JP2016040382A5 - - Google Patents
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- JP2016040382A5 JP2016040382A5 JP2015237884A JP2015237884A JP2016040382A5 JP 2016040382 A5 JP2016040382 A5 JP 2016040382A5 JP 2015237884 A JP2015237884 A JP 2015237884A JP 2015237884 A JP2015237884 A JP 2015237884A JP 2016040382 A5 JP2016040382 A5 JP 2016040382A5
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- JP
- Japan
- Prior art keywords
- composition
- weight
- water
- group
- miscible organic
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 239000000203 mixture Substances 0.000 claims 53
- -1 amine compound Chemical class 0.000 claims 16
- 239000003960 organic solvent Substances 0.000 claims 16
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims 16
- RTZKZFJDLAIYFH-UHFFFAOYSA-N Diethyl ether Chemical compound CCOCC RTZKZFJDLAIYFH-UHFFFAOYSA-N 0.000 claims 12
- PEDCQBHIVMGVHV-UHFFFAOYSA-N Glycerine Chemical compound OCC(O)CO PEDCQBHIVMGVHV-UHFFFAOYSA-N 0.000 claims 12
- DNIAPMSPPWPWGF-UHFFFAOYSA-N Propylene glycol Chemical compound CC(O)CO DNIAPMSPPWPWGF-UHFFFAOYSA-N 0.000 claims 12
- 239000004065 semiconductor Substances 0.000 claims 12
- 239000000758 substrate Substances 0.000 claims 12
- 238000004140 cleaning Methods 0.000 claims 11
- KRHYYFGTRYWZRS-UHFFFAOYSA-M Fluoride anion Chemical compound [F-] KRHYYFGTRYWZRS-UHFFFAOYSA-M 0.000 claims 10
- HZAXFHJVJLSVMW-UHFFFAOYSA-N 2-Aminoethan-1-ol Chemical compound NCCO HZAXFHJVJLSVMW-UHFFFAOYSA-N 0.000 claims 6
- UIKUBYKUYUSRSM-UHFFFAOYSA-N 3-morpholinopropylamine Chemical compound NCCCN1CCOCC1 UIKUBYKUYUSRSM-UHFFFAOYSA-N 0.000 claims 6
- LYCAIKOWRPUZTN-UHFFFAOYSA-N Ethylene glycol Chemical compound OCCO LYCAIKOWRPUZTN-UHFFFAOYSA-N 0.000 claims 6
- GSEJCLTVZPLZKY-UHFFFAOYSA-N Triethanolamine Chemical compound OCCN(CCO)CCO GSEJCLTVZPLZKY-UHFFFAOYSA-N 0.000 claims 6
- 239000003989 dielectric material Substances 0.000 claims 6
- 229920001174 Diethylhydroxylamine Polymers 0.000 claims 5
- FVCOIAYSJZGECG-UHFFFAOYSA-N diethylhydroxylamine Chemical compound CCN(O)CC FVCOIAYSJZGECG-UHFFFAOYSA-N 0.000 claims 5
- 238000000034 method Methods 0.000 claims 5
- GIAFURWZWWWBQT-UHFFFAOYSA-N 2-(2-aminoethoxy)ethanol Chemical compound NCCOCCO GIAFURWZWWWBQT-UHFFFAOYSA-N 0.000 claims 4
- SVTBMSDMJJWYQN-UHFFFAOYSA-N 2-methylpentane-2,4-diol Chemical compound CC(O)CC(C)(C)O SVTBMSDMJJWYQN-UHFFFAOYSA-N 0.000 claims 4
- DDFHBQSCUXNBSA-UHFFFAOYSA-N 5-(5-carboxythiophen-2-yl)thiophene-2-carboxylic acid Chemical compound S1C(C(=O)O)=CC=C1C1=CC=C(C(O)=O)S1 DDFHBQSCUXNBSA-UHFFFAOYSA-N 0.000 claims 4
- CIWBSHSKHKDKBQ-JLAZNSOCSA-N Ascorbic acid Chemical compound OC[C@H](O)[C@H]1OC(=O)C(O)=C1O CIWBSHSKHKDKBQ-JLAZNSOCSA-N 0.000 claims 4
- YNAVUWVOSKDBBP-UHFFFAOYSA-N Morpholine Chemical compound C1COCCN1 YNAVUWVOSKDBBP-UHFFFAOYSA-N 0.000 claims 4
- FXHOOIRPVKKKFG-UHFFFAOYSA-N N,N-Dimethylacetamide Chemical compound CN(C)C(C)=O FXHOOIRPVKKKFG-UHFFFAOYSA-N 0.000 claims 4
- OPKOKAMJFNKNAS-UHFFFAOYSA-N N-methylethanolamine Chemical compound CNCCO OPKOKAMJFNKNAS-UHFFFAOYSA-N 0.000 claims 4
- 238000001035 drying Methods 0.000 claims 4
- LNTHITQWFMADLM-UHFFFAOYSA-N gallic acid Chemical compound OC(=O)C1=CC(O)=C(O)C(O)=C1 LNTHITQWFMADLM-UHFFFAOYSA-N 0.000 claims 4
- 150000007524 organic acids Chemical class 0.000 claims 4
- 150000003856 quaternary ammonium compounds Chemical class 0.000 claims 4
- FPGGTKZVZWFYPV-UHFFFAOYSA-M tetrabutylammonium fluoride Chemical compound [F-].CCCC[N+](CCCC)(CCCC)CCCC FPGGTKZVZWFYPV-UHFFFAOYSA-M 0.000 claims 4
