JP5345334B2 - 脆性材料の熱応力割断方法 - Google Patents
脆性材料の熱応力割断方法 Download PDFInfo
- Publication number
- JP5345334B2 JP5345334B2 JP2008100887A JP2008100887A JP5345334B2 JP 5345334 B2 JP5345334 B2 JP 5345334B2 JP 2008100887 A JP2008100887 A JP 2008100887A JP 2008100887 A JP2008100887 A JP 2008100887A JP 5345334 B2 JP5345334 B2 JP 5345334B2
- Authority
- JP
- Japan
- Prior art keywords
- laser
- laser beam
- glass
- heating
- thermal stress
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B33/00—Severing cooled glass
- C03B33/09—Severing cooled glass by thermal shock
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D1/00—Working stone or stone-like materials, e.g. brick, concrete or glass, not provided for elsewhere; Machines, devices, tools therefor
- B28D1/22—Working stone or stone-like materials, e.g. brick, concrete or glass, not provided for elsewhere; Machines, devices, tools therefor by cutting, e.g. incising
- B28D1/221—Working stone or stone-like materials, e.g. brick, concrete or glass, not provided for elsewhere; Machines, devices, tools therefor by cutting, e.g. incising by thermic methods
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/0604—Shaping the laser beam, e.g. by masks or multi-focusing by a combination of beams
- B23K26/0608—Shaping the laser beam, e.g. by masks or multi-focusing by a combination of beams in the same heat affected zone [HAZ]
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/067—Dividing the beam into multiple beams, e.g. multifocusing
- B23K26/0676—Dividing the beam into multiple beams, e.g. multifocusing into dependently operating sub-beams, e.g. an array of spots with fixed spatial relationship or for performing simultaneously identical operations
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/14—Working by laser beam, e.g. welding, cutting or boring using a fluid stream, e.g. a jet of gas, in conjunction with the laser beam; Nozzles therefor
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/14—Working by laser beam, e.g. welding, cutting or boring using a fluid stream, e.g. a jet of gas, in conjunction with the laser beam; Nozzles therefor
- B23K26/146—Working by laser beam, e.g. welding, cutting or boring using a fluid stream, e.g. a jet of gas, in conjunction with the laser beam; Nozzles therefor the fluid stream containing a liquid
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/36—Removing material
- B23K26/362—Laser etching
- B23K26/364—Laser etching for making a groove or trench, e.g. for scribing a break initiation groove
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/36—Removing material
- B23K26/38—Removing material by boring or cutting
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/36—Removing material
- B23K26/40—Removing material taking account of the properties of the material involved
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/70—Auxiliary operations or equipment
- B23K26/702—Auxiliary equipment
- B23K26/705—Beam measuring device
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B33/00—Severing cooled glass
- C03B33/02—Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor
- C03B33/0222—Scoring using a focussed radiation beam, e.g. laser
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B33/00—Severing cooled glass
