JP6679106B2 - 生体分子を特徴付けるためのナノ細孔センサー - Google Patents
生体分子を特徴付けるためのナノ細孔センサー Download PDFInfo
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- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 266
- 229910021389 graphene Inorganic materials 0.000 claims description 266
- 238000000034 method Methods 0.000 claims description 105
- 239000012528 membrane Substances 0.000 claims description 35
- 238000004519 manufacturing process Methods 0.000 claims description 28
- 230000005684 electric field Effects 0.000 claims description 22
- 238000000231 atomic layer deposition Methods 0.000 claims description 19
- 238000005229 chemical vapour deposition Methods 0.000 claims description 15
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 14
- 238000012544 monitoring process Methods 0.000 claims description 10
- 230000005641 tunneling Effects 0.000 claims description 10
- 235000012239 silicon dioxide Nutrition 0.000 claims description 7
- 239000000377 silicon dioxide Substances 0.000 claims description 7
- 229910052581 Si3N4 Inorganic materials 0.000 claims description 5
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims description 5
- 229910000449 hafnium oxide Inorganic materials 0.000 claims description 4
- WIHZLLGSGQNAGK-UHFFFAOYSA-N hafnium(4+);oxygen(2-) Chemical compound [O-2].[O-2].[Hf+4] WIHZLLGSGQNAGK-UHFFFAOYSA-N 0.000 claims description 4
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 claims description 4
- BPUBBGLMJRNUCC-UHFFFAOYSA-N oxygen(2-);tantalum(5+) Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ta+5].[Ta+5] BPUBBGLMJRNUCC-UHFFFAOYSA-N 0.000 claims description 4
- RVTZCBVAJQQJTK-UHFFFAOYSA-N oxygen(2-);zirconium(4+) Chemical compound [O-2].[O-2].[Zr+4] RVTZCBVAJQQJTK-UHFFFAOYSA-N 0.000 claims description 4
- 229910001936 tantalum oxide Inorganic materials 0.000 claims description 4
- 229910001928 zirconium oxide Inorganic materials 0.000 claims description 4
- 108020004414 DNA Proteins 0.000 description 227
- 239000010410 layer Substances 0.000 description 195
- 239000011148 porous material Substances 0.000 description 137
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 98
- 239000002773 nucleotide Substances 0.000 description 94
- 125000003729 nucleotide group Chemical group 0.000 description 94
- 102000053602 DNA Human genes 0.000 description 93
- 108090000623 proteins and genes Proteins 0.000 description 70
- 239000010408 film Substances 0.000 description 68
- 238000012163 sequencing technique Methods 0.000 description 66
- 239000012530 fluid Substances 0.000 description 62
- 102000004169 proteins and genes Human genes 0.000 description 62
- 238000013508 migration Methods 0.000 description 59
- 230000005012 migration Effects 0.000 description 59
- 230000032258 transport Effects 0.000 description 42
- 108020004682 Single-Stranded DNA Proteins 0.000 description 38
- 239000002074 nanoribbon Substances 0.000 description 37
- 101710092462 Alpha-hemolysin Proteins 0.000 description 35
- 230000011987 methylation Effects 0.000 description 35
- 238000007069 methylation reaction Methods 0.000 description 35
- 238000001514 detection method Methods 0.000 description 32
- 238000004458 analytical method Methods 0.000 description 31
- 230000027455 binding Effects 0.000 description 31
- 238000013459 approach Methods 0.000 description 29
- 239000000126 substance Substances 0.000 description 28
- 108010007005 Estrogen Receptor alpha Proteins 0.000 description 23
- 102000007594 Estrogen Receptor alpha Human genes 0.000 description 21
- 238000001712 DNA sequencing Methods 0.000 description 20
- 239000002157 polynucleotide Substances 0.000 description 20
- 102000040430 polynucleotide Human genes 0.000 description 19
- 108091033319 polynucleotide Proteins 0.000 description 19
- 102000001218 Rec A Recombinases Human genes 0.000 description 18
- 108010055016 Rec A Recombinases Proteins 0.000 description 18
- 230000000694 effects Effects 0.000 description 18
- 238000005516 engineering process Methods 0.000 description 18
- 239000012634 fragment Substances 0.000 description 18
- 150000003839 salts Chemical class 0.000 description 18
- 239000000243 solution Substances 0.000 description 17
- 238000005259 measurement Methods 0.000 description 15
- 230000008569 process Effects 0.000 description 15
- 238000002474 experimental method Methods 0.000 description 14
- 230000035945 sensitivity Effects 0.000 description 14
- 239000002356 single layer Substances 0.000 description 14
- 108091006146 Channels Proteins 0.000 description 13
- 238000011161 development Methods 0.000 description 13
- 230000018109 developmental process Effects 0.000 description 13
- 238000010894 electron beam technology Methods 0.000 description 13
