JP5497279B2 - 薄膜トランジスタ、及び薄膜トランジスタを有する表示装置 - Google Patents
薄膜トランジスタ、及び薄膜トランジスタを有する表示装置 Download PDFInfo
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- JP5497279B2 JP5497279B2 JP2008257708A JP2008257708A JP5497279B2 JP 5497279 B2 JP5497279 B2 JP 5497279B2 JP 2008257708 A JP2008257708 A JP 2008257708A JP 2008257708 A JP2008257708 A JP 2008257708A JP 5497279 B2 JP5497279 B2 JP 5497279B2
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Images
Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/66007—Multistep manufacturing processes
- H01L29/66075—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials
- H01L29/66227—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials the devices being controllable only by the electric current supplied or the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched, e.g. three-terminal devices
- H01L29/66409—Unipolar field-effect transistors
- H01L29/66477—Unipolar field-effect transistors with an insulated gate, i.e. MISFET
- H01L29/66742—Thin film unipolar transistors
- H01L29/6675—Amorphous silicon or polysilicon transistors
- H01L29/66765—Lateral single gate single channel transistors with inverted structure, i.e. the channel layer is formed after the gate
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L28/00—Passive two-terminal components without a potential-jump or surface barrier for integrated circuits; Details thereof; Multistep manufacturing processes therefor
- H01L28/40—Capacitors
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/04—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their crystalline structure, e.g. polycrystalline, cubic or particular orientation of crystalline planes
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/786—Thin film transistors, i.e. transistors with a channel being at least partly a thin film
- H01L29/78696—Thin film transistors, i.e. transistors with a channel being at least partly a thin film characterised by the structure of the channel, e.g. multichannel, transverse or longitudinal shape, length or width, doping structure, or the overlap or alignment between the channel and the gate, the source or the drain, or the contacting structure of the channel
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/40—Electrodes ; Multistep manufacturing processes therefor
- H01L29/41—Electrodes ; Multistep manufacturing processes therefor characterised by their shape, relative sizes or dispositions
- H01L29/417—Electrodes ; Multistep manufacturing processes therefor characterised by their shape, relative sizes or dispositions carrying the current to be rectified, amplified or switched
- H01L29/41725—Source or drain electrodes for field effect devices
- H01L29/41733—Source or drain electrodes for field effect devices for thin film transistors with insulated gate
