission line, fixed beam structure, work(clutch and indirect thermoelectric (al) type microwave power
Sensor and 1 and indirect Thermoelectric Microwave Power Sensor and 2, described coplanar waveguide transmission line is by coplanar waveguide transmission line
Holding wire (2) and ground wire (3) are constituted, and described fixed beam structure is by clamped beam (4), the first anchor area (5) and second anchor area (6) structure
Into fixed beam structure is located at holding wire (2) top of coplanar waveguide transmission line, the first anchor area (5) of the upside of fixed beam structure
Indirect thermoelectric (al) type microwave work(is connected by the holding wire (18) of the coplanar waveguide transmission line of indirect Thermoelectric Microwave Power Sensor 1
Rate sensor 1, the holding wire of the first coplanar waveguide transmission line that the second anchor area (6) of the downside of fixed beam structure passes through work(clutch
(10) input of work(clutch is connected, another input of work(clutch passes through the second coplanar waveguide transmission line of work(clutch
Holding wire (11) be connected to reference signal input port, the 3rd coplanar wave guide transmission that the output end of work(clutch passes through work(clutch
The holding wire (12) of line is connected to indirect Thermoelectric Microwave Power Sensor 2.
2. the online microwave phase detector device based on clamped beam according to claim 1, it is characterized in that using work(clutch
Carry out power combing, described work(clutch by isolation resistance (8), ACPS holding wires (9), the first coplanar waveguide transmission line signal
The holding wire (12) of line (10), the holding wire (11) of the second coplanar waveguide transmission line and the 3rd coplanar waveguide transmission line is constituted.
3. the online microwave phase detector device based on clamped beam according to claim 1, it is characterized in that using indirect thermal
Electric-type microwave power detector carries out power detection, and described indirect Thermoelectric Microwave Power Sensor 1 includes metal thermocouple arm
(13), semiconductor thermocouple arm (14), ohmic contact regions (15), terminal resistance (16), direct current output block (17) and co-planar waveguide are passed
The holding wire (18) of defeated line；Described indirect Thermoelectric Microwave Power Sensor 2 includes metal thermocouple arm (19), semiconductor thermocouple
Arm (20), ohmic contact regions (21), terminal resistance (22) and direct current output block (23).
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| Application Number | Priority Date | Filing Date | Title |
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| CN201710052707.0A CN106814252A (en) | 2017-01-24 | 2017-01-24 | Online microwave phase detector device based on clamped beam |
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| CN201710052707.0A CN106814252A (en) | 2017-01-24 | 2017-01-24 | Online microwave phase detector device based on clamped beam |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109932561A (en) * | 2019-03-27 | 2019-06-25 | 南京邮电大学 | Microwave power detector based on compound arched girder |
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