KR100682209B1
(ko)
*
|
2002-06-21 |
2007-02-12 |
어플라이드 머티어리얼스, 인코포레이티드 |
진공 처리 시스템용 전달 챔버
|
US20050050708A1
(en)
*
|
2003-09-04 |
2005-03-10 |
Taiwan Semiconductor Manufacturing Co., Ltd. |
Embedded fastener apparatus and method for preventing particle contamination
|
US7645341B2
(en)
*
|
2003-12-23 |
2010-01-12 |
Lam Research Corporation |
Showerhead electrode assembly for plasma processing apparatuses
|
US20060054280A1
(en)
*
|
2004-02-23 |
2006-03-16 |
Jang Geun-Ha |
Apparatus of manufacturing display substrate and showerhead assembly equipped therein
|
JP4698251B2
(ja)
*
|
2004-02-24 |
2011-06-08 |
アプライド マテリアルズ インコーポレイテッド |
可動又は柔軟なシャワーヘッド取り付け
|
US8062471B2
(en)
*
|
2004-03-31 |
2011-11-22 |
Lam Research Corporation |
Proximity head heating method and apparatus
|
US8083853B2
(en)
|
2004-05-12 |
2011-12-27 |
Applied Materials, Inc. |
Plasma uniformity control by gas diffuser hole design
|
US7449220B2
(en)
*
|
2004-04-30 |
2008-11-11 |
Oc Oerlikon Blazers Ag |
Method for manufacturing a plate-shaped workpiece
|
US8074599B2
(en)
|
2004-05-12 |
2011-12-13 |
Applied Materials, Inc. |
Plasma uniformity control by gas diffuser curvature
|
US8328939B2
(en)
*
|
2004-05-12 |
2012-12-11 |
Applied Materials, Inc. |
Diffuser plate with slit valve compensation
|
US20060201074A1
(en)
*
|
2004-06-02 |
2006-09-14 |
Shinichi Kurita |
Electronic device manufacturing chamber and methods of forming the same
|
US7784164B2
(en)
*
|
2004-06-02 |
2010-08-31 |
Applied Materials, Inc. |
Electronic device manufacturing chamber method
|
CN103199039B
(zh)
*
|
2004-06-02 |
2016-01-13 |
应用材料公司 |
电子装置制造室及其形成方法
|
US20060042754A1
(en)
*
|
2004-07-30 |
2006-03-02 |
Tokyo Electron Limited |
Plasma etching apparatus
|
US7429410B2
(en)
*
|
2004-09-20 |
2008-09-30 |
Applied Materials, Inc. |
Diffuser gravity support
|
US7728823B2
(en)
*
|
2004-09-24 |
2010-06-01 |
Apple Inc. |
System and method for processing raw data of track pad device
|
JP2006179770A
(ja)
*
|
2004-12-24 |
2006-07-06 |
Watanabe Shoko:Kk |
基板表面処理装置
|
DE102005003984A1
(de)
*
|
2005-01-28 |
2006-08-03 |
Aixtron Ag |
Gaseinlassorgan für einen CVD-Reaktor
|
US7480974B2
(en)
*
|
2005-02-15 |
2009-01-27 |
Lam Research Corporation |
Methods of making gas distribution members for plasma processing apparatuses
|
US7430986B2
(en)
|
2005-03-18 |
2008-10-07 |
Lam Research Corporation |
Plasma confinement ring assemblies having reduced polymer deposition characteristics
|
US8679252B2
(en)
*
|
2005-09-23 |
2014-03-25 |
Lam Research Corporation |
Actively heated aluminum baffle component having improved particle performance and methods of use and manufacture thereof
|
US7743730B2
(en)
*
|
2005-12-21 |
2010-06-29 |
Lam Research Corporation |
Apparatus for an optimized plasma chamber grounded electrode assembly
|
US8789493B2
(en)
*
|
2006-02-13 |
2014-07-29 |
Lam Research Corporation |
Sealed elastomer bonded Si electrodes and the like for reduced particle contamination in dielectric etch
|
US8440049B2
(en)
*
|
2006-05-03 |
2013-05-14 |
Applied Materials, Inc. |
Apparatus for etching high aspect ratio features
|
JP4904202B2
(ja)
*
|
2006-05-22 |
2012-03-28 |
ジーイーエヌ カンパニー リミッテッド |
プラズマ反応器
|
KR100744639B1
(ko)
*
|
2006-07-31 |
2007-08-07 |
주식회사 월덱스 |
실리콘 단일재질의 플라즈마 챔버 캐소드 및 아웃링
|
US7875824B2
(en)
*
|
2006-10-16 |
2011-01-25 |
Lam Research Corporation |
Quartz guard ring centering features
|
US20080087641A1
(en)
*
|
2006-10-16 |
2008-04-17 |
Lam Research Corporation |
Components for a plasma processing apparatus
|
US7854820B2
(en)
*
|
2006-10-16 |
2010-12-21 |
Lam Research Corporation |
Upper electrode backing member with particle reducing features
|
US8702866B2
(en)
|
2006-12-18 |
2014-04-22 |
Lam Research Corporation |
Showerhead electrode assembly with gas flow modification for extended electrode life
|
JP4826483B2
(ja)
*
|
2007-01-19 |
2011-11-30 |
東京エレクトロン株式会社 |
プラズマ処理装置
|
ES2331489T3
(es)
*
|
2007-03-05 |
2010-01-05 |
Applied Materials, Inc. |
Instalacion de revestimiento y sistema de conduccion de gas.
|
US8375890B2
(en)
|
2007-03-19 |
2013-02-19 |
Micron Technology, Inc. |
Apparatus and methods for capacitively coupled plasma vapor processing of semiconductor wafers
|
US8069817B2
(en)
*
|
2007-03-30 |
2011-12-06 |
Lam Research Corporation |
Showerhead electrodes and showerhead electrode assemblies having low-particle performance for semiconductor material processing apparatuses
|
US8216418B2
(en)
*
|
2007-06-13 |
2012-07-10 |
Lam Research Corporation |
Electrode assembly and plasma processing chamber utilizing thermally conductive gasket and o-rings
|
US7862682B2
(en)
*
|
2007-06-13 |
2011-01-04 |
Lam Research Corporation |
Showerhead electrode assemblies for plasma processing apparatuses
|
JP4160104B1
(ja)
*
|
2007-08-16 |
2008-10-01 |
株式会社アルバック |
アッシング装置
|
US8313610B2
(en)
|
2007-09-25 |
2012-11-20 |
Lam Research Corporation |
Temperature control modules for showerhead electrode assemblies for plasma processing apparatuses
|
US7736441B2
(en)
*
|
2007-10-09 |
2010-06-15 |
Lam Research Corporation |
Cleaning fixtures and methods of cleaning electrode assembly plenums
|
US8187414B2
(en)
*
|
2007-10-12 |
2012-05-29 |
Lam Research Corporation |
Anchoring inserts, electrode assemblies, and plasma processing chambers
|
US8152954B2
(en)
*
|
2007-10-12 |
2012-04-10 |
Lam Research Corporation |
Showerhead electrode assemblies and plasma processing chambers incorporating the same
|
CN101842877B
(zh)
*
|
2007-10-31 |
2012-09-26 |
朗姆研究公司 |
用于半导体处理室的温度控制模块及控制元件温度的方法
|
US8043470B2
(en)
*
|
2007-11-21 |
2011-10-25 |
Lam Research Corporation |
Electrode/probe assemblies and plasma processing chambers incorporating the same
|
SG187386A1
(en)
*
|
2007-12-19 |
2013-02-28 |
Lam Res Corp |
A composite showerhead electrode assembly for a plasma processing apparatus
|
US8449786B2
(en)
*
|
2007-12-19 |
2013-05-28 |
Lam Research Corporation |
Film adhesive for semiconductor vacuum processing apparatus
|
KR101173645B1
(ko)
|
2007-12-31 |
2012-08-20 |
(주)에이디에스 |
가스 분사 유닛 및 이를 구비하는 박막 증착 장치
|
CN101488446B
(zh)
*
|
2008-01-14 |
2010-09-01 |
北京北方微电子基地设备工艺研究中心有限责任公司 |
等离子体处理设备及其气体分配装置
|
MX2010007722A
(es)
*
|
2008-01-15 |
2010-08-09 |
First Solar Inc |
Sistema y metodo para depositar un material sobre un sustrato.
