JP4698251B2 - 可動又は柔軟なシャワーヘッド取り付け - Google Patents

可動又は柔軟なシャワーヘッド取り付け Download PDF

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Publication number
JP4698251B2
JP4698251B2 JP2005045994A JP2005045994A JP4698251B2 JP 4698251 B2 JP4698251 B2 JP 4698251B2 JP 2005045994 A JP2005045994 A JP 2005045994A JP 2005045994 A JP2005045994 A JP 2005045994A JP 4698251 B2 JP4698251 B2 JP 4698251B2
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Japan
Prior art keywords
showerhead
gas
gas inlet
shower head
inlet manifold
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
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JP2005045994A
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English (en)
Japanese (ja)
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JP2005256172A (ja
JP2005256172A5 (https=
Inventor
エム． ホワイト ジョン
ノーマン スターリング ウィリアム
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Applied Materials Inc
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Applied Materials Inc
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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16B—DEVICES FOR FASTENING OR SECURING CONSTRUCTIONAL ELEMENTS OR MACHINE PARTS TOGETHER, e.g. NAILS, BOLTS, CIRCLIPS, CLAMPS, CLIPS OR WEDGES; JOINTS OR JOINTING
    • F16B35/00—Screw-bolts; Stay-bolts; Screw-threaded studs; Screws; Set screws
    • F16B35/04—Screw-bolts; Stay-bolts; Screw-threaded studs; Screws; Set screws with specially-shaped head or shaft in order to fix the bolt on or in an object
    • F16B35/041—Specially-shaped shafts
    • F16B35/044—Specially-shaped ends
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
    • C23C16/45563—Gas nozzles
    • C23C16/45565—Shower nozzles
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
    • B65D19/00—Pallets or like platforms, with or without side walls, for supporting loads to be lifted or lowered
    • B65D19/38—Details or accessories
    • B65D19/385—Frames, corner posts or pallet converters, e.g. for facilitating stacking of charged pallets
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/3244—Gas supply means
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/32458—Vessel
    • H01J37/32522—Temperature

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Analytical Chemistry (AREA)
  • Plasma & Fusion (AREA)
  • Physics & Mathematics (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Organic Chemistry (AREA)
  • Metallurgy (AREA)
  • Materials Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Vapour Deposition (AREA)
  • Drying Of Semiconductors (AREA)
  • Fire-Extinguishing By Fire Departments, And Fire-Extinguishing Equipment And Control Thereof (AREA)
  • Nozzles (AREA)
JP2005045994A 2004-02-24 2005-02-22 可動又は柔軟なシャワーヘッド取り付け Expired - Lifetime JP4698251B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US54733804P 2004-02-24 2004-02-24
US60/547338 2004-02-24

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2010278191A Division JP5366923B2 (ja) 2004-02-24 2010-12-14 可動又は柔軟なシャワーヘッド取り付け

Publications (3)

Publication Number Publication Date
JP2005256172A JP2005256172A (ja) 2005-09-22
JP2005256172A5 JP2005256172A5 (https=) 2008-04-24
JP4698251B2 true JP4698251B2 (ja) 2011-06-08

Family

ID=35046181

Family Applications (2)

Application Number Title Priority Date Filing Date
JP2005045994A Expired - Lifetime JP4698251B2 (ja) 2004-02-24 2005-02-22 可動又は柔軟なシャワーヘッド取り付け
JP2010278191A Expired - Lifetime JP5366923B2 (ja) 2004-02-24 2010-12-14 可動又は柔軟なシャワーヘッド取り付け

Family Applications After (1)

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JP2010278191A Expired - Lifetime JP5366923B2 (ja) 2004-02-24 2010-12-14 可動又は柔軟なシャワーヘッド取り付け

Country Status (5)

Country Link
US (1) US7722925B2 (https=)
JP (2) JP4698251B2 (https=)
KR (1) KR100769963B1 (https=)
CN (2) CN1673410B (https=)
TW (1) TWI290962B (https=)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101529669B1 (ko) * 2008-06-12 2015-06-18 주성엔지니어링(주) 기판처리장치

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