CN106814253A - The online microwave phase detector device of gap T-shaped knot - Google Patents
The online microwave phase detector device of gap T-shaped knot Download PDFInfo
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- CN106814253A CN106814253A CN201710052744.1A CN201710052744A CN106814253A CN 106814253 A CN106814253 A CN 106814253A CN 201710052744 A CN201710052744 A CN 201710052744A CN 106814253 A CN106814253 A CN 106814253A
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- transmission line
- shaped knot
- coplanar waveguide
- holding wire
- waveguide transmission
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R25/00—Arrangements for measuring phase angle between a voltage and a current or between voltages or currents
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- Measurement Of Resistance Or Impedance (AREA)
Abstract
The online microwave phase detector device of gap T-shaped knot of the invention, detector prepare on HR-Si substrate, by coplanar waveguide transmission line, gap structure 1 and gap structure 2, T-shaped knot and indirect Thermoelectric Microwave Power Sensor 1 and indirectly Thermoelectric Microwave Power Sensor 2 constituted.Two gap structures are symmetrically arranged with the holding wire both sides of the coplanar waveguide transmission line of microwave signal transmission, the gap structure of upside is connected to indirect Thermoelectric Microwave Power Sensor, mainly for detection of the watt level of the signal being coupled out.Because upper and lower coupled structure is symmetrical, so signal power size, phase for being coupled out etc. are essentially equal.The gap structure of downside is connected to T-shaped knot and indirect thermoelectric (al) type microwave phase detector device, and the phase-detection of signal is realized by vector synthesis.Innovation of the invention is the online detection that microwave signal phase is realized using gap structure, and because the signal being coupled out is much smaller for measured signal therefore little on microwave signal influence.
Description
Technical field
The present invention proposes the online microwave phase detector device of gap T-shaped knot, belongs to microelectromechanical systems (MEMS)
Technical field.
Background technology
Microwave signal phase measurement occupies highly important status in microwave measurement.With the increase of frequency, signal
Wavelength is progressively approached with various component sizes in circuit, and voltage, electric current exist all in the form of ripple in circuit, the phase of signal
Postpone to cause that not only the voltage of various location, electric current are different in synchronization amplitude in circuit, and at same position
Voltage, electric current also not different in the same time.Therefore grasped in microwave frequency band and the phase of control signal is necessary
, the phase of microwave signal is also just into an important measurement parameter.
In order to solve the problems, such as above-mentioned microwave phase detector device, the present invention devises gap T-shaped knot on HR-Si substrate
Online microwave phase detector device.It make use of gap structure to realize phase-detection, and simple structure is easy to implement, while carrying
The integrated level of system high, can realize online detection, and efficiency is higher.
The content of the invention
Technical problem：The purpose of the present invention is to propose to a kind of online microwave phase detector device of gap T-shaped knot, the present invention is adopted
With gap structure coupling microwaves signal, sensed using indirect thermoelectric (al) type microwave power in terms of the power detection of microwave signal
Device, uses T-shaped knot in terms of microwave signal synthesis, and vector synthesis are used in terms of microwave phase detector, it is achieved thereby that
The detection of wire type microwave phase.
Technical scheme：The online microwave phase detector device of gap T-shaped knot of the invention be by coplanar waveguide transmission line, two
The indirect thermoelectric (al) type microwave power sensing of the symmetrical gap structure of holding wire on coplanar waveguide transmission line, T-shaped knot and two
What device was constituted, as shown in Figure 1.The phase-detection of microwave uses vector synthesis, by reference signal and measured signal
Using the phase for calculating microwave signal after T-shaped knot Vector modulation by cosine function formula.
Two gap structures are positioned at the holding wire both sides of coplanar waveguide transmission line and symmetrical on it, and its effect is common coupling
The microwave signal transmitted on the holding wire of coplanar waveguide transmission line, for on-line checking microwave phase.
T-shaped knot is by the first air bridges, the second air bridges, the 3rd air bridges, the holding wire of the first coplanar waveguide transmission line,
The holding wire of two coplanar waveguide transmission lines, the holding wire of the 3rd coplanar waveguide transmission line are constituted, and are three port devices, can be used for work(
Rate synthesizes, without isolation resistance, wherein the first air bridges, the second air bridges, the 3rd air bridges are used for coplanar waveguide transmission line
Interconnection between ground wire, while the release of these three air bridges for convenience, has made one group of array of orifices thereon.
Indirect Thermoelectric Microwave Power Sensor includes metal thermocouple arm, semiconductor thermocouple arm, ohmic contact regions, terminal electricity
The holding wire of resistance, direct current output block and coplanar waveguide transmission line, its effect is the work(based on Seebeck effect to microwave signal
Rate size is detected.