- 238000007667 floating Methods 0.000 description 13
- 229910052751 metal Inorganic materials 0.000 description 13
- 239000002184 metal Substances 0.000 description 13
- 239000000758 substrate Substances 0.000 description 13
- 230000015572 biosynthetic process Effects 0.000 description 12
- 230000006870 function Effects 0.000 description 12
- 150000002500 ions Chemical class 0.000 description 11
- 239000002090 nanochannel Substances 0.000 description 11
- 230000004044 response Effects 0.000 description 11
- 239000000523 sample Substances 0.000 description 11
- 238000003491 array Methods 0.000 description 10
- 230000008859 change Effects 0.000 description 10
- 229920003229 poly(methyl methacrylate) Polymers 0.000 description 10
- 239000004926 polymethyl methacrylate Substances 0.000 description 10
- 102000004190 Enzymes Human genes 0.000 description 9
- 108090000790 Enzymes Proteins 0.000 description 9
- 239000000232 Lipid Bilayer Substances 0.000 description 9
- 238000006243 chemical reaction Methods 0.000 description 9
- 239000010931 gold Substances 0.000 description 9
- 230000003993 interaction Effects 0.000 description 9
- 230000033001 locomotion Effects 0.000 description 9
- 238000013507 mapping Methods 0.000 description 9
- 239000000463 material Substances 0.000 description 9
- 239000000203 mixture Substances 0.000 description 9
- 239000010936 titanium Substances 0.000 description 9
- 108091032973 (ribonucleotides)n+m Proteins 0.000 description 8
- 101000615488 Homo sapiens Methyl-CpG-binding domain protein 2 Proteins 0.000 description 8
- 102100021299 Methyl-CpG-binding domain protein 2 Human genes 0.000 description 8
- 238000010586 diagram Methods 0.000 description 8
- 238000011896 sensitive detection Methods 0.000 description 8
- 238000012546 transfer Methods 0.000 description 8
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 7
- 108010014303 DNA-directed DNA polymerase Proteins 0.000 description 7
- 102000016928 DNA-directed DNA polymerase Human genes 0.000 description 7
- 108060002716 Exonuclease Proteins 0.000 description 7
- 238000003917 TEM image Methods 0.000 description 7
- 150000001413 amino acids Chemical class 0.000 description 7
- 238000012512 characterization method Methods 0.000 description 7
- 239000003989 dielectric material Substances 0.000 description 7
- 238000009826 distribution Methods 0.000 description 7
- 239000003792 electrolyte Substances 0.000 description 7
- 102000013165 exonuclease Human genes 0.000 description 7
- 238000007672 fourth generation sequencing Methods 0.000 description 7
- 238000010348 incorporation Methods 0.000 description 7
- 239000007787 solid Substances 0.000 description 7
- YMWUJEATGCHHMB-UHFFFAOYSA-N Dichloromethane Chemical compound ClCCl YMWUJEATGCHHMB-UHFFFAOYSA-N 0.000 description 6
- OKKJLVBELUTLKV-UHFFFAOYSA-N Methanol Chemical compound OC OKKJLVBELUTLKV-UHFFFAOYSA-N 0.000 description 6
- 108010085220 Multiprotein Complexes Proteins 0.000 description 6
- 102000007474 Multiprotein Complexes Human genes 0.000 description 6
- 238000000151 deposition Methods 0.000 description 6
- 230000005669 field effect Effects 0.000 description 6
- 238000001020 plasma etching Methods 0.000 description 6
- 102000014914 Carrier Proteins Human genes 0.000 description 5
- 108091093037 Peptide nucleic acid Proteins 0.000 description 5
- 230000008901 benefit Effects 0.000 description 5
- 108091008324 binding proteins Proteins 0.000 description 5
- 230000000903 blocking effect Effects 0.000 description 5
- 239000004020 conductor Substances 0.000 description 5
- 239000010949 copper Substances 0.000 description 5
- 230000007423 decrease Effects 0.000 description 5
- 230000029087 digestion Effects 0.000 description 5
- 201000010099 disease Diseases 0.000 description 5
- 208000037265 diseases, disorders, signs and symptoms Diseases 0.000 description 5
- 238000000609 electron-beam lithography Methods 0.000 description 5
- 238000005530 etching Methods 0.000 description 5
- 238000007306 functionalization reaction Methods 0.000 description 5
- 238000010884 ion-beam technique Methods 0.000 description 5
- 229920000642 polymer Polymers 0.000 description 5
- 102000040650 (ribonucleotides)n+m Human genes 0.000 description 4
- 102000052510 DNA-Binding Proteins Human genes 0.000 description 4
- KCXVZYZYPLLWCC-UHFFFAOYSA-N EDTA Chemical compound OC(=O)CN(CC(O)=O)CCN(CC(O)=O)CC(O)=O KCXVZYZYPLLWCC-UHFFFAOYSA-N 0.000 description 4
- 108060004795 Methyltransferase Proteins 0.000 description 4
- 206010028980 Neoplasm Diseases 0.000 description 4
- 229910004298 SiO 2 Inorganic materials 0.000 description 4
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 4
