JP2016207910A - 半導体装置 - Google Patents
半導体装置 Download PDFInfo
- Publication number
- JP2016207910A JP2016207910A JP2015090011A JP2015090011A JP2016207910A JP 2016207910 A JP2016207910 A JP 2016207910A JP 2015090011 A JP2015090011 A JP 2015090011A JP 2015090011 A JP2015090011 A JP 2015090011A JP 2016207910 A JP2016207910 A JP 2016207910A
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- Prior art keywords
- conductor layer
- semiconductor device
- volume
- insulating plate
- circuit pattern
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- 239000004065 semiconductor Substances 0.000 title claims abstract description 93
- 239000004020 conductor Substances 0.000 claims abstract description 50
- 239000012212 insulator Substances 0.000 claims abstract description 4
- 238000007789 sealing Methods 0.000 claims description 35
- 239000000463 material Substances 0.000 claims description 8
- 239000003822 epoxy resin Substances 0.000 claims description 6
- 229920000647 polyepoxide Polymers 0.000 claims description 6
- 229920001187 thermosetting polymer Polymers 0.000 claims description 4
- 230000008646 thermal stress Effects 0.000 abstract description 12
- 230000005855 radiation Effects 0.000 abstract description 2
- 238000005538 encapsulation Methods 0.000 abstract 1
- 229910000679 solder Inorganic materials 0.000 description 13
- 230000001052 transient effect Effects 0.000 description 10
- 238000001816 cooling Methods 0.000 description 9
- 230000017525 heat dissipation Effects 0.000 description 9
- 230000035882 stress Effects 0.000 description 9
- 230000008602 contraction Effects 0.000 description 7
- 230000000694 effects Effects 0.000 description 6
- 229910052751 metal Inorganic materials 0.000 description 6
- 239000002184 metal Substances 0.000 description 6
- 239000000758 substrate Substances 0.000 description 6
- 230000020169 heat generation Effects 0.000 description 5
- 239000000919 ceramic Substances 0.000 description 4
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 3
- 230000000052 comparative effect Effects 0.000 description 3
- 229910052802 copper Inorganic materials 0.000 description 3
- 239000010949 copper Substances 0.000 description 3
- 238000005530 etching Methods 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 229920005989 resin Polymers 0.000 description 3
- 239000011347 resin Substances 0.000 description 3
- 238000003860 storage Methods 0.000 description 3
- 239000004734 Polyphenylene sulfide Substances 0.000 description 2
- 229910052581 Si3N4 Inorganic materials 0.000 description 2
- PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical compound Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 description 2
- 229920001707 polybutylene terephthalate Polymers 0.000 description 2
- 229920000069 polyphenylene sulfide Polymers 0.000 description 2
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 2
- -1 Polybutylene Terephthalate Polymers 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 238000005219 brazing Methods 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 239000004519 grease Substances 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 238000005304 joining Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000002923 metal particle Substances 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 229920001296 polysiloxane Polymers 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 238000003892 spreading Methods 0.000 description 1
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
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- H05K1/00—Printed circuits
- H05K1/02—Details
