JP5236279B2 - 電流抑制層を備える絶縁ゲート・バイポーラ・トランジスタ - Google Patents
電流抑制層を備える絶縁ゲート・バイポーラ・トランジスタInfo
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- JP5236279B2 JP5236279B2 JP2007334974A JP2007334974A JP5236279B2 JP 5236279 B2 JP5236279 B2 JP 5236279B2 JP 2007334974 A JP2007334974 A JP 2007334974A JP 2007334974 A JP2007334974 A JP 2007334974A JP 5236279 B2 JP5236279 B2 JP 5236279B2
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- 230000001629 suppression Effects 0.000 title claims description 47
- 229910010271 silicon carbide Inorganic materials 0.000 claims description 33
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 claims description 30
- 239000000758 substrate Substances 0.000 claims description 26
- 238000000034 method Methods 0.000 claims description 20
- 238000010438 heat treatment Methods 0.000 description 15
- 230000000903 blocking effect Effects 0.000 description 11
- 238000002513 implantation Methods 0.000 description 10
- 238000000576 coating method Methods 0.000 description 8
- 230000008569 process Effects 0.000 description 8
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 7
- 239000011248 coating agent Substances 0.000 description 7
- 229910002804 graphite Inorganic materials 0.000 description 7
- 239000010439 graphite Substances 0.000 description 7
- 239000007943 implant Substances 0.000 description 7
- 229910052782 aluminium Inorganic materials 0.000 description 6
- 239000002019 doping agent Substances 0.000 description 6
- 238000005468 ion implantation Methods 0.000 description 6
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 5
- 239000000969 carrier Substances 0.000 description 5
- 238000004519 manufacturing process Methods 0.000 description 5
- 239000000463 material Substances 0.000 description 5
- 230000015572 biosynthetic process Effects 0.000 description 4
- 239000013078 crystal Substances 0.000 description 4
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 3
- 230000007423 decrease Effects 0.000 description 3
- 150000002500 ions Chemical class 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 230000009467 reduction Effects 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 238000013459 approach Methods 0.000 description 2
- 230000008859 change Effects 0.000 description 2
- 238000013461 design Methods 0.000 description 2
- 238000011161 development Methods 0.000 description 2
- 239000007789 gas Substances 0.000 description 2
- 230000003647 oxidation Effects 0.000 description 2
- 238000007254 oxidation reaction Methods 0.000 description 2
- 238000004151 rapid thermal annealing Methods 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 235000012239 silicon dioxide Nutrition 0.000 description 2
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 1
- 241000408659 Darpa Species 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- 238000009825 accumulation Methods 0.000 description 1
- 230000004913 activation Effects 0.000 description 1
- -1 aluminum ions Chemical class 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 238000004380 ashing Methods 0.000 description 1
- 229910052796 boron Inorganic materials 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000006731 degradation reaction Methods 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 238000000407 epitaxy Methods 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 238000001802 infusion Methods 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
- 229920005591 polysilicon Polymers 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 230000006798 recombination Effects 0.000 description 1
- 238000005215 recombination Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 238000004088 simulation Methods 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
- 238000009279 wet oxidation reaction Methods 0.000 description 1
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Description
電流抑制層54は、約1×1015cm-3から約1×1017cm-3の範囲のドーピング濃度を有することができ、特定の実施形態では、約1×1016cm-3の濃度でアルミニウムをドープすることができる。それゆえ、電流抑制層54は、JFET領域34にイオン注入を行うことなく、n+井戸18の近傍にJFET領域34を提供することができる。n+井戸18、p+エミッタ領域20およびn+電極領域22は、例えば上述した注入条件を用いて電流抑制層54内にイオン注入を行うことによって形成するすることができる。いくつかの実施形態では、電流抑制層54は約1μmの厚さを有することができる。