Beneficial effect：The present invention is the online microwave phase detector device of gap T-shaped knot, and microwave phase detector device employs seam
Can be coupled out for the microwave signal of fraction by gap structure, this structure, and realize microwave phase using this part coupled signal
The online detection of position, and most signal can continue to be propagated on coplanar waveguide transmission line and carry out at follow-up signal
Reason.
Brief description of the drawings
Fig. 1 is the online microwave phase detector device top view of T-shaped knot in gap of the invention；
Fig. 2 is the A-A ' profiles of the online microwave phase detector device of Fig. 1 gaps T-shaped knot；
Fig. 3 is the B-B ' profiles of the online microwave phase detector device of Fig. 1 gaps T-shaped knot；
Figure includes：HR-Si substrate 1, the holding wire 2 of coplanar waveguide transmission line, ground wire 3, gap structure 4, gap structure
5, the first air bridges 6 of T-shaped knot, the second air bridges 7, the 3rd air bridges 8, the holding wire 9, second of the first coplanar waveguide transmission line
The holding wire 10 of coplanar waveguide transmission line, the holding wire 11 of the 3rd coplanar waveguide transmission line, indirect thermoelectric (al) type microwave power sensing
The metal thermocouple arm 12, semiconductor thermocouple arm 13 of device 1, ohmic contact regions 14, terminal resistance 15, direct current output block 16, coplanar ripple
Lead the holding wire 17 of transmission line, the metal thermocouple arm 18, semiconductor thermocouple arm 19, Europe of indirect Thermoelectric Microwave Power Sensor 2
Nurse contact zone 20, terminal resistance 21, direct current output block 22, SiO2Layer 23.One layer of SiO is prepared on HR-Si substrate 12Layer 23,
SiO2Layer 11 is provided with coplanar waveguide transmission line, gap structure 4 and gap structure 5, T-shaped knot and indirect thermoelectric (al) type microwave power
Sensor 1 and indirect Thermoelectric Microwave Power Sensor 2.
Specific embodiment
The online microwave phase detector device of gap T-shaped knot of the invention is on coplanar by coplanar waveguide transmission line, two
The symmetrical gap structure 4 of the holding wire 2 of waveguide transmission line and gap structure 5, T-shaped knot and indirect thermoelectric (al) type microwave power sensing
What device 1 and indirect Thermoelectric Microwave Power Sensor 2 were constituted, as shown in Figure 1.Passed using gap structure coupling coplanar wave guide
Microwave signal on defeated line, power combing is carried out using T-shaped knot, is believed using indirect Thermoelectric Microwave Power Sensor detection microwave
Number power, the phase-detection of microwave signal is carried out using vector synthesis, reference signal and the signal are combined into using T-shaped
The phase of microwave signal is calculated by cosine function formula afterwards.
Coplanar waveguide transmission line is made up of the holding wire 2 and ground wire 3 of coplanar waveguide transmission line, in coplanar waveguide transmission line
The both sides of holding wire 2 are symmetrically respectively equipped with a gap structure 4 and gap structure 5, the upside of holding wire 2 of coplanar waveguide transmission line
Gap structure 4 coupling microwave signal by indirect Thermoelectric Microwave Power Sensor 1 coplanar waveguide transmission line holding wire 17
Transmit to indirect Thermoelectric Microwave Power Sensor 1, because gap structure 4 and gap structure 5 are on coplanar waveguide transmission line
Holding wire 2 is symmetrical, therefore signal magnitude phase of its coupling etc. is identical.The microwave signal of the coupling of gap structure 5 of downside is by T
The holding wire 9 of the first coplanar waveguide transmission line of shape knot connects an input of T-shaped knot, and another input of T-shaped knot leads to
The connection reference signal input port of holding wire 10 of the second coplanar waveguide transmission line of T-shaped knot is crossed, the input port of T junction passes through
The holding wire 11 of the 3rd coplanar waveguide transmission line of T-shaped knot connects indirect Thermoelectric Microwave Power Sensor 2.
T-shaped knot by the first air bridges 6, the second air bridges 7, the 3rd air bridges 8, the first coplanar waveguide transmission line holding wire
9th, the holding wire 10 of the second coplanar waveguide transmission line, the holding wire 11 of the 3rd coplanar waveguide transmission line are constituted, and are three port devices,
Can be used for power combing, without isolation resistance, wherein the first air bridges 6, the second air bridges 7, the 3rd air bridges 8 are used for coplanar ripple
The interconnection between the ground wire 3 of transmission line is led, while the release of these three air bridges for convenience, has made one group of aperture thereon
Array.