- 239000013589 supplement Substances 0.000 claims 3
- HXKKHQJGJAFBHI-UHFFFAOYSA-N 1-aminopropan-2-ol Chemical compound CC(O)CN HXKKHQJGJAFBHI-UHFFFAOYSA-N 0.000 claims 2
- MIJDSYMOBYNHOT-UHFFFAOYSA-N 2-(ethylamino)ethanol Chemical compound CCNCCO MIJDSYMOBYNHOT-UHFFFAOYSA-N 0.000 claims 2
- HHPDFYDITNAMAM-UHFFFAOYSA-N 2-[cyclohexyl(2-hydroxyethyl)amino]ethanol Chemical compound OCCN(CCO)C1CCCCC1 HHPDFYDITNAMAM-UHFFFAOYSA-N 0.000 claims 2
- BFSVOASYOCHEOV-UHFFFAOYSA-N 2-diethylaminoethanol Chemical compound CCN(CC)CCO BFSVOASYOCHEOV-UHFFFAOYSA-N 0.000 claims 2
- ZDWPBMJZDNXTPG-UHFFFAOYSA-N 2h-benzotriazol-4-amine Chemical compound NC1=CC=CC2=C1NN=N2 ZDWPBMJZDNXTPG-UHFFFAOYSA-N 0.000 claims 2
- 239000002211 L-ascorbic acid Substances 0.000 claims 2
- 235000000069 L-ascorbic acid Nutrition 0.000 claims 2
- UEEJHVSXFDXPFK-UHFFFAOYSA-N N-dimethylaminoethanol Chemical compound CN(C)CCO UEEJHVSXFDXPFK-UHFFFAOYSA-N 0.000 claims 2
- AKNUHUCEWALCOI-UHFFFAOYSA-N N-ethyldiethanolamine Chemical compound OCCN(CC)CCO AKNUHUCEWALCOI-UHFFFAOYSA-N 0.000 claims 2
- SLINHMUFWFWBMU-UHFFFAOYSA-N Triisopropanolamine Chemical compound CC(O)CN(CC(C)O)CC(C)O SLINHMUFWFWBMU-UHFFFAOYSA-N 0.000 claims 2
- 239000001089 [(2R)-oxolan-2-yl]methanol Substances 0.000 claims 2
- LHIJANUOQQMGNT-UHFFFAOYSA-N aminoethylethanolamine Chemical compound NCCNCCO LHIJANUOQQMGNT-UHFFFAOYSA-N 0.000 claims 2
- 229960005070 ascorbic acid Drugs 0.000 claims 2
- QRUDEWIWKLJBPS-UHFFFAOYSA-N benzotriazole Chemical compound C1=CC=C2N[N][N]C2=C1 QRUDEWIWKLJBPS-UHFFFAOYSA-N 0.000 claims 2
- 239000012964 benzotriazole Substances 0.000 claims 2
- 238000005260 corrosion Methods 0.000 claims 2
- 230000007797 corrosion Effects 0.000 claims 2
- ZBCBWPMODOFKDW-UHFFFAOYSA-N diethanolamine Chemical compound OCCNCCO ZBCBWPMODOFKDW-UHFFFAOYSA-N 0.000 claims 2
- LVTYICIALWPMFW-UHFFFAOYSA-N diisopropanolamine Chemical compound CC(O)CNCC(C)O LVTYICIALWPMFW-UHFFFAOYSA-N 0.000 claims 2
- 229940043276 diisopropanolamine Drugs 0.000 claims 2
- 229940074391 gallic acid Drugs 0.000 claims 2
- 235000004515 gallic acid Nutrition 0.000 claims 2
- 229940051250 hexylene glycol Drugs 0.000 claims 2
- 239000003112 inhibitor Substances 0.000 claims 2
- MOVBJUGHBJJKOW-UHFFFAOYSA-N methyl 2-amino-5-methoxybenzoate Chemical compound COC(=O)C1=CC(OC)=CC=C1N MOVBJUGHBJJKOW-UHFFFAOYSA-N 0.000 claims 2
- CRVGTESFCCXCTH-UHFFFAOYSA-N methyl diethanolamine Chemical compound OCCN(C)CCO CRVGTESFCCXCTH-UHFFFAOYSA-N 0.000 claims 2
- BSYVTEYKTMYBMK-UHFFFAOYSA-N tetrahydrofurfuryl alcohol Chemical compound OCC1CCCO1 BSYVTEYKTMYBMK-UHFFFAOYSA-N 0.000 claims 2
- MWOOGOJBHIARFG-UHFFFAOYSA-N vanillin Chemical compound COC1=CC(C=O)=CC=C1O MWOOGOJBHIARFG-UHFFFAOYSA-N 0.000 claims 2
- 235000012141 vanillin Nutrition 0.000 claims 2
- FGQOOHJZONJGDT-UHFFFAOYSA-N vanillin Natural products COC1=CC(O)=CC(C=O)=C1 FGQOOHJZONJGDT-UHFFFAOYSA-N 0.000 claims 2
- 229940117960 vanillin Drugs 0.000 claims 2
- 238000005406 washing Methods 0.000 claims 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims 1
- 150000001412 amines Chemical class 0.000 claims 1
- 229910052802 copper Inorganic materials 0.000 claims 1
- 239000010949 copper Substances 0.000 claims 1
- 235000021384 green leafy vegetables Nutrition 0.000 claims 1
Applications Claiming Priority (6)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US201261717152P | 2012-10-23 | 2012-10-23 | |
| US61/717,152 | 2012-10-23 | ||