- C03B33/02—Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor
- C03B33/023—Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor the sheet or ribbon being in a horizontal position
- C03B33/033—Apparatus for opening score lines in glass sheets
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B33/00—Severing cooled glass
- C03B33/09—Severing cooled glass by thermal shock
- C03B33/091—Severing cooled glass by thermal shock using at least one focussed radiation beam, e.g. laser beam
- C03B33/093—Severing cooled glass by thermal shock using at least one focussed radiation beam, e.g. laser beam using two or more focussed radiation beams
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K2103/00—Materials to be soldered, welded or cut
- B23K2103/50—Inorganic material, e.g. metals, not provided for in B23K2103/02 – B23K2103/26
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/133351—Manufacturing of individual cells out of a plurality of cells, e.g. by dicing
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/005—Optical devices external to the laser cavity, specially adapted for lasers, e.g. for homogenisation of the beam or for manipulating laser pulses, e.g. pulse shaping
Description
特許文献2では、図4に示すレーザビーム1の形状を図5に示す5点ビームによるレーザビームの線状配列9にしている。また、レーザビームの線状配列9による加熱領域Hと冷却点3間の距離Gを固定でなく、可変にしている。実験的に探索された最適距離Gの選択によって、割断特性が一段と改善される。
レーザビーム線状配列9の生成手段の一例を図6に示す。レーザ発振器から射出されビームスプリッター14に入射するレーザビームBは、無反射面11を通過してビームスプリッター14に入る。その後、部分反射面13で反射され、射出光b1と反射光になる。反射光は全反射面10で反射され、その反射光は部分反射面13によって、同様に射出光b2と反射光になる。これを4回繰り返した後、射出光b5は5本目のビームになって、無反射面12を透過する。このようにして、1本の入射レーザビームBは5本の射出ビームb1、b2、b3、b4、b5に変換される。こうした線状配列9によるレーザビームの使用によってガラス割断特性は一段と改善された。
ビーム走査方向に対して同一線上に配列した複数群のレーザビームはそれぞれ複数の独立したレーザ発振器からの射出ビームにより発生させることができる。
複数のレーザビーム群は少なくとも主として初期加熱及び昇温を担当する群と、主として温度維持を担当する群に分類され、おのおのの群において加熱に最適なレーザ光強度分布を持たせるようにする。
複数のレーザ発振器は、それぞれレーザ出力の大きさを測定するパワーメータを備え、フィードバック制御により出力を安定化させるように制御する。
また、複数群のレーザビームを1つのレーザ発振器から射出されたレーザビームをビームスプリッターに入射して発生させた複数本の射出光により形成することもできる。
また、レーザビーム照射により加熱された脆性材料の加熱位置からビーム走査線上の後方位置に水や空気などの冷却媒体を照射して冷却したり、レーザビーム照射により加熱された脆性材料のビーム走査線にあわせて曲げ応力を印加することにより脆性材料の熱応力割断を促進させることができる。
(1)ガラスの熱応力割断を従来方法に比較して大幅に高速度で行う事ができる。
(2)割断面近傍におけるマイクロクラック発生がなく、ワークの機械強度が高い。
(3)割断面が高品質であり、カレットの付着がなく清浄である。
(4)割断位置精度が高い。
(5)割断面がガラス表面に対して、十分に垂直である。
(6)割断面が鏡面で、面粗さが良好である。
図1は、本発明によるガラスの高速熱応力割断方法の原理を説明する概念図である。図1(a)において、曲線15はレーザ光強度分布を示す。このレーザ光強度分布15を持つレーザビームを静止ガラスの上を照射しながら図1(a)において左方に移動させる。ガラス温度は室温であるが、レーザ光照射によって加熱される。図1(a)において、曲線16で示すのがガラス表面温度分布で、室温からの加熱温度分である。この説明は静止ガラス上をレーザビームが走査する場合を述べているが、レーザビームが静止しており、ガラスが図1(a)において右方に移動していっても同一である。要は、ガラスとレーザビームの位置が相対的に移動すればよい。
加熱先頭部レーザビーム191および温度維持部レーザビーム201で構成されたレーザビームをガラス表面に照射して切断予定線に沿って走査させると、ガラスの表面は表面温度分布16で示すように略一定の温度に加熱されて、ガラス表面に熱応力により亀裂が進行してスクライブ線が形成される。亀裂はガラスの熱伝導によりガラスの深さ方向にも伸びて亀裂がガラスの裏面に達すればガラスは割断される。亀裂がガラスの裏面に達しない場合は、脆性材料のビーム走査線に沿って形成されたスクライブ線にあわせて曲げ応力を印加することにより割断させることができる。
なお、図5のように、レーザビーム照射により加熱されたガラスの加熱領域Hからビーム走査線上の後方に離間した位置3に水や空気などの冷却媒体を照射して冷却することにより脆性材料の熱応力割断を促進させることができる。
その他の構成および動作は実施例1と同一であるので、説明を省略する。
2 引張り応力
3 冷却点
4 圧縮応力
5 表面スクライブ
6 ガラス板
7 走査方向
8 初亀裂
9 レーザビームの線状配列
10 全反射面
11 無反射面
12 無反射面
13 部分反射面
14 ビームスプリッター
15 レーザ光強度分布
16 ガラス表面温度分布
17 レーザ光強度分布
18 ガラス表面温度分布
19 先頭加熱部レーザビーム
191 先頭加熱部レーザビーム
192 先頭加熱部レーザビーム
20 温度維持部レーザビーム
201 温度維持部レーザビーム
