JP6827402B2 - 半導体装置 - Google Patents
半導体装置 Download PDFInfo
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- JP6827402B2 JP6827402B2 JP2017221442A JP2017221442A JP6827402B2 JP 6827402 B2 JP6827402 B2 JP 6827402B2 JP 2017221442 A JP2017221442 A JP 2017221442A JP 2017221442 A JP2017221442 A JP 2017221442A JP 6827402 B2 JP6827402 B2 JP 6827402B2
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- 239000004065 semiconductor Substances 0.000 title claims description 48
- 229910052751 metal Inorganic materials 0.000 claims description 80
- 239000002184 metal Substances 0.000 claims description 80
- 229920005989 resin Polymers 0.000 claims description 36
- 239000011347 resin Substances 0.000 claims description 36
- 239000007767 bonding agent Substances 0.000 claims description 21
- 239000000463 material Substances 0.000 claims description 16
- 229910052782 aluminium Inorganic materials 0.000 claims description 13
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 13
- 229910052709 silver Inorganic materials 0.000 claims description 13
- 239000004332 silver Substances 0.000 claims description 13
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 12
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 claims description 12
- 229910052802 copper Inorganic materials 0.000 claims description 12
- 239000010949 copper Substances 0.000 claims description 12
- 239000000956 alloy Substances 0.000 claims description 9
- 229910045601 alloy Inorganic materials 0.000 claims description 9
- 230000017525 heat dissipation Effects 0.000 claims description 3
- 239000011230 binding agent Substances 0.000 claims 1
- 230000004048 modification Effects 0.000 description 21
- 238000012986 modification Methods 0.000 description 21
- 238000007789 sealing Methods 0.000 description 8
- 230000000052 comparative effect Effects 0.000 description 6
- 230000002093 peripheral effect Effects 0.000 description 6
- 238000010586 diagram Methods 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- 238000005516 engineering process Methods 0.000 description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 239000003822 epoxy resin Substances 0.000 description 2
- 238000005530 etching Methods 0.000 description 2
- 230000010354 integration Effects 0.000 description 2
- 229920000647 polyepoxide Polymers 0.000 description 2
- 238000004382 potting Methods 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 239000004593 Epoxy Substances 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005538 encapsulation Methods 0.000 description 1
- 239000000945 filler Substances 0.000 description 1
- 238000005304 joining Methods 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 238000010248 power generation Methods 0.000 description 1
- 230000008929 regeneration Effects 0.000 description 1
- 238000011069 regeneration method Methods 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/34—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
- H01L23/36—Selection of materials, or shaping, to facilitate cooling or heating, e.g. heatsinks
- H01L23/373—Cooling facilitated by selection of materials for the device or materials for thermal expansion adaptation, e.g. carbon
- H01L23/3736—Metallic materials
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/02—Containers; Seals
- H01L23/10—Containers; Seals characterised by the material or arrangement of seals between parts, e.g. between cap and base of the container or between leads and walls of the container