Indirect Thermoelectric Microwave Power Sensor 1 includes metal thermocouple arm 12, semiconductor thermocouple arm 13, ohmic contact regions
14th, the holding wire 17 of terminal resistance 15, direct current output block 16 and coplanar waveguide transmission line；Described indirect thermoelectric (al) type microwave work(
Rate sensor 2 includes metal thermocouple arm 18, semiconductor thermocouple arm 19, ohmic contact regions 20, terminal resistance 21 and direct current output
Block 22.
The invention provides a kind of online microwave phase detector device of gap T-shaped knot, when microwave signal is passed in co-planar waveguide
When being transmitted on defeated line, the monosymmetric gap structure 4 of holding wire 2 and gap structure 5 of coplanar waveguide transmission line can be coupled out
Fraction signal, the signal that this part is coupled out possesses and the signal identical phase.The holding wire 2 of coplanar waveguide transmission line
The microwave signal that the gap structure 4 of upside will be coupled out by indirect Thermoelectric Microwave Power Sensor 1 coplanar waveguide transmission line
Holding wire 17 transmit to indirect Thermoelectric Microwave Power Sensor 1, based on Seebeck effect with VD V1Shape
Formula exports testing result, can extrapolate the power P of the coupled signal1.From symmetry, the gap structure 5 of downside is coupled out
Signal power be also P1.By T-shaped knot by power be P2, correspondence DC input voitage be V2Reference signal and power be P1, it is right
It is V to answer VD1The signal that is coupled out of downside gap structure carry out power vector synthesis, the signal after synthesis is utilized
The indirect detection of Thermoelectric Microwave Power Sensor 2 obtains VD V3, the synthesis power can be extrapolated for P3.They it
Between meet onCosine function formula：
WhereinIt is the phase difference of measured signal and reference signal.May finally be derived based on formula (1):
Simultaneously as the signal power very little that gap structure is coupled out, most signal can continue to by coplanar
Waveguide transmission line back-propagation simultaneously carries out follow-up signal transacting, it is achieved thereby that the detection of online microwave phase.
The preparation method of the online microwave phase detector device of gap T-shaped knot of the invention is：
1) 4 inches of high resistant Si substrates are prepared, resistivity is 4000 Ω cm, and thickness is 400mm；
2) thermally grown a layer thickness is the SiO of 1.2mm2Layer；
3) chemical vapor deposition (CVD) grows one layer of polysilicon, and thickness is 0.4mm；
4) photoetching and the N of extension is isolated+High Resistivity Si, forms the figure and Ohmic contact of the semiconductor thermocouple arm of thermoelectric pile
Area；
5) N is anti-carved+High Resistivity Si, it is 10 to form its doping concentration17cm-3Thermoelectric pile semiconductor thermocouple arm；
6) photoetching：Removal will retain the photoresist in gold germanium ni au place；
7) peel off, form the metal thermocouple arm of thermoelectric pile；
8) photoetching：Removal will retain the photoresist in tantalum nitride place；
9) tantalum nitride is sputtered, its thickness is 1 μm；
10) peel off；
11) one layer of photoresist, photoetching removal coplanar waveguide transmission line, thermoelectric pile metal interconnecting wires and output electrode are coated
The photoresist at place；
12) electron beam evaporation (EBE) forms ground floor gold (Au), and thickness is 0.3mm, on removal photoresist and photoresist
Au, stripping form coplanar waveguide transmission line, thermoelectric pile metal interconnecting wires and output electrode；
13) tantalum nitride is anti-carved, terminal resistance is formed；
14) one strata acid imide of uniform coating and litho pattern, thickness is 2mm, retains the polyimides below air bridges
As sacrifice layer；
15) photoresist, the photoresist of photoetching removal air bridges, coplanar waveguide transmission line and output electrode position are coated；
16) Seed Layer of 500/1500/300A ° of Ti/Au/Ti, the thickness of re-plating one after Ti layers at the top of removal are evaporated
Spend is Au layers of 2mm；
17) Au on photoresist and photoresist is removed, air bridges, coplanar waveguide transmission line and output electrode is formed；
18) deep reaction ion etching (DRIE) coplanar waveguide transmission line, makes gap structure；
19) deep reaction ion etching (DRIE) the backing material back side, makes the membrane structure below thermoelectric pile；
20) polyimide sacrificial layer is discharged：Developer solution soaks, the polyimide sacrificial layer under removal air bridges, deionization
Water soaks slightly, absolute ethyl alcohol dehydration, is volatilized under normal temperature, dries.
