JP2015529161A5 - - Google Patents

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JP2015529161A5
JP2015529161A5 JP2015533244A JP2015533244A JP2015529161A5 JP 2015529161 A5 JP2015529161 A5 JP 2015529161A5 JP 2015533244 A JP2015533244 A JP 2015533244A JP 2015533244 A JP2015533244 A JP 2015533244A JP 2015529161 A5 JP2015529161 A5 JP 2015529161A5
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workpiece
laser pulse
fluence
modify
irradiated
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JP2015533244A
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JP6397821B2 (ja
JP2015529161A (ja
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Priority claimed from US14/032,829 external-priority patent/US9610653B2/en
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JP2015533244A 2012-09-21 2013-09-23 ワークピースの分離のための方法及び装置 Expired - Fee Related JP6397821B2 (ja)

Applications Claiming Priority (11)

Application Number Priority Date Filing Date Title
US201261704038P 2012-09-21 2012-09-21
US61/704,038 2012-09-21
US201261735489P 2012-12-10 2012-12-10
US61/735,489 2012-12-10
US201361766274P 2013-02-19 2013-02-19
US61/766,274 2013-02-19
US201361866736P 2013-08-16 2013-08-16
US61/866,736 2013-08-16
US14/032,829 2013-09-20
US14/032,829 US9610653B2 (en) 2012-09-21 2013-09-20 Method and apparatus for separation of workpieces and articles produced thereby
PCT/US2013/061162 WO2014047549A1 (en) 2012-09-21 2013-09-23 Method and apparatus for separation of workpieces and articles produced thereby

Publications (3)

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JP2015529161A JP2015529161A (ja) 2015-10-05
JP2015529161A5 true JP2015529161A5 (enExample) 2016-11-24
JP6397821B2 JP6397821B2 (ja) 2018-09-26

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JP2015533244A Expired - Fee Related JP6397821B2 (ja) 2012-09-21 2013-09-23 ワークピースの分離のための方法及び装置

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US (1) US9610653B2 (enExample)
JP (1) JP6397821B2 (enExample)
KR (1) KR20150056597A (enExample)
CN (1) CN104684677B (enExample)
TW (1) TWI637807B (enExample)
WO (1) WO2014047549A1 (enExample)

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