TW200734257A - Vertical carrying device - Google Patents

Vertical carrying device

Info

Publication number
TW200734257A
TW200734257A TW095147035A TW95147035A TW200734257A TW 200734257 A TW200734257 A TW 200734257A TW 095147035 A TW095147035 A TW 095147035A TW 95147035 A TW95147035 A TW 95147035A TW 200734257 A TW200734257 A TW 200734257A
Authority
TW
Taiwan
Prior art keywords
conveyor
turntable
lifting
roller conveyor
carrying device
Prior art date
Application number
TW095147035A
Other languages
English (en)
Other versions
TWI369327B (zh
Inventor
Munekuni Oshima
Original Assignee
Asyst Shinko Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Asyst Shinko Inc filed Critical Asyst Shinko Inc
Publication of TW200734257A publication Critical patent/TW200734257A/zh
Application granted granted Critical
Publication of TWI369327B publication Critical patent/TWI369327B/zh

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
    • B65G47/52—Devices for transferring articles or materials between conveyors i.e. discharging or feeding devices
    • B65G47/53—Devices for transferring articles or materials between conveyors i.e. discharging or feeding devices between conveyors which cross one another
    • B65G47/54—Devices for transferring articles or materials between conveyors i.e. discharging or feeding devices between conveyors which cross one another at least one of which is a roller-way
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
    • B65G47/52—Devices for transferring articles or materials between conveyors i.e. discharging or feeding devices
    • B65G47/64—Switching conveyors
    • B65G47/641—Switching conveyors by a linear displacement of the switching conveyor
    • B65G47/643—Switching conveyors by a linear displacement of the switching conveyor in a vertical plane
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67706—Mechanical details, e.g. roller, belt
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67715—Changing the direction of the conveying path
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/6773—Conveying cassettes, containers or carriers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H01L21/67769—Storage means
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S414/00—Material or article handling
    • Y10S414/135—Associated with semiconductor wafer handling
    • Y10S414/14—Wafer cassette transporting
TW095147035A 2005-12-16 2006-12-15 Vertical carrying device TW200734257A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005362757A JP4910385B2 (ja) 2005-12-16 2005-12-16 垂直搬送装置

Publications (2)

Publication Number Publication Date
TW200734257A true TW200734257A (en) 2007-09-16
TWI369327B TWI369327B (zh) 2012-08-01

Family

ID=38163003

Family Applications (1)

Application Number Title Priority Date Filing Date
TW095147035A TW200734257A (en) 2005-12-16 2006-12-15 Vertical carrying device

Country Status (6)

Country Link
US (1) US7871231B2 (zh)
JP (1) JP4910385B2 (zh)
KR (1) KR101172565B1 (zh)
CN (1) CN101331074B (zh)
TW (1) TW200734257A (zh)
WO (1) WO2007069701A1 (zh)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI557841B (zh) * 2016-02-01 2016-11-11 亞智科技股份有限公司 輸送處理裝置與輸送處理方法
TWI602383B (zh) * 2011-11-04 2017-10-11 Yamaha Motor Co Ltd Linear motors and linear conveyors

Families Citing this family (31)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009120310A (ja) * 2007-11-14 2009-06-04 Murata Mach Ltd ターンテーブル及びターンテーブル上の物品の検出方法
US8977387B2 (en) 2009-10-29 2015-03-10 Taiwan Semiconductor Manufacturing Company, Ltd. System and method for overhead cross-system transportation
JP2011225338A (ja) * 2010-04-20 2011-11-10 Taesung Engineering Corp ４方向物流リフター
JP5674041B2 (ja) * 2011-08-11 2015-02-18 株式会社ダイフク 物品搬送設備
CN103204383B (zh) * 2012-01-17 2015-09-09 武汉海澜物流设备有限公司 卧式自动循环工装板垂直输送机输送片烟包的方法
CN103287771B (zh) * 2012-02-23 2015-09-09 谢刚 卧式自动循环工装板垂直输送机在烟叶楼库的存储方法
CN102689787B (zh) * 2012-06-08 2014-06-11 南通明兴科技开发有限公司 一种换向移载输送装置和输送系统
CN103145068B (zh) * 2013-03-19 2015-07-08 遵义火焰山电器有限公司 一种载货升降机构
KR101427323B1 (ko) * 2013-03-19 2014-08-06 (주)함코 타이어 휠 보호용 패드 공급장치
CN103420118B (zh) * 2013-08-28 2015-09-09 苏州卫捷医药科技有限公司 医用垂直分拣系统
CN103538920B (zh) * 2013-10-17 2015-08-05 济南拓展输送设备有限公司 一种双层旋转升降机
JP6314713B2 (ja) * 2014-07-14 2018-04-25 株式会社ダイフク 階間搬送設備
CN104150207A (zh) * 2014-08-25 2014-11-19 长沙开元仪器股份有限公司 输送设备及其输送转向装置
CN104150185A (zh) * 2014-08-25 2014-11-19 长沙开元仪器股份有限公司 一种输送设备
US10486940B2 (en) * 2015-08-25 2019-11-26 Otis Elevator Company Alignment system for an elevator car
DE102016211997A1 (de) * 2016-07-01 2018-01-04 Thyssenkrupp Ag Aufzugsanlage
US9850653B1 (en) 2016-07-06 2017-12-26 Par Systems, Inc. Modular elevator shaft assembly and method for making the same
CN106115212A (zh) * 2016-08-24 2016-11-16 河北羿珩科技股份有限公司 多层立体式太阳能组件自动化传输系统
CN107913853A (zh) * 2016-11-16 2018-04-17 揭阳市腾晟科技咨询有限公司 物流智能分拣装置
WO2018195851A1 (zh) * 2017-04-27 2018-11-01 刘卓鹏 用于楼宇的货物运输系统和方法
WO2018225435A1 (ja) * 2017-06-06 2018-12-13 村田機械株式会社 階間搬送システム及び階間搬送方法
GB2568803B (en) * 2017-10-31 2022-10-19 Itoh Denki Co Ltd Lifting and lowering apparatus
CN109956276A (zh) * 2017-12-22 2019-07-02 江苏中天华宇智能科技有限公司 运输装置
CN108202964B (zh) * 2017-12-29 2020-09-04 苏州谷夫道自动化科技有限公司 工件移送系统
CN108814025B (zh) * 2018-06-06 2023-11-24 泉州市一扬文化用品有限公司 一种物品存放装置及其使用方法
CN110668127B (zh) * 2019-09-25 2021-04-02 义乌市义心科技有限责任公司 一种零件输送用方向调整设备
CN110980233A (zh) * 2019-12-30 2020-04-10 安徽安鑫货叉有限公司 一种用于型材转运的旋转机构
EP3936407A1 (en) 2020-07-10 2022-01-12 ATOTECH Deutschland GmbH Processing apparatus, system and method for conveying therethrough parts to be treated and device for interconnecting a first line and a second line of the system
CN112537594A (zh) * 2020-11-30 2021-03-23 珠海格力智能装备有限公司 输送设备
KR20230058777A (ko) * 2021-10-25 2023-05-03 삼성전자주식회사 기판 이송 시스템
KR20230093883A (ko) 2021-12-20 2023-06-27 주식회사 에스에프에이 쐐기형 추락방지장치를 구비하는 수직 반송 장치