Present invention be distinguished in that：
Present invention employs gap structure, the microwave letter that this gap structure will can be propagated in coplanar waveguide transmission line
Number sub-fraction is coupled out, and the phase size of microwave signal to be measured is detected using the small-signal that this part is coupled out, so that
Realize the online detection of microwave phase；The power detection of signal is then realized using indirect Thermoelectric Microwave Power Sensor
Heat to electricity conversion, the synthesis of signal uses T-shaped knot, and the online phase-detection of signal uses vector synthesis.Additionally, due to coupling
The signal power for going out is compared very small therefore little on microwave signal influence with measured signal, and the microwave signal can continue
Follow-up signal transacting is propagated and carried out on coplanar waveguide transmission line.
The structure for meeting conditions above is considered as the online microwave phase detector device of T-shaped knot in gap of the invention..
Claims (3)
1. the online microwave phase detector device of a kind of gap T-shaped knot, it is characterized in that making SiO on HR-Si substrate (1)2Layer
(23), in SiO2Layer (23) is provided with coplanar waveguide transmission line, gap structure (4) and gap structure (5), T-shaped knot and indirect
Thermoelectric Microwave Power Sensor 1 and indirect Thermoelectric Microwave Power Sensor 2, described coplanar waveguide transmission line is by coplanar ripple
The holding wire (2) and ground wire (3) for leading transmission line are constituted, and described gap structure (4) and gap structure (5) is passed positioned at co-planar waveguide
Holding wire (2) both sides of defeated line are simultaneously symmetrical on it, and the gap structure (4) on the upside of the holding wire (2) of coplanar waveguide transmission line leads to
The holding wire (17) for crossing the coplanar waveguide transmission line of indirect Thermoelectric Microwave Power Sensor 1 connects indirect thermoelectric (al) type microwave power
Sensor 1, holding wire (9) the connection T-shaped knot of the first coplanar waveguide transmission line that the gap structure (5) of downside passes through T-shaped knot
One input port, the holding wire (10) of the second coplanar waveguide transmission line that another input port passes through T-shaped knot is connected to ginseng
Signal input port is examined, the holding wire (11) that the output end of T-shaped knot passes through the 3rd coplanar waveguide transmission line of T-shaped knot connects indirect
Thermoelectric Microwave Power Sensor 2.
2. the online microwave phase detector device of T-shaped knot in gap according to claim 1, it is characterized in that being carried out using T-shaped knot
Power combing, described T-shaped knot is by the first air bridges (6), the second air bridges (7), the 3rd air bridges (8), the first co-planar waveguide
The holding wire (9) of transmission line, the holding wire (10) of the second coplanar waveguide transmission line, the holding wire of the 3rd coplanar waveguide transmission line
(11) constitute, be three port devices, can be used for power combing, without isolation resistance, wherein the first air bridges (6), the second air
Bridge (7), the 3rd air bridges (8) are for the interconnection between the ground wire (3) of coplanar waveguide transmission line, while these three are empty for convenience
The release of air bridge, has made one group of array of orifices thereon.
3. the online microwave phase detector device of T-shaped knot in gap according to claim 1, it is characterized in that using indirect thermoelectric (al) type
Microwave power detector carries out power detection, described indirect Thermoelectric Microwave Power Sensor 1 include metal thermocouple arm (12),
Semiconductor thermocouple arm (13), ohmic contact regions (14), terminal resistance (15), direct current output block (16) and coplanar waveguide transmission line
Holding wire (17)；Described indirect Thermoelectric Microwave Power Sensor 2 includes metal thermocouple arm (18), semiconductor thermocouple arm
(19), ohmic contact regions (20), terminal resistance (21) and direct current output block (22).