- 239000007983 Tris buffer Substances 0.000 description 4
- 230000003321 amplification Effects 0.000 description 4
- RDOXTESZEPMUJZ-UHFFFAOYSA-N anisole Chemical compound COC1=CC=CC=C1 RDOXTESZEPMUJZ-UHFFFAOYSA-N 0.000 description 4
- 239000011889 copper foil Substances 0.000 description 4
- 239000003814 drug Substances 0.000 description 4
- 238000001312 dry etching Methods 0.000 description 4
- 239000007788 liquid Substances 0.000 description 4
- 230000004048 modification Effects 0.000 description 4
- 238000012986 modification Methods 0.000 description 4
- 238000003199 nucleic acid amplification method Methods 0.000 description 4
- 230000037361 pathway Effects 0.000 description 4
- -1 polymerases Proteins 0.000 description 4
- 238000011002 quantification Methods 0.000 description 4
- 238000000926 separation method Methods 0.000 description 4
- 229910052710 silicon Inorganic materials 0.000 description 4
- 239000010703 silicon Substances 0.000 description 4
- LENZDBCJOHFCAS-UHFFFAOYSA-N tris Chemical compound OCC(N)(CO)CO LENZDBCJOHFCAS-UHFFFAOYSA-N 0.000 description 4
- 229910052582 BN Inorganic materials 0.000 description 3
- PZNSFCLAULLKQX-UHFFFAOYSA-N Boron nitride Chemical compound N#B PZNSFCLAULLKQX-UHFFFAOYSA-N 0.000 description 3
- 108091029430 CpG site Proteins 0.000 description 3
- 230000007067 DNA methylation Effects 0.000 description 3
- 230000033616 DNA repair Effects 0.000 description 3
- 108700020911 DNA-Binding Proteins Proteins 0.000 description 3
- 108010033040 Histones Proteins 0.000 description 3
- 101000581507 Homo sapiens Methyl-CpG-binding domain protein 1 Proteins 0.000 description 3
- 102000006890 Methyl-CpG-Binding Protein 2 Human genes 0.000 description 3
- 108010072388 Methyl-CpG-Binding Protein 2 Proteins 0.000 description 3
- 102100027383 Methyl-CpG-binding domain protein 1 Human genes 0.000 description 3
- 108700011259 MicroRNAs Proteins 0.000 description 3
- 101710163270 Nuclease Proteins 0.000 description 3
- 108091028043 Nucleic acid sequence Proteins 0.000 description 3
- 102000011931 Nucleoproteins Human genes 0.000 description 3
- 108010061100 Nucleoproteins Proteins 0.000 description 3
- 108091034117 Oligonucleotide Proteins 0.000 description 3
- 108010013381 Porins Proteins 0.000 description 3
- 238000001069 Raman spectroscopy Methods 0.000 description 3
- 102000040945 Transcription factor Human genes 0.000 description 3
- 108091023040 Transcription factor Proteins 0.000 description 3
- 238000005842 biochemical reaction Methods 0.000 description 3
- 201000011510 cancer Diseases 0.000 description 3
- 239000002800 charge carrier Substances 0.000 description 3
- 239000011248 coating agent Substances 0.000 description 3
- 238000000576 coating method Methods 0.000 description 3
- 230000000295 complement effect Effects 0.000 description 3
- 150000001875 compounds Chemical class 0.000 description 3
- 238000009833 condensation Methods 0.000 description 3
- 230000005494 condensation Effects 0.000 description 3
- 229910052802 copper Inorganic materials 0.000 description 3
- 230000001419 dependent effect Effects 0.000 description 3
- 230000008021 deposition Effects 0.000 description 3
- XPPKVPWEQAFLFU-UHFFFAOYSA-J diphosphate(4-) Chemical compound [O-]P([O-])(=O)OP([O-])([O-])=O XPPKVPWEQAFLFU-UHFFFAOYSA-J 0.000 description 3
- 235000011180 diphosphates Nutrition 0.000 description 3
- 230000001973 epigenetic effect Effects 0.000 description 3
- 102000054766 genetic haplotypes Human genes 0.000 description 3
- 238000003780 insertion Methods 0.000 description 3
- 230000037431 insertion Effects 0.000 description 3
- 230000010354 integration Effects 0.000 description 3
- 238000002372 labelling Methods 0.000 description 3
- 150000002632 lipids Chemical class 0.000 description 3
- 230000007246 mechanism Effects 0.000 description 3
- 239000002679 microRNA Substances 0.000 description 3
- 230000003287 optical effect Effects 0.000 description 3
- 238000000059 patterning Methods 0.000 description 3
- 229920001184 polypeptide Polymers 0.000 description 3
- 108090000765 processed proteins & peptides Proteins 0.000 description 3
- 102000004196 processed proteins & peptides Human genes 0.000 description 3
- 238000012545 processing Methods 0.000 description 3
- 238000004393 prognosis Methods 0.000 description 3
- 238000002731 protein assay Methods 0.000 description 3
- 238000001878 scanning electron micrograph Methods 0.000 description 3
- 238000012216 screening Methods 0.000 description 3
- 238000002741 site-directed mutagenesis Methods 0.000 description 3
- 238000006557 surface reaction Methods 0.000 description 3
- 210000001519 tissue Anatomy 0.000 description 3
- 241000701844 Bacillus virus phi29 Species 0.000 description 2