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/40—Electrodes ; Multistep manufacturing processes therefor
- H01L29/43—Electrodes ; Multistep manufacturing processes therefor characterised by the materials of which they are formed
- H01L29/49—Metal-insulator-semiconductor electrodes, e.g. gates of MOSFET
- H01L29/4908—Metal-insulator-semiconductor electrodes, e.g. gates of MOSFET for thin film semiconductor, e.g. gate of TFT
Description
ここでは、ゲート絶縁膜との界面における結晶性が高く、従来の微結晶半導体膜をチャネル形成領域に有する薄膜トランジスタと比較して、電界効果移動度及びオン電流の高い薄膜トランジスタの構造について、図1乃至図5を用いて説明する。
本実施の形態では、実施の形態1に示す薄膜トランジスタにおいて、ゲート絶縁膜の層の構造の異なる薄膜トランジスタについて、図6及び図7を用いて示す。ここでは、図1乃至図5に示すような2層のゲート絶縁膜代わりに、図6及び図7に示すように、3層のゲート絶縁膜を有する薄膜トランジスタについて示す。
本実施の形態では、上記実施の形態1に示す薄膜トランジスタの作製工程について示す。
本実施の形態では、表示装置の一形態として、実施の形態1で示す薄膜トランジスタを有する液晶表示装置について、以下に示す。ここでは、VA(Vertical Alignment)型の液晶表示装置について、図32乃至図34を用いて説明する。VA型の液晶表示装置とは、液晶パネルの液晶分子の配列を制御する方式の一種である。VA型の液晶表示装置は、電圧が印加されていないときにパネル面に対して液晶分子が垂直方向を向く方式である。本実施の形態では、特に画素(ピクセル)をいくつかの領域(サブピクセル)に分け、それぞれ別の方向に分子を倒すよう工夫されている。これをマルチドメイン化あるいはマルチドメイン設計という。以下の説明では、マルチドメイン設計が考慮された液晶表示装置について説明する。
本実施の形態では、表示装置の一形態として、実施の形態1で示す薄膜トランジスタを有する発光表示装置について、以下に示す。ここでは、発光表示装置が有する画素の構成について説明する。図35(A)に、画素の上面図の一形態を示し、図35(B)に図35(A)のA−Bに対応する画素の断面構造の一形態を示す。
次に、本発明の表示装置の一形態である表示パネルの構成について、以下に示す。
本発明により得られる表示装置等は、アクティブマトリクス型表示装置パネルに用いることができる。即ち、それらを表示部に組み込んだ電子機器全てに本発明を実施できる。
0.1%PH3(Ar希釈)の流量500sccm
(条件2)
SiH4の流量100sccm、0.5%PH3((H2)希釈)の流量170sccm
(条件3)
SiH4の流量100sccm、H2の流量153sccm、0.5%PH3/H2の流量17sccm
・条件1の試料・・・5×1016〜2×1018atoms/cm3
・条件2の試料・・・6×1016〜3×1018atoms/cm3
・条件3の試料・・・3×1016〜2×1017atoms/cm3
SiH4の流量30sccm、N2Oの流量1200sccm、0.5%PH3(H2希釈)の流量60sccm
(条件5)
SiH4の流量30sccm、N2Oの流量1200sccm、0.5%PH3(H2希釈)の流量6sccm
・条件4の試料・・・3×1016〜7×1017atoms/cm3
・条件5の試料・・・3×1016〜2×1017atoms/cm3
SiH4の流量100sccm、0.5%PH3(H2希釈)の流量170sccm
(条件7)
保護膜として窒化珪素膜、酸化窒化珪素膜、及びアモルファスシリコン膜を積層した。このときの窒化珪素膜の成膜条件を、RF電源周波数を13.56MHz、RF電源のパワーを370Wとし、シラン流量、水素流量、窒素流量、アンモニア流量をそれぞれ、10sccm、500sccm、550sccm、140sccmとし、100Paの圧力として、厚さ110nmの窒化珪素膜を反応室の内壁に成膜した。また、酸化窒化珪素膜の成膜条件を、RF電源周波数を13.56MHz、RF電源のパワーを50Wとし、成膜温度を280℃とし、シランガス流量と一酸化二窒素流量をそれぞれ30sccm、1200sccmとし、40Paの圧力として、プラズマCVD法により窒化珪素膜上に厚さ110nmの酸化窒化珪素膜を形成した。アモルファスシリコン膜の成膜条件を、RF電源周波数を13.56MHz、RF電源のパワーを120Wとし、成膜温度を280℃とし、シランガスの流量を300sccmとし、170Paの圧力としてプラズマCVD法により酸化窒化珪素膜上に厚さ200nmのアモルファスシリコン膜を形成した。
・条件6の試料・・・5×1016〜1×1017atoms/cm3
・条件7の試料・・・3×1016〜5×1016atoms/cm3
・HDTV(画素数1920×1080)1125p 11.7インチ(278.4mm×156.6mm)
・VAモード
・画素容量88fF
・ゲート信号線(シート抵抗0.3Ω/□、配線幅7μm)抵抗11.9kΩ、容量495pF
・ビデオ信号線(シート抵抗0.14Ω/□、配線幅5μm)抵抗4.4kΩ、容量126pF
・画素TFTのL/W=6μm/15μm
・ゲート信号線の駆動電圧24V
・ビデオ信号4.5V〜17.5V
Claims (6)
- ゲート電極上の、ドナーとなる不純物元素を含むゲート絶縁膜と、
前記ドナーとなる不純物元素を含むゲート絶縁膜上の、微結晶半導体膜と、
前記微結晶半導体膜上の、一対のバッファ層と、
前記一対のバッファ層上の、一導電型を付与する不純物元素が添加された一対の半導体膜と、
前記一導電型を付与する不純物元素が添加された一対の半導体膜上の、配線と、を有することを特徴とする薄膜トランジスタ。 - ゲート電極上の、ゲート絶縁膜と、
前記ゲート絶縁膜上の、ドナーとなる不純物元素を含む第1の微結晶半導体膜と、
