JP4910385B2 - 垂直搬送装置 - Google Patents
垂直搬送装置 Download PDFInfo
- Publication number
- JP4910385B2 JP4910385B2 JP2005362757A JP2005362757A JP4910385B2 JP 4910385 B2 JP4910385 B2 JP 4910385B2 JP 2005362757 A JP2005362757 A JP 2005362757A JP 2005362757 A JP2005362757 A JP 2005362757A JP 4910385 B2 JP4910385 B2 JP 4910385B2
- Authority
- JP
- Japan
- Prior art keywords
- transport
- conveyor
- vertical
- floor
- track
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Images
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
- H10P72/30—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations
- H10P72/32—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations between different workstations
- H10P72/3202—Mechanical details, e.g. rollers or belts
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
- B65G47/52—Devices for transferring articles or materials between conveyors i.e. discharging or feeding devices
- B65G47/53—Devices for transferring articles or materials between conveyors i.e. discharging or feeding devices between conveyors which cross one another
- B65G47/54—Devices for transferring articles or materials between conveyors i.e. discharging or feeding devices between conveyors which cross one another at least one of which is a roller-way
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
- B65G47/52—Devices for transferring articles or materials between conveyors i.e. discharging or feeding devices
- B65G47/64—Switching conveyors
- B65G47/641—Switching conveyors by a linear displacement of the switching conveyor
- B65G47/643—Switching conveyors by a linear displacement of the switching conveyor in a vertical plane
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
- H10P72/30—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations
- H10P72/32—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations between different workstations
- H10P72/3208—Changing the direction of the conveying path
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
- H10P72/30—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations
- H10P72/32—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations between different workstations
- H10P72/3218—Conveying cassettes, containers or carriers
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
- H10P72/30—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations
- H10P72/34—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
- H10P72/3404—Storage means
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S414/00—Material or article handling
- Y10S414/135—Associated with semiconductor wafer handling
- Y10S414/14—Wafer cassette transporting
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Intermediate Stations On Conveyors (AREA)
- Relays Between Conveyors (AREA)
Description
3 垂直搬送コントローラ(垂直搬送制御装置)
4 昇降コントローラ
5 昇降コンベア(搬送方向設定装置)
7 ターンテーブルコントローラ
8 FOUP(被搬送物)
10−1〜10−3 コンベアレール(搬送軌道)
11−1〜11−3 コンベアレール(搬送軌道)
12−1〜12−2 コンベアレール(搬送軌道)
13 コンベアレール(搬送軌道)
17 ターンテーブル(回転装置)
18 ローラコンベア(搬送コンベア)
20 ケーブルベア(昇降装置)
20a ケーブル(昇降軌道)
20b 結合部材(支持部材)
Claims (4)
- 複数階に敷設された複数の搬送軌道を接続し、複数階を貫き外壁で区切られた昇降空間内で被搬送物を垂直方向に搬送する垂直搬送装置であって、