- LSNNMFCWUKXFEE-UHFFFAOYSA-M Bisulfite Chemical compound OS([O-])=O LSNNMFCWUKXFEE-UHFFFAOYSA-M 0.000 description 2
- 108020003215 DNA Probes Proteins 0.000 description 2
- 239000003298 DNA probe Substances 0.000 description 2
- 102100038595 Estrogen receptor Human genes 0.000 description 2
- 102000006947 Histones Human genes 0.000 description 2
- 241000187480 Mycobacterium smegmatis Species 0.000 description 2
- 102000017033 Porins Human genes 0.000 description 2
- 101710157310 Tegument protein UL47 homolog Proteins 0.000 description 2
- 229910010413 TiO 2 Inorganic materials 0.000 description 2
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 2
- JLCPHMBAVCMARE-UHFFFAOYSA-N [3-[[3-[[3-[[3-[[3-[[3-[[3-[[3-[[3-[[3-[[3-[[5-(2-amino-6-oxo-1H-purin-9-yl)-3-[[3-[[3-[[3-[[3-[[3-[[5-(2-amino-6-oxo-1H-purin-9-yl)-3-[[5-(2-amino-6-oxo-1H-purin-9-yl)-3-hydroxyoxolan-2-yl]methoxy-hydroxyphosphoryl]oxyoxolan-2-yl]methoxy-hydroxyphosphoryl]oxy-5-(5-methyl-2,4-dioxopyrimidin-1-yl)oxolan-2-yl]methoxy-hydroxyphosphoryl]oxy-5-(6-aminopurin-9-yl)oxolan-2-yl]methoxy-hydroxyphosphoryl]oxy-5-(6-aminopurin-9-yl)oxolan-2-yl]methoxy-hydroxyphosphoryl]oxy-5-(6-aminopurin-9-yl)oxolan-2-yl]methoxy-hydroxyphosphoryl]oxy-5-(6-aminopurin-9-yl)oxolan-2-yl]methoxy-hydroxyphosphoryl]oxyoxolan-2-yl]methoxy-hydroxyphosphoryl]oxy-5-(5-methyl-2,4-dioxopyrimidin-1-yl)oxolan-2-yl]methoxy-hydroxyphosphoryl]oxy-5-(4-amino-2-oxopyrimidin-1-yl)oxolan-2-yl]methoxy-hydroxyphosphoryl]oxy-5-(5-methyl-2,4-dioxopyrimidin-1-yl)oxolan-2-yl]methoxy-hydroxyphosphoryl]oxy-5-(5-methyl-2,4-dioxopyrimidin-1-yl)oxolan-2-yl]methoxy-hydroxyphosphoryl]oxy-5-(6-aminopurin-9-yl)oxolan-2-yl]methoxy-hydroxyphosphoryl]oxy-5-(6-aminopurin-9-yl)oxolan-2-yl]methoxy-hydroxyphosphoryl]oxy-5-(4-amino-2-oxopyrimidin-1-yl)oxolan-2-yl]methoxy-hydroxyphosphoryl]oxy-5-(4-amino-2-oxopyrimidin-1-yl)oxolan-2-yl]methoxy-hydroxyphosphoryl]oxy-5-(4-amino-2-oxopyrimidin-1-yl)oxolan-2-yl]methoxy-hydroxyphosphoryl]oxy-5-(6-aminopurin-9-yl)oxolan-2-yl]methoxy-hydroxyphosphoryl]oxy-5-(4-amino-2-oxopyrimidin-1-yl)oxolan-2-yl]methyl [5-(6-aminopurin-9-yl)-2-(hydroxymethyl)oxolan-3-yl] hydrogen phosphate Polymers Cc1cn(C2CC(OP(O)(=O)OCC3OC(CC3OP(O)(=O)OCC3OC(CC3O)n3cnc4c3nc(N)[nH]c4=O)n3cnc4c3nc(N)[nH]c4=O)C(COP(O)(=O)OC3CC(OC3COP(O)(=O)OC3CC(OC3COP(O)(=O)OC3CC(OC3COP(O)(=O)OC3CC(OC3COP(O)(=O)OC3CC(OC3COP(O)(=O)OC3CC(OC3COP(O)(=O)OC3CC(OC3COP(O)(=O)OC3CC(OC3COP(O)(=O)OC3CC(OC3COP(O)(=O)OC3CC(OC3COP(O)(=O)OC3CC(OC3COP(O)(=O)OC3CC(OC3COP(O)(=O)OC3CC(OC3COP(O)(=O)OC3CC(OC3COP(O)(=O)OC3CC(OC3COP(O)(=O)OC3CC(OC3COP(O)(=O)OC3CC(OC3CO)n3cnc4c(N)ncnc34)n3ccc(N)nc3=O)n3cnc4c(N)ncnc34)n3ccc(N)nc3=O)n3ccc(N)nc3=O)n3ccc(N)nc3=O)n3cnc4c(N)ncnc34)n3cnc4c(N)ncnc34)n3cc(C)c(=O)[nH]c3=O)n3cc(C)c(=O)[nH]c3=O)n3ccc(N)nc3=O)n3cc(C)c(=O)[nH]c3=O)n3cnc4c3nc(N)[nH]c4=O)n3cnc4c(N)ncnc34)n3cnc4c(N)ncnc34)n3cnc4c(N)ncnc34)n3cnc4c(N)ncnc34)O2)c(=O)[nH]c1=O JLCPHMBAVCMARE-UHFFFAOYSA-N 0.000 description 2
- 125000003275 alpha amino acid group Chemical group 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 238000004082 amperometric method Methods 0.000 description 2
- 210000002159 anterior chamber Anatomy 0.000 description 2
- 238000003556 assay Methods 0.000 description 2
- 125000004429 atom Chemical group 0.000 description 2
- 230000031018 biological processes and functions Effects 0.000 description 2
- 230000003592 biomimetic effect Effects 0.000 description 2
- 125000004432 carbon atom Chemical group C* 0.000 description 2
- 238000000701 chemical imaging Methods 0.000 description 2
- 239000003153 chemical reaction reagent Substances 0.000 description 2
- 239000013626 chemical specie Substances 0.000 description 2
- 239000011247 coating layer Substances 0.000 description 2
- 238000004891 communication Methods 0.000 description 2
- 230000006854 communication Effects 0.000 description 2
- 230000003247 decreasing effect Effects 0.000 description 2
- 230000007547 defect Effects 0.000 description 2
- 239000008367 deionised water Substances 0.000 description 2
- 229910021641 deionized water Inorganic materials 0.000 description 2
- 238000003745 diagnosis Methods 0.000 description 2
- 230000005782 double-strand break Effects 0.000 description 2
- 230000009881 electrostatic interaction Effects 0.000 description 2
- 230000002708 enhancing effect Effects 0.000 description 2
- 239000011888 foil Substances 0.000 description 2
- 230000002068 genetic effect Effects 0.000 description 2
- 238000003205 genotyping method Methods 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 230000012010 growth Effects 0.000 description 2
- 230000036541 health Effects 0.000 description 2
- 238000009396 hybridization Methods 0.000 description 2