202 温度維持部レーザビーム
Claims (4)
- レーザ発振器から射出されるレーザビーム照射によって脆性材料を加熱し、熱応力によって前記脆性材料を割断する脆性材料の熱応力割断方法において、加熱を行なうレーザビームを、初期加熱、昇温を行なう第1のレーザビームおよび温度維持を行なう第2のレーザビームから構成し、前記第1のレーザビームおよび第2のレーザビームを前記脆性材料の照射位置において互いに重ならないようにビーム走査方向に対して同一線上に順次配列し、前記第1のレーザビームおよび第2のレーザビームの各々のレーザ光強度を互いに独立に変化させて前記第1のレーザビームおよび第2のレーザビームで構成された加熱を行うレーザビームのレーザ光強度分布を制御することを特徴とする脆性材料の熱応力割断方法。
- 第1および第2のレーザビームを複数の独立したレーザ発振器からの射出ビームにより発生させることを特徴とする請求項1に記載の脆性材料の熱応力割断方法。
- 第1および第2のレーザビームをそれぞれ1つのレーザ発振器から射出されたレーザビームをビームスプリッターに入射して発生させた複数本の射出光により形成することを特徴とする請求項1に記載の脆性材料の熱応力割断方法。
- 第1および第2のレーザビーム照射により加熱された脆性材料の加熱位置からビーム走査線上の後方位置を冷却することを特徴とする請求項1に記載の脆性材料の熱応力割断方法。
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2008100887A JP5345334B2 (ja) | 2008-04-08 | 2008-04-08 | 脆性材料の熱応力割断方法 |
US12/417,112 US8791385B2 (en) | 2008-04-08 | 2009-04-02 | High speed laser scribing method of fragile material |
KR1020090029335A KR101296030B1 (ko) | 2008-04-08 | 2009-04-06 | 취성 재료의 열응력 할단방법 |
TW098111380A TWI460044B (zh) | 2008-04-08 | 2009-04-06 | Thermal Stress Cutting Method for Brittle Materials |
CN200910134039.1A CN101559626B (zh) | 2008-04-08 | 2009-04-08 | 脆性材料的热应力割断方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2008100887A JP5345334B2 (ja) | 2008-04-08 | 2008-04-08 | 脆性材料の熱応力割断方法 |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2009248160A JP2009248160A (ja) | 2009-10-29 |
JP2009248160A5 JP2009248160A5 (ja) | 2010-08-12 |
JP5345334B2 true JP5345334B2 (ja) | 2013-11-20 |
Family
ID=41218683
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2008100887A Expired - Fee Related JP5345334B2 (ja) | 2008-04-08 | 2008-04-08 | 脆性材料の熱応力割断方法 |
Country Status (5)
Country | Link |
---|---|
US (1) | US8791385B2 (ja) |
JP (1) | JP5345334B2 (ja) |
KR (1) | KR101296030B1 (ja) |
CN (1) | CN101559626B (ja) |
TW (1) | TWI460044B (ja) |
Families Citing this family (63)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8232687B2 (en) | 2006-04-26 | 2012-07-31 | Raydiance, Inc. | Intelligent laser interlock system |
US9130344B2 (en) | 2006-01-23 | 2015-09-08 | Raydiance, Inc. | Automated laser tuning |
CN101462822B (zh) * | 2007-12-21 | 2012-08-29 | 鸿富锦精密工业(深圳)有限公司 | 具有通孔的脆性非金属工件及其加工方法 |
KR20120073249A (ko) * | 2009-08-28 | 2012-07-04 | 코닝 인코포레이티드 | 화학적으로 강화된 유리 기판으로부터 제품을 레이저 절단하기 위한 방법 |
US8932510B2 (en) * | 2009-08-28 | 2015-01-13 | Corning Incorporated | Methods for laser cutting glass substrates |
US8946590B2 (en) | 2009-11-30 | 2015-02-03 | Corning Incorporated | Methods for laser scribing and separating glass substrates |
KR101262923B1 (ko) * | 2010-08-17 | 2013-05-09 | 주식회사 이오테크닉스 | 레이저를 이용한 스크라이빙 방법 및 스크라이빙 장치 |
TWI513670B (zh) | 2010-08-31 | 2015-12-21 | Corning Inc | 分離強化玻璃基板之方法 |
WO2012030700A1 (en) | 2010-08-31 | 2012-03-08 | First Solar, Inc | System and method for laser modulation |
WO2012037465A1 (en) | 2010-09-16 | 2012-03-22 | Raydiance, Inc. | Laser based processing of layered materials |
KR101800223B1 (ko) * | 2011-06-08 | 2017-11-22 | 니폰 덴키 가라스 가부시키가이샤 | 판형상 유리의 절단방법 및 그 절단장치 |
US10239160B2 (en) * | 2011-09-21 | 2019-03-26 | Coherent, Inc. | Systems and processes that singulate materials |
KR101300575B1 (ko) * | 2011-09-30 | 2013-08-27 | 앰코 테크놀로지 코리아 주식회사 | 반도체 패키지 제조용 레이저 가공 장치 및 방법 |
KR20140129055A (ko) * | 2012-02-28 | 2014-11-06 | 일렉트로 싸이언티픽 인더스트리이즈 인코포레이티드 | 강화 유리를 분리하는 방법과 장치 및 이에 의해 제조된 물품 |