前記ドナーとなる不純物元素を含む第1の微結晶半導体膜上の、第2の微結晶半導体膜と、
前記第2の微結晶半導体膜上の、一対のバッファ層と、
前記一対のバッファ層上の、一導電型を付与する不純物元素が添加された一対の半導体膜と、
前記一導電型を付与する不純物元素が添加された一対の半導体膜上の、配線と、を有し、
前記第2の微結晶半導体膜は、SIMSの検出限界より多くのドナーとなる不純物元素を含まないことを特徴とする薄膜トランジスタ。 - ゲート電極上の、ドナーとなる不純物元素を含むゲート絶縁膜と、
前記ドナーとなる不純物元素を含むゲート絶縁膜上の、ドナーとなる不純物元素を含む微結晶半導体膜と、
前記ドナーとなる不純物元素を含む微結晶半導体膜上の、一対のバッファ層と、
前記一対のバッファ層上の、一導電型を付与する不純物元素が添加された一対の半導体膜と、
前記一導電型を付与する不純物元素が添加された一対の半導体膜上の、配線と、を有することを特徴とする薄膜トランジスタ。 - 請求項1乃至3のいずれか一項において、
前記ドナーとなる不純物元素を含むゲート絶縁膜、前記ドナーとなる不純物元素を含む微結晶半導体膜、または前記ドナーとなる不純物元素を含む前記第1の微結晶半導体膜に含まれる前記ドナーとなる不純物元素の、二次イオン質量分析法(SIMS)により分析されるピーク濃度は、6×1015atoms/cm3以上3×1018atoms/cm3以下であることを特徴とする薄膜トランジスタ。 - 請求項1乃至4のいずれか一項において、
前記ドナーとなる不純物元素は、リン、砒素、またはアンチモンであることを特徴とする薄膜トランジスタ。 - 請求項1乃至5のいずれか一項の薄膜トランジスタの前記配線に接する画素電極を有することを特徴とする表示装置。
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Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US11183650B2 (en) | 2017-12-12 | 2021-11-23 | Samsung Display Co., Ltd. | Display substrate, method of manufacturing the same, and display device including the same |
Families Citing this family (36)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4759598B2 (ja) * | 2007-09-28 | 2011-08-31 | キヤノン株式会社 | 薄膜トランジスタ、その製造方法及びそれを用いた表示装置 |
JP5311957B2 (ja) * | 2007-10-23 | 2013-10-09 | 株式会社半導体エネルギー研究所 | 表示装置及びその作製方法 |
JP5311955B2 (ja) * | 2007-11-01 | 2013-10-09 | 株式会社半導体エネルギー研究所 | 表示装置の作製方法 |
KR101523353B1 (ko) * | 2007-12-03 | 2015-05-27 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 박막트랜지스터 및 반도체 장치 |
US8247276B2 (en) | 2009-02-20 | 2012-08-21 | Semiconductor Energy Laboratory Co., Ltd. | Thin film transistor, method for manufacturing the same, and semiconductor device |
EP2256814B1 (en) * | 2009-05-29 | 2019-01-16 | Semiconductor Energy Laboratory Co, Ltd. | Oxide semiconductor device and method for manufacturing the same |
CN105810753A (zh) | 2009-09-04 | 2016-07-27 | 株式会社半导体能源研究所 | 半导体器件及其制造方法 |
KR102157249B1 (ko) * | 2009-09-16 | 2020-09-17 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 반도체 장치 및 그 제조 방법 |
WO2011043206A1 (en) * | 2009-10-09 | 2011-04-14 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
KR101084233B1 (ko) | 2009-10-13 | 2011-11-16 | 삼성모바일디스플레이주식회사 | 박막트랜지스터 및 그 제조 방법 |
EP2494601A4 (en) * | 2009-10-30 | 2016-09-07 | Semiconductor Energy Lab | SEMICONDUCTOR COMPONENT AND MANUFACTURING METHOD THEREFOR |
KR102089200B1 (ko) | 2009-11-28 | 2020-03-13 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 반도체 장치 및 그 제조 방법 |
US8598586B2 (en) * | 2009-12-21 | 2013-12-03 | Semiconductor Energy Laboratory Co., Ltd. | Thin film transistor and manufacturing method thereof |
KR101836067B1 (ko) * | 2009-12-21 | 2018-03-08 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 박막 트랜지스터와 그 제작 방법 |
KR101588355B1 (ko) | 2009-12-23 | 2016-02-15 | 삼성디스플레이 주식회사 | 터치스크린 기판, 이의 제조 방법 및 표시 패널 |
