TW218933B - - Google Patents

Download PDF

Info

Publication number
TW218933B
TW218933B TW079110800A01A TW079110800A01A TW218933B TW 218933 B TW218933 B TW 218933B TW 079110800A01 A TW079110800A01 A TW 079110800A01A TW 079110800A01 A TW079110800A01 A TW 079110800A01A TW 218933 B TW218933 B TW 218933B
Authority
TW
Taiwan
Prior art keywords
film
insulating film
contact hole
layer
etching
Prior art date
Application number
TW079110800A01A
Other languages
English (en)
Chinese (zh)
Original Assignee
Sharp Kk
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP1340159A external-priority patent/JP2574910B2/ja
Priority claimed from JP2074639A external-priority patent/JP2547882B2/ja
Application filed by Sharp Kk filed Critical Sharp Kk
Application granted granted Critical
Publication of TW218933B publication Critical patent/TW218933B/zh

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10B—ELECTRONIC MEMORY DEVICES
    • H10B12/00—Dynamic random access memory [DRAM] devices
    • H10B12/30—DRAM devices comprising one-transistor - one-capacitor [1T-1C] memory cells
    • H10B12/31—DRAM devices comprising one-transistor - one-capacitor [1T-1C] memory cells having a storage electrode stacked over the transistor
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10B—ELECTRONIC MEMORY DEVICES
    • H10B12/00—Dynamic random access memory [DRAM] devices
    • H10B12/01—Manufacture or treatment
    • H10B12/02—Manufacture or treatment for one transistor one-capacitor [1T-1C] memory cells
    • H10B12/03—Making the capacitor or connections thereto
    • H10B12/033—Making the capacitor or connections thereto the capacitor extending over the transistor
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S148/00—Metal treatment
    • Y10S148/014—Capacitor
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S148/00—Metal treatment
    • Y10S148/109—Memory devices

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Semiconductor Memories (AREA)
TW079110800A01A 1989-12-29 1993-02-04 TW218933B (enExample)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP1340159A JP2574910B2 (ja) 1989-12-29 1989-12-29 半導体装置の製造方法
JP2074639A JP2547882B2 (ja) 1990-03-23 1990-03-23 半導体装置の製造方法

Publications (1)

Publication Number Publication Date
TW218933B true TW218933B (enExample) 1994-01-11

Family

ID=26415810

Family Applications (1)

Application Number Title Priority Date Filing Date
TW079110800A01A TW218933B (enExample) 1989-12-29 1993-02-04

Country Status (5)

Country Link
US (2) US5118640A (enExample)
EP (1) EP0439965B1 (enExample)
KR (1) KR960002078B1 (enExample)
DE (1) DE69030433T2 (enExample)
TW (1) TW218933B (enExample)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE59009067D1 (de) * 1990-04-27 1995-06-14 Siemens Ag Verfahren zur Herstellung einer Öffnung in einem Halbleiterschichtaufbau und dessen Verwendung zur Herstellung von Kontaktlöchern.
JP2524863B2 (ja) * 1990-05-02 1996-08-14 三菱電機株式会社 半導体装置およびその製造方法
US5236860A (en) * 1991-01-04 1993-08-17 Micron Technology, Inc. Lateral extension stacked capacitor
US5231043A (en) * 1991-08-21 1993-07-27 Sgs-Thomson Microelectronics, Inc. Contact alignment for integrated circuits
TW243541B (enExample) * 1991-08-31 1995-03-21 Samsung Electronics Co Ltd
KR960003773B1 (ko) * 1992-08-25 1996-03-22 금성일렉트론주식회사 디램(DRAM) 셀(Cell) 제조방법
US5605857A (en) * 1993-02-12 1997-02-25 Micron Technology, Inc. Method of forming a bit line over capacitor array of memory cells and an array of bit line over capacitor array of memory cells
US5563089A (en) * 1994-07-20 1996-10-08 Micron Technology, Inc. Method of forming a bit line over capacitor array of memory cells and an array of bit line over capacitor array of memory cells
US5840605A (en) * 1993-04-19 1998-11-24 Industrial Technology Research Institute Dual layer polysilicon capacitor node DRAM process
KR100388519B1 (ko) * 1995-02-22 2003-09-19 마이크론 테크놀로지, 인크. 메모리셀의커패시터배열위에비트선을형성하는방법및이를이용한집적회로및반도체메모리장치
WO2001009946A1 (de) * 1999-07-29 2001-02-08 Infineon Technologies Ag Verfahren zur herstellung integrierter halbleiterbauelemente
DE10332600B3 (de) 2003-07-17 2005-04-14 Infineon Technologies Ag Verfahren zum Herstellen eines elektrisch leitenden Kontaktes
JP4301227B2 (ja) * 2005-09-15 2009-07-22 セイコーエプソン株式会社 電気光学装置及びその製造方法、電子機器並びにコンデンサー

