JP6356550B2 - 半導体装置およびその製造方法 - Google Patents
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- JP6356550B2 JP6356550B2 JP2014183972A JP2014183972A JP6356550B2 JP 6356550 B2 JP6356550 B2 JP 6356550B2 JP 2014183972 A JP2014183972 A JP 2014183972A JP 2014183972 A JP2014183972 A JP 2014183972A JP 6356550 B2 JP6356550 B2 JP 6356550B2
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- H10W40/25—Arrangements for cooling characterised by their materials
- H10W40/255—Arrangements for cooling characterised by their materials having a laminate or multilayered structure, e.g. direct bond copper [DBC] ceramic substrates
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- H10W70/05—Manufacture or treatment of insulating or insulated package substrates, or of interposers, or of redistribution layers
- H10W70/095—Manufacture or treatment of insulating or insulated package substrates, or of interposers, or of redistribution layers of vias therein
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- H10W70/67—Insulating or insulated package substrates; Interposers; Redistribution layers characterised by their insulating layers or insulating parts
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- H10W74/131—Encapsulations, e.g. protective coatings characterised by their shape or disposition the semiconductor body being only partially enclosed
- H10W74/134—Encapsulations, e.g. protective coatings characterised by their shape or disposition the semiconductor body being only partially enclosed the encapsulations being in grooves in the semiconductor body
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- H10W72/075—Connecting or disconnecting of bond wires
- H10W72/07531—Techniques
- H10W72/07532—Compression bonding, e.g. thermocompression bonding
- H10W72/07533—Ultrasonic bonding, e.g. thermosonic bonding
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- H10W72/07531—Techniques
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- H10W72/07541—Controlling the environment, e.g. atmosphere composition or temperature
- H10W72/07552—Controlling the environment, e.g. atmosphere composition or temperature changes in structures or sizes
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- H10W72/351—Materials of die-attach connectors
- H10W72/352—Materials of die-attach connectors comprising metals or metalloids, e.g. solders
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- H10W72/521—Structures or relative sizes of bond wires
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- H10W72/531—Shapes of wire connectors
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- H10W72/541—Dispositions of bond wires
- H10W72/547—Dispositions of multiple bond wires
- H10W72/5475—Dispositions of multiple bond wires multiple bond wires connected to common bond pads at both ends of the wires
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- H10W72/50—Bond wires
- H10W72/551—Materials of bond wires
- H10W72/552—Materials of bond wires comprising metals or metalloids, e.g. silver
- H10W72/5524—Materials of bond wires comprising metals or metalloids, e.g. silver comprising aluminium [Al]
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- H10W72/00—Interconnections or connectors in packages
- H10W72/50—Bond wires
- H10W72/551—Materials of bond wires
- H10W72/552—Materials of bond wires comprising metals or metalloids, e.g. silver
- H10W72/5525—Materials of bond wires comprising metals or metalloids, e.g. silver comprising copper [Cu]
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- H10W72/851—Dispositions of multiple connectors or interconnections
- H10W72/874—On different surfaces
- H10W72/884—Die-attach connectors and bond wires
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- H10W72/90—Bond pads, in general
- H10W72/921—Structures or relative sizes of bond pads