- 230000006607 hypermethylation Effects 0.000 description 2
- 230000006872 improvement Effects 0.000 description 2
- 238000000338 in vitro Methods 0.000 description 2
- 238000009616 inductively coupled plasma Methods 0.000 description 2
- 238000011835 investigation Methods 0.000 description 2
- 238000002955 isolation Methods 0.000 description 2
- 239000002923 metal particle Substances 0.000 description 2
- UZKWTJUDCOPSNM-UHFFFAOYSA-N methoxybenzene Substances CCCCOC=C UZKWTJUDCOPSNM-UHFFFAOYSA-N 0.000 description 2
- 125000002496 methyl group Chemical group [H]C([H])([H])* 0.000 description 2
- 102000031635 methyl-CpG binding proteins Human genes 0.000 description 2
- 108091009877 methyl-CpG binding proteins Proteins 0.000 description 2
- 108091070501 miRNA Proteins 0.000 description 2
- 238000012775 microarray technology Methods 0.000 description 2
- 230000035772 mutation Effects 0.000 description 2
- 238000007481 next generation sequencing Methods 0.000 description 2
- 230000000149 penetrating effect Effects 0.000 description 2
- 238000000623 plasma-assisted chemical vapour deposition Methods 0.000 description 2
- 229920001308 poly(aminoacid) Polymers 0.000 description 2
- 102000054765 polymorphisms of proteins Human genes 0.000 description 2
- 102000005962 receptors Human genes 0.000 description 2
- 108020003175 receptors Proteins 0.000 description 2
- 230000009467 reduction Effects 0.000 description 2
- 230000022532 regulation of transcription, DNA-dependent Effects 0.000 description 2
- 230000011506 response to oxidative stress Effects 0.000 description 2
- 238000007480 sanger sequencing Methods 0.000 description 2
- 229910021428 silicene Inorganic materials 0.000 description 2
- 238000004088 simulation Methods 0.000 description 2
- 239000010409 thin film Substances 0.000 description 2
- 238000007671 third-generation sequencing Methods 0.000 description 2
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 description 2
- 230000001052 transient effect Effects 0.000 description 2
- 239000000107 tumor biomarker Substances 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- NCMVOABPESMRCP-SHYZEUOFSA-N 2'-deoxycytosine 5'-monophosphate Chemical compound O=C1N=C(N)C=CN1[C@@H]1O[C@H](COP(O)(O)=O)[C@@H](O)C1 NCMVOABPESMRCP-SHYZEUOFSA-N 0.000 description 1
- LTFMZDNNPPEQNG-KVQBGUIXSA-N 2'-deoxyguanosine 5'-monophosphate Chemical compound C1=2NC(N)=NC(=O)C=2N=CN1[C@H]1C[C@H](O)[C@@H](COP(O)(O)=O)O1 LTFMZDNNPPEQNG-KVQBGUIXSA-N 0.000 description 1
- CMNQZZPAVNBESS-UHFFFAOYSA-N 6-sulfanylhexanoic acid Chemical compound OC(=O)CCCCCS CMNQZZPAVNBESS-UHFFFAOYSA-N 0.000 description 1
- 108700028369 Alleles Proteins 0.000 description 1
- 108091023037 Aptamer Proteins 0.000 description 1
- 238000012935 Averaging Methods 0.000 description 1
- 241000894006 Bacteria Species 0.000 description 1
- 108020004635 Complementary DNA Proteins 0.000 description 1
- 201000003883 Cystic fibrosis Diseases 0.000 description 1
- 102000004594 DNA Polymerase I Human genes 0.000 description 1
- 108010017826 DNA Polymerase I Proteins 0.000 description 1
- 230000003682 DNA packaging effect Effects 0.000 description 1
- 108050009160 DNA polymerase 1 Proteins 0.000 description 1
- 101710096438 DNA-binding protein Proteins 0.000 description 1
- 208000001490 Dengue Diseases 0.000 description 1
- 206010012310 Dengue fever Diseases 0.000 description 1
- 241000725619 Dengue virus Species 0.000 description 1
- 108010008532 Deoxyribonuclease I Proteins 0.000 description 1
- 102000007260 Deoxyribonuclease I Human genes 0.000 description 1
- 206010061818 Disease progression Diseases 0.000 description 1
- 108010042407 Endonucleases Proteins 0.000 description 1
- 102000004533 Endonucleases Human genes 0.000 description 1
- 102100030943 Glutathione S-transferase P Human genes 0.000 description 1
- 241000711549 Hepacivirus C Species 0.000 description 1
- 208000005176 Hepatitis C Diseases 0.000 description 1
- 241000238631 Hexapoda Species 0.000 description 1
- 229910004129 HfSiO Inorganic materials 0.000 description 1
- 101001010139 Homo sapiens Glutathione S-transferase P Proteins 0.000 description 1
- 101000615495 Homo sapiens Methyl-CpG-binding domain protein 3 Proteins 0.000 description 1
- 101000615492 Homo sapiens Methyl-CpG-binding domain protein 4 Proteins 0.000 description 1
- 208000023105 Huntington disease Diseases 0.000 description 1
- 208000026350 Inborn Genetic disease Diseases 0.000 description 1
- FYYHWMGAXLPEAU-UHFFFAOYSA-N Magnesium Chemical compound [Mg] FYYHWMGAXLPEAU-UHFFFAOYSA-N 0.000 description 1
- 208000024556 Mendelian disease Diseases 0.000 description 1
- 102100021291 Methyl-CpG-binding domain protein 3 Human genes 0.000 description 1
