CN106841803A - Clamped beam couples online microwave phase detector device - Google Patents
Clamped beam couples online microwave phase detector device Download PDFInfo
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- CN106841803A CN106841803A CN201710062653.6A CN201710062653A CN106841803A CN 106841803 A CN106841803 A CN 106841803A CN 201710062653 A CN201710062653 A CN 201710062653A CN 106841803 A CN106841803 A CN 106841803A
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- transmission line
- coplanar waveguide
- waveguide transmission
- clutch
- work
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R25/00—Arrangements for measuring phase angle between a voltage and a current or between voltages or currents
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R21/00—Arrangements for measuring electric power or power factor
- G01R21/02—Arrangements for measuring electric power or power factor by thermal methods, e.g. calorimetric
Abstract
Clamped beam couples online microwave phase detector device, and detector is prepared on HR-Si substrate, is made up of coplanar waveguide transmission line, fixed beam structure, work(clutch and two identical direct-heating type microwave power detectors.Wherein coplanar waveguide transmission line includes the holding wire and ground wire of coplanar waveguide transmission line；Fixed beam structure includes clamped beam and anchor area, is suspended from the dielectric layer top on holding wire；Work(clutch includes asymmetric coplanar stripline ACPS holding wires, the holding wire and isolation resistance of coplanar waveguide transmission line；Direct-heating type microwave power detector includes terminal resistance, semiconductor thermocouple arm, direct current output block, the holding wire of isolation DC capacitor coplanar waveguide transmission line.Detector arrangement of the present invention is simple, and circuit size is smaller, is capable of achieving the online detection of microwave phase.
Description
Technical field
The present invention proposes clamped beam and couples online microwave phase detector device, belongs to microelectromechanical systems (MEMS)
Technical field.
Background technology
With the development of Radar Technology, particularly go out in more recent technology such as phased-array radar, phased array antenna and accelerators
After now, the measurement of phase-shift phase seems increasingly important.Existing method for detecting phases has following several：Using diode detection,
Phase-detection is realized using multiplier architecture and using vector calculus method, the shortcoming of above method is to be required for relative complex knot
Structure.With the development of microelectric technique, modern PCS Personal Communications System and radar system requirement microwave phase detector utensil have simply
Structure, small volume and small power consumption.MEMS system has small volume, low in energy consumption, low cost and other advantages.Mesh of the invention
Exactly to propose a kind of implementation method of the online microwave signal phase detector based on technology.
The content of the invention
Technical problem：Online microwave phase detector device, the present invention are coupled the purpose of the present invention is to propose to a kind of clamped beam
Clamped beam coupling microwaves signal is employed, is sensed using direct-heating type microwave power in terms of the power detection of microwave signal
Device, uses vector synthesis in terms of microwave phase detector, it is achieved thereby that the detection of online microwave phase.
Technical scheme：Clamped beam couples online microwave phase detector device, and SiO is made on HR-Si substrate2Layer,
SiO2Layer is provided with coplanar waveguide transmission line, fixed beam structure, work(clutch and direct-heating type microwave power detector 1 and straight
Connect heated microwave power sensor 2, described coplanar waveguide transmission line by coplanar waveguide transmission line holding wire and ground wire structure
Into described fixed beam structure is made up of clamped beam, the first anchor area and the second anchor area；Fixed beam structure is suspended from coplanar wave guide transmission
The dielectric layer top of the holding wire of line, the first anchor area being total to by direct-heating type microwave power detector 1 of fixed beam structure
The holding wire connection direct-heating type microwave power detector 1 of coplanar waveguide transmission line, the second anchor area of fixed beam structure passes through work(
The holding wire of the first coplanar waveguide transmission line of clutch connects the input of work(clutch, and another input of work(clutch passes through work(
The holding wire of the second coplanar waveguide transmission line of clutch is connected to reference signal input port, and the output end of work(clutch is closed by work(
The holding wire connection direct-heating type microwave power detector 2 of the 3rd coplanar waveguide transmission line of device.
Work(clutch includes asymmetric coplanar stripline ACPS holding wires, the holding wire and isolation resistance of coplanar waveguide transmission line,
It is asymmetric coplanar striplines ACPS holding wires between the input and output end of work(clutch for microwave signal power synthesis,
Isolation resistance is arranged between two inputs.
Direct-heating type microwave power detector includes that terminal resistance, semiconductor thermocouple arm, direct current output block, isolation are straight
The holding wire of stream electric capacity and coplanar waveguide transmission line, its effect is the size that microwave power is detected based on Seebeck effect, and with
The form display testing result of VD.