US9938180B2 (en) | 2012-06-05 | 2018-04-10 | Corning Incorporated | Methods of cutting glass using a laser |
US9610653B2 (en) | 2012-09-21 | 2017-04-04 | Electro Scientific Industries, Inc. | Method and apparatus for separation of workpieces and articles produced thereby |
WO2014079478A1 (en) | 2012-11-20 | 2014-05-30 | Light In Light Srl | High speed laser processing of transparent materials |
EP2754524B1 (de) | 2013-01-15 | 2015-11-25 | Corning Laser Technologies GmbH | Verfahren und Vorrichtung zum laserbasierten Bearbeiten von flächigen Substraten, d.h. Wafer oder Glaselement, unter Verwendung einer Laserstrahlbrennlinie |
US9701564B2 (en) | 2013-01-15 | 2017-07-11 | Corning Incorporated | Systems and methods of glass cutting by inducing pulsed laser perforations into glass articles |
WO2014130830A1 (en) | 2013-02-23 | 2014-08-28 | Raydiance, Inc. | Shaping of brittle materials with controlled surface and bulk properties |
CN104014936B (zh) * | 2013-02-28 | 2016-12-28 | 大族激光科技产业集团股份有限公司 | 高分子材料工件的激光加工方法及激光切割系统 |
EP2781296B1 (de) | 2013-03-21 | 2020-10-21 | Corning Laser Technologies GmbH | Vorrichtung und verfahren zum ausschneiden von konturen aus flächigen substraten mittels laser |
US9676167B2 (en) * | 2013-12-17 | 2017-06-13 | Corning Incorporated | Laser processing of sapphire substrate and related applications |
US10442719B2 (en) | 2013-12-17 | 2019-10-15 | Corning Incorporated | Edge chamfering methods |
US9850160B2 (en) | 2013-12-17 | 2017-12-26 | Corning Incorporated | Laser cutting of display glass compositions |
US9701563B2 (en) | 2013-12-17 | 2017-07-11 | Corning Incorporated | Laser cut composite glass article and method of cutting |
US9815730B2 (en) | 2013-12-17 | 2017-11-14 | Corning Incorporated | Processing 3D shaped transparent brittle substrate |
US20150165560A1 (en) | 2013-12-17 | 2015-06-18 | Corning Incorporated | Laser processing of slots and holes |
US9517963B2 (en) | 2013-12-17 | 2016-12-13 | Corning Incorporated | Method for rapid laser drilling of holes in glass and products made therefrom |
US11556039B2 (en) | 2013-12-17 | 2023-01-17 | Corning Incorporated | Electrochromic coated glass articles and methods for laser processing the same |
US9687936B2 (en) | 2013-12-17 | 2017-06-27 | Corning Incorporated | Transparent material cutting with ultrafast laser and beam optics |
EP3166895B1 (en) | 2014-07-08 | 2021-11-24 | Corning Incorporated | Methods and apparatuses for laser processing materials |
WO2016010949A1 (en) | 2014-07-14 | 2016-01-21 | Corning Incorporated | Method and system for forming perforations |
EP3552753A3 (en) * | 2014-07-14 | 2019-12-11 | Corning Incorporated | System for and method of processing transparent materials using laser beam focal lines adjustable in length and diameter |
US9617180B2 (en) | 2014-07-14 | 2017-04-11 | Corning Incorporated | Methods and apparatuses for fabricating glass articles |
JP6788571B2 (ja) | 2014-07-14 | 2020-11-25 | コーニング インコーポレイテッド | 界面ブロック、そのような界面ブロックを使用する、ある波長範囲内で透過する基板を切断するためのシステムおよび方法 |
US10335902B2 (en) | 2014-07-14 | 2019-07-02 | Corning Incorporated | Method and system for arresting crack propagation |