|
TWI501704B
(zh)
*
|
2008-02-08 |
2015-09-21 |
Lam Res Corp |
於電漿處理系統中用以改變面積比之方法與裝置
|
US8187413B2
(en)
*
|
2008-03-18 |
2012-05-29 |
Lam Research Corporation |
Electrode assembly and plasma processing chamber utilizing thermally conductive gasket
|
CN104357807B
(zh)
*
|
2008-03-26 |
2019-06-28 |
Oci有限公司 |
在化学气相沉积反应器中用于配气的系统和方法
|
TWI464292B
(zh)
*
|
2008-03-26 |
2014-12-11 |
Gtat Corp |
塗覆金之多晶矽反應器系統和方法
|
US8679288B2
(en)
|
2008-06-09 |
2014-03-25 |
Lam Research Corporation |
Showerhead electrode assemblies for plasma processing apparatuses
|
US8075701B2
(en)
*
|
2008-06-30 |
2011-12-13 |
Lam Research Corporation |
Processes for reconditioning multi-component electrodes
|
US8161906B2
(en)
*
|
2008-07-07 |
2012-04-24 |
Lam Research Corporation |
Clamped showerhead electrode assembly
|
US8206506B2
(en)
*
|
2008-07-07 |
2012-06-26 |
Lam Research Corporation |
Showerhead electrode
|
US8221582B2
(en)
|
2008-07-07 |
2012-07-17 |
Lam Research Corporation |
Clamped monolithic showerhead electrode
|
US8328561B2
(en)
*
|
2008-08-11 |
2012-12-11 |
Veeco Instruments Inc. |
Electrical contacts for use with vacuum deposition sources
|
US8147648B2
(en)
*
|
2008-08-15 |
2012-04-03 |
Lam Research Corporation |
Composite showerhead electrode assembly for a plasma processing apparatus
|
US8449679B2
(en)
|
2008-08-15 |
2013-05-28 |
Lam Research Corporation |
Temperature controlled hot edge ring assembly
|
US10378106B2
(en)
|
2008-11-14 |
2019-08-13 |
Asm Ip Holding B.V. |
Method of forming insulation film by modified PEALD
|
US9714465B2
(en)
*
|
2008-12-01 |
2017-07-25 |
Applied Materials, Inc. |
Gas distribution blocker apparatus
|
US8869741B2
(en)
*
|
2008-12-19 |
2014-10-28 |
Lam Research Corporation |
Methods and apparatus for dual confinement and ultra-high pressure in an adjustable gap plasma chamber
|
JP5182136B2
(ja)
*
|
2009-02-12 |
2013-04-10 |
三菱マテリアル株式会社 |
プラズマ処理装置用電極板構成体及びプラズマ処理装置
|
US8313612B2
(en)
|
2009-03-24 |
2012-11-20 |
Lam Research Corporation |
Method and apparatus for reduction of voltage potential spike during dechucking
|
US9394608B2
(en)
|
2009-04-06 |
2016-07-19 |
Asm America, Inc. |
Semiconductor processing reactor and components thereof
|
US8402918B2
(en)
*
|
2009-04-07 |
2013-03-26 |
Lam Research Corporation |
Showerhead electrode with centering feature
|
US8272346B2
(en)
|
2009-04-10 |
2012-09-25 |
Lam Research Corporation |
Gasket with positioning feature for clamped monolithic showerhead electrode
|
US8147614B2
(en)
*
|
2009-06-09 |
2012-04-03 |
Applied Materials, Inc. |
Multi-gas flow diffuser
|
JP4786731B2
(ja)
*
|
2009-06-12 |
2011-10-05 |
シャープ株式会社 |
プラズマcvd装置
|
JP5212275B2
(ja)
*
|
2009-07-02 |
2013-06-19 |
三菱マテリアル株式会社 |
プラズマ処理装置用電極板
|
KR101110080B1
(ko)
*
|
2009-07-08 |
2012-03-13 |
주식회사 유진테크 |
확산판을 선택적으로 삽입설치하는 기판처리방법
|
CN102473612B
(zh)
*
|
2009-08-10 |
2015-06-10 |
三菱电机株式会社 |
等离子体cvd装置、等离子体电极以及半导体膜的制造方法
|
US8802201B2
(en)
|
2009-08-14 |
2014-08-12 |
Asm America, Inc. |
Systems and methods for thin-film deposition of metal oxides using excited nitrogen-oxygen species
|
SG169960A1
(en)
*
|
2009-09-18 |
2011-04-29 |
Lam Res Corp |
Clamped monolithic showerhead electrode
|
JP3160877U
(ja)
|
2009-10-13 |
2010-07-15 |
ラム リサーチ コーポレーションLam Research Corporation |
シャワーヘッド電極アセンブリの端部クランプ留めおよび機械固定される内側電極
|
US9441295B2
(en)
*
|
2010-05-14 |
2016-09-13 |
Solarcity Corporation |
Multi-channel gas-delivery system
|
KR101810065B1
(ko)
|
2010-05-21 |
2017-12-18 |
어플라이드 머티어리얼스, 인코포레이티드 |
대면적 전극 상에 억지 끼워맞춤된 세라믹 절연체
|
US8529729B2
(en)
|
2010-06-07 |
2013-09-10 |
Lam Research Corporation |
Plasma processing chamber component having adaptive thermal conductor
|
US8573152B2
(en)
|
2010-09-03 |
2013-11-05 |
Lam Research Corporation |
Showerhead electrode
|
US20120135609A1
(en)
*
|
2010-11-30 |
2012-05-31 |
Applied Materials, Inc. |
Apparatus and Process for Atomic Layer Deposition
|
US8470127B2
(en)
*
|
2011-01-06 |
2013-06-25 |
Lam Research Corporation |
Cam-locked showerhead electrode and assembly
|
KR101295794B1
(ko)
*
|
2011-05-31 |
2013-08-09 |
세메스 주식회사 |
기판 처리 장치
|
US9312155B2
(en)
|
2011-06-06 |
2016-04-12 |
Asm Japan K.K. |
High-throughput semiconductor-processing apparatus equipped with multiple dual-chamber modules
|
US10364496B2
(en)
|
2011-06-27 |
2019-07-30 |
Asm Ip Holding B.V. |
Dual section module having shared and unshared mass flow controllers
|
US10854498B2
(en)
|
2011-07-15 |
2020-12-01 |
Asm Ip Holding B.V. |
Wafer-supporting device and method for producing same
|
US20130023129A1
(en)
|
2011-07-20 |
2013-01-24 |
Asm America, Inc. |
Pressure transmitter for a semiconductor processing environment
|
US9017481B1
(en)
|
2011-10-28 |
2015-04-28 |
Asm America, Inc. |
Process feed management for semiconductor substrate processing
|
US8545639B2
(en)
|
2011-10-31 |
2013-10-01 |
Lam Research Corporation |
Method of cleaning aluminum plasma chamber parts
|
CN102446738A
(zh)
*
|
2011-11-29 |
2012-05-09 |
上海华力微电子有限公司 |
一种等离子体刻蚀装置
|
US9976215B2
(en)
*
|
2012-05-01 |
2018-05-22 |
Taiwan Semiconductor Manufacturing Co., Ltd. |
Semiconductor film formation apparatus and process
|
US9058960B2
(en)
|
2012-05-09 |
2015-06-16 |
Lam Research Corporation |
Compression member for use in showerhead electrode assembly
|
US9267205B1
(en)
*
|
2012-05-30 |
2016-02-23 |
Alta Devices, Inc. |
Fastener system for supporting a liner plate in a gas showerhead reactor
|
US9659799B2
(en)
|
2012-08-28 |
2017-05-23 |
Asm Ip Holding B.V. |
Systems and methods for dynamic semiconductor process scheduling
|
US9021985B2
(en)
|
2012-09-12 |
2015-05-05 |
Asm Ip Holdings B.V. |
Process gas management for an inductively-coupled plasma deposition reactor
|
US9018022B2
(en)
|
2012-09-24 |
2015-04-28 |
Lam Research Corporation |
Showerhead electrode assembly in a capacitively coupled plasma processing apparatus
|
US10714315B2
(en)
|
2012-10-12 |
2020-07-14 |
Asm Ip Holdings B.V. |
Semiconductor reaction chamber showerhead
|
US8975817B2
(en)
*
|
2012-10-17 |
2015-03-10 |
Lam Research Corporation |
Pressure controlled heat pipe temperature control plate
|
US8883029B2
(en)
*
|
2013-02-13 |
2014-11-11 |
Lam Research Corporation |
Method of making a gas distribution member for a plasma processing chamber
|
US9484191B2
(en)
|
2013-03-08 |
2016-11-01 |
Asm Ip Holding B.V. |
Pulsed remote plasma method and system
|
US9589770B2
(en)
|
2013-03-08 |
2017-03-07 |
Asm Ip Holding B.V. |
Method and systems for in-situ formation of intermediate reactive species
|
KR102127715B1
(ko)
*
|
2013-08-09 |
2020-06-29 |
에스케이실트론 주식회사 |
에피텍셜 반응기
|
US20150041062A1
(en)
*
|
2013-08-12 |
2015-02-12 |
Lam Research Corporation |
Plasma processing chamber with removable body
|
US9240412B2
(en)
|
2013-09-27 |
2016-01-19 |
Asm Ip Holding B.V. |
Semiconductor structure and device and methods of forming same using selective epitaxial process
|
US9275840B2
(en)
|
2014-01-25 |
2016-03-01 |
Yuri Glukhoy |
Method for providing uniform distribution of plasma density in a plasma treatment apparatus
|
US9484190B2
(en)