US8476744B2 (en) * | 2009-12-28 | 2013-07-02 | Semiconductor Energy Laboratory Co., Ltd. | Thin film transistor with channel including microcrystalline and amorphous semiconductor regions |
JP5752447B2 (ja) * | 2010-03-15 | 2015-07-22 | 株式会社半導体エネルギー研究所 | 半導体装置 |
TWI541782B (zh) | 2010-07-02 | 2016-07-11 | 半導體能源研究所股份有限公司 | 液晶顯示裝置 |
JP5948025B2 (ja) | 2010-08-06 | 2016-07-06 | 株式会社半導体エネルギー研究所 | 液晶表示装置 |
JP5961391B2 (ja) * | 2011-01-26 | 2016-08-02 | 株式会社半導体エネルギー研究所 | 半導体装置の作製方法 |
JP5832780B2 (ja) * | 2011-05-24 | 2015-12-16 | 株式会社半導体エネルギー研究所 | 半導体装置の製造方法 |
CN102629555B (zh) * | 2011-10-11 | 2014-11-26 | 北京京东方光电科技有限公司 | 栅极绝缘层、tft、阵列基板、显示装置以及制备方法 |
CN102646676B (zh) * | 2011-11-03 | 2015-06-10 | 京东方科技集团股份有限公司 | 一种tft阵列基板 |
KR102088462B1 (ko) * | 2013-07-03 | 2020-05-28 | 삼성디스플레이 주식회사 | 박막 트랜지스터 표시판 및 이의 제조 방법 |
US9524849B2 (en) | 2013-07-18 | 2016-12-20 | Varian Semiconductor Equipment Associates, Inc. | Method of improving ion beam quality in an implant system |
KR102084177B1 (ko) * | 2013-11-07 | 2020-03-04 | 삼성디스플레이 주식회사 | 박막 트랜지스터 기판, 그것을 포함하는 표시 장치, 및 그것의 제조 방법 |
US9236243B2 (en) | 2014-01-09 | 2016-01-12 | Stmicroelectronics Pte Ltd | Method for making semiconductor devices including reactant treatment of residual surface portion |
CN105093816B (zh) * | 2015-09-23 | 2019-08-02 | 武汉华星光电技术有限公司 | 一种显示面板的信号线的制程方法及显示面板 |
KR102263122B1 (ko) | 2017-10-19 | 2021-06-09 | 삼성디스플레이 주식회사 | 트랜지스터 표시판 |
JP2020004861A (ja) * | 2018-06-28 | 2020-01-09 | 堺ディスプレイプロダクト株式会社 | 薄膜トランジスタ、表示装置及び薄膜トランジスタの製造方法 |
JP2020086346A (ja) * | 2018-11-30 | 2020-06-04 | セイコーエプソン株式会社 | 導光装置及び虚像表示装置 |
CN109659235B (zh) * | 2018-12-14 | 2021-12-03 | 武汉华星光电半导体显示技术有限公司 | Tft的制备方法、tft、阵列基板及显示装置 |
CN109671623B (zh) * | 2018-12-21 | 2020-11-24 | 深圳市华星光电技术有限公司 | 栅极与薄膜晶体管的制造方法 |
CN111129037B (zh) * | 2019-12-25 | 2022-09-09 | Tcl华星光电技术有限公司 | Tft阵列基板及其制作方法 |
KR20210152721A (ko) | 2020-06-09 | 2021-12-16 | 삼성전자주식회사 | 반도체 패키지 |
CN113111498B (zh) * | 2021-03-26 | 2022-11-29 | 中山大学 | 一种偏栅晶体管进行建模的方法及电路仿真方法 |
Family Cites Families (76)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5091334A (en) * | 1980-03-03 | 1992-02-25 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
JPS56122123A (en) * | 1980-03-03 | 1981-09-25 | Shunpei Yamazaki | Semiamorphous semiconductor |
JPS6098680A (ja) | 1983-11-04 | 1985-06-01 | Seiko Instr & Electronics Ltd | 電界効果型薄膜トランジスタ |
JPS60160170A (ja) | 1984-01-31 | 1985-08-21 | Seiko Instr & Electronics Ltd | 薄膜トランジスタ |
JPS6187371A (ja) | 1984-10-05 | 1986-05-02 | Hitachi Ltd | 薄膜半導体装置 |
JPS6267872A (ja) | 1985-09-20 | 1987-03-27 | Toshiba Corp | 非晶質シリコン薄膜トランジスタ |
JPS63258072A (ja) * | 1987-04-15 | 1988-10-25 | Nec Corp | 電界効果トランジスタ |
US5256509A (en) | 1989-11-20 | 1993-10-26 | Semiconductor Energy Laboratory Co., Ltd. | Image-forming member for electrophotography and manufacturing method for the same |