Online microwave phase detector device is coupled the invention provides a kind of clamped beam, positioned at coplanar waveguide transmission line top
Clamped beam be coupled out part microwave signal online, one end anchor area connection direct-heating type microwave power sensing of fixed beam structure
Device 1 detects watt level, and other end coupled signal input work clutch carries out Vector modulation with reference signal.Signal profit after synthesis
The size of synthesis power is detected with direct-heating type microwave power detector 2, according to direct-heating type microwave power detector 1
The size of VD, is inferred to the phase of measured signal.Clamped beam of the invention couples online microwave phase detector
Device, not only has the advantages that to be easy to measurement, and can realize the online detection to microwave signal phase, it is easy to it is integrated and
The advantage compatible with High Resistivity Si monolithic integrated microwave circuit.
Simultaneously as the signal power very little that clamped beam is coupled out, most signal can continue to by coplanar ripple
Lead transmission line back-propagation and carry out follow-up signal transacting, it is achieved thereby that the detection of online microwave phase.
Beneficial effect：The present invention is that clamped beam couples online microwave phase detector device, employs the clamped of simple structure
Beam coupling microwaves signal, and the online detection of microwave phase is realized using this part coupling small-signal, and most signal
Can continue to that follow-up signal treatment is propagated and carried out on co-planar waveguide.
Brief description of the drawings
Fig. 1 is that clamped beam of the invention couples online microwave phase detector device top view；
Fig. 2 is the A-A ' profiles that Fig. 1 clamped beams couple online microwave phase detector device；
Fig. 3 is the B-B ' profiles that Fig. 1 clamped beams couple online microwave phase detector device；
Figure includes：HR-Si substrate 1, the holding wire 2 of coplanar waveguide transmission line, ground wire 3, the cantilever of fixed beam structure
Beam 4, the first anchor area 5, the second anchor area 6, insulating medium layer 7, the isolation resistance 8 of work(clutch, ACPS holding wires 9, the first coplanar ripple
Holding wire 10, the holding wire 11 of the second coplanar waveguide transmission line, the holding wire 12 of the 3rd coplanar waveguide transmission line of transmission line are led,
The terminal resistance 13 of direct-heating type microwave power detector 1, semiconductor thermocouple arm 14, direct current output block 15, isolation direct current
The holding wire 17 of electric capacity 16, coplanar waveguide transmission line, the terminal resistance 18, semiconductor of direct-heating type microwave power detector 2
Thermocouple arm 19, direct current output block 20, isolation DC capacitor 21, SiO2 layers 22.On HR-Si substrate 1 prepare one time SiO2 layers
22, coplanar waveguide transmission line, fixed beam structure, work(clutch and direct-heating type microwave power sensing are provided with SiO2 layers 22
Device 1 and direct-heating type microwave power detector 2.
Specific embodiment
Clamped beam of the invention couples online microwave phase detector device and is produced on HR-Si substrate 1, in High Resistivity Si lining
Being prepared on bottom has one layer of SiO2Layer 22, in SiO2Layer 22 is provided with coplanar waveguide transmission line, fixed beam structure, work(clutch and straight
Connect heated microwave power sensor 1 and direct-heating type microwave power detector 2.Coplanar waveguide transmission line is used as phase of the present invention
The signal transmssion line of bit detector, is made up of the holding wire 2 and ground wire 3 of coplanar waveguide transmission line.
Coplanar waveguide transmission line is made up of the holding wire 2 and ground wire 3 of coplanar waveguide transmission line；Fixed beam structure is by clamped beam
4th, the first anchor area 5 and the second anchor area 6 are constituted.
Direct-heating type microwave power detector 1 includes terminal resistance 13, semiconductor thermocouple arm 14, direct current output block
15th, the holding wire 17 of isolation DC capacitor 1 and coplanar waveguide transmission line；Direct-heating type microwave power detector 2 includes terminal
Resistance 18, semiconductor thermocouple arm 19, direct current output block 20 and isolation DC capacitor 21.
Holding wire 10, second of the work(clutch including isolation resistance 8, ACPS holding wires 9, the first coplanar waveguide transmission line is coplanar
The holding wire 12 of the coplanar waveguide transmission line of holding wire 11 and the 3rd of waveguide transmission line is constituted.
Fixed beam structure is located at the top of the insulating medium layer 7 on the holding wire 2 of coplanar waveguide transmission line.When microwave to be measured
When signal passes through coplanar waveguide transmission line, clamped beam 4 is coupled out fraction microwave signal, and respectively by fixed beam structure upper end
The first anchor area 5 and the second anchor area 6 of lower end export.First anchor area 5 of anchor area of upper end clamped beam is by directly heating type micro-wave
Coupling microwaves signal is transferred to direct-heating type microwave power sensing by the holding wire 17 of the coplanar waveguide transmission line of power sensor 1
Device 1, and detect its power P1；The letter of the first coplanar waveguide transmission line that the second anchor area 6 of lower end clamped beam passes through work(clutch
Coupling microwaves signal is transferred to work(clutch by number 10 lines, its letter for passing through work(clutch and the second coplanar waveguide transmission line from work(clutch
The power of number line 11 input is P2Reference signal vector synthesis, signal after synthesis passed by the 3rd co-planar waveguide of work(clutch
It is P that the holding wire 12 of defeated line is transmitted to the inspection record power of direct-heating type microwave power detector 23.Remember microwave signal to be measured and
The phase difference of reference signal isThe power P of the composite signal for then being exported through work(clutch3With phase differenceThere is cosine function system：
May finally be derived based on formula (1):
Simultaneously as the signal power very little that fixed beam structure is coupled out, most signal can continue to by altogether
Coplanar waveguide transmission line back-propagation simultaneously carries out follow-up signal transacting, it is achieved thereby that the detection of online microwave phase.
