TWI800025B - 清洗水溶液 - Google Patents

清洗水溶液 Download PDF

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Publication number
TWI800025B
TWI800025B TW110137393A TW110137393A TWI800025B TW I800025 B TWI800025 B TW I800025B TW 110137393 A TW110137393 A TW 110137393A TW 110137393 A TW110137393 A TW 110137393A TW I800025 B TWI800025 B TW I800025B
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TW
Taiwan
Prior art keywords
cleaning solution
cleaning
solution
Prior art date
Application number
TW110137393A
Other languages
English (en)
Other versions
TW202315933A (zh
Inventor
郭幸宜
廖晉毅
Original Assignee
德揚科技股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Application filed by 德揚科技股份有限公司 filed Critical 德揚科技股份有限公司
Priority to TW110137393A priority Critical patent/TWI800025B/zh
Publication of TW202315933A publication Critical patent/TW202315933A/zh
Application granted granted Critical
Publication of TWI800025B publication Critical patent/TWI800025B/zh

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TW110137393A 2021-10-07 2021-10-07 清洗水溶液 TWI800025B (zh)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW110137393A TWI800025B (zh) 2021-10-07 2021-10-07 清洗水溶液

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW110137393A TWI800025B (zh) 2021-10-07 2021-10-07 清洗水溶液

Publications (2)

Publication Number Publication Date
TW202315933A TW202315933A (zh) 2023-04-16
TWI800025B true TWI800025B (zh) 2023-04-21

Family

ID=86943141

Family Applications (1)

Application Number Title Priority Date Filing Date
TW110137393A TWI800025B (zh) 2021-10-07 2021-10-07 清洗水溶液

Country Status (1)

Country Link
TW (1) TWI800025B (zh)

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1716104A (zh) * 2004-06-29 2006-01-04 关东化学株式会社 光致抗蚀剂残渣及聚合物残渣的除去组合物
CN102399648A (zh) * 2010-09-10 2012-04-04 安集微电子（上海）有限公司 一种含氟清洗液
TW201416436A (zh) * 2012-10-23 2014-05-01 Air Prod & Chem 清潔配方
TW202039812A (zh) * 2019-03-26 2020-11-01 日商富士軟片電子材料股份有限公司 洗淨液
TW202124693A (zh) * 2019-12-26 2021-07-01 日商富士軟片電子材料股份有限公司 洗淨液及洗淨方法

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1716104A (zh) * 2004-06-29 2006-01-04 关东化学株式会社 光致抗蚀剂残渣及聚合物残渣的除去组合物
CN102399648A (zh) * 2010-09-10 2012-04-04 安集微电子（上海）有限公司 一种含氟清洗液
TW201416436A (zh) * 2012-10-23 2014-05-01 Air Prod & Chem 清潔配方
TW202039812A (zh) * 2019-03-26 2020-11-01 日商富士軟片電子材料股份有限公司 洗淨液
TW202124693A (zh) * 2019-12-26 2021-07-01 日商富士軟片電子材料股份有限公司 洗淨液及洗淨方法

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Publication number Publication date
TW202315933A (zh) 2023-04-16

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