- 102100021290 Methyl-CpG-binding domain protein 4 Human genes 0.000 description 1
- 101100153331 Mus musculus Timp1 gene Proteins 0.000 description 1
- CTQNGGLPUBDAKN-UHFFFAOYSA-N O-Xylene Chemical compound CC1=CC=CC=C1C CTQNGGLPUBDAKN-UHFFFAOYSA-N 0.000 description 1
- 208000031481 Pathologic Constriction Diseases 0.000 description 1
- 206010060862 Prostate cancer Diseases 0.000 description 1
- 208000000236 Prostatic Neoplasms Diseases 0.000 description 1
- 238000003559 RNA-seq method Methods 0.000 description 1
- 238000001237 Raman spectrum Methods 0.000 description 1
- 102000007056 Recombinant Fusion Proteins Human genes 0.000 description 1
- 108010008281 Recombinant Fusion Proteins Proteins 0.000 description 1
- 108091027981 Response element Proteins 0.000 description 1
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- 241000251539 Vertebrata <Metazoa> Species 0.000 description 1
- 241000700605 Viruses Species 0.000 description 1
- 241000710886 West Nile virus Species 0.000 description 1
- 238000002441 X-ray diffraction Methods 0.000 description 1
- 229910006501 ZrSiO Inorganic materials 0.000 description 1
- 230000001594 aberrant effect Effects 0.000 description 1
- 230000005856 abnormality Effects 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 238000007792 addition Methods 0.000 description 1
- NLTUCYMLOPLUHL-KQYNXXCUSA-N adenosine 5'-[gamma-thio]triphosphate Chemical compound C1=NC=2C(N)=NC=NC=2N1[C@@H]1O[C@H](COP(O)(=O)OP(O)(=O)OP(O)(O)=S)[C@@H](O)[C@H]1O NLTUCYMLOPLUHL-KQYNXXCUSA-N 0.000 description 1
- UDMBCSSLTHHNCD-KQYNXXCUSA-N adenosine 5'-monophosphate Chemical compound C1=NC=2C(N)=NC=NC=2N1[C@@H]1O[C@H](COP(O)(O)=O)[C@@H](O)[C@H]1O UDMBCSSLTHHNCD-KQYNXXCUSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- 238000000137 annealing Methods 0.000 description 1
- 230000004888 barrier function Effects 0.000 description 1
- 239000011324 bead Substances 0.000 description 1
- 230000002902 bimodal effect Effects 0.000 description 1
- 239000000090 biomarker Substances 0.000 description 1
- 229920001222 biopolymer Polymers 0.000 description 1
- 229910052810 boron oxide Inorganic materials 0.000 description 1
- 239000007853 buffer solution Substances 0.000 description 1
- 239000008364 bulk solution Substances 0.000 description 1
- 210000004899 c-terminal region Anatomy 0.000 description 1
- 230000000711 cancerogenic effect Effects 0.000 description 1
- 231100000315 carcinogenic Toxicity 0.000 description 1
- 230000003197 catalytic effect Effects 0.000 description 1
- 230000001413 cellular effect Effects 0.000 description 1
- 125000003636 chemical group Chemical group 0.000 description 1
- 238000003776 cleavage reaction Methods 0.000 description 1
- 239000012141 concentrate Substances 0.000 description 1
- 238000012790 confirmation Methods 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- IERHLVCPSMICTF-XVFCMESISA-N cytidine 5'-monophosphate Chemical compound O=C1N=C(N)C=CN1[C@H]1[C@H](O)[C@H](O)[C@@H](COP(O)(O)=O)O1 IERHLVCPSMICTF-XVFCMESISA-N 0.000 description 1
- OPTASPLRGRRNAP-UHFFFAOYSA-N cytosine Chemical group NC=1C=CNC(=O)N=1 OPTASPLRGRRNAP-UHFFFAOYSA-N 0.000 description 1
- GYOZYWVXFNDGLU-XLPZGREQSA-N dTMP Chemical compound O=C1NC(=O)C(C)=CN1[C@@H]1O[C@H](COP(O)(O)=O)[C@@H](O)C1 GYOZYWVXFNDGLU-XLPZGREQSA-N 0.000 description 1
- 208000025729 dengue disease Diseases 0.000 description 1
- KHWCHTKSEGGWEX-UHFFFAOYSA-N deoxyadenylic acid Natural products C1=NC=2C(N)=NC=NC=2N1C1CC(O)C(COP(O)(O)=O)O1 KHWCHTKSEGGWEX-UHFFFAOYSA-N 0.000 description 1
- LTFMZDNNPPEQNG-UHFFFAOYSA-N deoxyguanylic acid Natural products C1=2NC(N)=NC(=O)C=2N=CN1C1CC(O)C(COP(O)(O)=O)O1 LTFMZDNNPPEQNG-UHFFFAOYSA-N 0.000 description 1
- 230000001079 digestive effect Effects 0.000 description 1
- 230000005750 disease progression Effects 0.000 description 1
- 231100000673 dose–response relationship Toxicity 0.000 description 1
- 230000034431 double-strand break repair via homologous recombination Effects 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 239000008151 electrolyte solution Substances 0.000 description 1
- 238000002003 electron diffraction Methods 0.000 description 1
- 238000005370 electroosmosis Methods 0.000 description 1
- 238000001962 electrophoresis Methods 0.000 description 1
- 230000002255 enzymatic effect Effects 0.000 description 1
- 229940011871 estrogen Drugs 0.000 description 1
- 239000000262 estrogen Substances 0.000 description 1
- 238000011156 evaluation Methods 0.000 description 1
- 238000004299 exfoliation Methods 0.000 description 1
- 238000010195 expression analysis Methods 0.000 description 1
- 238000009472 formulation Methods 0.000 description 1
- 125000000524 functional group Chemical group 0.000 description 1