The specific embodiment that clamped beam of the invention couples online microwave phase detector device is as follows：
Such as Fig. 1, HR-Si substrate 1, the holding wire 2 of coplanar waveguide transmission line, ground wire 3, the cantilever beam of fixed beam structure
4th, the first anchor area 5, the second anchor area 6, insulating medium layer 7, the isolation resistance 8 of work(clutch, ACPS holding wires 9, the first co-planar waveguide
The holding wire 10 of transmission line, the holding wire 11 of the second coplanar waveguide transmission line, the holding wire 12 of the 3rd coplanar waveguide transmission line, directly
Connect terminal resistance 13, semiconductor thermocouple arm 14, direct current output block 15, the isolation direct current of heated microwave power sensor 1
Hold 16, the holding wire 17 of coplanar waveguide transmission line, the terminal resistance 18, semiconductor heat of direct-heating type microwave power detector 2
Galvanic couple arm 19, direct current output block 20, isolation DC capacitor 21, SiO2 layers 22.On HR-Si substrate 1 prepare one time SiO2 layers
22, coplanar waveguide transmission line, fixed beam structure, work(clutch and direct-heating type microwave power sensing are provided with SiO2 layers 22
Device 1 and direct-heating type microwave power detector 2.
The preparation method that clamped beam of the invention couples online microwave phase detector device is：
1) 4 inches of high resistant Si substrates are prepared, resistivity is 4000 Ω cm, and thickness is 400mm；
2) thermally grown a layer thickness is the SiO of 1.2mm2Layer；
3) chemical vapor deposition (CVD) grows one layer of polysilicon, and thickness is 0.4mm；
4) one layer of photoresist and photoetching are coated, in addition to polysilicon resistance region, other regions are photo-etched glue protection, and note
Enter phosphorus (P) ion, doping concentration is 1015cm-2, form isolation resistance and terminal resistance；
5) one layer of photoresist of coating, one layer of photoresist of photoetching polysilicon resistance graphic application, photoetching polysilicon resistance figure,
Isolation resistance and terminal resistance are formed by dry etching again；
6) one layer of photoresist, the light at photoetching removal coplanar waveguide transmission line, ACPS holding wires and output electrode are coated
Photoresist；
7) electron beam evaporation (EBE) forms ground floor gold (Au), and thickness is 0.3mm, on removal photoresist and photoresist
Au, stripping forms the ground floor Au of transmission line, isolation DC capacitor bottom crown, and output electrode；
8) (LPCVD) one layer of Si is deposited3N4, thickness is 0.1mm；
9) one layer of photoresist is coated, photoetching simultaneously retains the photoresist below isolation DC capacitor and clamped beam, dry etching
Si3N4, form Si3N4Dielectric layer；
10) one strata acid imide of uniform coating and litho pattern, thickness is 2mm, retains the polyimides below clamped beam
As sacrifice layer；
11) coat photoresist, photoetching removal clamped beam, clamped beam anchor area, coplanar waveguide transmission line, ACPS holding wires, every
Exhausted DC capacitor and the photoresist of output electrode position；
12) Seed Layer of 500/1500/300A ° of Ti/Au/Ti, the thickness of re-plating one after Ti layers at the top of removal are evaporated
Spend is Au layers of 2mm；
13) removal photoresist and photoresist on Au, formed clamped beam, clamped beam anchor area, coplanar waveguide transmission line,
ACPS holding wires, isolation DC capacitor top crown and output electrode；
14) deep reaction ion etching (DRIE) the backing material back side, makes the membrane structure below semiconductor thermocouple arm；
15) polyimide sacrificial layer is discharged：Developer solution soaks, the polyimide sacrificial layer under removal clamped beam, deionization
Water soaks slightly, absolute ethyl alcohol dehydration, is volatilized under normal temperature, dries.