前記複数階の各階に設けられて、各階の前記搬送軌道を駆動制御する搬送軌道制御装置と、
前記搬送軌道のいずれかから搬送される被搬送物を載置すると共に当該被搬送物を前記搬送軌道のいずれかに搬送することが可能な搬送コンベアと、前記搬送軌道の搬送方向に合わせて当該搬送コンベアを旋回させる回転装置と、を備え、前記昇降空間内を昇降する搬送方向設定装置と、
前記搬送軌道が敷設される複数階にまたがって垂直方向に設置される昇降軌道と、前記搬送方向設定装置を前記昇降軌道に支持させる支持部材と、から構成され、前記昇降軌道又は前記支持部材のいずれか一方を駆動することにより、前記複数階の搬送軌道間で、前記搬送方向設定装置を垂直方向に昇降させる昇降装置と、
被搬送物に対する搬送指令に基づいて、前記回転装置の旋回制御、前記搬送コンベアの駆動制御及び前記昇降装置の昇降制御を行うと共に、前記搬送方向設定装置の現在の階が目標の階であるかを判断し、目標の階に到着したと判断した場合、前記搬送軌道制御装置に対して駆動指令を送信する垂直搬送制御装置と、
を備えることを特徴とする垂直搬送装置。 - 前記垂直搬送制御装置が、
被搬送物を荷受けする際に、前記搬送方向設定装置を荷受けする搬送コンベアが敷設される階に昇降するよう前記昇降装置を制御すると同時に前記搬送コンベアを荷受けする前記搬送軌道の搬送方向と一致するよう前記回転装置を制御し、
被搬送物を荷渡しする際に、前記搬送方向設定装置を荷渡しする搬送コンベアが敷設される階に昇降するよう前記昇降装置を制御すると同時に前記搬送コンベアを荷渡しする前記搬送軌道の搬送方向と一致するよう前記回転装置を制御することを特徴とする請求項1に記載の垂直搬送装置。 - 前記昇降軌道が、ケーブルであり、
前記支持部材が、前記ケーブルに結合された結合部材であり、
前記結合部材を介して前記ケーブルに支持された搬送方向設定装置が、前記ケーブルの垂直方向への往復循環により昇降されることを特徴とする請求項1または2に記載の垂直搬送装置。 - 前記搬送軌道が、複数階からなる製造工場に敷設されたものであり、
前記搬送軌道及び前記搬送コンベアが、ローラコンベアから構成されることを特徴とする請求項1〜3のいずれか一項に記載の垂直搬送装置。
Priority Applications (6)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2005362757A JP4910385B2 (ja) | 2005-12-16 | 2005-12-16 | 垂直搬送装置 |
| KR1020087014601A KR101172565B1 (ko) | 2005-12-16 | 2006-12-14 | 수직 반송 장치 |
| US12/097,428 US7871231B2 (en) | 2005-12-16 | 2006-12-14 | Vertical carrying apparatus |
| CN200680047203XA CN101331074B (zh) | 2005-12-16 | 2006-12-14 | 垂直搬运装置 |
| PCT/JP2006/324978 WO2007069701A1 (ja) | 2005-12-16 | 2006-12-14 | 垂直搬送装置 |
| TW095147035A TW200734257A (en) | 2005-12-16 | 2006-12-15 | Vertical carrying device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2005362757A JP4910385B2 (ja) | 2005-12-16 | 2005-12-16 | 垂直搬送装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2007161460A JP2007161460A (ja) | 2007-06-28 |
| JP4910385B2 true JP4910385B2 (ja) | 2012-04-04 |
Family
ID=38163003
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2005362757A Expired - Fee Related JP4910385B2 (ja) | 2005-12-16 | 2005-12-16 | 垂直搬送装置 |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US7871231B2 (ja) |
| JP (1) | JP4910385B2 (ja) |
| KR (1) | KR101172565B1 (ja) |
| CN (1) | CN101331074B (ja) |
| TW (1) | TW200734257A (ja) |
| WO (1) | WO2007069701A1 (ja) |
Families Citing this family (43)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009120310A (ja) * | 2007-11-14 | 2009-06-04 | Murata Mach Ltd | ターンテーブル及びターンテーブル上の物品の検出方法 |
| US8977387B2 (en) * | 2009-10-29 | 2015-03-10 | Taiwan Semiconductor Manufacturing Company, Ltd. | System and method for overhead cross-system transportation |
| JP2011225338A (ja) * | 2010-04-20 | 2011-11-10 | Taesung Engineering Corp | 4方向物流リフター |
| JP5674041B2 (ja) * | 2011-08-11 | 2015-02-18 | 株式会社ダイフク | 物品搬送設備 |
| JP5826599B2 (ja) * | 2011-11-04 | 2015-12-02 | ヤマハ発動機株式会社 | リニアモータおよびリニア搬送装置 |
| CN103204383B (zh) * | 2012-01-17 | 2015-09-09 | 武汉海澜物流设备有限公司 | 卧式自动循环工装板垂直输送机输送片烟包的方法 |
| CN103287771B (zh) * | 2012-02-23 | 2015-09-09 | 谢刚 | 卧式自动循环工装板垂直输送机在烟叶楼库的存储方法 |
| CN102689787B (zh) * | 2012-06-08 | 2014-06-11 | 南通明兴科技开发有限公司 | 一种换向移载输送装置和输送系统 |
| KR101427323B1 (ko) * | 2013-03-19 | 2014-08-06 | (주)함코 | 타이어 휠 보호용 패드 공급장치 |