- 230000004927 fusion Effects 0.000 description 1
- 210000003976 gap junction Anatomy 0.000 description 1
- 238000001502 gel electrophoresis Methods 0.000 description 1
- 230000014509 gene expression Effects 0.000 description 1
- 238000012100 gene-based analysis Methods 0.000 description 1
- 238000012252 genetic analysis Methods 0.000 description 1
- 208000016361 genetic disease Diseases 0.000 description 1
- 238000012268 genome sequencing Methods 0.000 description 1
- 230000037442 genomic alteration Effects 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 229910002804 graphite Inorganic materials 0.000 description 1
- 239000010439 graphite Substances 0.000 description 1
- 229910052735 hafnium Inorganic materials 0.000 description 1
- VBJZVLUMGGDVMO-UHFFFAOYSA-N hafnium atom Chemical compound [Hf] VBJZVLUMGGDVMO-UHFFFAOYSA-N 0.000 description 1
- 239000003228 hemolysin Substances 0.000 description 1
- 238000012165 high-throughput sequencing Methods 0.000 description 1
- 238000002744 homologous recombination Methods 0.000 description 1
- 229920001519 homopolymer Polymers 0.000 description 1
- 244000052637 human pathogen Species 0.000 description 1
- 125000004029 hydroxymethyl group Chemical group [H]OC([H])([H])* 0.000 description 1
- 238000007031 hydroxymethylation reaction Methods 0.000 description 1
- 238000003384 imaging method Methods 0.000 description 1
- 238000001114 immunoprecipitation Methods 0.000 description 1
- 238000011065 in-situ storage Methods 0.000 description 1
- 238000011534 incubation Methods 0.000 description 1
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 description 1
- 230000000977 initiatory effect Effects 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 239000003446 ligand Substances 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 238000004518 low pressure chemical vapour deposition Methods 0.000 description 1
- 238000004768 lowest unoccupied molecular orbital Methods 0.000 description 1
- 229920002521 macromolecule Polymers 0.000 description 1
- 229910052749 magnesium Inorganic materials 0.000 description 1
- 239000011777 magnesium Substances 0.000 description 1
- 239000003550 marker Substances 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 230000001394 metastastic effect Effects 0.000 description 1
- 206010061289 metastatic neoplasm Diseases 0.000 description 1
- 238000000329 molecular dynamics simulation Methods 0.000 description 1
- 239000000178 monomer Substances 0.000 description 1
- 239000002086 nanomaterial Substances 0.000 description 1
- 239000012811 non-conductive material Substances 0.000 description 1
- 230000009871 nonspecific binding Effects 0.000 description 1
- 210000004492 nuclear pore Anatomy 0.000 description 1
- 102000039446 nucleic acids Human genes 0.000 description 1
- 108020004707 nucleic acids Proteins 0.000 description 1
- 150000007523 nucleic acids Chemical class 0.000 description 1
- 230000006849 nucleocytoplasmic transport Effects 0.000 description 1
- 102000026415 nucleotide binding proteins Human genes 0.000 description 1
- 108091014756 nucleotide binding proteins Proteins 0.000 description 1
- 230000005257 nucleotidylation Effects 0.000 description 1
- 238000005457 optimization Methods 0.000 description 1
- 239000006174 pH buffer Substances 0.000 description 1
- 238000004806 packaging method and process Methods 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 230000007170 pathology Effects 0.000 description 1
- 230000002688 persistence Effects 0.000 description 1
- 239000013612 plasmid Substances 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 238000002331 protein detection Methods 0.000 description 1
- 238000000734 protein sequencing Methods 0.000 description 1
- 150000003212 purines Chemical class 0.000 description 1
- 150000003230 pyrimidines Chemical class 0.000 description 1
- 238000012175 pyrosequencing Methods 0.000 description 1
- 238000003753 real-time PCR Methods 0.000 description 1
- 230000010076 replication Effects 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 239000012266 salt solution Substances 0.000 description 1
- 238000005070 sampling Methods 0.000 description 1
- 238000004574 scanning tunneling microscopy Methods 0.000 description 1
- 230000007017 scission Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 210000004222 sensilla Anatomy 0.000 description 1
- 238000007841 sequencing by ligation Methods 0.000 description 1
- 210000002966 serum Anatomy 0.000 description 1
- 239000002109 single walled nanotube Substances 0.000 description 1
- 238000001179 sorption measurement Methods 0.000 description 1
- 238000012732 spatial analysis Methods 0.000 description 1