- H05K1/0201—Thermal arrangements, e.g. for cooling, heating or preventing overheating
- H05K1/0203—Cooling of mounted components
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Abstract
Description
(構成)
図1を参照して、本実施の形態の半導体装置501は、ケース9と、信号端子7(外部端子)と、主端子8(外部端子)と、半導体チップ1と、はんだ部11と、封止部10と、ワイヤー6(配線部)と、回路基板101とを有する。さらに図2および図3を参照して、回路基板101は、絶縁板12と、回路パターン4(第1の導体層)と、回路パターン2(第2の導体層)と、回路パターン3(第3の導体層)とを有する。なお、図3においては、回路基板101の形状に加えて、回路パターン3の実装領域3Mを破線で示し、また半導体チップ1を2点鎖線で示している。
図4を参照して、比較例の半導体装置500の回路基板100には、上記回路パターン3に代わり、回路パターン3Zが設けられている。回路パターン3Zおよび2は、絶縁板12にろう剤によって接着された均一な厚さの金属板をエッチングすることによって形成されている。よって回路パターン3Zは、回路パターン2の厚さと同じ厚さを有する。またこのエッチングを容易なものとするため、その厚さは0.5mm以下とされている。
図6は、半導体装置501(図1)についての、回路パターン3(回路基板101の上面)上に半導体チップ1が取り付けられた箇所から、回路パターン4(回路基板101の下面)上に冷却フィン(図示せず)が取り付けられた箇所への放熱経路における過渡熱抵抗と、半導体チップ1の発熱時間との関係の実験結果を示す。半導体装置501は半導体装置500に比して、より低い過渡熱抵抗を有していた。たとえば0.1秒において、半導体装置500は過渡熱抵抗3.5K/W(図5)を有していた一方、半導体装置501は過渡熱抵抗3.0K/W(図6)を有していた。
本実施の形態によれば、半導体チップ1が回路パターン2よりも厚い実装領域3M上に配置されていることにより、実装領域3Mが回路パターン2の厚さと同じ厚さを有する場合に比して、放熱性を高めることができ、特に過渡熱抵抗を抑えることができる。また絶縁板12の下面S1上に設けられた回路パターン2および回路パターン3の体積の和V2+V3が、絶縁板12の下面S1上に設けられた回路パターン4の体積V1の70%以上130%以下であることにより、絶縁板12の下面S1側の熱応力と上面S2側の熱応力との差異が小さくなる。これにより、絶縁板12の反りを抑えることができる。以上から、高い放熱性を有し、かつ熱応力に起因した反りを抑えることができる半導体装置501が得られる。
図8を参照して、本実施の形態の半導体装置の回路基板102においては、回路パターン3は、実装領域3Mの外側に段差3Sを有する。図示されているように、段差3Sによって、実装領域3Mの外側から実装領域3Mに向かって回路パターン3の表面高さが高くなっていることが好ましい。言い換えれば、回路パターン3において、実装領域3Mの外側に位置する外周部に比して実装領域3Mがより厚くなっていることが好ましい。なお、上記以外の構成については、上述した実施の形態1の構成とほぼ同じであるため、同一または対応する要素について同一の符号を付し、その説明を繰り返さない。
図9〜図11を参照して、本実施の形態の半導体装置の回路基板103においては、回路パターン3は実装領域3Mの外側に凹部を有する。具体的には回路パターン3は実装領域3Mの外側にディンプル部5aを有する。ディンプル部5aは、深さ方向において逆テーパ形状(図11におけるディンプル部5aの下部を参照)を有することが好ましい。ディンプル部5a内には封止部10(図1)が入り込んでいる。なお、上記以外の構成については、上述した実施の形態1の構成とほぼ同じであるため、同一または対応する要素について同一の符号を付し、その説明を繰り返さない。
図12を参照して、本実施の形態の半導体装置の回路基板104においては、回路パターン3の凹部は、前述したディンプル部5aに加えて、半導体チップ1の4つの角のそれぞれに沿って延在する4つのスリット部13aを含む。なお平面視(図12)において、半導体チップ1とスリット部13aとの間には間隔が設けられていてもよい。
図13〜図16を参照して、本実施の形態の半導体装置の回路基板104においては、回路パターン3の凹部は、複数のディンプル部5bと、スリット部13bとを有する。複数のディンプル部5bは、回路パターン3の縁から離れて設けられている。スリット部13bは、複数のディンプル部5bを互いにつないでおり、回路パターン3の縁まで延びている。なお、上記以外の構成については、上述した実施の形態1の構成とほぼ同じであるため、同一または対応する要素について同一の符号を付し、その説明を繰り返さない。
Claims (8)
- 半導体装置であって、
ケースと、
前記ケースに取り付けられた外部端子と、
第1の面と、前記第1の面と反対の、前記ケースに囲まれた第2の面とを有する絶縁板と、
前記絶縁板の前記第1の面上に設けられ、一の導体材料から作られ、第1の体積を有する第1の導体層と、
前記絶縁板の前記第2の面上に設けられ、前記一の導体材料から作られ、第2の体積を有する第2の導体層と、
前記絶縁板の前記第2の面上に前記第2の導体層から離れて設けられ、前記一の導体材料から作られ、第3の体積を有する第3の導体層とを備え、前記第3の導体層は、前記第2の導体層よりも厚い実装領域を有し、前記第2の体積および前記第3の体積の和は前記第1の体積の70%以上130%以下であり、前記半導体装置はさらに
前記第3の導体層の前記実装領域上に設けられた半導体チップと、
絶縁体から作られ、前記ケース内で前記半導体チップを封止する封止部と、
前記封止部内を通り、前記半導体チップと、前記外部端子および前記第2の導体層の少なくともいずれかとを短絡する配線部と
を備える半導体装置。 - 前記第3の導体層の前記実装領域は0.6mm以上の厚さを有する、請求項1に記載の半導体装置。
- 前記第3の導体層は前記実装領域の外側に段差を有する、請求項1または2に記載の半導体装置。
- 前記第3の導体層は前記実装領域の外側に凹部を有する、請求項1から3のいずれか1項に記載の半導体装置。
- 前記凹部は、深さ方向において逆テーパ形状を有する部分を含む、請求項4に記載の半導体装置。
- 前記半導体チップは、4つの角を有する四角形状を有し、
前記第3の導体層の前記凹部は、前記4つの角のそれぞれに沿って延在する4つのスリット部を含む、請求項4または5に記載の半導体装置。 - 前記第3の導体層の前記凹部は、前記第3の導体層の縁から離れて設けられた複数のディンプル部と、前記複数のディンプル部を互いにつなぎ前記第3の導体層の縁まで延びるスリット部とを含む、請求項4または5に記載の半導体装置。
- 前記封止部は、9ppm/K以上12ppm/K以下の線膨張係数を有する熱硬化性エポキシ樹脂から作られている、請求項1から7のいずれか1項に記載の半導体装置。
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US11348852B2 (en) | 2018-12-10 | 2022-05-31 | Fuji Electric Co., Ltd. | Semiconductor device |
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US9583407B2 (en) | 2017-02-28 |
US20160315023A1 (en) | 2016-10-27 |
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JP6370257B2 (ja) | 2018-08-08 |
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CN106098646B (zh) | 2019-05-17 |
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