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- H10W76/00—Containers; Fillings or auxiliary members therefor; Seals
- H10W76/40—Fillings or auxiliary members in containers, e.g. centering rings
- H10W76/42—Fillings
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- H10W90/00—Package configurations
- H10W90/701—Package configurations characterised by the relative positions of pads or connectors relative to package parts
- H10W90/731—Package configurations characterised by the relative positions of pads or connectors relative to package parts of die-attach connectors
- H10W90/734—Package configurations characterised by the relative positions of pads or connectors relative to package parts of die-attach connectors between a chip and a stacked insulating package substrate, interposer or RDL
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- H10W90/00—Package configurations
- H10W90/701—Package configurations characterised by the relative positions of pads or connectors relative to package parts
- H10W90/751—Package configurations characterised by the relative positions of pads or connectors relative to package parts of bond wires
- H10W90/753—Package configurations characterised by the relative positions of pads or connectors relative to package parts of bond wires between laterally-adjacent chips
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- Cooling Or The Like Of Semiconductors Or Solid State Devices (AREA)
- Structures Or Materials For Encapsulating Or Coating Semiconductor Devices Or Solid State Devices (AREA)
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Ceramic Engineering (AREA)
Priority Applications (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2014183972A JP6356550B2 (ja) | 2014-09-10 | 2014-09-10 | 半導体装置およびその製造方法 |
| US14/717,309 US9443778B2 (en) | 2014-09-10 | 2015-05-20 | Semiconductor device and manufacturing method thereof |
| DE102015213495.4A DE102015213495B4 (de) | 2014-09-10 | 2015-07-17 | Halbleitervorrichtung und Herstellungsverfahren dafür |
| CN201510575213.1A CN105405815B (zh) | 2014-09-10 | 2015-09-10 | 半导体装置及其制造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2014183972A JP6356550B2 (ja) | 2014-09-10 | 2014-09-10 | 半導体装置およびその製造方法 |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2018108039A Division JP2018133598A (ja) | 2018-06-05 | 2018-06-05 | 半導体装置およびその製造方法 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2016058563A JP2016058563A (ja) | 2016-04-21 |
| JP2016058563A5 JP2016058563A5 (https=) | 2017-01-19 |
| JP6356550B2 true JP6356550B2 (ja) | 2018-07-11 |
Family
ID=55358675
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2014183972A Active JP6356550B2 (ja) | 2014-09-10 | 2014-09-10 | 半導体装置およびその製造方法 |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US9443778B2 (https=) |
| JP (1) | JP6356550B2 (https=) |
| CN (1) | CN105405815B (https=) |
| DE (1) | DE102015213495B4 (https=) |
Families Citing this family (40)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6775385B2 (ja) * | 2015-11-10 | 2020-10-28 | 昭和電工株式会社 | パワーモジュール用ベース |
| KR101922874B1 (ko) * | 2015-12-21 | 2018-11-28 | 삼성전기 주식회사 | 전자 부품 패키지 |
| JP6409846B2 (ja) * | 2016-10-18 | 2018-10-24 | トヨタ自動車株式会社 | 半導体装置 |
| US9929066B1 (en) * | 2016-12-13 | 2018-03-27 | Ixys Corporation | Power semiconductor device module baseplate having peripheral heels |
| JP7042217B2 (ja) * | 2016-12-27 | 2022-03-25 | ヌヴォトンテクノロジージャパン株式会社 | 半導体装置 |
| JP6625044B2 (ja) * | 2016-12-28 | 2019-12-25 | 三菱電機株式会社 | 半導体装置およびその製造方法 |
| JP6743916B2 (ja) * | 2017-02-13 | 2020-08-19 | 富士電機株式会社 | 半導体装置及び半導体装置の製造方法 |
| JP6946698B2 (ja) * | 2017-03-31 | 2021-10-06 | 富士電機株式会社 | 半導体装置および半導体装置の製造方法 |
| JP6766744B2 (ja) * | 2017-05-10 | 2020-10-14 | 株式会社豊田自動織機 | 半導体モジュール |
| JP2018195717A (ja) * | 2017-05-17 | 2018-12-06 | 富士電機株式会社 | 半導体モジュール、半導体モジュールのベース板および半導体装置の製造方法 |
| JP7034613B2 (ja) * | 2017-06-29 | 2022-03-14 | 太陽誘電株式会社 | セラミック電子部品及びその製造方法、並びに電子部品実装基板 |