|
2014-01-25 |
2016-11-01 |
Yuri Glukhoy |
Showerhead-cooler system of a semiconductor-processing chamber for semiconductor wafers of large area
|
US10683571B2
(en)
|
2014-02-25 |
2020-06-16 |
Asm Ip Holding B.V. |
Gas supply manifold and method of supplying gases to chamber using same
|
US10167557B2
(en)
|
2014-03-18 |
2019-01-01 |
Asm Ip Holding B.V. |
Gas distribution system, reactor including the system, and methods of using the same
|
US11015245B2
(en)
|
2014-03-19 |
2021-05-25 |
Asm Ip Holding B.V. |
Gas-phase reactor and system having exhaust plenum and components thereof
|
US20150361582A1
(en)
*
|
2014-06-17 |
2015-12-17 |
Veeco Instruments, Inc. |
Gas Flow Flange For A Rotating Disk Reactor For Chemical Vapor Deposition
|
US10858737B2
(en)
*
|
2014-07-28 |
2020-12-08 |
Asm Ip Holding B.V. |
Showerhead assembly and components thereof
|
US9890456B2
(en)
|
2014-08-21 |
2018-02-13 |
Asm Ip Holding B.V. |
Method and system for in situ formation of gas-phase compounds
|
US10941490B2
(en)
|
2014-10-07 |
2021-03-09 |
Asm Ip Holding B.V. |
Multiple temperature range susceptor, assembly, reactor and system including the susceptor, and methods of using the same
|
US9657845B2
(en)
|
2014-10-07 |
2017-05-23 |
Asm Ip Holding B.V. |
Variable conductance gas distribution apparatus and method
|
JP6305314B2
(ja)
*
|
2014-10-29 |
2018-04-04 |
東京エレクトロン株式会社 |
成膜装置およびシャワーヘッド
|
KR102263121B1
(ko)
|
2014-12-22 |
2021-06-09 |
에이에스엠 아이피 홀딩 비.브이. |
반도체 소자 및 그 제조 방법
|
US10529542B2
(en)
|
2015-03-11 |
2020-01-07 |
Asm Ip Holdings B.V. |
Cross-flow reactor and method
|
US10276355B2
(en)
|
2015-03-12 |
2019-04-30 |
Asm Ip Holding B.V. |
Multi-zone reactor, system including the reactor, and method of using the same
|
KR101698433B1
(ko)
*
|
2015-04-30 |
2017-01-20 |
주식회사 에이씨엔 |
기상식각 및 세정을 위한 플라즈마 장치
|
US9738975B2
(en)
|
2015-05-12 |
2017-08-22 |
Lam Research Corporation |
Substrate pedestal module including backside gas delivery tube and method of making
|
US10177024B2
(en)
|
2015-05-12 |
2019-01-08 |
Lam Research Corporation |
High temperature substrate pedestal module and components thereof
|
US9972740B2
(en)
|
2015-06-07 |
2018-05-15 |
Tesla, Inc. |
Chemical vapor deposition tool and process for fabrication of photovoltaic structures
|
US10458018B2
(en)
|
2015-06-26 |
2019-10-29 |
Asm Ip Holding B.V. |
Structures including metal carbide material, devices including the structures, and methods of forming same
|
US10600673B2
(en)
|
2015-07-07 |
2020-03-24 |
Asm Ip Holding B.V. |
Magnetic susceptor to baseplate seal
|
US10083836B2
(en)
|
2015-07-24 |
2018-09-25 |
Asm Ip Holding B.V. |
Formation of boron-doped titanium metal films with high work function
|
US9960072B2
(en)
|
2015-09-29 |
2018-05-01 |
Asm Ip Holding B.V. |
Variable adjustment for precise matching of multiple chamber cavity housings
|
US10211308B2
(en)
|
2015-10-21 |
2019-02-19 |
Asm Ip Holding B.V. |
NbMC layers
|
US10322384B2
(en)
|
2015-11-09 |
2019-06-18 |
Asm Ip Holding B.V. |
Counter flow mixer for process chamber
|
KR102070450B1
(ko)
*
|
2015-11-19 |
2020-01-28 |
주식회사 원익아이피에스 |
기판처리장치의 제어방법 및 제어장치
|
JP6333232B2
(ja)
*
|
2015-12-02 |
2018-05-30 |
株式会社日立国際電気 |
基板処理装置、半導体装置の製造方法およびプログラム
|
US11139308B2
(en)
|
2015-12-29 |
2021-10-05 |
Asm Ip Holding B.V. |
Atomic layer deposition of III-V compounds to form V-NAND devices
|
US20170211185A1
(en)
*
|
2016-01-22 |
2017-07-27 |
Applied Materials, Inc. |
Ceramic showerhead with embedded conductive layers
|
US10468251B2
(en)
|
2016-02-19 |
2019-11-05 |
Asm Ip Holding B.V. |
Method for forming spacers using silicon nitride film for spacer-defined multiple patterning
|
US10529554B2
(en)
|
2016-02-19 |
2020-01-07 |
Asm Ip Holding B.V. |
Method for forming silicon nitride film selectively on sidewalls or flat surfaces of trenches
|
US10501866B2
(en)
|
2016-03-09 |
2019-12-10 |
Asm Ip Holding B.V. |
Gas distribution apparatus for improved film uniformity in an epitaxial system
|
US10343920B2
(en)
|
2016-03-18 |
2019-07-09 |
Asm Ip Holding B.V. |
Aligned carbon nanotubes
|
US9892913B2
(en)
|
2016-03-24 |
2018-02-13 |
Asm Ip Holding B.V. |
Radial and thickness control via biased multi-port injection settings
|
US10190213B2
(en)
|
2016-04-21 |
2019-01-29 |
Asm Ip Holding B.V. |
Deposition of metal borides
|
US10865475B2
(en)
|
2016-04-21 |
2020-12-15 |
Asm Ip Holding B.V. |
Deposition of metal borides and silicides
|
US10032628B2
(en)
|
2016-05-02 |
2018-07-24 |
Asm Ip Holding B.V. |
Source/drain performance through conformal solid state doping
|
US10367080B2
(en)
|
2016-05-02 |
2019-07-30 |
Asm Ip Holding B.V. |
Method of forming a germanium oxynitride film
|
KR102592471B1
(ko)
|
2016-05-17 |
2023-10-20 |
에이에스엠 아이피 홀딩 비.브이. |
금속 배선 형성 방법 및 이를 이용한 반도체 장치의 제조 방법
|
US9748434B1
(en)
|
2016-05-24 |
2017-08-29 |
Tesla, Inc. |
Systems, method and apparatus for curing conductive paste
|
US11453943B2
(en)
|
2016-05-25 |
2022-09-27 |
Asm Ip Holding B.V. |
Method for forming carbon-containing silicon/metal oxide or nitride film by ALD using silicon precursor and hydrocarbon precursor
|
US10519545B2
(en)
|
2016-05-31 |
2019-12-31 |
Taiwan Semiconductor Manufacturing Co., Ltd. |
Systems and methods for a plasma enhanced deposition of material on a semiconductor substrate
|
US10388509B2
(en)
|
2016-06-28 |
2019-08-20 |
Asm Ip Holding B.V. |
Formation of epitaxial layers via dislocation filtering
|
US9859151B1
(en)
|
2016-07-08 |
2018-01-02 |
Asm Ip Holding B.V. |
Selective film deposition method to form air gaps
|
US10612137B2
(en)
|
2016-07-08 |
2020-04-07 |
Asm Ip Holdings B.V. |
Organic reactants for atomic layer deposition
|
KR102652258B1
(ko)
*
|
2016-07-12 |
2024-03-28 |
에이비엠 주식회사 |
금속부품 및 그 제조 방법 및 금속부품을 구비한 공정챔버
|
US10714385B2
(en)
|
2016-07-19 |
2020-07-14 |
Asm Ip Holding B.V. |
Selective deposition of tungsten
|
KR102354490B1
(ko)
|
2016-07-27 |
2022-01-21 |
에이에스엠 아이피 홀딩 비.브이. |
기판 처리 방법
|
US10395919B2
(en)
|
2016-07-28 |
2019-08-27 |
Asm Ip Holding B.V. |
Method and apparatus for filling a gap
|
KR102532607B1
(ko)
|
2016-07-28 |
2023-05-15 |
에이에스엠 아이피 홀딩 비.브이. |
기판 가공 장치 및 그 동작 방법
|
US9812320B1
(en)
|
2016-07-28 |
2017-11-07 |
Asm Ip Holding B.V. |
Method and apparatus for filling a gap
|
US9887082B1
(en)
|
2016-07-28 |
2018-02-06 |
Asm Ip Holding B.V. |
Method and apparatus for filling a gap
|
US9954136B2
(en)
|
2016-08-03 |
2018-04-24 |
Tesla, Inc. |
Cassette optimized for an inline annealing system
|
US10410943B2
(en)
|
2016-10-13 |
2019-09-10 |
Asm Ip Holding B.V. |
Method for passivating a surface of a semiconductor and related systems
|
US10643826B2
(en)
|
2016-10-26 |
2020-05-05 |
Asm Ip Holdings B.V. |
Methods for thermally calibrating reaction chambers
|
US11532757B2
(en)
|
2016-10-27 |
2022-12-20 |
Asm Ip Holding B.V. |
Deposition of charge trapping layers
|
US10115856B2
(en)
|
2016-10-31 |
2018-10-30 |
Tesla, Inc. |
System and method for curing conductive paste using induction heating
|
US10643904B2
(en)
|
2016-11-01 |
2020-05-05 |
Asm Ip Holdings B.V. |