Family Cites Families (25)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3075655A (en) * 1963-01-29 bryant
US3968888A (en) * 1968-10-21 1976-07-13 The Lummus Company Warehouse sysem with parallel conductor positional control means for a stacker crane
US3792785A (en) * 1973-01-26 1974-02-19 Fmc Corp Automated storage and freight terminal apparatus
US4484289A (en) * 1982-01-29 1984-11-20 Rapistan Division Of Lear Siegler, Inc. Tote director
US4768914A (en) * 1986-01-13 1988-09-06 Peter Sing Storage system
JPS6337023A (ja) * 1986-07-31 1988-02-17 Matsushita Electric Ind Co Ltd 昇降装置
US4946006A (en) * 1988-04-13 1990-08-07 T. K. M. Engineering Kabushiki Kaisha Elevator apparatus with a sectored vertical shaft and a turntable for transfering elevator cages between the individual sectors
US5044859A (en) * 1989-10-19 1991-09-03 Harnischfeger Engineers, Inc. Control system for a storage and retrieval machine
JPH0717333B2 (ja) * 1990-08-07 1995-03-01 鹿島建設株式会社 リニアモータ駆動エレベータ
KR970003868B1 (ko) * 1991-10-14 1997-03-22 가부시끼가이샤 다이후꾸 입체주차설비
US5284252A (en) * 1991-11-13 1994-02-08 United Parcel Service Of America, Inc. Automatic rotary sorter
JPH05262407A (ja) 1992-03-18 1993-10-12 Japan Steel Works Ltd:The 自動倉庫におけるパレット供給装置及びその方法
JPH06239416A (ja) 1993-02-10 1994-08-30 Mitsubishi Heavy Ind Ltd パレットの搬送装置
CN2255965Y (zh) * 1995-09-04 1997-06-11 财团法人工业技术研究院 输送机移载装置
JP3298388B2 (ja) * 1995-11-24 2002-07-02 株式会社ダイフク 車の移送設備
EP0887491B1 (en) * 1997-06-06 2004-04-07 Park Plus, Inc. Vehicle handling system
ES2153751B1 (es) * 1998-09-21 2001-08-01 Gomez Gines Sanchez Almacen automatico.
US6516239B1 (en) * 1999-08-03 2003-02-04 Honda Of Canada Incorporated Assembly line control system
JP2001187631A (ja) * 1999-12-28 2001-07-10 Murata Mach Ltd 物品移載装置
KR100351175B1 (ko) * 2000-03-15 2002-09-05 주식회사 이성엔지니어링 수직 반송장치
JP2002167032A (ja) * 2000-11-30 2002-06-11 Murata Mach Ltd 昇降移載装置及び昇降移載方法
US6854583B1 (en) * 2001-02-06 2005-02-15 Middlesex General Industries, Inc. Conveyorized storage and transportation system
TWI254695B (en) * 2002-08-29 2006-05-11 Murata Machinery Ltd Carrying apparatus
US7591630B2 (en) * 2003-08-29 2009-09-22 Casepick Systems, Llc Materials-handling system using autonomous transfer and transport vehicles
JP2005325606A (ja) * 2004-05-14 2005-11-24 Toshihiro Abe 荷物格納装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI602383B (zh) * 2011-11-04 2017-10-11 Yamaha Motor Co Ltd Linear motors and linear conveyors
TWI557841B (zh) * 2016-02-01 2016-11-11 亞智科技股份有限公司 輸送處理裝置與輸送處理方法

Also Published As

Publication number Publication date
JP4910385B2 (ja) 2012-04-04
KR20080077372A (ko) 2008-08-22
WO2007069701A1 (ja) 2007-06-21
TWI369327B (zh) 2012-08-01
JP2007161460A (ja) 2007-06-28
US20090288931A1 (en) 2009-11-26
US7871231B2 (en) 2011-01-18
CN101331074A (zh) 2008-12-24
KR101172565B1 (ko) 2012-08-08
CN101331074B (zh) 2011-12-07

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Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees