JP2018147941A - パワーモジュール - Google Patents
パワーモジュール Download PDFInfo
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- JP2018147941A JP2018147941A JP2017038878A JP2017038878A JP2018147941A JP 2018147941 A JP2018147941 A JP 2018147941A JP 2017038878 A JP2017038878 A JP 2017038878A JP 2017038878 A JP2017038878 A JP 2017038878A JP 2018147941 A JP2018147941 A JP 2018147941A
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- Prior art keywords
- copper block
- power module
- semiconductor element
- conductor layer
- relay substrate
- Prior art date
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- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims abstract description 60
- 229910052802 copper Inorganic materials 0.000 claims abstract description 60
- 239000010949 copper Substances 0.000 claims abstract description 60
- 239000000758 substrate Substances 0.000 claims abstract description 41
- 239000004065 semiconductor Substances 0.000 claims abstract description 39
- 239000004020 conductor Substances 0.000 claims abstract description 27
- 239000003566 sealing material Substances 0.000 claims abstract description 13
- 239000000463 material Substances 0.000 claims abstract description 8
- 230000000149 penetrating effect Effects 0.000 claims abstract description 4
- 238000007789 sealing Methods 0.000 claims abstract description 4
- 239000010410 layer Substances 0.000 description 20
- 229910000679 solder Inorganic materials 0.000 description 11
- 230000000694 effects Effects 0.000 description 6
- 239000002184 metal Substances 0.000 description 4
- 229910052751 metal Inorganic materials 0.000 description 4
- 239000003822 epoxy resin Substances 0.000 description 2
- 229920000647 polyepoxide Polymers 0.000 description 2
- 239000002356 single layer Substances 0.000 description 2
- 238000005476 soldering Methods 0.000 description 2
- 239000004593 Epoxy Substances 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 229910010293 ceramic material Inorganic materials 0.000 description 1
- 238000010292 electrical insulation Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000000945 filler Substances 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 239000000088 plastic resin Substances 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 239000000565 sealant Substances 0.000 description 1
- 229920001187 thermosetting polymer Polymers 0.000 description 1
- 230000001052 transient effect Effects 0.000 description 1
Images
Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L25/00—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof
- H01L25/03—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes
- H01L25/04—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes the devices not having separate containers
- H01L25/07—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes the devices not having separate containers the devices being of a type provided for in group H01L29/00
- H01L25/072—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes the devices not having separate containers the devices being of a type provided for in group H01L29/00 the devices being arranged next to each other
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/34—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
- H01L23/36—Selection of materials, or shaping, to facilitate cooling or heating, e.g. heatsinks
- H01L23/367—Cooling facilitated by shape of device
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/34—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
- H01L23/36—Selection of materials, or shaping, to facilitate cooling or heating, e.g. heatsinks
- H01L23/373—Cooling facilitated by selection of materials for the device or materials for thermal expansion adaptation, e.g. carbon
- H01L23/3735—Laminates or multilayers, e.g. direct bond copper ceramic substrates
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/48—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/48—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
- H01L23/488—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of soldered or bonded constructions
- H01L23/498—Leads, i.e. metallisations or lead-frames on insulating substrates, e.g. chip carriers
- H01L23/49811—Additional leads joined to the metallisation on the insulating substrate, e.g. pins, bumps, wires, flat leads
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/52—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames
- H01L23/538—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames the interconnection structure between a plurality of semiconductor chips being formed on, or in, insulating substrates
- H01L23/5385—Assembly of a plurality of insulating substrates
