JP4850392B2 - 半導体装置の製造方法 - Google Patents
半導体装置の製造方法 Download PDFInfo
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- JP4850392B2 JP4850392B2 JP2004040403A JP2004040403A JP4850392B2 JP 4850392 B2 JP4850392 B2 JP 4850392B2 JP 2004040403 A JP2004040403 A JP 2004040403A JP 2004040403 A JP2004040403 A JP 2004040403A JP 4850392 B2 JP4850392 B2 JP 4850392B2
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- Prior art keywords
- forming
- insulating layer
- layer
- semiconductor substrate
- via hole
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- 238000004519 manufacturing process Methods 0.000 title claims description 21
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- 238000000034 method Methods 0.000 claims description 11
- 238000007747 plating Methods 0.000 claims description 10
- 239000010410 layer Substances 0.000 description 116
- 239000011521 glass Substances 0.000 description 7
- 229910052751 metal Inorganic materials 0.000 description 5
- 239000002184 metal Substances 0.000 description 5
- 239000010949 copper Substances 0.000 description 4
- 238000004544 sputter deposition Methods 0.000 description 4
- 229910052782 aluminium Inorganic materials 0.000 description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 3
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- NRTOMJZYCJJWKI-UHFFFAOYSA-N Titanium nitride Chemical compound [Ti]#N NRTOMJZYCJJWKI-UHFFFAOYSA-N 0.000 description 2
- 230000006866 deterioration Effects 0.000 description 2
- 239000003822 epoxy resin Substances 0.000 description 2
- 239000000463 material Substances 0.000 description 2
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- 239000011347 resin Substances 0.000 description 2
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 2
- 229910052814 silicon oxide Inorganic materials 0.000 description 2
- 239000010936 titanium Substances 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
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- 230000001070 adhesive effect Effects 0.000 description 1
- 239000002390 adhesive tape Substances 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000001312 dry etching Methods 0.000 description 1
- 238000002488 metal-organic chemical vapour deposition Methods 0.000 description 1
- 238000004806 packaging method and process Methods 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 239000003870 refractory metal Substances 0.000 description 1
- 238000007790 scraping Methods 0.000 description 1
- 229910000679 solder Inorganic materials 0.000 description 1
- 229910052715 tantalum Inorganic materials 0.000 description 1
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 1
- MZLGASXMSKOWSE-UHFFFAOYSA-N tantalum nitride Chemical compound [Ta]#N MZLGASXMSKOWSE-UHFFFAOYSA-N 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- MAKDTFFYCIMFQP-UHFFFAOYSA-N titanium tungsten Chemical compound [Ti].[W] MAKDTFFYCIMFQP-UHFFFAOYSA-N 0.000 description 1