US10047001B2 (en) | 2014-12-04 | 2018-08-14 | Corning Incorporated | Glass cutting systems and methods using non-diffracting laser beams |
EP3708548A1 (en) | 2015-01-12 | 2020-09-16 | Corning Incorporated | Laser cutting of thermally tempered substrates using the multiphoton absorption method |
US11773004B2 (en) | 2015-03-24 | 2023-10-03 | Corning Incorporated | Laser cutting and processing of display glass compositions |
JP2018516215A (ja) | 2015-03-27 | 2018-06-21 | コーニング インコーポレイテッド | 気体透過性窓、および、その製造方法 |
DE102015104802A1 (de) * | 2015-03-27 | 2016-09-29 | Schott Ag | Verfahren zum Trennen von Glas mittels eines Lasers, sowie verfahrensgemäß hergestelltes Glaserzeugnis |
US11420894B2 (en) * | 2015-04-24 | 2022-08-23 | Nanoplus Ltd. | Brittle object cutting apparatus and cutting method thereof |
EP3319911B1 (en) | 2015-07-10 | 2023-04-19 | Corning Incorporated | Methods of continuous fabrication of holes in flexible substrate sheets and products relating to the same |
WO2017192835A1 (en) | 2016-05-06 | 2017-11-09 | Corning Incorporated | Laser cutting and removal of contoured shapes from transparent substrates |
US10410883B2 (en) | 2016-06-01 | 2019-09-10 | Corning Incorporated | Articles and methods of forming vias in substrates |
US10794679B2 (en) | 2016-06-29 | 2020-10-06 | Corning Incorporated | Method and system for measuring geometric parameters of through holes |
CN109803934A (zh) | 2016-07-29 | 2019-05-24 | 康宁股份有限公司 | 用于激光处理的装置和方法 |
WO2018044843A1 (en) | 2016-08-30 | 2018-03-08 | Corning Incorporated | Laser processing of transparent materials |
US10730783B2 (en) | 2016-09-30 | 2020-08-04 | Corning Incorporated | Apparatuses and methods for laser processing transparent workpieces using non-axisymmetric beam spots |
EP3848333A1 (en) | 2016-10-24 | 2021-07-14 | Corning Incorporated | Substrate processing station for laser-based machining of sheet-like glass substrates |
US10752534B2 (en) | 2016-11-01 | 2020-08-25 | Corning Incorporated | Apparatuses and methods for laser processing laminate workpiece stacks |
US10688599B2 (en) | 2017-02-09 | 2020-06-23 | Corning Incorporated | Apparatus and methods for laser processing transparent workpieces using phase shifted focal lines |
US11078112B2 (en) | 2017-05-25 | 2021-08-03 | Corning Incorporated | Silica-containing substrates with vias having an axially variable sidewall taper and methods for forming the same |
US10580725B2 (en) | 2017-05-25 | 2020-03-03 | Corning Incorporated | Articles having vias with geometry attributes and methods for fabricating the same |
US10626040B2 (en) | 2017-06-15 | 2020-04-21 | Corning Incorporated | Articles capable of individual singulation |
CN107442934A (zh) * | 2017-07-14 | 2017-12-08 | 华中科技大学 | 一种基于能量带拼接的激光焊接设备 |
US11554984B2 (en) | 2018-02-22 | 2023-01-17 | Corning Incorporated | Alkali-free borosilicate glasses with low post-HF etch roughness |
CN109396661A (zh) * | 2018-11-09 | 2019-03-01 | 上海申和热磁电子有限公司 | 一种用于co2激光引导光纤加工氧化铝陶瓷的加工方法 |
JP7420548B2 (ja) | 2019-12-24 | 2024-01-23 | ファナック株式会社 | ワーク搬送システム |
CN113245701A (zh) * | 2021-04-14 | 2021-08-13 | 哈尔滨焊接研究院有限公司 | 降低钛合金厚板窄间隙激光填丝焊接头应力和变形的方法及装置 |
CN114192985B (zh) * | 2021-11-30 | 2023-04-21 | 深圳信息职业技术学院 | 磁场辅助激光抛光装置与磁场辅助抛光方法 |
CN114734153B (zh) * | 2022-03-31 | 2023-02-14 | 武汉华日精密激光股份有限公司 | 一种用于激光器加工脆性材料的裂片方法及系统 |
