JP2020011858A - 成膜方法、及び、半導体装置の製造方法 - Google Patents
成膜方法、及び、半導体装置の製造方法 Download PDFInfo
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Abstract
Description
12 :炉
13 :基板ステージ
14 :ヒータ
20 :ミスト供給装置
22 :容器
24 :超音波振動子
26 :ミスト供給路
28 :搬送ガス導入路
30 :希釈ガス導入路
60 :溶液
62 :ミスト
64 :搬送ガス
66 :希釈ガス
70 :基板
80 :排出管
Claims (22)
- ゲルマニウムがドープされているとともに導体または半導体の特性を有する酸化物膜を基体上に形成する成膜方法であって、
前記基体を加熱しながら、前記酸化物膜の構成元素を含む酸化物膜材料と有機ゲルマニウム化合物が溶解した溶液のミストを前記基体の表面に供給する工程、
を有する成膜方法。 - 前記酸化物膜材料と前記有機ゲルマニウム化合物が溶解した溶液のミストを前記基体の前記表面に供給する前記工程が、
前記酸化物膜材料と前記有機ゲルマニウム化合物の両方が溶解した溶液からミストを生成する工程と、
前記酸化物膜材料と前記有機ゲルマニウム化合物の両方が溶解した前記溶液の前記ミストを前記基体の前記表面に供給する工程、
を有する請求項1の成膜方法。 - 前記酸化物膜材料と前記有機ゲルマニウム化合物が溶解した溶液のミストを前記基体の前記表面に供給する前記工程が、
前記酸化物膜材料が溶解した溶液からミストを生成する工程と、
前記有機ゲルマニウム化合物が溶解した溶液からミストを生成する工程と、
前記酸化物膜材料が溶解した前記溶液の前記ミストと前記有機ゲルマニウム化合物が溶解した前記溶液の前記ミストを前記基体の前記表面に供給する工程、
を有する請求項1の成膜方法。 - 前記酸化物膜が、単結晶膜である請求項1〜3のいずれか一項の成膜方法。
- 前記有機ゲルマニウム化合物が、金属錯体である請求項1〜4のいずれか一項の成膜方法。
- 前記有機ゲルマニウム化合物が、β‐カルボキシエチルゲルマニウムセスキオキシドである請求項1〜5のいずれか一項の成膜方法。
- 前記酸化物膜が、酸化インジウム、酸化アルミニウム、酸化ガリウム、または、これらを組み合わせた酸化物により構成されており、
前記酸化物膜材料が、インジウム化合物、アルミニウム化合物、及び、ガリウム化合物の少なくとも1つを含む、
請求項1〜6のいずれか一項の成膜方法。 - 前記酸化物膜が、酸化亜鉛により構成されており、
前記酸化物膜材料が、亜鉛化合物を含む、
請求項1〜6のいずれか一項の成膜方法。 - 前記酸化物膜が、酸化ガリウム、または、酸化ガリウムを含む酸化物により構成されており、
前記酸化物膜材料が、ガリウム化合物である、
請求項1〜6のいずれか一項の成膜方法。 - 前記ガリウム化合物が、有機物である請求項9の成膜方法。
- 前記ガリウム化合物が、金属錯体である請求項9または10の成膜方法。
- 前記ガリウム化合物が、ガリウムアセチルアセトナートである請求項9〜11のいずれか一項の成膜方法。
- 前記ガリウム化合物が、ハロゲン化物である請求項9の成膜方法。
- 前記ガリウム化合物が、塩化ガリウムである請求項9または13の成膜方法。
- 前記酸化物膜材料と前記有機ゲルマニウム化合物が溶解した前記溶液の前記ミストに含まれるゲルマニウム原子の数が、前記酸化物膜材料と前記有機ゲルマニウム化合物が溶解した前記溶液の前記ミストに含まれるインジウム原子、アルミニウム原子、及び、ガリウム原子の総数の10倍以下である、請求項1〜14のいずれか一項の成膜方法。
- 前記基体が、酸化ガリウムにより構成されている請求項1〜15のいずれか一項の成膜方法。
- 前記基体が、β‐Ga2O3により構成されている請求項16の成膜方法。
- 前記基体が、α‐Ga2O3により構成されている請求項16の成膜方法。
- 前記基体が、α‐Al2O3により構成されている請求項1〜15のいずれか一項の成膜方法。
- 前記酸化物膜が、β‐Ga2O3により構成されている請求項1〜7、9〜19のいずれか一項の成膜方法。
- 前記酸化物膜を形成するときに、前記基体を400〜1000℃に加熱する請求項1〜20のいずれか一項の成膜方法。
- 半導体装置の製造方法であって、請求項1〜21のいずれか一項の成膜方法によって前記酸化物膜を形成する工程を備える、製造方法。
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DE102019119200.5A DE102019119200A1 (de) | 2018-07-17 | 2019-07-16 | Filmbildungsverfahren und Verfahren zur Herstellung einer Halbleitervorrichtung |
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US16/512,442 US20200027730A1 (en) | 2018-07-17 | 2019-07-16 | Film forming method and method of manufacturing semiconductor device |
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JP2021034623A (ja) * | 2019-08-27 | 2021-03-01 | 株式会社デンソー | 半導体装置の製造方法 |
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US20200027730A1 (en) | 2020-01-23 |
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