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| CN201710052744.1A CN106814253A (en) | 2017-01-24 | 2017-01-24 | The online microwave phase detector device of gap T-shaped knot |
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| CN201710052744.1A CN106814253A (en) | 2017-01-24 | 2017-01-24 | The online microwave phase detector device of gap T-shaped knot |
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Citations (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2004325162A (en) * | 2003-04-23 | 2004-11-18 | Mitsubishi Heavy Ind Ltd | Phase measuring apparatus and cosmic solar generation system |
| CN101034122A (en) * | 2007-03-30 | 2007-09-12 | 东南大学 | Microelectronic machinery orthogonal double channels microwave phase online detector and manufacturing method therefor |
| WO2007101916A1 (en) * | 2006-03-09 | 2007-09-13 | Valtion Teknillinen Tutkimuskeskus | Device and method for measuring electrical power |
| CN101788605B (en) * | 2010-02-01 | 2012-04-11 | 东南大学 | Wireless-receiving system for detecting microelectronic mechanical microwave frequency and preparation method thereof |
| CN103048540A (en) * | 2013-01-18 | 2013-04-17 | 东南大学 | Online microwave frequency detector and detecting method thereof based on cantilever beam and direct-type power sensor |
| CN103116067A (en) * | 2013-01-18 | 2013-05-22 | 东南大学 | On-line microwave frequency detector and detection method thereof based on clamped beams and indirect-type power sensors |
| CN103278681A (en) * | 2013-05-20 | 2013-09-04 | 东南大学 | Microwave power sensor with multi-cantilever structure |
| CN103018559B (en) * | 2012-12-26 | 2015-04-15 | 东南大学 | Device and method for phase detection based on indirect type micromechanical microwave power sensor |
| CN103344831B (en) * | 2013-06-19 | 2015-04-29 | 东南大学 | Phase detector based on micromechanical direct thermoelectric power sensors and preparation method thereof |
| CN104614584A (en) * | 2015-01-15 | 2015-05-13 | 南京邮电大学 | Micro-mechanical, high-precision and fixed supporting beam type microwave power detecting system and preparation method thereof |
| CN104655921A (en) * | 2015-02-16 | 2015-05-27 | 南京邮电大学 | Microwave power detection system based on parallel-connected MEMS (micro-electromechanical system) cantilever beams and preparation method of microwave power detection system |
| CN104950172A (en) * | 2015-07-01 | 2015-09-30 | 东南大学 | GaAs-based low-leakage-current microwave phase detector provided with double clamped-beam switches |
-
2017
- 2017-01-24 CN CN201710052744.1A patent/CN106814253A/en active Pending
Patent Citations (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2004325162A (en) * | 2003-04-23 | 2004-11-18 | Mitsubishi Heavy Ind Ltd | Phase measuring apparatus and cosmic solar generation system |
| WO2007101916A1 (en) * | 2006-03-09 | 2007-09-13 | Valtion Teknillinen Tutkimuskeskus | Device and method for measuring electrical power |
| CN101034122A (en) * | 2007-03-30 | 2007-09-12 | 东南大学 | Microelectronic machinery orthogonal double channels microwave phase online detector and manufacturing method therefor |
| CN101788605B (en) * | 2010-02-01 | 2012-04-11 | 东南大学 | Wireless-receiving system for detecting microelectronic mechanical microwave frequency and preparation method thereof |
| CN103018559B (en) * | 2012-12-26 | 2015-04-15 | 东南大学 | Device and method for phase detection based on indirect type micromechanical microwave power sensor |
| CN103048540A (en) * | 2013-01-18 | 2013-04-17 | 东南大学 | Online microwave frequency detector and detecting method thereof based on cantilever beam and direct-type power sensor |
| CN103116067A (en) * | 2013-01-18 | 2013-05-22 | 东南大学 | On-line microwave frequency detector and detection method thereof based on clamped beams and indirect-type power sensors |
| CN103278681A (en) * | 2013-05-20 | 2013-09-04 | 东南大学 | Microwave power sensor with multi-cantilever structure |
| CN103344831B (en) * | 2013-06-19 | 2015-04-29 | 东南大学 | Phase detector based on micromechanical direct thermoelectric power sensors and preparation method thereof |
| CN104614584A (en) * | 2015-01-15 | 2015-05-13 | 南京邮电大学 | Micro-mechanical, high-precision and fixed supporting beam type microwave power detecting system and preparation method thereof |
| CN104655921A (en) * | 2015-02-16 | 2015-05-27 | 南京邮电大学 | Microwave power detection system based on parallel-connected MEMS (micro-electromechanical system) cantilever beams and preparation method of microwave power detection system |
| CN104950172A (en) * | 2015-07-01 | 2015-09-30 | 东南大学 | GaAs-based low-leakage-current microwave phase detector provided with double clamped-beam switches |
Non-Patent Citations (4)
| Title |
|---|
| ZHENXIANG YI 等: "Fabrication of the Different Microwave Power Sensor by Seesaw-Type MEMS Membrane", 《JOURNAL OF MICROELECTROMECHANICAL SYSTEMS》 * |
| 朱健: "《微米纳米技术丛书•MEMS与微系统系列 RF MEMS器件设计、加工和应用》", 31 December 2012, 国防工业出版社 * |
| 林成鲁 编著: "《SOI-纳米技术时代的高端硅基材料》", 30 June 2009, 中国科学技术大学出版社 * |
| 焦永昌 等: "基于MEMS技术的差分式微波信号相位检测器", 《东南大学学报》 * |
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