Family Cites Families (29)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE1244346B (de) * | 1964-10-19 | 1967-07-13 | Menzel Gerhard Glasbearbeitung | Verfahren zum Schneiden von Glas |
US3795502A (en) * | 1972-05-26 | 1974-03-05 | Ppg Industries Inc | Method of cutting glass |
US4546231A (en) * | 1983-11-14 | 1985-10-08 | Group Ii Manufacturing Ltd. | Creation of a parting zone in a crystal structure |
EP0397237B1 (en) * | 1989-05-08 | 1994-05-18 | Koninklijke Philips Electronics N.V. | Method of cleaving a plate of brittle material |
DE69013047T2 (de) * | 1989-05-08 | 1995-04-13 | Philips Nv | Verfahren zum Spalten einer Platte aus sprödem Werkstoff. |
US5132505A (en) * | 1990-03-21 | 1992-07-21 | U.S. Philips Corporation | Method of cleaving a brittle plate and device for carrying out the method |
RU2024441C1 (ru) * | 1992-04-02 | 1994-12-15 | Владимир Степанович Кондратенко | Способ резки неметаллических материалов |
JP3210934B2 (ja) * | 1994-06-08 | 2001-09-25 | 長崎県 | 脆性材料の割断方法 |
US5776220A (en) * | 1994-09-19 | 1998-07-07 | Corning Incorporated | Method and apparatus for breaking brittle materials |
KR100394409B1 (ko) * | 1995-01-13 | 2003-11-28 | 도카이 고교 미싱 가부시키가이샤 | 레이저가공기및레이저가공기능을가진미싱 |
US5603853A (en) * | 1995-02-28 | 1997-02-18 | The Twentyfirst Century Corporation | Method of high energy density radiation beam lap welding |
JP3923526B2 (ja) * | 1995-08-31 | 2007-06-06 | コーニング インコーポレイテッド | 壊れやすい材料の分断方法および装置 |
JPH1034364A (ja) * | 1996-07-25 | 1998-02-10 | Souei Tsusho Kk | 複数点熱源による脆性材料の割断加工方法 |
JPH10128567A (ja) * | 1996-10-30 | 1998-05-19 | Nec Kansai Ltd | レーザ割断方法 |
MY120533A (en) * | 1997-04-14 | 2005-11-30 | Schott Ag | Method and apparatus for cutting through a flat workpiece made of brittle material, especially glass. |
JP3498895B2 (ja) * | 1997-09-25 | 2004-02-23 | シャープ株式会社 | 基板の切断方法および表示パネルの製造方法 |
US6407360B1 (en) * | 1998-08-26 | 2002-06-18 | Samsung Electronics, Co., Ltd. | Laser cutting apparatus and method |
US6420678B1 (en) * | 1998-12-01 | 2002-07-16 | Brian L. Hoekstra | Method for separating non-metallic substrates |
US6653593B2 (en) * | 1999-10-08 | 2003-11-25 | Nanovia, Lp | Control system for ablating high-density array of vias or indentation in surface of object |
JP4659300B2 (ja) * | 2000-09-13 | 2011-03-30 | 浜松ホトニクス株式会社 | レーザ加工方法及び半導体チップの製造方法 |
KR100673073B1 (ko) * | 2000-10-21 | 2007-01-22 | 삼성전자주식회사 | 레이저 빔을 이용한 비금속 기판의 절단 방법 및 장치 |
US6744009B1 (en) * | 2002-04-02 | 2004-06-01 | Seagate Technology Llc | Combined laser-scribing and laser-breaking for shaping of brittle substrates |
JP3792639B2 (ja) * | 2002-11-08 | 2006-07-05 | 株式会社日本エミック | 切断装置 |
KR100497820B1 (ko) * | 2003-01-06 | 2005-07-01 | 로체 시스템즈(주) | 유리판절단장치 |
ATE375023T1 (de) * | 2003-04-29 | 2007-10-15 | Spi Lasers Uk Ltd | Laservorrichtung zur materialbearbeitung |
JP4175636B2 (ja) * | 2003-10-31 | 2008-11-05 | 株式会社日本製鋼所 | ガラスの切断方法 |
JP2005161361A (ja) | 2003-12-02 | 2005-06-23 | Fujitsu Ltd | レーザ加工機の管理方法及びレーザ加工機 |
JP2005212364A (ja) | 2004-01-30 | 2005-08-11 | Shibaura Mechatronics Corp | 脆性材料の割断加工システム及びその方法 |
JP2007301631A (ja) * | 2006-05-15 | 2007-11-22 | Shibaura Mechatronics Corp | 割断装置及び割断方法 |
-
2008
- 2008-04-08 JP JP2008100887A patent/JP5345334B2/ja not_active Expired - Fee Related
-