- 241000894007 species Species 0.000 description 1
- 230000009870 specific binding Effects 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 230000036262 stenosis Effects 0.000 description 1
- 208000037804 stenosis Diseases 0.000 description 1
- 230000035882 stress Effects 0.000 description 1
- 238000003786 synthesis reaction Methods 0.000 description 1
- 230000002194 synthesizing effect Effects 0.000 description 1
- 229910052715 tantalum Inorganic materials 0.000 description 1
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- 230000004797 therapeutic response Effects 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- 230000037426 transcriptional repression Effects 0.000 description 1
- 230000014616 translation Effects 0.000 description 1
- 210000004881 tumor cell Anatomy 0.000 description 1
- 230000003612 virological effect Effects 0.000 description 1
- 230000029302 virus maturation Effects 0.000 description 1
- 239000008096 xylene Substances 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/26—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
- G01N27/416—Systems
- G01N27/447—Systems using electrophoresis
- G01N27/44756—Apparatus specially adapted therefor
- G01N27/44791—Microapparatus
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- C12Q1/00—Measuring or testing processes involving enzymes, nucleic acids or microorganisms; Compositions therefor; Processes of preparing such compositions
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- C12Q1/6813—Hybridisation assays
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- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
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- G01N27/416—Systems
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- G01N33/48—Biological material, e.g. blood, urine; Haemocytometers
- G01N33/483—Physical analysis of biological material
- G01N33/487—Physical analysis of biological material of liquid biological material
- G01N33/48707—Physical analysis of biological material of liquid biological material by electrical means
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Description
で示される回転半径で高次コイル状のボール形であると推測される。ナノ細孔中に捕捉されると、(ii)パートで示されるように伸長及びねじ切り過程が起こる。図3bは、それに対応する、1MのKCl、10mMトリス、1mMのEDTA(pH10.4)中で、400mVの印加電圧でλ−DNAが直径11.3nmの細孔を通過するときにλ−DNAにより誘導された電流遮断を説明する。これらの実験で用いられるλ−DNA濃度は、100ng/μlである。高いpHの緩衝液を用いて、ナノ細孔底部のグラフェン表面と負電荷を有するdsDNA分子との静電的相互作用を最小化する。さらに、Al2O3はこのpH値では負電荷を有するため(Al2O3の等電点は8〜9である)、DNAとは静電的に結合しないと予想されることに留意することも重要である。従って、これらの実験条件により、繰り返し可能なグラフェン−Al2O3ナノ細孔を通るDNAの移動が起こる。
Claims (9)
- 生体分子パラメーターを特徴付けるためのナノ細孔を含む膜を製造する方法であって、
自立型誘電体膜中に通路を形成するステップと、
化学蒸着法でグラフェン層を成長させるステップと、
前記自立型誘電体膜に前記グラフェン層の一部を移動させるステップと、
前記移動したグラフェン層上に誘電体層を形成するステップと、
前記グラフェン層のステップを繰り返して、第二のグラフェン層を作製するステップと、
前記誘電体層を形成するステップを繰り返して、第二の誘電体層を作製し、誘電体−グラフェン−誘電体−グラフェンスタックを形成するステップと、
前記グラフェン層及び誘電体層それぞれを通る、前記膜の第一の表面から前記膜の第二の表面に伸長するナノ細孔を形成するステップと、
複数の前記グラフェン層の1つ又は複数を、電気的な接触部に電気的に接触させて、前記スタック内に組み込まれたゲート電極と、前記生体分子が前記ナノ細孔を通過するときの横方向の電気的パラメーターを測定するための埋込み導電層とを形成し、それによりグラフェン/誘電体/グラフェン/誘電体スタック中にナノ細孔を含む膜を作製するステップと、
を含む、方法。 - 前記第一のグラフェン層、前記第二のグラフェン層又は前記第一のグラフェン層及び前記第二のグラフェン層の両方を、電気的な接触部と独立して電気的に接触させて、前記電気的にゲーティングされたナノ細孔を形成するステップをさらに含む、請求項1に記載の方法。
- 前記繰り返しステップを繰り返して、隣接するグラフェン層が誘電体層で隔てられた3つ以上のグラフェン層を作製する、請求項1に記載の方法。
- 前記ナノ細孔膜中の前記ゲート電極が、前記ナノ細孔中の又は前記ナノ細孔に隣接する局所電界を改変する、請求項1に記載の方法。
- 前記誘電体層が、原子層堆積により堆積させた誘電体を含む、請求項1に記載の方法。
- 前記誘電体層が、酸化アルミニウム、酸化タンタル、酸化ハフニウム、酸化ジルコニウム、二酸化ケイ素、若しくは窒化ケイ素、又はそれらの組み合わせを含む、請求項1又は5に記載の方法。
- 前記ナノ細孔で電気的パラメーターを測定するためにホイートストンブリッジ配置で前記グラフェン層を電気的に接続するステップをさらに含み、前記電気的パラメーターが、差動インピーダンス、トンネル電流、抵抗、キャパシタンス、電流又は電圧のうち1つ又は複数である、請求項1に記載の方法。
- AC電圧シグナルで1つ又は複数のグラフェン層に電気的にバイアスをかけるステップをさらに含む、請求項1に記載の方法。
- 中央のグラフェン層と外部グラフェン層との間のインピーダンスをモニターするステップ、又はグラフェン層間のインピーダンス電流又は電圧を測定するステップをさらに含む、請求項8に記載の方法。
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US20090093403A1 (en) | 2007-03-01 | 2009-04-09 | Feng Zhang | Systems, methods and compositions for optical stimulation of target cells |
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US10434327B2 (en) | 2007-10-31 | 2019-10-08 | The Board Of Trustees Of The Leland Stanford Junior University | Implantable optical stimulators |
US10035027B2 (en) | 2007-10-31 | 2018-07-31 | The Board Of Trustees Of The Leland Stanford Junior University | Device and method for ultrasonic neuromodulation via stereotactic frame based technique |
MY169771A (en) | 2008-04-23 | 2019-05-15 | Univ Leland Stanford Junior | Systems, methods and compositions for optical stimulation of target cells |
ES2532235T3 (es) | 2008-05-29 | 2015-03-25 | The Board Of Trustees Of The Leland Stanford Junior University | Línea celular, sistema y procedimiento para el control óptico de mensajeros secundarios |
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