Methods for forming a semiconductor device and related semiconductor device structures
|
US10714350B2
(en)
|
2016-11-01 |
2020-07-14 |
ASM IP Holdings, B.V. |
Methods for forming a transition metal niobium nitride film on a substrate by atomic layer deposition and related semiconductor device structures
|
US10229833B2
(en)
|
2016-11-01 |
2019-03-12 |
Asm Ip Holding B.V. |
Methods for forming a transition metal nitride film on a substrate by atomic layer deposition and related semiconductor device structures
|
US10435790B2
(en)
|
2016-11-01 |
2019-10-08 |
Asm Ip Holding B.V. |
Method of subatmospheric plasma-enhanced ALD using capacitively coupled electrodes with narrow gap
|
US10134757B2
(en)
|
2016-11-07 |
2018-11-20 |
Asm Ip Holding B.V. |
Method of processing a substrate and a device manufactured by using the method
|
US10403476B2
(en)
|
2016-11-09 |
2019-09-03 |
Lam Research Corporation |
Active showerhead
|
KR102546317B1
(ko)
|
2016-11-15 |
2023-06-21 |
에이에스엠 아이피 홀딩 비.브이. |
기체 공급 유닛 및 이를 포함하는 기판 처리 장치
|
US10340135B2
(en)
|
2016-11-28 |
2019-07-02 |
Asm Ip Holding B.V. |
Method of topologically restricted plasma-enhanced cyclic deposition of silicon or metal nitride
|
KR20180068582A
(ko)
|
2016-12-14 |
2018-06-22 |
에이에스엠 아이피 홀딩 비.브이. |
기판 처리 장치
|
US11581186B2
(en)
|
2016-12-15 |
2023-02-14 |
Asm Ip Holding B.V. |
Sequential infiltration synthesis apparatus
|
US11447861B2
(en)
|
2016-12-15 |
2022-09-20 |
Asm Ip Holding B.V. |
Sequential infiltration synthesis apparatus and a method of forming a patterned structure
|
KR20180070971A
(ko)
|
2016-12-19 |
2018-06-27 |
에이에스엠 아이피 홀딩 비.브이. |
기판 처리 장치
|
US10269558B2
(en)
|
2016-12-22 |
2019-04-23 |
Asm Ip Holding B.V. |
Method of forming a structure on a substrate
|
US10867788B2
(en)
|
2016-12-28 |
2020-12-15 |
Asm Ip Holding B.V. |
Method of forming a structure on a substrate
|
US11390950B2
(en)
|
2017-01-10 |
2022-07-19 |
Asm Ip Holding B.V. |
Reactor system and method to reduce residue buildup during a film deposition process
|
US10655221B2
(en)
|
2017-02-09 |
2020-05-19 |
Asm Ip Holding B.V. |
Method for depositing oxide film by thermal ALD and PEALD
|
US10468261B2
(en)
|
2017-02-15 |
2019-11-05 |
Asm Ip Holding B.V. |
Methods for forming a metallic film on a substrate by cyclical deposition and related semiconductor device structures
|
US10529563B2
(en)
|
2017-03-29 |
2020-01-07 |
Asm Ip Holdings B.V. |
Method for forming doped metal oxide films on a substrate by cyclical deposition and related semiconductor device structures
|
US10283353B2
(en)
|
2017-03-29 |
2019-05-07 |
Asm Ip Holding B.V. |
Method of reforming insulating film deposited on substrate with recess pattern
|
KR102457289B1
(ko)
|
2017-04-25 |
2022-10-21 |
에이에스엠 아이피 홀딩 비.브이. |
박막 증착 방법 및 반도체 장치의 제조 방법
|
US10892156B2
(en)
|
2017-05-08 |
2021-01-12 |
Asm Ip Holding B.V. |
Methods for forming a silicon nitride film on a substrate and related semiconductor device structures
|
US10446393B2
(en)
|
2017-05-08 |
2019-10-15 |
Asm Ip Holding B.V. |
Methods for forming silicon-containing epitaxial layers and related semiconductor device structures
|
US10770286B2
(en)
|
2017-05-08 |
2020-09-08 |
Asm Ip Holdings B.V. |
Methods for selectively forming a silicon nitride film on a substrate and related semiconductor device structures
|
US10504742B2
(en)
|
2017-05-31 |
2019-12-10 |
Asm Ip Holding B.V. |
Method of atomic layer etching using hydrogen plasma
|
US10886123B2
(en)
|
2017-06-02 |
2021-01-05 |
Asm Ip Holding B.V. |
Methods for forming low temperature semiconductor layers and related semiconductor device structures
|
US20180366354A1
(en)
*
|
2017-06-19 |
2018-12-20 |
Applied Materials, Inc. |
In-situ semiconductor processing chamber temperature apparatus
|
US11306395B2
(en)
|
2017-06-28 |
2022-04-19 |
Asm Ip Holding B.V. |
Methods for depositing a transition metal nitride film on a substrate by atomic layer deposition and related deposition apparatus
|
US10685834B2
(en)
|
2017-07-05 |
2020-06-16 |
Asm Ip Holdings B.V. |
Methods for forming a silicon germanium tin layer and related semiconductor device structures
|
KR20190009245A
(ko)
|
2017-07-18 |
2019-01-28 |
에이에스엠 아이피 홀딩 비.브이. |
반도체 소자 구조물 형성 방법 및 관련된 반도체 소자 구조물
|
US11018002B2
(en)
|
2017-07-19 |
2021-05-25 |
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Method for selectively depositing a Group IV semiconductor and related semiconductor device structures
|
US11374112B2
(en)
|
2017-07-19 |
2022-06-28 |
Asm Ip Holding B.V. |
Method for depositing a group IV semiconductor and related semiconductor device structures
|
US10541333B2
(en)
|
2017-07-19 |
2020-01-21 |
Asm Ip Holding B.V. |
Method for depositing a group IV semiconductor and related semiconductor device structures
|
US10605530B2
(en)
|
2017-07-26 |
2020-03-31 |
Asm Ip Holding B.V. |
Assembly of a liner and a flange for a vertical furnace as well as the liner and the vertical furnace
|
US10590535B2
(en)
|
2017-07-26 |
2020-03-17 |
Asm Ip Holdings B.V. |
Chemical treatment, deposition and/or infiltration apparatus and method for using the same
|
US10312055B2
(en)
|
2017-07-26 |
2019-06-04 |
Asm Ip Holding B.V. |
Method of depositing film by PEALD using negative bias
|
US10692741B2
(en)
|
2017-08-08 |
2020-06-23 |
Asm Ip Holdings B.V. |
Radiation shield
|
US10770336B2
(en)
|
2017-08-08 |
2020-09-08 |
Asm Ip Holding B.V. |
Substrate lift mechanism and reactor including same
|
US11769682B2
(en)
|
2017-08-09 |
2023-09-26 |
Asm Ip Holding B.V. |
Storage apparatus for storing cassettes for substrates and processing apparatus equipped therewith
|
US10249524B2
(en)
|
2017-08-09 |
2019-04-02 |
Asm Ip Holding B.V. |
Cassette holder assembly for a substrate cassette and holding member for use in such assembly
|
US11139191B2
(en)
|
2017-08-09 |
2021-10-05 |
Asm Ip Holding B.V. |
Storage apparatus for storing cassettes for substrates and processing apparatus equipped therewith
|
US20190048467A1
(en)
*
|
2017-08-10 |
2019-02-14 |
Applied Materials, Inc. |
Showerhead and process chamber incorporating same
|
US10236177B1
(en)
|
2017-08-22 |
2019-03-19 |
ASM IP Holding B.V.. |
Methods for depositing a doped germanium tin semiconductor and related semiconductor device structures
|
USD900036S1
(en)
|
2017-08-24 |
2020-10-27 |
Asm Ip Holding B.V. |
Heater electrical connector and adapter
|
US11830730B2
(en)
|
2017-08-29 |
2023-11-28 |
Asm Ip Holding B.V. |
Layer forming method and apparatus
|
KR102491945B1
(ko)
|
2017-08-30 |
2023-01-26 |
에이에스엠 아이피 홀딩 비.브이. |
기판 처리 장치
|
US11295980B2
(en)
|
2017-08-30 |
2022-04-05 |
Asm Ip Holding B.V. |
Methods for depositing a molybdenum metal film over a dielectric surface of a substrate by a cyclical deposition process and related semiconductor device structures
|
US11056344B2
(en)
|
2017-08-30 |
2021-07-06 |
Asm Ip Holding B.V. |
Layer forming method
|
DE202017105481U1
(de)
*
|
2017-09-11 |
2018-12-12 |
Aixtron Se |
Gaseinlassorgan für einen CVD- oder PVD-Reaktor
|
US11598003B2
(en)
|
2017-09-12 |