JP2934874B2 (ja) * | 1990-05-21 | 1999-08-16 | カシオ計算機株式会社 | 薄膜トランジスタの製造方法 |
EP0473988A1 (en) | 1990-08-29 | 1992-03-11 | International Business Machines Corporation | Method of fabricating a thin film transistor having amorphous/polycrystalline semiconductor channel region |
JP2791422B2 (ja) | 1990-12-25 | 1998-08-27 | 株式会社 半導体エネルギー研究所 | 電気光学装置およびその作製方法 |
US7115902B1 (en) | 1990-11-20 | 2006-10-03 | Semiconductor Energy Laboratory Co., Ltd. | Electro-optical device and method for manufacturing the same |
US5849601A (en) * | 1990-12-25 | 1998-12-15 | Semiconductor Energy Laboratory Co., Ltd. | Electro-optical device and method for manufacturing the same |
US7098479B1 (en) | 1990-12-25 | 2006-08-29 | Semiconductor Energy Laboratory Co., Ltd. | Electro-optical device and method for manufacturing the same |
US7576360B2 (en) | 1990-12-25 | 2009-08-18 | Semiconductor Energy Laboratory Co., Ltd. | Electro-optical device which comprises thin film transistors and method for manufacturing the same |
JP3255942B2 (ja) * | 1991-06-19 | 2002-02-12 | 株式会社半導体エネルギー研究所 | 逆スタガ薄膜トランジスタの作製方法 |
US5495121A (en) | 1991-09-30 | 1996-02-27 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
KR970002267B1 (en) * | 1991-09-30 | 1997-02-27 | Semiconductor Energy Lab Kk | Semiconductor integrated circuit device fabrication process |
EP0535979A3 (en) | 1991-10-02 | 1993-07-21 | Sharp Kabushiki Kaisha | A thin film transistor and a method for producing the same |
JPH05226656A (ja) * | 1992-02-13 | 1993-09-03 | Hitachi Ltd | 薄膜半導体装置及びその製造方法 |
US6709907B1 (en) | 1992-02-25 | 2004-03-23 | Semiconductor Energy Laboratory Co., Ltd. | Method of fabricating a thin film transistor |
JP2924441B2 (ja) | 1992-04-27 | 1999-07-26 | 日本電気株式会社 | 薄膜トランジスタ及びその製造方法 |
US6078059A (en) | 1992-07-10 | 2000-06-20 | Sharp Kabushiki Kaisha | Fabrication of a thin film transistor and production of a liquid display apparatus |
JP3429034B2 (ja) * | 1992-10-07 | 2003-07-22 | シャープ株式会社 | 半導体膜の製造方法 |
EP0592227A3 (en) | 1992-10-07 | 1995-01-11 | Sharp Kk | Manufacture of a thin film transistor and production of a liquid crystal display device. |
JPH06326312A (ja) | 1993-05-14 | 1994-11-25 | Toshiba Corp | アクティブマトリクス型表示装置 |
TW303526B (ja) * | 1994-12-27 | 1997-04-21 | Matsushita Electric Ind Co Ltd | |
JP2833545B2 (ja) * | 1995-03-06 | 1998-12-09 | 日本電気株式会社 | 半導体装置の製造方法 |
JP2661594B2 (ja) * | 1995-05-25 | 1997-10-08 | 日本電気株式会社 | 薄膜トランジスタおよびその製造方法 |
JPH10261801A (ja) * | 1997-03-19 | 1998-09-29 | Toshiba Electron Eng Corp | 薄膜トランジスタ装置及び薄膜トランジスタ装置の製造方法 |
KR100257158B1 (ko) | 1997-06-30 | 2000-05-15 | 김영환 | 박막 트랜지스터 및 그의 제조 방법 |
US6197624B1 (en) | 1997-08-29 | 2001-03-06 | Semiconductor Energy Laboratory Co., Ltd. | Method of adjusting the threshold voltage in an SOI CMOS |
