JP6750263B2 - 電力用半導体モジュール - Google Patents
電力用半導体モジュール Download PDFInfo
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- JP6750263B2 JP6750263B2 JP2016055485A JP2016055485A JP6750263B2 JP 6750263 B2 JP6750263 B2 JP 6750263B2 JP 2016055485 A JP2016055485 A JP 2016055485A JP 2016055485 A JP2016055485 A JP 2016055485A JP 6750263 B2 JP6750263 B2 JP 6750263B2
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- Prior art keywords
- solder
- power semiconductor
- semiconductor module
- semiconductor element
- module according
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 239000004065 semiconductor Substances 0.000 title claims description 204
- 229910000679 solder Inorganic materials 0.000 claims description 137
- 239000000758 substrate Substances 0.000 claims description 32
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims description 25
- 239000010949 copper Substances 0.000 claims description 25
- 229920005989 resin Polymers 0.000 claims description 20
- 239000011347 resin Substances 0.000 claims description 20
- 229910052751 metal Inorganic materials 0.000 claims description 16
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- 229910052802 copper Inorganic materials 0.000 claims description 11
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- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 6
- 229910052782 aluminium Inorganic materials 0.000 claims description 5
- 239000010931 gold Substances 0.000 claims description 5
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 claims description 4
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- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 claims description 3
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- 229910052787 antimony Inorganic materials 0.000 claims description 2
- WATWJIUSRGPENY-UHFFFAOYSA-N antimony atom Chemical compound [Sb] WATWJIUSRGPENY-UHFFFAOYSA-N 0.000 claims description 2
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims description 2
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- 229910020935 Sn-Sb Inorganic materials 0.000 description 3
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Description
図1は第1の実施の形態に係る電力用半導体モジュールの一例を示す図である。図2は半導体素子の一例を示す図であって、(A)は半導体素子とするRC−IGBTの回路図、(B)は半導体素子とするRC−IGBTの平面図である。図3は半導体素子とリード端子との接合状態を示す平面図である。図4は半導体素子とリード端子との接合部の部分拡大断面図である。図5は半導体素子のガードリングおよび表面電極の近傍を示す部分拡大断面図である。なお、図1に示した第1の実施の形態に係る電力用半導体モジュールは、その一例の要部断面を模式的に示している。