2023-03-07 |
Applied Materials, Inc. |
Substrate processing chamber having heated showerhead assembly
|
US10607895B2
(en)
|
2017-09-18 |
2020-03-31 |
Asm Ip Holdings B.V. |
Method for forming a semiconductor device structure comprising a gate fill metal
|
KR102630301B1
(ko)
|
2017-09-21 |
2024-01-29 |
에이에스엠 아이피 홀딩 비.브이. |
침투성 재료의 순차 침투 합성 방법 처리 및 이를 이용하여 형성된 구조물 및 장치
|
US10844484B2
(en)
|
2017-09-22 |
2020-11-24 |
Asm Ip Holding B.V. |
Apparatus for dispensing a vapor phase reactant to a reaction chamber and related methods
|
US10658205B2
(en)
|
2017-09-28 |
2020-05-19 |
Asm Ip Holdings B.V. |
Chemical dispensing apparatus and methods for dispensing a chemical to a reaction chamber
|
US10403504B2
(en)
|
2017-10-05 |
2019-09-03 |
Asm Ip Holding B.V. |
Method for selectively depositing a metallic film on a substrate
|
US10319588B2
(en)
|
2017-10-10 |
2019-06-11 |
Asm Ip Holding B.V. |
Method for depositing a metal chalcogenide on a substrate by cyclical deposition
|
US10923344B2
(en)
|
2017-10-30 |
2021-02-16 |
Asm Ip Holding B.V. |
Methods for forming a semiconductor structure and related semiconductor structures
|
KR102443047B1
(ko)
|
2017-11-16 |
2022-09-14 |
에이에스엠 아이피 홀딩 비.브이. |
기판 처리 장치 방법 및 그에 의해 제조된 장치
|
US10910262B2
(en)
|
2017-11-16 |
2021-02-02 |
Asm Ip Holding B.V. |
Method of selectively depositing a capping layer structure on a semiconductor device structure
|
US11022879B2
(en)
|
2017-11-24 |
2021-06-01 |
Asm Ip Holding B.V. |
Method of forming an enhanced unexposed photoresist layer
|
US11639811B2
(en)
|
2017-11-27 |
2023-05-02 |
Asm Ip Holding B.V. |
Apparatus including a clean mini environment
|
KR102597978B1
(ko)
|
2017-11-27 |
2023-11-06 |
에이에스엠 아이피 홀딩 비.브이. |
배치 퍼니스와 함께 사용하기 위한 웨이퍼 카세트를 보관하기 위한 보관 장치
|
US10290508B1
(en)
|
2017-12-05 |
2019-05-14 |
Asm Ip Holding B.V. |
Method for forming vertical spacers for spacer-defined patterning
|
US10872771B2
(en)
|
2018-01-16 |
2020-12-22 |
Asm Ip Holding B. V. |
Method for depositing a material film on a substrate within a reaction chamber by a cyclical deposition process and related device structures
|
WO2019142055A2
(en)
|
2018-01-19 |
2019-07-25 |
Asm Ip Holding B.V. |
Method for depositing a gap-fill layer by plasma-assisted deposition
|
TWI799494B
(zh)
|
2018-01-19 |
2023-04-21 |
荷蘭商Asm 智慧財產控股公司 |
沈積方法
|
USD903477S1
(en)
|
2018-01-24 |
2020-12-01 |
Asm Ip Holdings B.V. |
Metal clamp
|
US11018047B2
(en)
|
2018-01-25 |
2021-05-25 |
Asm Ip Holding B.V. |
Hybrid lift pin
|
US10535516B2
(en)
|
2018-02-01 |
2020-01-14 |
Asm Ip Holdings B.V. |
Method for depositing a semiconductor structure on a surface of a substrate and related semiconductor structures
|
USD880437S1
(en)
|
2018-02-01 |
2020-04-07 |
Asm Ip Holding B.V. |
Gas supply plate for semiconductor manufacturing apparatus
|
US11081345B2
(en)
|
2018-02-06 |
2021-08-03 |
Asm Ip Holding B.V. |
Method of post-deposition treatment for silicon oxide film
|
CN111699278B
(zh)
|
2018-02-14 |
2023-05-16 |
Asm Ip私人控股有限公司 |
通过循环沉积工艺在衬底上沉积含钌膜的方法
|
US10896820B2
(en)
|
2018-02-14 |
2021-01-19 |
Asm Ip Holding B.V. |
Method for depositing a ruthenium-containing film on a substrate by a cyclical deposition process
|
US10731249B2
(en)
|
2018-02-15 |
2020-08-04 |
Asm Ip Holding B.V. |
Method of forming a transition metal containing film on a substrate by a cyclical deposition process, a method for supplying a transition metal halide compound to a reaction chamber, and related vapor deposition apparatus
|
KR102636427B1
(ko)
|
2018-02-20 |
2024-02-13 |
에이에스엠 아이피 홀딩 비.브이. |
기판 처리 방법 및 장치
|
US10658181B2
(en)
|
2018-02-20 |
2020-05-19 |
Asm Ip Holding B.V. |
Method of spacer-defined direct patterning in semiconductor fabrication
|
US10975470B2
(en)
|
2018-02-23 |
2021-04-13 |
Asm Ip Holding B.V. |
Apparatus for detecting or monitoring for a chemical precursor in a high temperature environment
|
US11473195B2
(en)
|
2018-03-01 |
2022-10-18 |
Asm Ip Holding B.V. |
Semiconductor processing apparatus and a method for processing a substrate
|
US20190276932A1
(en)
*
|
2018-03-08 |
2019-09-12 |
Shimadzu Corporation |
Film forming apparatus and film forming method
|
US11629406B2
(en)
|
2018-03-09 |
2023-04-18 |
Asm Ip Holding B.V. |
Semiconductor processing apparatus comprising one or more pyrometers for measuring a temperature of a substrate during transfer of the substrate
|
US11114283B2
(en)
|
2018-03-16 |
2021-09-07 |
Asm Ip Holding B.V. |
Reactor, system including the reactor, and methods of manufacturing and using same
|
KR102646467B1
(ko)
|
2018-03-27 |
2024-03-11 |
에이에스엠 아이피 홀딩 비.브이. |
기판 상에 전극을 형성하는 방법 및 전극을 포함하는 반도체 소자 구조
|
US10510536B2
(en)
|
2018-03-29 |
2019-12-17 |
Asm Ip Holding B.V. |
Method of depositing a co-doped polysilicon film on a surface of a substrate within a reaction chamber
|
US11088002B2
(en)
|
2018-03-29 |
2021-08-10 |
Asm Ip Holding B.V. |
Substrate rack and a substrate processing system and method
|
US11230766B2
(en)
|
2018-03-29 |
2022-01-25 |
Asm Ip Holding B.V. |
Substrate processing apparatus and method
|
KR102501472B1
(ko)
|
2018-03-30 |
2023-02-20 |
에이에스엠 아이피 홀딩 비.브이. |
기판 처리 방법
|
WO2019203975A1
(en)
*
|
2018-04-17 |
2019-10-24 |
Applied Materials, Inc |
Heated ceramic faceplate
|
WO2019212059A1
(ja)
*
|
2018-05-02 |
2019-11-07 |
東京エレクトロン株式会社 |
上部電極およびプラズマ処理装置
|
TW202344708A
(zh)
|
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2023-11-16 |
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|
US10555412B2
(en)
|
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Method of controlling ion energy distribution using a pulse generator with a current-return output stage
|
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(zh)
|
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|
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(ko)
|
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에이에스엠 아이피 홀딩 비.브이. |
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|
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(en)
|
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|
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(zh)
|
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|
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(ko)
*
|
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|
US11286562B2
(en)
|
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|
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(en)
|
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|
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(ko)
|
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에이에스엠 아이피 홀딩 비.브이. |
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|
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(ja)
|
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|
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|
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|
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(ko)
|
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|