JPH11177094A (ja) * | 1997-12-08 | 1999-07-02 | Advanced Display Inc | 半導体薄膜トランジスタおよび該半導体薄膜トランジスタを含む半導体薄膜トランジスタアレイ基板 |
JP4293385B2 (ja) | 1998-01-27 | 2009-07-08 | 株式会社半導体エネルギー研究所 | 光電変換装置の作製方法 |
JP2001007024A (ja) | 1999-06-18 | 2001-01-12 | Sanyo Electric Co Ltd | 多結晶シリコン膜の形成方法 |
JP2001077366A (ja) | 1999-08-20 | 2001-03-23 | Internatl Business Mach Corp <Ibm> | 薄膜トランジスタ、液晶表示装置、及び薄膜トランジスタの製造方法 |
JP3538088B2 (ja) | 1999-10-25 | 2004-06-14 | Nec液晶テクノロジー株式会社 | 薄膜トランジスタおよびその製造方法 |
JP2001217424A (ja) | 2000-02-03 | 2001-08-10 | Matsushita Electric Ind Co Ltd | 薄膜トランジスタおよびそれを用いた液晶表示装置 |
JP4118485B2 (ja) | 2000-03-13 | 2008-07-16 | 株式会社半導体エネルギー研究所 | 半導体装置の作製方法 |
JP2002246605A (ja) | 2001-02-20 | 2002-08-30 | Matsushita Electric Ind Co Ltd | 液晶表示用薄膜トランジスタの製造方法 |
KR100796795B1 (ko) * | 2001-10-22 | 2008-01-22 | 삼성전자주식회사 | 반도체 소자의 접촉부 및 그 제조 방법과 이를 포함하는표시 장치용 박막 트랜지스터 어레이 기판 및 그 제조 방법 |
EP1367659B1 (en) | 2002-05-21 | 2012-09-05 | Semiconductor Energy Laboratory Co., Ltd. | Organic field effect transistor |
JP3805750B2 (ja) * | 2003-01-21 | 2006-08-09 | 株式会社東芝 | 相補型電界効果トランジスタ及びその製造方法 |
TW577176B (en) | 2003-03-31 | 2004-02-21 | Ind Tech Res Inst | Structure of thin-film transistor, and the manufacturing method thereof |
JP4748954B2 (ja) * | 2003-07-14 | 2011-08-17 | 株式会社半導体エネルギー研究所 | 液晶表示装置 |
TWI399580B (zh) * | 2003-07-14 | 2013-06-21 | Semiconductor Energy Lab | 半導體裝置及顯示裝置 |
US7365361B2 (en) * | 2003-07-23 | 2008-04-29 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US7314785B2 (en) | 2003-10-24 | 2008-01-01 | Semiconductor Energy Laboratory Co., Ltd. | Display device and manufacturing method thereof |
JP2005167051A (ja) * | 2003-12-04 | 2005-06-23 | Sony Corp | 薄膜トランジスタおよび薄膜トランジスタの製造方法 |
US7205171B2 (en) | 2004-02-11 | 2007-04-17 | Au Optronics Corporation | Thin film transistor and manufacturing method thereof including a lightly doped channel |
US7642038B2 (en) * | 2004-03-24 | 2010-01-05 | Semiconductor Energy Laboratory Co., Ltd. | Method for forming pattern, thin film transistor, display device, method for manufacturing thereof, and television apparatus |
JP2005322845A (ja) * | 2004-05-11 | 2005-11-17 | Sekisui Chem Co Ltd | 半導体デバイスと、その製造装置、および製造方法 |
KR101009677B1 (ko) * | 2004-05-24 | 2011-01-19 | 엘지디스플레이 주식회사 | 액정표시장치 및 이의 제조방법 |
JP4397753B2 (ja) * | 2004-07-28 | 2010-01-13 | 株式会社半導体エネルギー研究所 | 半導体装置 |
JP4628040B2 (ja) | 2004-08-20 | 2011-02-09 | 株式会社半導体エネルギー研究所 | 半導体素子を備えた表示装置の製造方法 |
JP4882322B2 (ja) * | 2004-09-17 | 2012-02-22 | 日本電気株式会社 | 半導体装置、回路、これらを用いた表示装置、及びこれらの駆動方法 |
US8058652B2 (en) * | 2004-10-28 | 2011-11-15 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device used as electro-optical device having channel formation region containing first element, and source or drain region containing second element |