| US201361817134P | 2013-04-29 | 2013-04-29 | |
| US61/817,134 | 2013-04-29 | ||
| US14/010,748 | 2013-08-27 | ||
| US14/010,748 US9536730B2 (en) | 2012-10-23 | 2013-08-27 | Cleaning formulations |
Related Parent Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2013219489A Division JP2014084464A (ja) | 2012-10-23 | 2013-10-22 | クリーニング用組成物 |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2018098635A Division JP2018164091A (ja) | 2012-10-23 | 2018-05-23 | クリーニング用組成物 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2016040382A JP2016040382A (ja) | 2016-03-24 |
| JP2016040382A5 true JP2016040382A5 (enExample) | 2016-10-06 |
| JP6546080B2 JP6546080B2 (ja) | 2019-07-17 |
Family
ID=50484217
Family Applications (3)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2013219489A Pending JP2014084464A (ja) | 2012-10-23 | 2013-10-22 | クリーニング用組成物 |
| JP2015237884A Expired - Fee Related JP6546080B2 (ja) | 2012-10-23 | 2015-12-04 | クリーニング用組成物 |
| JP2018098635A Pending JP2018164091A (ja) | 2012-10-23 | 2018-05-23 | クリーニング用組成物 |
Family Applications Before (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2013219489A Pending JP2014084464A (ja) | 2012-10-23 | 2013-10-22 | クリーニング用組成物 |
Family Applications After (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2018098635A Pending JP2018164091A (ja) | 2012-10-23 | 2018-05-23 | クリーニング用組成物 |
Country Status (7)
| Country | Link |
|---|---|
| US (1) | US9536730B2 (enExample) |
| JP (3) | JP2014084464A (enExample) |
| KR (1) | KR101557979B1 (enExample) |
| CN (1) | CN103777475B (enExample) |
| MY (1) | MY163132A (enExample) |
| SG (1) | SG2013076922A (enExample) |
| TW (1) | TWI563077B (enExample) |
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| TWI572711B (zh) * | 2012-10-16 | 2017-03-01 | 盟智科技股份有限公司 | 半導體製程用的清洗組成物及清洗方法 |
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| US9957469B2 (en) * | 2014-07-14 | 2018-05-01 | Versum Materials Us, Llc | Copper corrosion inhibition system |
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| KR102347656B1 (ko) * | 2014-12-11 | 2022-01-07 | 동우 화인켐 주식회사 | 포토레지스트 애싱 후 잔류물 제거를 위한 세정제 조성물 |
| CN104570629B (zh) * | 2015-02-14 | 2016-04-13 | 江阴江化微电子材料股份有限公司 | —种液晶面板铜膜光阻水系剥离液 |
| CN107406810A (zh) * | 2015-03-31 | 2017-11-28 | 弗萨姆材料美国有限责任公司 | 清洁制剂 |
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| US10233413B2 (en) * | 2015-09-23 | 2019-03-19 | Versum Materials Us, Llc | Cleaning formulations |
| US10400167B2 (en) | 2015-11-25 | 2019-09-03 | Versum Materials Us, Llc | Etching compositions and methods for using same |
| US11035044B2 (en) * | 2017-01-23 | 2021-06-15 | Versum Materials Us, Llc | Etching solution for tungsten and GST films |
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-
2013
- 2013-08-27 US US14/010,748 patent/US9536730B2/en not_active Expired - Fee Related
- 2013-10-16 SG SG2013076922A patent/SG2013076922A/en unknown
- 2013-10-18 TW TW102137823A patent/TWI563077B/zh not_active IP Right Cessation
- 2013-10-21 MY MYPI2013701982A patent/MY163132A/en unknown
- 2013-10-22 KR KR1020130125968A patent/KR101557979B1/ko not_active Expired - Fee Related
- 2013-10-22 JP JP2013219489A patent/JP2014084464A/ja active Pending
- 2013-10-23 CN CN201310504991.2A patent/CN103777475B/zh not_active Expired - Fee Related
-
2015
- 2015-12-04 JP JP2015237884A patent/JP6546080B2/ja not_active Expired - Fee Related
-
2018
- 2018-05-23 JP JP2018098635A patent/JP2018164091A/ja active Pending
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