RC−IGBTは、また、IGBT14aのエミッタ端子がFWD14bのアノード端子と接続されて半導体素子14のおもて面の表面電極を構成している。RC−IGBTは、図2(B)に示したように、複数のIGBT領域14cと複数のFWD領域14dとをストライプ状に交互に配置した構成を有している。RC−IGBTは、図2(B)には図示しないが、複数のIGBT領域14cにあるIGBT14aのエミッタ端子および複数のFWD領域14dにあるFWD14bのアノード端子に接続された表面電極を有している。半導体素子14のおもて面は、また、IGBT14aのゲート端子に接続された制御用表面電極を有している。半導体素子14は、さらに、その中央部および周辺部に感温センサ14e,14fが一体に形成されている。
リード端子下はんだ18は、Sn0.7Cu、すなわち、Snを主成分とし、Cuを0.7wt%の割合で添加した。半導体素子下はんだ17は、Sn5Sb、すなわち、Snを主成分とし、Sbを5wt%の割合で添加した。このとき、Sn0.7Cuの0.2%耐力は、50℃において18.5メガパスカル(MPa)であり、Sn5Sbの0.2%耐力は、50℃において24.8MPaである。これにより、リード端子下はんだ18の0.2%耐力を「A」、半導体素子下はんだ17の0.2%耐力を「B」としたとき、A<Bの関係になる。
リード端子下はんだ18は、Sn0.7Cu、すなわち、Snを主成分とし、Cuを0.7wt%の割合で添加した。半導体素子下はんだ17は、Sn3.5Ag0.5Cu、すなわち、Snを主成分とし、Agを3.5wt%、Cuを0.5wt%の割合で添加した。このとき、Sn0.7Cuの0.2%耐力は、50℃において18.5MPaであり、Sn3.5Ag0.5Cuの0.2%耐力は、50℃において20.0MPaである。これにより、リード端子下はんだ18の0.2%耐力を「A」、半導体素子下はんだ17の0.2%耐力を「B」としたとき、A<Bの関係になる。
リード端子下はんだ18は、Sn3.5Ag0.5Cu、すなわち、Snを主成分とし、Agを3.5wt%、Cuを0.5wt%の割合で添加した。半導体素子下はんだ17は、Sn0.7Cu、すなわち、Snを主成分とし、Cuを0.7wt%の割合で添加した。このとき、Sn3.5Ag0.5Cuの0.2%耐力は、50℃において20.0MPaであり、Sn0.7Cuの0.2%耐力は、50℃において18.5MPaである。これにより、リード端子下はんだ18の0.2%耐力を「A」、半導体素子下はんだ17の0.2%耐力を「B」としたとき、A>Bの関係になる。
リード端子下はんだ18は、Snを主成分とし、Cuを0.7wt%の割合で添加し、半導体素子下はんだ17は、Snを主成分とし、Cuを0.7wt%の割合で添加した。このとき、リード端子下はんだ18および半導体素子下はんだ17の0.2%耐力は、いずれも50℃において18.5MPaであるので、リード端子下はんだ18の0.2%耐力を「A」、半導体素子下はんだ17の0.2%耐力を「B」としたとき、A=Bの関係になる。
図6には、リード端子下はんだ18の0.2%耐力を「A」、半導体素子下はんだ17の0.2%耐力を「B」としたときに、「A」および「B」の大小関係と半導体素子の温度を繰り返し変化させたときの寿命との関係を示している。
この図7では、比較例1の電力用半導体モジュール10が寿命のときにどのような壊れ方をするかを示しており、特に、リード端子15の接合部15aが立ち上がる折り曲げ部分(図の左端)近傍の状態を示している。リード端子15は、折り曲げ部分がリード端子下はんだ18および半導体素子14に対して大きなストレスをかける部分であり、その折り曲げ部分の直下には、部分的な劣化部25がいくつも生じている。これらの劣化部25は、リード端子下はんだ18がリード端子15からストレスを繰り返し受けることによって半導体素子14の表面電極のAlにひび割れを生じさせ、Al直下のRC−IGBTを構成しているトランジスタのセルを傷つけることによって生じる。すなわち、セルが短絡するようなことがあると、その箇所に大電流が流れ、その通り道のリード端子下はんだ18および半導体素子14が瞬間的に高温になることで溶けて穴が形成され、それが劣化部25となる。ただし、パワーサイクル試験を100000(100kcyc.)回実施した後でも、リード端子15の折り曲げ部分の直下を除く部分には、大きな変化は見られなかった。
リード端子下はんだ18の0.2%耐力を半導体素子下はんだ17の0.2%耐力と同じとした比較例2では、寿命の半分のパワーサイクル試験を経過したときの劣化状態は、比較例1の場合と相当相違している。すなわち、封止樹脂20とリード端子15とリード端子下はんだ18とが交わる場所の近傍をクラック起点26にしてリード端子下はんだ18にクラック27が入っている。このクラック27により、半導体素子14からリード端子下はんだ18を介してリード端子15に流れる電流の流路が部分的にオープンとなる。つまり、電力用半導体モジュール10は、リード端子下はんだ18にクラック27が入り、そのクラック27が進展して故障に至る方向に進んでいることになる。これは、比較例1の電力用半導体モジュール10が瞬間的にショートにより故障するのと違い、クラック27の進展がゆっくりであるが、確実に故障に向かって進展していることには変わりはない。
比較例1,2と同じパワーサイクルの回数のときに抜き取った実施例1,2の電力用半導体モジュール10の試料によれば、リード端子下はんだ18にひび割れや劣化といった現象が確認されない。このことから、リード端子下はんだ18の0.2%耐力を半導体素子下はんだ17の0.2%耐力より低くした場合、リード端子下はんだ18の劣化が確認できないので、電力用半導体モジュール10の信頼性が向上したことになる。このようなリード端子下はんだ18および半導体素子下はんだ17の組み合わせは、リード端子15が接合部15aと起立部15bが接続する折り曲げ部分を備える電力用半導体モジュール10において有用であろう。リード端子15がエポキシ樹脂などの封止樹脂20により拘束される場合に、さらに有用であろう。