KR100645718B1 (ko) | 2005-04-28 | 2006-11-14 | 삼성에스디아이 주식회사 | 박막 트랜지스터 및 그 제조방법 |
JP4577114B2 (ja) | 2005-06-23 | 2010-11-10 | ソニー株式会社 | 薄膜トランジスタの製造方法および表示装置の製造方法 |
JP2007035964A (ja) | 2005-07-27 | 2007-02-08 | Sony Corp | 薄膜トランジスタとその製造方法、及び表示装置 |
US7576359B2 (en) * | 2005-08-12 | 2009-08-18 | Semiconductor Energy Laboratory Co., Ltd. | Liquid crystal display device and method for manufacturing the same |
KR100719566B1 (ko) * | 2005-10-22 | 2007-05-17 | 삼성에스디아이 주식회사 | 유기 박막 트랜지스터, 및 이를 구비한 평판 표시 장치 |
KR101277606B1 (ko) * | 2006-03-22 | 2013-06-21 | 삼성디스플레이 주식회사 | 표시 장치 및 그 제조 방법 |
CN100529866C (zh) * | 2006-04-19 | 2009-08-19 | 群康科技(深圳)有限公司 | 液晶显示器制造方法 |
KR101266273B1 (ko) * | 2006-06-30 | 2013-05-22 | 엘지디스플레이 주식회사 | 액정표시소자의 제조방법 |
JP2007049171A (ja) | 2006-08-30 | 2007-02-22 | Chi Mei Electronics Corp | 微結晶薄膜トランジスタを用いた画像表示装置 |
KR20080056493A (ko) * | 2006-12-18 | 2008-06-23 | 삼성전자주식회사 | 박막 트랜지스터 기판 및 이의 제조 방법 |
JP5331389B2 (ja) | 2007-06-15 | 2013-10-30 | 株式会社半導体エネルギー研究所 | 表示装置の作製方法 |
JP2009049384A (ja) | 2007-07-20 | 2009-03-05 | Semiconductor Energy Lab Co Ltd | 発光装置 |
US7633089B2 (en) | 2007-07-26 | 2009-12-15 | Semiconductor Energy Laboratory Co., Ltd. | Liquid crystal display device and electronic device provided with the same |
KR101446251B1 (ko) | 2007-08-07 | 2014-10-01 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 표시 장치, 이 표시 장치를 구비한 전자기기 및 그 제조 방법 |
JP5395382B2 (ja) | 2007-08-07 | 2014-01-22 | 株式会社半導体エネルギー研究所 | トランジスタの作製方法 |
US7611930B2 (en) | 2007-08-17 | 2009-11-03 | Semiconductor Energy Laboratory Co., Ltd. | Method of manufacturing display device |
JP2009071289A (ja) | 2007-08-17 | 2009-04-02 | Semiconductor Energy Lab Co Ltd | 半導体装置およびその作製方法 |
US9054206B2 (en) | 2007-08-17 | 2015-06-09 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing semiconductor device |
US8076222B2 (en) * | 2008-02-11 | 2011-12-13 | Applied Materials, Inc. | Microcrystalline silicon thin film transistor |
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Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US11183650B2 (en) | 2017-12-12 | 2021-11-23 | Samsung Display Co., Ltd. | Display substrate, method of manufacturing the same, and display device including the same |
Also Published As
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KR101564006B1 (ko) | 2015-10-27 |
KR101551294B1 (ko) | 2015-09-08 |
US20130217191A1 (en) | 2013-08-22 |
KR20140147071A (ko) | 2014-12-29 |
TWI557922B (zh) | 2016-11-11 |
TW200933893A (en) | 2009-08-01 |
KR20090035431A (ko) | 2009-04-09 |
JP2009111365A (ja) | 2009-05-21 |
US20090090915A1 (en) | 2009-04-09 |
US8945962B2 (en) | 2015-02-03 |
CN101404294A (zh) | 2009-04-08 |
CN101404294B (zh) | 2013-11-06 |
TWI470805B (zh) | 2015-01-21 |
TW201507167A (zh) | 2015-02-16 |
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