2009
- 2009-04-02 US US12/417,112 patent/US8791385B2/en not_active Expired - Fee Related
- 2009-04-06 TW TW098111380A patent/TWI460044B/zh not_active IP Right Cessation
- 2009-04-06 KR KR1020090029335A patent/KR101296030B1/ko active IP Right Grant
- 2009-04-08 CN CN200910134039.1A patent/CN101559626B/zh not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
KR20090107417A (ko) | 2009-10-13 |
TWI460044B (zh) | 2014-11-11 |
JP2009248160A (ja) | 2009-10-29 |
CN101559626B (zh) | 2014-11-05 |
KR101296030B1 (ko) | 2013-08-12 |
TW200948525A (en) | 2009-12-01 |
CN101559626A (zh) | 2009-10-21 |
US20100089882A1 (en) | 2010-04-15 |
US8791385B2 (en) | 2014-07-29 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP5345334B2 (ja) | 脆性材料の熱応力割断方法 | |
JP5113462B2 (ja) | 脆性材料基板の面取り方法 | |
KR101329477B1 (ko) | 단일 방사 빔으로 취성 재료를 스코어링 및 분리하는 방법 및 장치 | |
JP5325209B2 (ja) | 脆性材料基板の加工方法 | |
JP5050099B2 (ja) | 脆性材料基板の加工方法 | |
JP2009248160A5 (ja) | ||
JP2011079690A (ja) | 回折格子を用いた厚板ガラスのレーザ熱応力割断 | |
KR101404250B1 (ko) | 취성 재료의 분할 장치 및 할단 방법 | |
JP2009084089A (ja) | ガラス切断装置及び方法 | |
JP2009040665A (ja) | 脆性材料のフルボディ割断方法 | |
JP2005212364A (ja) | 脆性材料の割断加工システム及びその方法 | |
JP2008247038A (ja) | 脆性材料のフルカット割断方法 | |
JP2007260749A (ja) | レーザ加工方法、レーザ加工装置及び脆性材料の加工品 | |
JP2007076077A (ja) | 脆性材料をフルカットするレーザ割断方法および装置 | |
JP5590642B2 (ja) | スクライブ加工装置及びスクライブ加工方法 | |
JP2004035315A (ja) | 脆性材料基板の分断方法および脆性材料基板分断装置 | |
JP2007261885A (ja) | 重ねガラスの割断方法 | |
JP2009262408A (ja) | 脆性材料基板のスクライブ方法および装置 | |
KR20180035111A (ko) | 취성 재료 기판의 분단 방법 그리고 분단 장치 | |
KR100659931B1 (ko) | 레이저를 이용한 기판 절단 장치 및 그 방법 | |
KR102074737B1 (ko) | 레이저 스팟 빔을 이용한 절단 장치 | |
JP2008127224A (ja) | 脆性材料をフルカットするレーザ割断方法 | |
JP7164136B2 (ja) | レーザー割断方法 | |
JP2009196175A (ja) | 割断装置、割断方法、およびフラットパネルディスプレイの製造方法 | |
JP2008100412A (ja) | レーザ割断方法 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A521 | Written amendment |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20100629 |
|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20100629 |
|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20120126 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20120203 |
|
A521 | Written amendment |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20120402 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20130107 |
|
A521 | Written amendment |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20130301 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20130801 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20130814 |
|
R150 | Certificate of patent or registration of utility model |
Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
S111 | Request for change of ownership or part of ownership |
Free format text: JAPANESE INTERMEDIATE CODE: R313113 |
|
R360 | Written notification for declining of transfer of rights |
Free format text: JAPANESE INTERMEDIATE CODE: R360 |
|
R370 | Written measure of declining of transfer procedure |
Free format text: JAPANESE INTERMEDIATE CODE: R370 |
|
S111 | Request for change of ownership or part of ownership |
Free format text: JAPANESE INTERMEDIATE CODE: R313113 |
|
R350 | Written notification of registration of transfer |
Free format text: JAPANESE INTERMEDIATE CODE: R350 |
|
LAPS | Cancellation because of no payment of annual fees |