| CN103145068B (zh) * | 2013-03-19 | 2015-07-08 | 遵义火焰山电器有限公司 | 一种载货升降机构 |
| CN103420118B (zh) * | 2013-08-28 | 2015-09-09 | 苏州卫捷医药科技有限公司 | 医用垂直分拣系统 |
| CN103538920B (zh) * | 2013-10-17 | 2015-08-05 | 济南拓展输送设备有限公司 | 一种双层旋转升降机 |
| JP6314713B2 (ja) * | 2014-07-14 | 2018-04-25 | 株式会社ダイフク | 階間搬送設備 |
| CN104150207A (zh) * | 2014-08-25 | 2014-11-19 | 长沙开元仪器股份有限公司 | 输送设备及其输送转向装置 |
| CN104150185A (zh) * | 2014-08-25 | 2014-11-19 | 长沙开元仪器股份有限公司 | 一种输送设备 |
| US10486940B2 (en) * | 2015-08-25 | 2019-11-26 | Otis Elevator Company | Alignment system for an elevator car |
| TWI557841B (zh) * | 2016-02-01 | 2016-11-11 | 亞智科技股份有限公司 | 輸送處理裝置與輸送處理方法 |
| DE102016211997A1 (de) * | 2016-07-01 | 2018-01-04 | Thyssenkrupp Ag | Aufzugsanlage |
| US9850653B1 (en) | 2016-07-06 | 2017-12-26 | Par Systems, Inc. | Modular elevator shaft assembly and method for making the same |
| CN106115212A (zh) * | 2016-08-24 | 2016-11-16 | 河北羿珩科技股份有限公司 | 多层立体式太阳能组件自动化传输系统 |
| CN107913853A (zh) * | 2016-11-16 | 2018-04-17 | 揭阳市腾晟科技咨询有限公司 | 物流智能分拣装置 |
| WO2018195851A1 (zh) * | 2017-04-27 | 2018-11-01 | 刘卓鹏 | 用于楼宇的货物运输系统和方法 |
| JP6822562B2 (ja) * | 2017-06-06 | 2021-01-27 | 村田機械株式会社 | 階間搬送システム及び階間搬送方法 |
| US10597237B2 (en) | 2017-10-31 | 2020-03-24 | Itoh Denki Co., Ltd. | Lifting and lowering apparatus |
| CN109956276A (zh) * | 2017-12-22 | 2019-07-02 | 江苏中天华宇智能科技有限公司 | 运输装置 |
| CN108202964B (zh) * | 2017-12-29 | 2020-09-04 | 苏州谷夫道自动化科技有限公司 | 工件移送系统 |
| CN108814025B (zh) * | 2018-06-06 | 2023-11-24 | 泉州市一扬文化用品有限公司 | 一种物品存放装置及其使用方法 |
| JPWO2020049876A1 (ja) * | 2018-09-05 | 2021-08-12 | 村田機械株式会社 | 走行車システム |
| CN110668127B (zh) * | 2019-09-25 | 2021-04-02 | 义乌市义心科技有限责任公司 | 一种零件输送用方向调整设备 |
| CN110980233A (zh) * | 2019-12-30 | 2020-04-10 | 安徽安鑫货叉有限公司 | 一种用于型材转运的旋转机构 |
| CN111180376B (zh) * | 2020-01-21 | 2024-07-23 | 拉普拉斯新能源科技股份有限公司 | 一种搬舟装置 |
| CN111792299B (zh) * | 2020-06-16 | 2025-10-28 | 上海楼哒物流技术中心 | 一种医院用物流系统 |
| EP3936407A1 (en) * | 2020-07-10 | 2022-01-12 | ATOTECH Deutschland GmbH | Processing apparatus, system and method for conveying therethrough parts to be treated and device for interconnecting a first line and a second line of the system |
| CN112537594A (zh) * | 2020-11-30 | 2021-03-23 | 珠海格力智能装备有限公司 | 输送设备 |
| JP7255615B2 (ja) * | 2021-01-29 | 2023-04-11 | 村田機械株式会社 | コンベアシステム |
| US12463072B2 (en) * | 2021-06-17 | 2025-11-04 | Taiwan Semiconductor Manufacturing Company, Ltd. | Hash overhead hoist transport rail system and methods of operating the same |
| KR102907882B1 (ko) * | 2021-10-25 | 2026-01-02 | 삼성전자주식회사 | 기판 이송 시스템 |
| KR102669835B1 (ko) | 2021-12-20 | 2024-05-28 | 주식회사 에스에프에이 | 쐐기형 추락방지장치를 구비하는 수직 반송 장치 |
| CN115535499A (zh) * | 2022-07-08 | 2022-12-30 | 南京维拓科技股份有限公司 | 双料车单货梯往复式升降机系统及其运送方法 |
| US20240071797A1 (en) * | 2022-08-26 | 2024-02-29 | Taiwan Semiconductor Manufacturing Company, Ltd. | Turntable for wafer transport system |
| CN117842661A (zh) * | 2022-12-16 | 2024-04-09 | 苏州儒玛特智能装备科技有限公司 | 一种连续式提升机 |
| CN118373143B (zh) * | 2024-06-26 | 2024-08-20 | 江苏环亚医用科技集团股份有限公司 | 一种应用于智慧医院垂直物送系统的上、下料转运机构 |