Claims (17)
- 絶縁ゲート・バイポーラ・トランジスタであって、
第1の伝導型を有する基板と、
前記基板上に存在し、前記第1の伝導型と反対の第2の伝導型を有するドリフト層と、
前記ドリフト層上の電流抑制層であって、前記第2の伝導型を有し、前記ドリフト層のドーピング濃度よりも大きな、1×1015cm−3から1×1017cm−3の範囲のドーピング濃度を有する電流抑制層と、
前記電流抑制層内に存在し、前記第1の伝導型を有する井戸領域であって、前記電流抑制層の厚さよりも小さな接合深さを有し、前記電流抑制層は、前記井戸領域の下に横方向に延在する井戸領域と、
前記井戸領域内に存在し、前記第2の伝導型を有するエミッタ領域と、
前記電流抑制層上および前記井戸領域上のゲート酸化膜と、
前記ゲート酸化膜層上のゲートと、
前記エミッタ領域上のエミッタ電極と
を備えることを特徴とする絶縁ゲート・バイポーラ・トランジスタ。 - 前記電流抑制層は、エピタキシャル層を含むことを特徴とする請求項1に記載の絶縁ゲート・バイポーラ・トランジスタ。
- 前記基板は、オフアクシスn型炭化珪素基板を含み、
前記ドリフト層および前記電流抑制層は、p型炭化珪素エピタキシャル層を含むことを特徴とする請求項2に記載の絶縁ゲート・バイポーラ・トランジスタ。 - 前記電流抑制層は、1μmの厚さを有することを特徴とする請求項1に記載の絶縁ゲート・バイポーラ・トランジスタ。
- 前記電流抑制層は、1×1016cm−3のドーピング濃度を有することを特徴とする請求項1に記載の絶縁ゲート・バイポーラ・トランジスタ。
- 前記ドリフト層は、2×1014cm−3から6×1014cm−3の範囲のドーピング濃度を有し、100μmから120μmの範囲の厚さを有することを特徴とする請求項1に記載の絶縁ゲート・バイポーラ・トランジスタ。
- 前記第1の伝導型は、n型を含み、前記第2の伝導型は、p型を含むことを特徴とする請求項1に記載の絶縁ゲート・バイポーラ・トランジスタ。
- 前記第1の伝導型は、p型を含み、前記第2の伝導型は、n型を含むことを特徴とする請求項1に記載の絶縁ゲート・バイポーラ・トランジスタ。
- 前記基板とドリフト層との間のバッファ層であって、前記第2の伝導型を有するバッファ層をさらに備えることを特徴とする請求項1に記載の絶縁ゲート・バイポーラ・トランジスタ。
- 前記井戸領域は、0.5μmの接合深さを有することを特徴とする請求項1に記載の絶縁ゲート・バイポーラ・トランジスタ。
- 絶縁ゲート・バイポーラ・トランジスタを形成する方法であって、
第1の伝導型を有する基板を設けるステップと、
前記基板上にドリフト層を形成するステップであって、前記ドリフト層は、前記第1の伝導型と反対の第2の伝導型を有するステップと、
前記ドリフト層上に電流抑制層を形成するステップであって、前記電流抑制層は、前記第2の伝導型を有し、前記ドリフト層のドーピング濃度よりも大きな、1×1015cm−3から1×1017cm−3の範囲のドーピング濃度を有するステップと、
前記電流抑制層内に井戸領域を形成するステップであって、前記井戸領域は、前記第1の伝導型を有するステップと、
前記井戸領域内にエミッタ領域を形成するステップであって、前記エミッタ領域は、前記第2の伝導型を有するステップと、
前記電流抑制層上および前記井戸領域上にゲート酸化膜を形成するステップと、
前記ゲート酸化膜層上にゲートを形成するステップと、
前記エミッタ領域上にエミッタ電極を形成するステップと
を含むことを特徴とする絶縁ゲート・バイポーラ・トランジスタを形成する方法。 - 前記電流抑制層を形成するステップは、前記ドリフト層上にエピタキシャル層を成長するステップを含むことを特徴とする請求項11に記載の方法。
- 前記基板は、オフアクシスn型炭化珪素基板を含み、
前記ドリフト層を形成するステップは、前記基板上にp型炭化珪素エピタキシャル層を形成するステップを含み、
前記電流抑制層を形成するステップは、前記ドリフト層上にp型炭化珪素エピタキシャル層を形成するステップを含むことを特徴とする請求項12に記載の方法。 - 前記電流抑制層は、1μmの厚さを有するように形成されることを特徴とする請求項11に記載の方法。
- 前記電流抑制層は、1×1016cm−3のドーピング濃度を有するように形成されることを特徴とする請求項11に記載の方法。
- 前記井戸領域を形成するステップは、前記井戸領域が、前記電流抑制層の厚さよりも小さい接合深さを有するように形成されることを含むことを特徴とする請求項11に記載の方法。
- 絶縁ゲート・バイポーラ・トランジスタであって、
n型炭化珪素基板と、
前記n型炭化珪素基板上のp型炭化珪素ドリフト層と、
前記p型炭化珪素ドリフト層上のp型エピタキシャル炭化珪素電流抑制層であって、前記p型炭化珪素ドリフト層のドーピング濃度よりも大きな、1×1015cm−3から1×1017cm−3の範囲のドーピング濃度を有するp型エピタキシャル炭化珪素電流抑制層と、
前記エピタキシャル電流抑制層内のn+井戸領域であって、前記エピタキシャル電流抑制層の厚さよりも小さい接合深さを有するn+井戸領域と、
前記n+井戸領域内のp+エミッタ領域と、
前記電流抑制層上および前記井戸領域上のゲート酸化膜と、
前記ゲート酸化膜層上のゲートと、
前記エミッタ領域上のエミッタ電極と
を備えることを特徴とする絶縁ゲート・バイポーラ・トランジスタ。
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US8432012B2 (en) | 2006-08-01 | 2013-04-30 | Cree, Inc. | Semiconductor devices including schottky diodes having overlapping doped regions and methods of fabricating same |
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JP5645404B2 (ja) | 2006-08-17 | 2014-12-24 | クリー インコーポレイテッドCree Inc. | 高電力絶縁ゲート・バイポーラ・トランジスタ |
US8835987B2 (en) | 2007-02-27 | 2014-09-16 | Cree, Inc. | Insulated gate bipolar transistors including current suppressing layers |
US7687825B2 (en) * | 2007-09-18 | 2010-03-30 | Cree, Inc. | Insulated gate bipolar conduction transistors (IBCTS) and related methods of fabrication |
US8232558B2 (en) | 2008-05-21 | 2012-07-31 | Cree, Inc. | Junction barrier Schottky diodes with current surge capability |
US8629509B2 (en) | 2009-06-02 | 2014-01-14 | Cree, Inc. | High voltage insulated gate bipolar transistors with minority carrier diverter |
US8193848B2 (en) | 2009-06-02 | 2012-06-05 | Cree, Inc. | Power switching devices having controllable surge current capabilities |
US8541787B2 (en) | 2009-07-15 | 2013-09-24 | Cree, Inc. | High breakdown voltage wide band-gap MOS-gated bipolar junction transistors with avalanche capability |
US8354690B2 (en) | 2009-08-31 | 2013-01-15 | Cree, Inc. | Solid-state pinch off thyristor circuits |
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2007
- 2007-02-27 US US11/711,383 patent/US8835987B2/en active Active
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US9064840B2 (en) | 2015-06-23 |
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