JP6848802B2 - 半導体装置 - Google Patents
半導体装置 Download PDFInfo
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- JP6848802B2 JP6848802B2 JP2017197913A JP2017197913A JP6848802B2 JP 6848802 B2 JP6848802 B2 JP 6848802B2 JP 2017197913 A JP2017197913 A JP 2017197913A JP 2017197913 A JP2017197913 A JP 2017197913A JP 6848802 B2 JP6848802 B2 JP 6848802B2
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- 239000004065 semiconductor Substances 0.000 title claims description 70
- 239000003566 sealing material Substances 0.000 claims description 25
- 229920005989 resin Polymers 0.000 claims description 14
- 239000011347 resin Substances 0.000 claims description 14
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 8
- 229910052802 copper Inorganic materials 0.000 claims description 8
- 239000010949 copper Substances 0.000 claims description 8
- 239000000853 adhesive Substances 0.000 claims description 7
- 230000001070 adhesive effect Effects 0.000 claims description 7
- 239000003822 epoxy resin Substances 0.000 claims description 7
- 229920000647 polyepoxide Polymers 0.000 claims description 7
- 239000008393 encapsulating agent Substances 0.000 claims description 5
- 229910052751 metal Inorganic materials 0.000 claims description 4
- 239000002184 metal Substances 0.000 claims description 4
- 239000004734 Polyphenylene sulfide Substances 0.000 claims description 3
- 229920000069 polyphenylene sulfide Polymers 0.000 claims description 3
- 230000000694 effects Effects 0.000 description 9
- 238000007789 sealing Methods 0.000 description 5
- 229910052782 aluminium Inorganic materials 0.000 description 4
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 4
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 3
- 239000011810 insulating material Substances 0.000 description 3
- 229910052710 silicon Inorganic materials 0.000 description 3
- 239000010703 silicon Substances 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 238000004382 potting Methods 0.000 description 2
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 2
- 229910010271 silicon carbide Inorganic materials 0.000 description 2
- 229910002601 GaN Inorganic materials 0.000 description 1
- JMASRVWKEDWRBT-UHFFFAOYSA-N Gallium nitride Chemical compound [Ga]#N JMASRVWKEDWRBT-UHFFFAOYSA-N 0.000 description 1
- 230000004888 barrier function Effects 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 239000010432 diamond Substances 0.000 description 1
- 229910003460 diamond Inorganic materials 0.000 description 1
- 239000000945 filler Substances 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 229920001187 thermosetting polymer Polymers 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
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Description
図1は、実施の形態1に係る半導体装置を示す断面図である。ベース板1は、順に積層された銅ベース板1a、樹脂絶縁層1b及び回路パターン1cが一体成形された樹脂絶縁銅ベース板である。
図2は、実施の形態2に係る半導体装置を示す断面図である。ケース4の内側面に蓋9を固定する段11が設けられている。これにより、蓋9の沈み込みを防止して、半導体装置の寸法精度が向上する。その他の構成及び効果は実施の形態1と同様である。なお、蓋9の固定に接着剤又はねじを使用してもよい。
図3は、実施の形態3に係る半導体装置を示す断面図である。図4は、図3のスナップフィット構造を拡大した断面図である。ケース4の内側面に、蓋9を上からはめ込んで勘合固定するスナップフィット構造12が設けられている。これにより、半導体装置の組立加工が容易となる。その他の構成及び効果は実施の形態1と同様である。