US10612136B2
(en)
|
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2020-04-07 |
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|
US10388513B1
(en)
|
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2019-08-20 |
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Method for depositing silicon-free carbon-containing film as gap-fill layer by pulse plasma-assisted deposition
|
US10755922B2
(en)
|
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2020-08-25 |
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Method for depositing silicon-free carbon-containing film as gap-fill layer by pulse plasma-assisted deposition
|
US10767789B2
(en)
|
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2020-09-08 |
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|
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(en)
|
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|
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(en)
|
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|
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(en)
|
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Vertical furnace for processing substrates and a liner for use therein
|
US10829852B2
(en)
|
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|
US11430674B2
(en)
|
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2022-08-30 |
Asm Ip Holding B.V. |
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|
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(ko)
|
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2020-03-20 |
에이에스엠 아이피 홀딩 비.브이. |
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|
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(en)
|
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|
US11049751B2
(en)
|
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|
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(zh)
|
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|
US11232963B2
(en)
|
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|
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(ko)
|
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에이에스엠 아이피 홀딩 비.브이. |
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|
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(en)
|
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|
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(en)
|
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|
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(ko)
|
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에이에스엠 아이피 홀딩 비.브이. |
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|
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(ko)
|
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|
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(en)
|
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|
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(en)
|
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|
US11087997B2
(en)
|
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|
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(ko)
|
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에이에스엠 아이피 홀딩 비.브이. |
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|
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(en)
|
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|
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(en)
|
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|
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(en)
|
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|
US10818758B2
(en)
|
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2020-10-27 |
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|
US11476145B2
(en)
|
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|
US10559458B1
(en)
|
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|
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(en)
|
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|
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(ko)
|
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에이에스엠 아이피 홀딩 비.브이. |
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|
US11158513B2
(en)
|
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|
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(ja)
|
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2020-06-18 |
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|
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(zh)
*
|
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|
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(zh)
|
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|
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(ko)
|
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|
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(ko)
|
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에이에스엠 아이피 홀딩 비.브이. |
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|
US11508554B2
(en)
|
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High voltage filter assembly
|
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(zh)
|
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|
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(zh)
*
|
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|
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(ko)
|
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에이에스엠 아이피 홀딩 비.브이. |
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|
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(ja)
|
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|
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|
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2020-08-31 |
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|
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(ko)
|
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에이에스엠 아이피 홀딩 비.브이. |
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|
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(zh)
|
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|
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(ko)
|
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에이에스엠 아이피 홀딩 비.브이. |
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|
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(ko)
|
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에이에스엠 아이피 홀딩 비.브이. |
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|
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(ko)
|
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에이에스엠 아이피 홀딩 비.브이. |
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|
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(ja)
|
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|
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(ko)
|
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2020-10-13 |
에이에스엠 아이피 홀딩 비.브이. |
반도체 소자를 제조하는 방법
|
US11447864B2
(en)
|