Family Cites Families (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3986903A (en) * 1974-03-13 1976-10-19 Intel Corporation Mosfet transistor and method of fabrication
US3984822A (en) * 1974-12-30 1976-10-05 Intel Corporation Double polycrystalline silicon gate memory device
US4268951A (en) * 1978-11-13 1981-05-26 Rockwell International Corporation Submicron semiconductor devices
JPS5681968A (en) * 1979-12-07 1981-07-04 Toshiba Corp Manufacture of semiconductor device
US4577392A (en) * 1984-08-03 1986-03-25 Advanced Micro Devices, Inc. Fabrication technique for integrated circuits
JPS6237960A (ja) * 1985-08-13 1987-02-18 Toshiba Corp 読み出し専用半導体記憶装置の製造方法
JPS6286853A (ja) * 1985-10-14 1987-04-21 Fujitsu Ltd 半導体装置の製造方法
DE3609274A1 (de) * 1986-03-19 1987-09-24 Siemens Ag Verfahren zur herstellung eines selbstjustiert positionierten metallkontaktes
JPS63237551A (ja) * 1987-03-26 1988-10-04 Toshiba Corp 半導体装置の製造方法
US4916083A (en) * 1987-05-11 1990-04-10 International Business Machines Corporation High performance sidewall emitter transistor
JPH0834311B2 (ja) * 1987-06-10 1996-03-29 日本電装株式会社 半導体装置の製造方法
JP2612836B2 (ja) * 1987-09-23 1997-05-21 シーメンス、アクチエンゲゼルシヤフト 自己整合ゲートを備えるｍｅｓｆｅｔの製造方法
US4852062A (en) * 1987-09-28 1989-07-25 Motorola, Inc. EPROM device using asymmetrical transistor characteristics
JPH01129440A (ja) * 1987-11-14 1989-05-22 Fujitsu Ltd 半導体装置
US4977105A (en) * 1988-03-15 1990-12-11 Mitsubishi Denki Kabushiki Kaisha Method for manufacturing interconnection structure in semiconductor device
JP2723530B2 (ja) * 1988-04-13 1998-03-09 日本電気株式会社 ダイナミック型ランダムアクセスメモリ装置の製造方法
JP2695185B2 (ja) * 1988-05-02 1997-12-24 株式会社日立製作所 半導体集積回路装置及びその製造方法
DE3916228C2 (de) * 1988-05-18 1995-06-22 Toshiba Kawasaki Kk Halbleiterspeichervorrichtung mit Stapelkondensatorzellenstruktur und Verfahren zu ihrer Herstellung
JPH0278270A (ja) * 1988-09-14 1990-03-19 Hitachi Ltd 半導体記憶装置及びその製造方法
JP2633650B2 (ja) * 1988-09-30 1997-07-23 株式会社東芝 半導体記憶装置およびその製造方法
JP2904533B2 (ja) * 1989-03-09 1999-06-14 株式会社東芝 半導体装置の製造方法
US4965217A (en) * 1989-04-13 1990-10-23 International Business Machines Corporation Method of making a lateral transistor

Also Published As

Publication number Publication date
KR910013505A (ko) 1991-08-08
DE69030433T2 (de) 1997-10-09
DE69030433D1 (de) 1997-05-15
EP0439965A3 (en) 1991-12-04
US5100828A (en) 1992-03-31
EP0439965B1 (en) 1997-04-09
KR960002078B1 (ko) 1996-02-10
US5118640A (en) 1992-06-02
EP0439965A2 (en) 1991-08-07

Similar Documents

Publication Publication Date Title
TW218933B (enExample)
US4970564A (en) Semiconductor memory device having stacked capacitor cells
US6319824B1 (en) Method of forming a contact hole in a semiconductor device
JPH05198771A (ja) 二重リング形スタック型セル構造体の製造方法
JPH05175451A (ja) スタック型ｈ字形セルキャパシタおよびその製造方法
TW512516B (en) Method for fabricating a semiconductor memory device and the structure thereof
TW307021B (enExample)
JP2003249572A (ja) 半導体装置の製造方法及び半導体装置
TW202109624A (zh) 積體電路的製作方法
JP3200974B2 (ja) 半導体記憶装置の製造方法
TWI809359B (zh) 動態隨機存取記憶體的製造方法
JP3504250B2 (ja) 半導体素子の製造方法
JP3185747B2 (ja) 半導体装置及びその製造方法
JPH11251540A5 (enExample)
TWI253119B (en) Method for forming metal contact in semiconductor device
JPH03142966A (ja) 半導体装置の製造方法
KR20010100532A (ko) 전기 도금법으로 형성된 전극을 구비하는 커패시터 및 그제조방법
JP2550590B2 (ja) 半導体装置の製造方法
JPH0837181A (ja) 半導体装置及びその製造方法
JP2547882B2 (ja) 半導体装置の製造方法
KR100538814B1 (ko) 반도체 소자의 콘택 형성방법
TW478149B (en) Method of forming a storage capacitor
JPH08236619A (ja) 半導体装置および半導体装置の製造方法
JP3355613B2 (ja) 半導体記憶装置及びその製造方法
TW436982B (en) Method for filling up a defect gap in a semiconductor structure