図5は、実施の形態4に係る半導体装置を示す断面図である。蓋9の下面に複数の凸部13が設けられ、凸部13の下面が封止材8の上面に接している。この凸部13により封止材8からの蓋9の高さを揃えることができるため、半導体装置の寸法精度が向上する。また、封止材8の硬化時に蓋9の凸部13を封止材8に接着することで組立加工が容易となる。その他の構成及び効果は実施の形態1と同様である。なお、接着剤を用いて凸部13を封止材8に接着してもよい。
図6は、実施の形態5に係る半導体装置を示す断面図である。凸部13は蓋9の外周部にのみ設けられている。これにより、位置決めが容易となり、組立性が向上する。その他の構成及び効果は実施の形態4と同様である。
図7は、実施の形態6に係る半導体装置を示す断面図である。図8は、図7の突起を拡大した断面図である。ケース4の内側面に突起14が設けられている。蓋9は突起14との圧接によりケース4に固定されている。これにより、蓋9をケース4に強固に固定することができる。また、蓋9の浮きを防止することができる。その他の構成及び効果は実施の形態1と同様である。
図9は、実施の形態7に係る半導体装置を示す断面図である。蓋9は接着剤15によりケース4に固定されている。これにより、蓋9をケース4に強固に固定することができる。その他の構成及び効果は実施の形態1と同様である。
図10は、実施の形態8に係る半導体装置を示す断面図である。蓋9の下面にベース板1の上面まで延びる柱16が設けられている。柱16の材料は蓋9と同じである。これにより、ベース板1からの蓋9の高さが固定され、蓋9の沈み込みを防止できるため、半導体装置の寸法精度が向上する。また、封止材8の硬化時に蓋9を封止材8に接着することで組立が容易となる。その他の構成及び効果は実施の形態1と同様である。
図11は、実施の形態9に係る半導体装置を示す断面図である。封止材8の上面と蓋9の下面との間に接着剤17が設けられている。これにより、空隙10を確保しつつ蓋9を強固に固定することができる。その他の構成及び効果は実施の形態1と同様である。
Claims (5)
- ベース板と、
前記ベース板の上に実装された半導体チップと、
前記ベース板の上において前記半導体チップを囲むケースと、
前記半導体チップに接続された電極端子と、
前記ケースの内部において前記ベース板の上面、前記半導体チップ、及び前記電極端子の一部を覆う封止材と、
前記封止材の上方において前記ケースに固定された蓋とを備え、
前記電極端子は前記封止材の上面に露出しておらず、
前記封止材の前記上面と前記蓋の下面との間に空隙が設けられ、
前記封止材の前記上面の一部と前記蓋の下面の一部が接着剤により直接的に接着されていることを特徴とする半導体装置。 - 前記ベース板は、順に積層された銅ベース板、樹脂絶縁層及び回路パターンが一体成形された樹脂絶縁銅ベース板であり、
前記封止材はエポキシ樹脂であることを特徴とする請求項1に記載の半導体装置。 - 前記蓋はポリフェニレンサルファイド樹脂であることを特徴とする請求項1又は2に記載の半導体装置。
- 前記蓋は金属板を有することを特徴とする請求項1又は2に記載の半導体装置。
- 前記半導体チップはワイドバンドギャップ半導体によって形成されていることを特徴とする請求項1〜4の何れか1項に記載の半導体装置。
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2017197913A JP6848802B2 (ja) | 2017-10-11 | 2017-10-11 | 半導体装置 |
US15/953,521 US11004756B2 (en) | 2017-10-11 | 2018-04-16 | Semiconductor device |
DE102018210855.2A DE102018210855B4 (de) | 2017-10-11 | 2018-07-02 | Halbleitervorrichtung |
CN201811155047.XA CN109659284B (zh) | 2017-10-11 | 2018-09-30 | 半导体装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2017197913A JP6848802B2 (ja) | 2017-10-11 | 2017-10-11 | 半導体装置 |
Publications (2)
Publication Number | Publication Date |
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JP2019071392A JP2019071392A (ja) | 2019-05-09 |
JP6848802B2 true JP6848802B2 (ja) | 2021-03-24 |
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Application Number | Title | Priority Date | Filing Date |
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JP2017197913A Active JP6848802B2 (ja) | 2017-10-11 | 2017-10-11 | 半導体装置 |
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US (1) | US11004756B2 (ja) |
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CN109716516B (zh) * | 2016-09-20 | 2023-05-23 | 三菱电机株式会社 | 半导体装置 |
JP7379886B2 (ja) * | 2019-07-03 | 2023-11-15 | 富士電機株式会社 | 半導体装置 |
JP2021077698A (ja) * | 2019-11-06 | 2021-05-20 | キオクシア株式会社 | 半導体パッケージ |
CN111725160A (zh) * | 2020-06-16 | 2020-09-29 | 杰群电子科技(东莞)有限公司 | 一种高功率半导体模组、封装方法及电子产品 |
CN111725159A (zh) * | 2020-06-16 | 2020-09-29 | 杰群电子科技(东莞)有限公司 | 一种高散热半导体产品、封装方法及电子产品 |
CN111725145A (zh) * | 2020-06-16 | 2020-09-29 | 杰群电子科技(东莞)有限公司 | 一种半导体封装结构、封装方法及电子产品 |
CN115885386A (zh) * | 2020-09-02 | 2023-03-31 | 三菱电机株式会社 | 半导体装置、电力变换装置以及移动体 |
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