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|
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(ko)
|
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2020-11-04 |
에이에스엠 아이피 홀딩 비.브이. |
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|
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(ko)
|
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에이에스엠 아이피 홀딩 비.브이. |
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|
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(ko)
|
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에이에스엠 아이피 홀딩 비.브이. |
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|
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(ko)
|
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2020-11-19 |
에이에스엠 아이피 홀딩 비.브이. |
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|
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(ja)
|
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|
USD947913S1
(en)
|
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2022-04-05 |
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|
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(en)
|
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2023-01-17 |
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|
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(en)
|
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2021-11-09 |
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|
USD922229S1
(en)
|
2019-06-05 |
2021-06-15 |
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|
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(ko)
|
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에이에스엠 아이피 홀딩 비.브이. |
가스 감지기를 포함하는 기상 반응기 시스템
|
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(ko)
|
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2020-12-23 |
에이에스엠 아이피 홀딩 비.브이. |
개질 가스를 사용하여 전자 구조를 형성하는 방법, 상기 방법을 수행하기 위한 시스템, 및 상기 방법을 사용하여 형성되는 구조
|
USD944946S1
(en)
|
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2022-03-01 |
Asm Ip Holding B.V. |
Shower plate
|
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(en)
|
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2021-09-28 |
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|
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(ko)
|
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2021-01-14 |
에이에스엠 아이피 홀딩 비.브이. |
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|
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(ja)
|
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|
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(zh)
|
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2021-01-12 |
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|
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(ko)
|
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2021-01-27 |
에이에스엠 아이피 홀딩 비.브이. |
기판 처리 장치
|
KR20210010820A
(ko)
|
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2021-01-28 |
에이에스엠 아이피 홀딩 비.브이. |
실리콘 게르마늄 구조를 형성하는 방법
|
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(ko)
|
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2021-01-28 |
에이에스엠 아이피 홀딩 비.브이. |
라디칼 보조 점화 플라즈마 시스템 및 방법
|
US11643724B2
(en)
|
2019-07-18 |
2023-05-09 |
Asm Ip Holding B.V. |
Method of forming structures using a neutral beam
|
CN112242296A
(zh)
|
2019-07-19 |
2021-01-19 |
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|
CN112309843A
(zh)
|
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2021-02-02 |
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|
CN112309899A
(zh)
|
2019-07-30 |
2021-02-02 |
Asm Ip私人控股有限公司 |
基板处理设备
|
CN112309900A
(zh)
|
2019-07-30 |
2021-02-02 |
Asm Ip私人控股有限公司 |
基板处理设备
|
US11587814B2
(en)
|
2019-07-31 |
2023-02-21 |
Asm Ip Holding B.V. |
Vertical batch furnace assembly
|
US11587815B2
(en)
|
2019-07-31 |
2023-02-21 |
Asm Ip Holding B.V. |
Vertical batch furnace assembly
|
US11227782B2
(en)
|
2019-07-31 |
2022-01-18 |
Asm Ip Holding B.V. |
Vertical batch furnace assembly
|
KR20210018759A
(ko)
|
2019-08-05 |
2021-02-18 |
에이에스엠 아이피 홀딩 비.브이. |
화학물질 공급원 용기를 위한 액체 레벨 센서
|
USD965044S1
(en)
|
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2022-09-27 |
Asm Ip Holding B.V. |
Susceptor shaft
|
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(en)
|
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2022-10-04 |
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|
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(ja)
|
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2021-03-01 |
エーエスエム アイピー ホールディング ビー.ブイ. |
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|
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(en)
|
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2021-09-14 |
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Gas distributor
|
USD979506S1
(en)
|
2019-08-22 |
2023-02-28 |
Asm Ip Holding B.V. |
Insulator
|
USD940837S1
(en)
|
2019-08-22 |
2022-01-11 |
Asm Ip Holding B.V. |
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|
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(ko)
|
2019-08-22 |
2021-03-05 |
에이에스엠 아이피 홀딩 비.브이. |
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|
USD949319S1
(en)
|
2019-08-22 |
2022-04-19 |
Asm Ip Holding B.V. |
Exhaust duct
|
KR20210024420A
(ko)
|
2019-08-23 |
2021-03-05 |
에이에스엠 아이피 홀딩 비.브이. |
비스(디에틸아미노)실란을 사용하여 peald에 의해 개선된 품질을 갖는 실리콘 산화물 막을 증착하기 위한 방법
|
US11286558B2
(en)
|
2019-08-23 |
2022-03-29 |
Asm Ip Holding B.V. |
Methods for depositing a molybdenum nitride film on a surface of a substrate by a cyclical deposition process and related semiconductor device structures including a molybdenum nitride film
|
KR20210029090A
(ko)
|
2019-09-04 |
2021-03-15 |
에이에스엠 아이피 홀딩 비.브이. |
희생 캡핑 층을 이용한 선택적 증착 방법
|
KR20210029663A
(ko)
|
2019-09-05 |
2021-03-16 |
에이에스엠 아이피 홀딩 비.브이. |
기판 처리 장치
|
CN112530774B
(zh)
*
|
2019-09-17 |
2024-04-05 |
中微半导体设备(上海)股份有限公司 |
等离子体处理设备
|
US11562901B2
(en)
|
2019-09-25 |
2023-01-24 |
Asm Ip Holding B.V. |
Substrate processing method
|
JP7282646B2
(ja)
|
2019-09-26 |
2023-05-29 |
株式会社アルバック |
真空処理装置
|
US11881384B2
(en)
*
|
2019-09-27 |
2024-01-23 |
Applied Materials, Inc. |
Monolithic modular microwave source with integrated process gas distribution
|
US11564292B2
(en)
*
|
2019-09-27 |
2023-01-24 |
Applied Materials, Inc. |
Monolithic modular microwave source with integrated temperature control
|
CN112593212B
(zh)
|
2019-10-02 |
2023-12-22 |
Asm Ip私人控股有限公司 |
通过循环等离子体增强沉积工艺形成拓扑选择性氧化硅膜的方法
|
TW202129060A
(zh)
|
2019-10-08 |
2021-08-01 |
荷蘭商Asm Ip控股公司 |
基板處理裝置、及基板處理方法
|
KR20210043460A
(ko)
|
2019-10-10 |
2021-04-21 |
에이에스엠 아이피 홀딩 비.브이. |
포토레지스트 하부층을 형성하기 위한 방법 및 이를 포함한 구조체
|
KR20210045930A
(ko)
|
2019-10-16 |
2021-04-27 |
에이에스엠 아이피 홀딩 비.브이. |
실리콘 산화물의 토폴로지-선택적 막의 형성 방법
|
US11637014B2
(en)
|
2019-10-17 |
2023-04-25 |
Asm Ip Holding B.V. |
Methods for selective deposition of doped semiconductor material
|
KR20210047808A
(ko)
|
2019-10-21 |
2021-04-30 |
에이에스엠 아이피 홀딩 비.브이. |
막을 선택적으로 에칭하기 위한 장치 및 방법
|