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/02—Containers; Seals
- H01L23/04—Containers; Seals characterised by the shape of the container or parts, e.g. caps, walls
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/16—Fillings or auxiliary members in containers or encapsulations, e.g. centering rings
- H01L23/18—Fillings characterised by the material, its physical or chemical properties, or its arrangement within the complete device
- H01L23/24—Fillings characterised by the material, its physical or chemical properties, or its arrangement within the complete device solid or gel at the normal operating temperature of the device
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/34—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
- H01L23/36—Selection of materials, or shaping, to facilitate cooling or heating, e.g. heatsinks
- H01L23/373—Cooling facilitated by selection of materials for the device or materials for thermal expansion adaptation, e.g. carbon
- H01L23/3735—Laminates or multilayers, e.g. direct bond copper ceramic substrates
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/48—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
- H01L23/488—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of soldered or bonded constructions
- H01L23/492—Bases or plates or solder therefor
- H01L23/4924—Bases or plates or solder therefor characterised by the materials
- H01L23/4926—Bases or plates or solder therefor characterised by the materials the materials containing semiconductor material
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
- H01L2224/4805—Shape
- H01L2224/4809—Loop shape
- H01L2224/48091—Arched
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/73—Means for bonding being of different types provided for in two or more of groups H01L2224/10, H01L2224/18, H01L2224/26, H01L2224/34, H01L2224/42, H01L2224/50, H01L2224/63, H01L2224/71
- H01L2224/732—Location after the connecting process
- H01L2224/73251—Location after the connecting process on different surfaces
- H01L2224/73265—Layer and wire connectors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/48—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
- H01L23/488—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of soldered or bonded constructions
- H01L23/495—Lead-frames or other flat leads
- H01L23/49568—Lead-frames or other flat leads specifically adapted to facilitate heat dissipation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/19—Details of hybrid assemblies other than the semiconductor or other solid state devices to be connected
- H01L2924/191—Disposition
- H01L2924/19101—Disposition of discrete passive components
- H01L2924/19107—Disposition of discrete passive components off-chip wires
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Materials Engineering (AREA)
- Ceramic Engineering (AREA)
- Dispersion Chemistry (AREA)
- Cooling Or The Like Of Semiconductors Or Solid State Devices (AREA)
Description
図1は、本発明の実施の形態1に係る半導体装置100の断面図である。半導体装置100は、発電、送電等の分野、効率的なエネルギーの利用および再生等の様々な場面で利用される。
以下においては、実施の形態1の構成を、「構成Ct1」ともいう。また、以下においては、本変形例の構成を「構成Ctm1」ともいう。構成Ctm1は、露出部11xの形状に特徴を有する構成である。構成Ctm1は、構成Ct1(実施の形態1)に適用される。
以下においては、本変形例の構成を「構成Ctm2」ともいう。構成Ctm2は、露出部11xが設けられる位置に特徴を有する構成である。構成Ctm2は、構成Ct1(実施の形態1)に適用される。
以下においては、本変形例の構成を「構成Ctm3」ともいう。構成Ctm3は、露出部11xが設けられる位置に特徴を有する構成である。構成Ctm3は、構成Ct1(実施の形態1)および構成Ctm1(変形例1)の全てまたは一部に適用される。
以下においては、本変形例の構成を「構成Ctm4」ともいう。構成Ctm4は、放熱金属板11が複数の露出部を有する構成である。構成Ctm4は、構成Ct1、構成Ctm1および構成Ctm2の全てまたは一部に適用される。