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Description
2 絶縁層
3 パッド電極
7 第1の開口
8 ビアホール
9,9A 絶縁層
10 バリア膜
11 シード層
12 再配線層
13 ボール状端子
Claims (6)
- 半導体基板の表面に第1の絶縁層を介して形成されたパッド電極を被覆するように前記半導体基板の表面側に支持体を接着する工程と、
前記半導体基板の裏面から前記パッド電極の表面に到達するようにビアホ−ルを形成する工程と、
前記ビアホールの側壁に第2の絶縁層を形成する工程と、
前記第2の絶縁層上であって、前記ビアホール内を含む前記半導体基板の裏面にバリア層を形成する工程と、
前記バリア層上にメッキ用のシード層を形成する工程と、
前記シード層上にメッキ処理により再配線層を形成する工程と、を備え、
前記ビアホ−ルを形成する工程は、前記半導体基板に対して前記第1の絶縁層が露出しない位置まで第1の開口を形成する工程と、前記半導体基板に対して前記第1の開口の開口径よりも広い開口径を有する第2の開口を前記第1の絶縁層が露出する位置まで形成する工程を含み、
前記ビアホ−ルの側壁に第2の絶縁層を形成する工程は、前記ビアホ−ルを含む半導体基板上に前記第2の絶縁層を形成した後に、前記半導体基板上に形成したレジスト層をマスクにして前記パッド電極上の前記第2の絶縁層を除去する工程であることを特徴とする半導体装置の製造方法。 - 半導体基板の表面に第1の絶縁層を介して形成されたパッド電極を被覆するように前記半導体基板の表面側に支持体を接着する工程と、
前記半導体基板の裏面から前記パッド電極の表面に到達するようにビアホ−ルを形成する工程と、
前記ビアホールの側壁に第2の絶縁層を形成する工程と、
前記第2の絶縁層上であって、前記ビアホール内を含む前記半導体基板の裏面にバリア層を形成する工程と、
前記バリア層上にメッキ用のシード層を形成する工程と、
前記シード層上にメッキ処理により再配線層を形成する工程と、を備え、
前記ビアホ−ルを形成する工程は、前記半導体基板に対して前記第1の絶縁層が露出しない位置まで第1の開口を形成する工程と、前記半導体基板に対して前記第1の開口の開口径よりも広い開口径を有する第2の開口を前記第1の絶縁層が露出する位置まで形成する工程を含み、
前記ビアホ−ルの側壁に第2の絶縁層を形成する工程は、前記ビアホ−ルを含む半導体基板上に、前記ビアホールの底部の膜厚よりも前記半導体基板上の膜厚が厚くなるように前記第2の絶縁層を形成した後に、レジスト層をマスクとして用いることなく、前記パッド電極上の前記第2の絶縁層をエッチングにより除去する工程であることを特徴とする半導体装置の製造方法。 - 前記ビアホ−ルを形成する工程は、前記第2の開口から露出した前記第1の絶縁層をエッチングして前記パッド電極を露出させる工程を含むことを特徴とする請求項1又は2に記載の半導体装置の製造方法。
- 前記再配線層に接続される導電端子を形成する工程を具備することを特徴とする請求項1又は2に記載の半導体装置の製造方法。
- 前記再配線層を形成する工程は、前記再配線層をビアホール内に中空部分を有して形成する工程であることを特徴とする請求項1又は2に記載の半導体装置の製造方法。
- 前記半導体基板を複数の半導体チップに分割する工程を具備することを特徴とする請求項1乃至5のいずれかに記載の半導体装置の製造方法。
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JP2004040403A JP4850392B2 (ja) | 2004-02-17 | 2004-02-17 | 半導体装置の製造方法 |
TW094102860A TWI268534B (en) | 2004-02-17 | 2005-01-31 | Semiconductor device and method for making same |
EP05002897.6A EP1564810B1 (en) | 2004-02-17 | 2005-02-11 | Semiconductor device and manufacturing method thereof |
US11/055,707 US7732925B2 (en) | 2004-02-17 | 2005-02-11 | Semiconductor device and manufacturing method thereof |
KR1020050012866A KR100658543B1 (ko) | 2004-02-17 | 2005-02-16 | 반도체 장치 및 그 제조 방법 |
CNB2005100093666A CN100382304C (zh) | 2004-02-17 | 2005-02-17 | 半导体装置及其制造方法 |
US11/808,667 US7750478B2 (en) | 2004-02-17 | 2007-06-12 | Semiconductor device with via hole of uneven width |
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- 2005-02-16 KR KR1020050012866A patent/KR100658543B1/ko active IP Right Grant
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Publication number | Publication date |
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CN1658387A (zh) | 2005-08-24 |
US20070249158A1 (en) | 2007-10-25 |
KR100658543B1 (ko) | 2006-12-19 |
US7732925B2 (en) | 2010-06-08 |
JP2005235858A (ja) | 2005-09-02 |
CN100382304C (zh) | 2008-04-16 |
TW200531142A (en) | 2005-09-16 |
EP1564810A1 (en) | 2005-08-17 |
KR20060042012A (ko) | 2006-05-12 |
US20050189637A1 (en) | 2005-09-01 |
TWI268534B (en) | 2006-12-11 |
US7750478B2 (en) | 2010-07-06 |
EP1564810B1 (en) | 2017-01-11 |
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