Difference whether be structure of the present invention standard it is as follows：
Clamped beam of the invention couples online microwave phase detector device and uses clamped beam coupling microwaves signal, with two
Direct-heating type microwave power detector and a work(clutch.It is clamped when microwave signal to be measured passes through coplanar waveguide transmission line
Beam is coupled out fraction microwave signal, and respectively by the two ends anchor area output of fixed beam structure.Upper end anchor area passes through coplanar ripple
Lead holding wire and coupling microwaves signal is transferred into direct-heating type microwave power detector；Lower end anchor area passes through co-planar waveguide holding wire
Coupling microwaves signal is transferred into work(clutch, it passes through work(clutch and synthesizes with reference signal vector, power and the reference of composite signal
There is cosine function relationship in the phase difference of signal, the final online inspection that microwave signal phase is realized using Vector modulation principle
Survey.
The structure for meeting conditions above is considered as the online microwave phase detector device of clamped beam coupling of the invention.
Claims (3)
1. a kind of clamped beam couples online microwave phase detector device, it is characterized in that making SiO on HR-Si substrate (1)2Layer
(22), in SiO2Layer (22) is provided with coplanar waveguide transmission line, fixed beam structure, work(clutch and direct-heating type microwave power
Sensor 1 and direct-heating type microwave power detector 2, described coplanar waveguide transmission line by coplanar waveguide transmission line signal
Line (2) and ground wire (3) are constituted, and described fixed beam structure is made up of clamped beam (4), the first anchor area (5) and the second anchor area (6)；
Fixed beam structure is suspended from dielectric layer (7) top of the holding wire (2) of coplanar waveguide transmission line, the first anchor area of fixed beam structure
(5) connect to directly heat by the holding wire (17) of the coplanar waveguide transmission line of direct-heating type microwave power detector 1 and decline
Wave power sensor 1, the holding wire of the first coplanar waveguide transmission line that the second anchor area (6) of fixed beam structure passes through work(clutch
(10) input of work(clutch is connected, another input of work(clutch passes through the letter of the second coplanar waveguide transmission line of work(clutch
Number line (11) is connected to reference signal input port, the 3rd coplanar waveguide transmission line that the output end of work(clutch passes through work(clutch
Holding wire (12) connection direct-heating type microwave power detector 2.
2. clamped beam according to claim 1 couples online microwave phase detector device, it is characterized in that using directly heating
Type micro-wave power sensor checks microwave power, described direct-heating type microwave power detector 1 include terminal resistance (13),
The holding wire of semiconductor thermocouple arm (14), direct current output block (15), isolation DC capacitor (16) and coplanar waveguide transmission line
(17)；Direct-heating type microwave power detector 2 includes terminal resistance (18), semiconductor thermocouple arm (19), direct current output block
(20) and isolation DC capacitor (21).
3. clamped beam according to claim 1 couples online microwave phase detector device, it is characterized in that being entered using work(clutch
Row power combing, described work(clutch includes isolation resistance (8), ACPS holding wires (9), the signal of the first coplanar waveguide transmission line
Holding wire (12) composition of line (10), the holding wire (11) of the second coplanar waveguide transmission line and the 3rd coplanar waveguide transmission line.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710062653.6A CN106841803A (en) | 2017-01-24 | 2017-01-24 | Clamped beam couples online microwave phase detector device |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710062653.6A CN106841803A (en) | 2017-01-24 | 2017-01-24 | Clamped beam couples online microwave phase detector device |
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| CN201710062653.6A Pending CN106841803A (en) | 2017-01-24 | 2017-01-24 | Clamped beam couples online microwave phase detector device |
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Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102735933A (en) * | 2012-06-20 | 2012-10-17 | 东南大学 | Micromechanical silicon-based clamped beam-based phase detector and detection method |
| CN103048536A (en) * | 2013-01-18 | 2013-04-17 | 东南大学 | Online microwave frequency detector and detecting method thereof based on clamped beam and direct-type power sensor |
| CN103063918A (en) * | 2012-12-26 | 2013-04-24 | 东南大学 | Phase detecting device based on clamped beam capacity type micromechanical microwave power sensor |
-
2017
- 2017-01-24 CN CN201710062653.6A patent/CN106841803A/en active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102735933A (en) * | 2012-06-20 | 2012-10-17 | 东南大学 | Micromechanical silicon-based clamped beam-based phase detector and detection method |
| CN103063918A (en) * | 2012-12-26 | 2013-04-24 | 东南大学 | Phase detecting device based on clamped beam capacity type micromechanical microwave power sensor |
| CN103048536A (en) * | 2013-01-18 | 2013-04-17 | 东南大学 | Online microwave frequency detector and detecting method thereof based on clamped beam and direct-type power sensor |
Non-Patent Citations (2)
| Title |
|---|
| 朱健: "《微米纳米技术丛书 MEMS与微系统系列 RF MEMS器件设计、加工和应用》", 31 December 2012, 国防工业出版社 * |
| 林成鲁: "《SOI-纳米技术时代的高端硅基材料》", 30 June 2009 * |
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Application publication date: 20170613 |