| CN119284508A (zh) * | 2024-12-13 | 2025-01-10 | 安徽宇锋智能科技有限公司 | 一种用于叉车搬运的升降式托盘输送机 |
Family Cites Families (25)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3075655A (en) * | 1963-01-29 | bryant | ||
| US3968888A (en) * | 1968-10-21 | 1976-07-13 | The Lummus Company | Warehouse sysem with parallel conductor positional control means for a stacker crane |
| US3792785A (en) * | 1973-01-26 | 1974-02-19 | Fmc Corp | Automated storage and freight terminal apparatus |
| US4484289A (en) * | 1982-01-29 | 1984-11-20 | Rapistan Division Of Lear Siegler, Inc. | Tote director |
| US4768914A (en) * | 1986-01-13 | 1988-09-06 | Peter Sing | Storage system |
| JPS6337023A (ja) * | 1986-07-31 | 1988-02-17 | Matsushita Electric Ind Co Ltd | 昇降装置 |
| US4946006A (en) * | 1988-04-13 | 1990-08-07 | T. K. M. Engineering Kabushiki Kaisha | Elevator apparatus with a sectored vertical shaft and a turntable for transfering elevator cages between the individual sectors |
| US5044859A (en) * | 1989-10-19 | 1991-09-03 | Harnischfeger Engineers, Inc. | Control system for a storage and retrieval machine |
| JPH0717333B2 (ja) * | 1990-08-07 | 1995-03-01 | 鹿島建設株式会社 | リニアモータ駆動エレベータ |
| KR970003868B1 (ko) * | 1991-10-14 | 1997-03-22 | 가부시끼가이샤 다이후꾸 | 입체주차설비 |
| US5284252A (en) * | 1991-11-13 | 1994-02-08 | United Parcel Service Of America, Inc. | Automatic rotary sorter |
| JPH05262407A (ja) | 1992-03-18 | 1993-10-12 | Japan Steel Works Ltd:The | 自動倉庫におけるパレット供給装置及びその方法 |
| JPH06239416A (ja) | 1993-02-10 | 1994-08-30 | Mitsubishi Heavy Ind Ltd | パレットの搬送装置 |
| CN2255965Y (zh) * | 1995-09-04 | 1997-06-11 | 财团法人工业技术研究院 | 输送机移载装置 |
| JP3298388B2 (ja) * | 1995-11-24 | 2002-07-02 | 株式会社ダイフク | 車の移送設備 |
| AU6996498A (en) * | 1997-06-06 | 1998-12-10 | Park Plus Incorporated | Vehicle handling system |
| ES2153751B1 (es) * | 1998-09-21 | 2001-08-01 | Gomez Gines Sanchez | Almacen automatico. |
| US6516239B1 (en) * | 1999-08-03 | 2003-02-04 | Honda Of Canada Incorporated | Assembly line control system |
| JP2001187631A (ja) * | 1999-12-28 | 2001-07-10 | Murata Mach Ltd | 物品移載装置 |
| KR100351175B1 (ko) * | 2000-03-15 | 2002-09-05 | 주식회사 이성엔지니어링 | 수직 반송장치 |
| JP2002167032A (ja) | 2000-11-30 | 2002-06-11 | Murata Mach Ltd | 昇降移載装置及び昇降移載方法 |
| US6854583B1 (en) * | 2001-02-06 | 2005-02-15 | Middlesex General Industries, Inc. | Conveyorized storage and transportation system |
| TWI254695B (en) * | 2002-08-29 | 2006-05-11 | Murata Machinery Ltd | Carrying apparatus |
| US7591630B2 (en) * | 2003-08-29 | 2009-09-22 | Casepick Systems, Llc | Materials-handling system using autonomous transfer and transport vehicles |
| JP2005325606A (ja) * | 2004-05-14 | 2005-11-24 | Toshihiro Abe | 荷物格納装置 |
-
2005
- 2005-12-16 JP JP2005362757A patent/JP4910385B2/ja not_active Expired - Fee Related
-
2006
- 2006-12-14 CN CN200680047203XA patent/CN101331074B/zh not_active Expired - Fee Related
- 2006-12-14 KR KR1020087014601A patent/KR101172565B1/ko not_active Expired - Fee Related
- 2006-12-14 WO PCT/JP2006/324978 patent/WO2007069701A1/ja not_active Ceased
- 2006-12-14 US US12/097,428 patent/US7871231B2/en not_active Expired - Fee Related