Claims (9)
- 接合剤を介して、ケースに接合されるベース板を備え、
前記ベース板は、
放熱性を有する放熱金属板と、
樹脂で構成された樹脂絶縁層とを含み、
前記樹脂絶縁層は、前記放熱金属板上に形成されており、
前記樹脂絶縁層には、前記放熱金属板の一部を露出させる切りかきが設けられており、
前記ケースは、前記接合剤を介して、前記切りかきにより露出している、前記放熱金属板の一部である露出部と接合しており、
前記露出部は、平面視において前記ケースに覆われている溝であり、
前記溝のうち、当該溝の開口部に近い部分程、当該部分の幅が狭くなるように、当該溝の一部は構成されている
半導体装置。 - 前記溝の深さ方向に沿った、前記溝の断面の形状は、丸状である
請求項1に記載の半導体装置。 - 前記露出部は、前記放熱金属板の4つの角部にわたって存在する
請求項1または2に記載の半導体装置。 - 前記放熱金属板は、複数の前記露出部を有し、
前記複数の露出部は、間隔をあけて設けられている
請求項1または2に記載の半導体装置。 - 前記放熱金属板は、アルミニウム、銀および銅のいずれかから構成される
請求項1から4のいずれか1項に記載の半導体装置。 - 前記放熱金属板は、材料としてのアルミニウム、銀および銅のうちの少なくとも2つの当該材料からなる合金で構成される
請求項1から4のいずれか1項に記載の半導体装置。 - 前記樹脂絶縁層上には、金属回路板が形成されており、
前記金属回路板は、アルミニウム、銀および銅のいずれかから構成される
請求項1から6のいずれか1項に記載の半導体装置。 - 前記樹脂絶縁層上には、金属回路板が形成されており、
前記金属回路板は、材料としてのアルミニウム、銀および銅のうちの少なくとも2つの当該材料からなる合金で構成される
請求項1から6のいずれか1項に記載の半導体装置。 - 前記ベース板には、半導体素子が設けられており、
前記半導体素子は、ワイドバンドギャップ材料を用いて形成されている
請求項1から8のいずれか1項に記載の半導体装置。
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2017221442A JP6827402B2 (ja) | 2017-11-17 | 2017-11-17 | 半導体装置 |
US16/115,463 US10643922B2 (en) | 2017-11-17 | 2018-08-28 | Semiconductor device |
DE102018217420.2A DE102018217420B4 (de) | 2017-11-17 | 2018-10-11 | Halbleitervorrichtung |
CN201811341442.7A CN109801882A (zh) | 2017-11-17 | 2018-11-12 | 半导体装置 |
Applications Claiming Priority (1)
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---|---|---|---|
JP2017221442A JP6827402B2 (ja) | 2017-11-17 | 2017-11-17 | 半導体装置 |
Publications (2)
Publication Number | Publication Date |
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JP2019091864A JP2019091864A (ja) | 2019-06-13 |
JP6827402B2 true JP6827402B2 (ja) | 2021-02-10 |
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JP2017221442A Active JP6827402B2 (ja) | 2017-11-17 | 2017-11-17 | 半導体装置 |
Country Status (4)
Country | Link |
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US (1) | US10643922B2 (ja) |
JP (1) | JP6827402B2 (ja) |
CN (1) | CN109801882A (ja) |
DE (1) | DE102018217420B4 (ja) |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS55122359U (ja) * | 1979-02-20 | 1980-08-30 | ||
JPH04199548A (ja) * | 1990-11-28 | 1992-07-20 | Mitsubishi Electric Corp | 半導体装置 |
JPH11307658A (ja) * | 1998-04-22 | 1999-11-05 | Fuji Electric Co Ltd | 半導体装置のパッケージ |
JP2000323593A (ja) * | 1999-05-06 | 2000-11-24 | Yazaki Corp | 半導体装置 |
JP2004103846A (ja) * | 2002-09-10 | 2004-04-02 | Mitsubishi Electric Corp | 電力用半導体装置 |
JP4137840B2 (ja) * | 2004-05-10 | 2008-08-20 | 三菱電機株式会社 | 電力用半導体装置 |
JP2009130168A (ja) * | 2007-11-26 | 2009-06-11 | Nissan Motor Co Ltd | 半導体装置および半導体装置の絶縁方法 |
JP5285347B2 (ja) * | 2008-07-30 | 2013-09-11 | セミコンダクター・コンポーネンツ・インダストリーズ・リミテッド・ライアビリティ・カンパニー | 回路装置 |
JP6356550B2 (ja) * | 2014-09-10 | 2018-07-11 | 三菱電機株式会社 | 半導体装置およびその製造方法 |
JP6435794B2 (ja) * | 2014-11-12 | 2018-12-12 | 富士電機株式会社 | 半導体装置 |
-
2017
- 2017-11-17 JP JP2017221442A patent/JP6827402B2/ja active Active
-
2018
- 2018-08-28 US US16/115,463 patent/US10643922B2/en active Active
- 2018-10-11 DE DE102018217420.2A patent/DE102018217420B4/de active Active
- 2018-11-12 CN CN201811341442.7A patent/CN109801882A/zh active Pending
Also Published As
Publication number | Publication date |
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JP2019091864A (ja) | 2019-06-13 |
US10643922B2 (en) | 2020-05-05 |
DE102018217420A1 (de) | 2019-05-23 |
US20190157182A1 (en) | 2019-05-23 |
DE102018217420B4 (de) | 2023-10-26 |
CN109801882A (zh) | 2019-05-24 |
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