| US11031355B2 (en) | 2017-07-03 | 2021-06-08 | Mitsubishi Electric Corporation | Semiconductor device |
| JP7013728B2 (ja) * | 2017-08-25 | 2022-02-01 | 富士電機株式会社 | 半導体装置 |
| JP6768612B2 (ja) * | 2017-09-06 | 2020-10-14 | 三菱電機株式会社 | 半導体装置 |
| JP6852649B2 (ja) * | 2017-10-24 | 2021-03-31 | 株式会社オートネットワーク技術研究所 | 回路構成体及び回路構成体の製造方法 |
| JP6827402B2 (ja) | 2017-11-17 | 2021-02-10 | 三菱電機株式会社 | 半導体装置 |
| KR102008278B1 (ko) * | 2017-12-07 | 2019-08-07 | 현대오트론 주식회사 | 파워칩 통합 모듈과 이의 제조 방법 및 양면 냉각형 파워 모듈 패키지 |
| CN111433910B (zh) * | 2017-12-13 | 2023-10-10 | 三菱电机株式会社 | 半导体装置以及半导体装置的制造方法 |
| EP3506344A1 (de) * | 2017-12-29 | 2019-07-03 | Siemens Aktiengesellschaft | Halbleiterbaugruppe |
| JP2019129201A (ja) * | 2018-01-23 | 2019-08-01 | 三菱電機株式会社 | 半導体装置、および、半導体装置の製造方法 |
| JP7056366B2 (ja) * | 2018-05-16 | 2022-04-19 | 富士電機株式会社 | 半導体モジュール及びそれを用いた半導体装置 |
| JP7038645B2 (ja) * | 2018-12-06 | 2022-03-18 | 三菱電機株式会社 | 半導体装置および半導体装置の製造方法 |
| US11107962B2 (en) * | 2018-12-18 | 2021-08-31 | Soulnano Limited | UV LED array with power interconnect and heat sink |
| EP3909124A4 (en) * | 2019-01-10 | 2022-10-26 | Wolfspeed, Inc. | HIGH POWER MULTI-LAYER LOW INDUCTANCE FAST SWITCHING MODULE FOR PARALLEL POWER DEVICES |
| JP7257977B2 (ja) * | 2020-01-17 | 2023-04-14 | 三菱電機株式会社 | 半導体装置および半導体モジュール |
| US20230118890A1 (en) * | 2020-03-26 | 2023-04-20 | Mitsubishi Electric Corporation | Semiconductor device, and manufacturing method therefor |
| JP7676760B2 (ja) * | 2020-05-28 | 2025-05-15 | 富士電機株式会社 | 半導体装置及び半導体装置の製造方法 |
| JP7571434B2 (ja) * | 2020-09-15 | 2024-10-23 | 富士電機株式会社 | 半導体装置 |
| EP3979313B1 (de) * | 2020-09-30 | 2022-11-30 | SEMIKRON Elektronik GmbH & Co. KG | Leistungselektronische einrichtung und leistungshalbleitermodul damit |
| JP7378379B2 (ja) * | 2020-11-02 | 2023-11-13 | 三菱電機株式会社 | パワー半導体モジュール及び電力変換装置 |
| JP7487695B2 (ja) * | 2021-03-26 | 2024-05-21 | 三菱電機株式会社 | 半導体装置 |
| JP7615834B2 (ja) * | 2021-03-30 | 2025-01-17 | 株式会社三社電機製作所 | 半導体装置及び放熱器組立体並びに半導体装置及び放熱器の組立方法 |
| JP7749955B2 (ja) * | 2021-07-09 | 2025-10-07 | 富士電機株式会社 | 半導体モジュールおよびその製造方法 |
| JP7830911B2 (ja) * | 2021-12-02 | 2026-03-17 | 富士電機株式会社 | 半導体モジュール及び半導体モジュールの製造方法 |
| US20240023285A1 (en) * | 2022-07-13 | 2024-01-18 | Quantum-Si Incorporated | Flexible metal chip cooling interface |
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| DE3915707A1 (de) * | 1989-05-13 | 1990-11-22 | Asea Brown Boveri | Kunststoffgehaeuse und leistungshalbleitermodul mit diesem gehaeuse |
| JP3225457B2 (ja) | 1995-02-28 | 2001-11-05 | 株式会社日立製作所 | 半導体装置 |
| JP3519299B2 (ja) | 1999-01-06 | 2004-04-12 | 芝府エンジニアリング株式会社 | 半導体装置 |
| JP3919398B2 (ja) * | 1999-10-27 | 2007-05-23 | 三菱電機株式会社 | 半導体モジュール |
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| US8237260B2 (en) * | 2008-11-26 | 2012-08-07 | Infineon Technologies Ag | Power semiconductor module with segmented base plate |
| DE102009026558B3 (de) * | 2009-05-28 | 2010-12-02 | Infineon Technologies Ag | Leistungshalbleitermodul mit beweglich gelagerten Schaltungsträgern und Verfahren zur Herstellung eines solchen Leistungshalbleitermoduls |
| JP5362624B2 (ja) * | 2010-03-09 | 2013-12-11 | 株式会社三社電機製作所 | パワー半導体モジュール |
| JP5602095B2 (ja) * | 2011-06-09 | 2014-10-08 | 三菱電機株式会社 | 半導体装置 |
| US9117795B2 (en) * | 2012-02-09 | 2015-08-25 | Fuji Electric Co., Ltd. | Semiconductor device |
| JP2013229369A (ja) * | 2012-04-24 | 2013-11-07 | Denso Corp | モールドパッケージ |
| KR20150053874A (ko) * | 2012-09-13 | 2015-05-19 | 후지 덴키 가부시키가이샤 | 반도체 장치, 반도체 장치에 대한 방열 부재의 부착 방법 및 반도체 장치의 제조 방법 |
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| US9443778B2 (en) | 2016-09-13 |
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| US20160071778A1 (en) | 2016-03-10 |
| DE102015213495A1 (de) | 2016-03-10 |
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| CN105405815A (zh) | 2016-03-16 |
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