図10は第2の実施の形態に係る電力用半導体モジュールの一例を示す部分拡大断面図である。この図10において、第1の実施の形態の対応する構成要素と同じまたは均等の構成要素については同じ符号を付してその詳細な説明は省略する。
11 冷却器
12 ケース
13 絶縁基板
13a セラミック絶縁板
13b,13c 回路層
13d 金属箔
14 半導体素子
14a IGBT
14b FWD
14c IGBT領域
14d FWD領域
14e,14f 感温センサ
14g ガードリング
15 リード端子
15a 接合部
15b 起立部
15c 水平部
16 絶縁基板下はんだ
17 半導体素子下はんだ
18,19 リード端子下はんだ
20 封止樹脂
21 ポリイミド(第1のポリイミド)
22 ポリイミド(第2のポリイミド)
25 劣化部
26 クラック起点
27 クラック
30 被覆
Claims (21)
- 一方の面および前記一方の面の反対側の他方の面を有する半導体素子と、
一端と他端を有し前記一端が前記半導体素子に電気的および熱的に接続された接合部と前記接合部の端部から上方へ折り曲げられた起立部とを有するリード端子と、
前記リード端子の前記接合部と前記半導体素子の一方の面とを接合する第1のはんだと、
一方の面および前記一方の面の反対側の他方の面を有する絶縁板、前記絶縁板の一方の面に配置した第1の回路層および前記絶縁板の他方の面に配置した金属箔を有する絶縁基板と、
前記半導体素子の他方の面と前記絶縁基板の前記第1の回路層とを接合する第2のはんだと、
少なくとも前記半導体素子、前記リード端子全体、前記第1のはんだおよび前記絶縁基板を封止する樹脂と、
を備え、
前記第1のはんだの0.2%耐力をA、前記第2のはんだの0.2%耐力をBとしたとき、A<Bが成立する関係にした、電力用半導体モジュール。 - 前記半導体素子の厚さが100マイクロメートル以下である、請求項1記載の電力用半導体モジュール。
- 前記半導体素子は前記第1のはんだによって前記リード端子と接合される表面電極を備え、前記表面電極がアルミニウム、ニッケルおよび金の3層からなる、請求項1記載の電力用半導体モジュール。
- 前記第1のはんだおよび前記第2のはんだの融点が前記ニッケルの結晶化温度より低い、請求項3記載の電力用半導体モジュール。
- 前記半導体素子のガードリングの表面が第1のポリイミドの膜によって被覆され、前記第1のポリイミドと前記表面電極とのすき間が第2のポリイミドで充填されている、請求項3記載の電力用半導体モジュール。
- 前記リード端子の表面が異種金属によって被覆されている、請求項1記載の電力用半導体モジュール。
- 前記被覆の方法がめっきである、請求項6記載の電力用半導体モジュール。
- 前記リード端子の被覆厚が10マイクロメートル以下である、請求項6記載の電力用半導体モジュール。
- 前記リード端子の被覆材料がニッケルである、請求項6記載の電力用半導体モジュール。
- 前記ニッケルの中に含まれるリン濃度が50%以下である、請求項9記載の電力用半導体モジュール。
- 前記ニッケルの中に含まれるリン濃度が20%以下である、請求項9記載の電力用半導体モジュール。
- 前記リード端子の材料が銅である、請求項1記載の電力用半導体モジュール。
- 前記リード端子の厚さが0.5〜1.0ミリメートルである、請求項12記載の電力用半導体モジュール。
- 前記第1のはんだは、錫を主成分とし、銅を0.1wt%以上、1.0wt%以下の割合で含む、請求項1記載の電力用半導体モジュール。
- 前記第2のはんだは、錫を主成分とし、アンチモンを0.1wt%以上、15wt%以下の割合で含む、請求項14記載の電力用半導体モジュール。
- 前記第2のはんだは、錫を主成分とし、銀を3.5wt%、銅を0.5wt%の割合で含む、請求項14記載の電力用半導体モジュール。
- 前記半導体素子は、RC−IGBTである、請求項1記載の電力用半導体モジュール。
- 前記絶縁基板は、前記一方の面に第2の回路層を有し、
前記リード端子の前記他端は、第3のはんだによって前記絶縁基板の前記第2の回路層に接合されている、請求項1から17のいずれか一項に記載の電力用半導体モジュール。 - 前記第3のはんだは、前記第2のはんだと同じ組成である、請求項18記載の電力用半導体モジュール。
- 前記樹脂は、エポキシ樹脂、マレイミド樹脂、ポリイミド樹脂、イソシアネート樹脂、アミノ樹脂、フェノール樹脂のいずれかである、請求項1から19のいずれか一項に記載の電力用半導体モジュール。
- 前記リード端子は、帯状の板を折り曲げて作られており、前記起立部の端部から前記半導体素子の面に平行な方向に折り曲げられた水平部を有している、請求項1から20のいずれか一項に記載の電力用半導体モジュール。
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DE102009045181B4 (de) * | 2009-09-30 | 2020-07-09 | Infineon Technologies Ag | Leistungshalbleitermodul |
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JP6199397B2 (ja) * | 2013-08-28 | 2017-09-20 | 三菱電機株式会社 | 半導体装置およびその製造方法 |
KR102300972B1 (ko) * | 2014-07-04 | 2021-09-09 | 미쓰비시 마테리알 가부시키가이샤 | 파워 모듈용 기판 유닛 및 파워 모듈 |
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