- 2006-12-15 TW TW095147035A patent/TW200734257A/zh not_active IP Right Cessation
Also Published As
| Publication number | Publication date |
|---|---|
| US20090288931A1 (en) | 2009-11-26 |
| KR20080077372A (ko) | 2008-08-22 |
| US7871231B2 (en) | 2011-01-18 |
| TW200734257A (en) | 2007-09-16 |
| TWI369327B (ja) | 2012-08-01 |
| CN101331074A (zh) | 2008-12-24 |
| JP2007161460A (ja) | 2007-06-28 |
| CN101331074B (zh) | 2011-12-07 |
| KR101172565B1 (ko) | 2012-08-08 |
| WO2007069701A1 (ja) | 2007-06-21 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP4910385B2 (ja) | 垂直搬送装置 | |
| CN102530553B (zh) | 搬送系统以及搬送方法 | |
| CN102807097B (zh) | 物品运送设备 | |
| CN111891615A (zh) | 转运装置、机器人、分拣系统及分拣方法 | |
| TWI641549B (zh) | Carrier handling system and handling method | |
| JP2007137599A (ja) | ストッカ | |
| JP2007217079A (ja) | ターンテーブル | |
| CN101181954A (zh) | 物品收纳装置 | |
| JP5401842B2 (ja) | 搬送システム | |
| JP2023133357A (ja) | 搬送車 | |
| CN108290687B (zh) | 保管装置以及输送系统 | |
| JP4690414B2 (ja) | ワーク搬入出システム及び搬送装置 | |
| JP4126559B2 (ja) | 天井走行車システム | |
| WO2022201904A1 (ja) | 搬送車(transport vehicle) | |
| JP4200387B2 (ja) | 搬送システム | |
| JP4314521B2 (ja) | 物品搬送装置 | |
| JP2009184422A (ja) | 無人搬送台車 | |
| JP7400769B2 (ja) | 移載装置 | |
| CN118692963A (zh) | 基板传送装置和基板传送方法 | |
| JP2000255760A (ja) | 昇降機用搬出入装置及びパレット | |
| JP2762251B2 (ja) | 昇降機用搬出入装置及びパレット | |
| CN102009843A (zh) | 装卸机及输送车及装置之间的装卸方法 | |
| KR20100001557A (ko) | 기판 이송장치 | |
| JP5224199B2 (ja) | コンベヤ搬送システム間での移載装置と移載方法 | |
| JP2012086955A (ja) | 物品搬送装置 |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20080624 |
|
| A711 | Notification of change in applicant |
Free format text: JAPANESE INTERMEDIATE CODE: A711 Effective date: 20091023 |
|
| A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A821 Effective date: 20091117 |
|
| RD02 | Notification of acceptance of power of attorney |
Free format text: JAPANESE INTERMEDIATE CODE: A7422 Effective date: 20091117 |
|
| A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20100114 |
|
| A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20110802 |
|
| A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20110929 |
|
| TRDD | Decision of grant or rejection written | ||
| A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20111220 |
|
| A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 |
|
| A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20120102 |
|
| R150 | Certificate of patent or registration of utility model |
Ref document number: 4910385 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20150127 Year of fee payment: 3 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20150127 Year of fee payment: 3 |
|
| S111 | Request for change of ownership or part of ownership |
Free format text: JAPANESE INTERMEDIATE CODE: R313111 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20150127 Year of fee payment: 3 |
|
| R350 | Written notification of registration of transfer |
Free format text: JAPANESE INTERMEDIATE CODE: R350 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| LAPS | Cancellation because of no payment of annual fees |