US11646205B2
(en)
|
2019-10-29 |
2023-05-09 |
Asm Ip Holding B.V. |
Methods of selectively forming n-type doped material on a surface, systems for selectively forming n-type doped material, and structures formed using same
|
KR20210054983A
(ko)
|
2019-11-05 |
2021-05-14 |
에이에스엠 아이피 홀딩 비.브이. |
도핑된 반도체 층을 갖는 구조체 및 이를 형성하기 위한 방법 및 시스템
|
US11501968B2
(en)
|
2019-11-15 |
2022-11-15 |
Asm Ip Holding B.V. |
Method for providing a semiconductor device with silicon filled gaps
|
KR20210062561A
(ko)
|
2019-11-20 |
2021-05-31 |
에이에스엠 아이피 홀딩 비.브이. |
기판의 표면 상에 탄소 함유 물질을 증착하는 방법, 상기 방법을 사용하여 형성된 구조물, 및 상기 구조물을 형성하기 위한 시스템
|
CN112951697A
(zh)
|
2019-11-26 |
2021-06-11 |
Asm Ip私人控股有限公司 |
基板处理设备
|
KR20210065848A
(ko)
|
2019-11-26 |
2021-06-04 |
에이에스엠 아이피 홀딩 비.브이. |
제1 유전체 표면과 제2 금속성 표면을 포함한 기판 상에 타겟 막을 선택적으로 형성하기 위한 방법
|
CN112885693A
(zh)
|
2019-11-29 |
2021-06-01 |
Asm Ip私人控股有限公司 |
基板处理设备
|
CN112885692A
(zh)
|
2019-11-29 |
2021-06-01 |
Asm Ip私人控股有限公司 |
基板处理设备
|
JP2021090042A
(ja)
|
2019-12-02 |
2021-06-10 |
エーエスエム アイピー ホールディング ビー.ブイ. |
基板処理装置、基板処理方法
|
KR20210070898A
(ko)
|
2019-12-04 |
2021-06-15 |
에이에스엠 아이피 홀딩 비.브이. |
기판 처리 장치
|
CN112992667A
(zh)
|
2019-12-17 |
2021-06-18 |
Asm Ip私人控股有限公司 |
形成氮化钒层的方法和包括氮化钒层的结构
|
KR20210080214A
(ko)
|
2019-12-19 |
2021-06-30 |
에이에스엠 아이피 홀딩 비.브이. |
기판 상의 갭 피처를 충진하는 방법 및 이와 관련된 반도체 소자 구조
|
KR20210095050A
(ko)
|
2020-01-20 |
2021-07-30 |
에이에스엠 아이피 홀딩 비.브이. |
박막 형성 방법 및 박막 표면 개질 방법
|
TW202130846A
(zh)
|
2020-02-03 |
2021-08-16 |
荷蘭商Asm Ip私人控股有限公司 |
形成包括釩或銦層的結構之方法
|
TW202146882A
(zh)
|
2020-02-04 |
2021-12-16 |
荷蘭商Asm Ip私人控股有限公司 |
驗證一物品之方法、用於驗證一物品之設備、及用於驗證一反應室之系統
|
US11776846B2
(en)
|
2020-02-07 |
2023-10-03 |
Asm Ip Holding B.V. |
Methods for depositing gap filling fluids and related systems and devices
|
US11781243B2
(en)
|
2020-02-17 |
2023-10-10 |
Asm Ip Holding B.V. |
Method for depositing low temperature phosphorous-doped silicon
|
KR20210116249A
(ko)
|
2020-03-11 |
2021-09-27 |
에이에스엠 아이피 홀딩 비.브이. |
록아웃 태그아웃 어셈블리 및 시스템 그리고 이의 사용 방법
|
KR20210116240A
(ko)
|
2020-03-11 |
2021-09-27 |
에이에스엠 아이피 홀딩 비.브이. |
조절성 접합부를 갖는 기판 핸들링 장치
|
KR20210117157A
(ko)
|
2020-03-12 |
2021-09-28 |
에이에스엠 아이피 홀딩 비.브이. |
타겟 토폴로지 프로파일을 갖는 층 구조를 제조하기 위한 방법
|
KR20210124042A
(ko)
|
2020-04-02 |
2021-10-14 |
에이에스엠 아이피 홀딩 비.브이. |
박막 형성 방법
|
TW202146689A
(zh)
|
2020-04-03 |
2021-12-16 |
荷蘭商Asm Ip控股公司 |
阻障層形成方法及半導體裝置的製造方法
|
TW202145344A
(zh)
|
2020-04-08 |
2021-12-01 |
荷蘭商Asm Ip私人控股有限公司 |
用於選擇性蝕刻氧化矽膜之設備及方法
|
US11821078B2
(en)
|
2020-04-15 |
2023-11-21 |
Asm Ip Holding B.V. |
Method for forming precoat film and method for forming silicon-containing film
|
US11898243B2
(en)
|
2020-04-24 |
2024-02-13 |
Asm Ip Holding B.V. |
Method of forming vanadium nitride-containing layer
|
KR20210132600A
(ko)
|
2020-04-24 |
2021-11-04 |
에이에스엠 아이피 홀딩 비.브이. |
바나듐, 질소 및 추가 원소를 포함한 층을 증착하기 위한 방법 및 시스템
|
KR20210132605A
(ko)
|
2020-04-24 |
2021-11-04 |
에이에스엠 아이피 홀딩 비.브이. |
냉각 가스 공급부를 포함한 수직형 배치 퍼니스 어셈블리
|
KR20210134226A
(ko)
|
2020-04-29 |
2021-11-09 |
에이에스엠 아이피 홀딩 비.브이. |
고체 소스 전구체 용기
|
KR20210134869A
(ko)
|
2020-05-01 |
2021-11-11 |
에이에스엠 아이피 홀딩 비.브이. |
Foup 핸들러를 이용한 foup의 빠른 교환
|
CN113628949A
(zh)
*
|
2020-05-09 |
2021-11-09 |
长鑫存储技术有限公司 |
控温装置及其控制方法、等离子设备
|
KR20210141379A
(ko)
|
2020-05-13 |
2021-11-23 |
에이에스엠 아이피 홀딩 비.브이. |
반응기 시스템용 레이저 정렬 고정구
|
KR20210143653A
(ko)
|
2020-05-19 |
2021-11-29 |
에이에스엠 아이피 홀딩 비.브이. |
기판 처리 장치
|
KR20210145078A
(ko)
|
2020-05-21 |
2021-12-01 |
에이에스엠 아이피 홀딩 비.브이. |
다수의 탄소 층을 포함한 구조체 및 이를 형성하고 사용하는 방법
|
TW202201602A
(zh)
|
2020-05-29 |
2022-01-01 |
荷蘭商Asm Ip私人控股有限公司 |
基板處理方法
|
TW202218133A
(zh)
|
2020-06-24 |
2022-05-01 |
荷蘭商Asm Ip私人控股有限公司 |
形成含矽層之方法
|
TW202217953A
(zh)
|
2020-06-30 |
2022-05-01 |
荷蘭商Asm Ip私人控股有限公司 |
基板處理方法
|
TW202219628A
(zh)
|
2020-07-17 |
2022-05-16 |
荷蘭商Asm Ip私人控股有限公司 |
用於光微影之結構與方法
|
TW202204662A
(zh)
|
2020-07-20 |
2022-02-01 |
荷蘭商Asm Ip私人控股有限公司 |
用於沉積鉬層之方法及系統
|
US11462388B2
(en)
|
2020-07-31 |
2022-10-04 |
Applied Materials, Inc. |
Plasma processing assembly using pulsed-voltage and radio-frequency power
|
US11725280B2
(en)
|
2020-08-26 |
2023-08-15 |
Asm Ip Holding B.V. |
Method for forming metal silicon oxide and metal silicon oxynitride layers
|
USD990534S1
(en)
|
2020-09-11 |
2023-06-27 |
Asm Ip Holding B.V. |
Weighted lift pin
|
USD1012873S1
(en)
|
2020-09-24 |
2024-01-30 |
Asm Ip Holding B.V. |
Electrode for semiconductor processing apparatus
|
TW202229613A
(zh)
|
2020-10-14 |
2022-08-01 |
荷蘭商Asm Ip私人控股有限公司 |
於階梯式結構上沉積材料的方法
|
TW202217037A
(zh)
|
2020-10-22 |
2022-05-01 |
荷蘭商Asm Ip私人控股有限公司 |
沉積釩金屬的方法、結構、裝置及沉積總成
|
TW202223136A
(zh)
|
2020-10-28 |
2022-06-16 |
荷蘭商Asm Ip私人控股有限公司 |
用於在基板上形成層之方法、及半導體處理系統
|
US11901157B2
(en)
|
2020-11-16 |
2024-02-13 |
Applied Materials, Inc. |
Apparatus and methods for controlling ion energy distribution
|
US11798790B2
(en)
|
2020-11-16 |
2023-10-24 |
Applied Materials, Inc. |
Apparatus and methods for controlling ion energy distribution
|
TW202235675A
(zh)
|
2020-11-30 |
2022-09-16 |
荷蘭商Asm Ip私人控股有限公司 |
注入器、及基板處理設備
|
CN114639631A
(zh)
|
2020-12-16 |
2022-06-17 |
Asm Ip私人控股有限公司 |
跳动和摆动测量固定装置
|
CN112720119B
(zh)
*
|
2020-12-19 |
2021-11-30 |
华中科技大学 |
一种晶圆快速定位装置及方法
|
TW202231903A
(zh)
|
2020-12-22 |
2022-08-16 |
荷蘭商Asm Ip私人控股有限公司 |
過渡金屬沉積方法、過渡金屬層、用於沉積過渡金屬於基板上的沉積總成
|
KR20220095677A
(ko)
*
|
2020-12-30 |
2022-07-07 |
세메스 주식회사 |
온도 측정 유닛을 포함하는 공정 챔버 및 온도 측정 유닛을 포함하는 기판 처리 장치
|
US11495470B1
(en)
|
2021-04-16 |
2022-11-08 |
Applied Materials, Inc. |
Method of enhancing etching selectivity using a pulsed plasma
|
US11851758B2
(en)
|
2021-04-20 |
2023-12-26 |
Applied Materials, Inc. |
Fabrication of a high temperature showerhead
|
USD981973S1
(en)
|
2021-05-11 |
2023-03-28 |
Asm Ip Holding B.V. |
Reactor wall for substrate processing apparatus
|
USD980813S1
(en)
|
2021-05-11 |
2023-03-14 |
Asm Ip Holding B.V. |
Gas flow control plate for substrate processing apparatus
|
USD980814S1
(en)
|
2021-05-11 |
2023-03-14 |
Asm Ip Holding B.V. |
Gas distributor for substrate processing apparatus
|
US11948780B2
(en)
|
2021-05-12 |
2024-04-02 |
Applied Materials, Inc. |
Automatic electrostatic chuck bias compensation during plasma processing
|
US11791138B2
(en)
|
2021-05-12 |
2023-10-17 |
Applied Materials, Inc. |
Automatic electrostatic chuck bias compensation during plasma processing
|
US11810760B2
(en)
|
2021-06-16 |
2023-11-07 |
Applied Materials, Inc. |
Apparatus and method of ion current compensation
|
US11569066B2
(en)
|
2021-06-23 |
2023-01-31 |
Applied Materials, Inc. |
Pulsed voltage source for plasma processing applications
|
US11776788B2
(en)
|
2021-06-28 |
2023-10-03 |
Applied Materials, Inc. |
Pulsed voltage boost for substrate processing
|
US11476090B1
(en)
|
2021-08-24 |
2022-10-18 |
Applied Materials, Inc. |
Voltage pulse time-domain multiplexing
|
USD990441S1
(en)
|
2021-09-07 |
2023-06-27 |
Asm Ip Holding B.V. |
Gas flow control plate
|
US11694876B2
(en)
|
2021-12-08 |
2023-07-04 |
Applied Materials, Inc. |
Apparatus and method for delivering a plurality of waveform signals during plasma processing
|