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L25/00—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof
- H01L25/03—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes
- H01L25/04—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes the devices not having separate containers
- H01L25/065—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes the devices not having separate containers the devices being of a type provided for in group H01L27/00
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/26—Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
- H01L2224/31—Structure, shape, material or disposition of the layer connectors after the connecting process
- H01L2224/32—Structure, shape, material or disposition of the layer connectors after the connecting process of an individual layer connector
- H01L2224/321—Disposition
- H01L2224/32151—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
- H01L2224/32221—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
- H01L2224/32225—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/02—Containers; Seals
- H01L23/04—Containers; Seals characterised by the shape of the container or parts, e.g. caps, walls
- H01L23/053—Containers; Seals characterised by the shape of the container or parts, e.g. caps, walls the container being a hollow construction and having an insulating or insulated base as a mounting for the semiconductor body
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/16—Fillings or auxiliary members in containers or encapsulations, e.g. centering rings
- H01L23/18—Fillings characterised by the material, its physical or chemical properties, or its arrangement within the complete device
- H01L23/24—Fillings characterised by the material, its physical or chemical properties, or its arrangement within the complete device solid or gel at the normal operating temperature of the device
Abstract
Description
実施の形態1におけるパワーモジュールについて説明する。図1は、実施の形態1のパワーモジュールを示す断面図である。なお、図1以外の他図において、同一符号は同一又は相当部分を示す。パワーモジュール100は、半導体素子1(1a,1b)がはんだ2を介して絶縁基板3の表面に接合し、中継基板4が絶縁基板3の表面の上方に配置されて半導体素子1と銅ブロック6を介して電気的に接続される構成である。
外部端子7b、7cは、中継基板4の表面導体層4aと電気的に接続し、外部との電気信号のやり取りに使用する。図1には外部端子7b、7cをL字形状として示したが、円筒形状でもよい。なお、図3に示す通り、外部端子7b、7cは、中継基板4の表面導体層4aではなく、銅ブロック6と接合させてもよい。
実施の形態2のパワーモジュールについて説明する。図4は、実施の形態2のパワーモジュールを示す断面図である。実施の形態2のパワーモジュールは、銅ブロック6の裏面が中継基板4の裏面よりも下方に突出して位置する。
実施の形態3のパワーモジュールについて説明する。図6は、実施の形態3のパワーモジュールを示す断面図である。実施の形態3のパワーモジュールは、銅ブロック6の表面が中継基板4の表面よりも上方に突出して位置し、銅ブロック6の表面が封止材9から露出している。
実施の形態4のパワーモジュールについて説明する。図9は、実施の形態4のパワーモジュールを示す断面図である。実施の形態4のパワーモジュールは、銅ブロック6の裏面に凹部が備えられている。
また、部品と部品を接合する手段ははんだに限定されず、あらゆる導電性接合材を利用することができる。導電性接合材として、はんだ、金属フィラーを用いた金属ペースト、又は熱により金属化する焼成金属などの電気抵抗の低い金属を用いることが好ましい。
Claims (5)
- 第1導体層と第2導体層とを表面と裏面とにそれぞれ有する中継基板と、
前記中継基板の厚さ方向に貫通した孔に挿入され、前記第1導体層と前記第2導体層と導通する銅ブロックと、
前記銅ブロックの端面に対向した位置に主電極を有し、一つの前記主電極には一つの前記銅ブロックのみが電気的に接続された半導体素子と、
前記半導体素子の裏面に接合材を介して接合された絶縁基板と、
前記中継基板、前記銅ブロック、及び前記半導体素子とを封止する封止材を備えることを特徴とするパワーモジュール。 - 前記第2導体層と前記半導体素子が対向し、前記銅ブロックの前記主電極に対向した端面が前記第2導体層よりも突出したことを特徴とする請求項1に記載のパワーモジュール。
- 前記銅ブロックの端部が前記封止部材から露出することを特徴とする請求項1及び2に記載のパワーモジュール。
- 前記銅ブロックの前記封止部材から露出している端部が端子形状であることを特徴とする請求項1〜3のいずれか1項に記載のパワーモジュール。
- 前記銅ブロックの前記主電極に対向した端面に凹部が備えられていることを特徴とする請求項1〜4のいずれか1項に記載のパワーモジュール。
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2017038878A JP6809294B2 (ja) | 2017-03-02 | 2017-03-02 | パワーモジュール |
US15/790,090 US10026670B1 (en) | 2017-03-02 | 2017-10-23 | Power module |
DE102017221437.6A DE102017221437A1 (de) | 2017-03-02 | 2017-11-29 | Leistungsmodul |
CN201810175418.4A CN108538825B (zh) | 2017-03-02 | 2018-03-02 | 功率模块 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2017038878A JP6809294B2 (ja) | 2017-03-02 | 2017-03-02 | パワーモジュール |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2018147941A true JP2018147941A (ja) | 2018-09-20 |
JP6809294B2 JP6809294B2 (ja) | 2021-01-06 |
Family
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Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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JP2017038878A Active JP6809294B2 (ja) | 2017-03-02 | 2017-03-02 | パワーモジュール |
Country Status (4)
Country | Link |
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US (1) | US10026670B1 (ja) |
JP (1) | JP6809294B2 (ja) |
CN (1) | CN108538825B (ja) |
DE (1) | DE102017221437A1 (ja) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP7035920B2 (ja) | 2018-09-06 | 2022-03-15 | 三菱電機株式会社 | 半導体装置および電力変換装置 |
JP7176397B2 (ja) * | 2018-12-21 | 2022-11-22 | 株式会社デンソー | 半導体装置とその製造方法 |
CN109801900B (zh) * | 2019-01-15 | 2021-10-29 | 江苏双聚智能装备制造有限公司 | 一种电力用逆变电路装置 |
JP7163828B2 (ja) * | 2019-03-05 | 2022-11-01 | 株式会社デンソー | 半導体モジュールとそれを備えた半導体装置 |
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