JP2013078810A - 真空吸着装置 - Google Patents

真空吸着装置 Download PDF

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Publication number
JP2013078810A
JP2013078810A JP2011218831A JP2011218831A JP2013078810A JP 2013078810 A JP2013078810 A JP 2013078810A JP 2011218831 A JP2011218831 A JP 2011218831A JP 2011218831 A JP2011218831 A JP 2011218831A JP 2013078810 A JP2013078810 A JP 2013078810A
Authority
JP
Japan
Prior art keywords
suction
workpiece
sheet
vacuum suction
negative pressure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2011218831A
Other languages
English (en)
Japanese (ja)
Other versions
JP2013078810A5 (enExample
Inventor
Yoshihiro Fukano
喜弘 深野
Shuzo Sakurai
修三 櫻井
Masahiko Someya
雅彦 染谷
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
SMC Corp
Original Assignee
SMC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by SMC Corp filed Critical SMC Corp
Priority to JP2011218831A priority Critical patent/JP2013078810A/ja
Priority to US13/607,983 priority patent/US8960749B2/en
Priority to TW101133253A priority patent/TWI538791B/zh
Priority to KR1020120104947A priority patent/KR102083919B1/ko
Priority to CN2012103777357A priority patent/CN103029985A/zh
Priority to DE102012019327A priority patent/DE102012019327A1/de
Publication of JP2013078810A publication Critical patent/JP2013078810A/ja
Publication of JP2013078810A5 publication Critical patent/JP2013078810A5/ja
Pending legal-status Critical Current

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
    • B65G47/74—Feeding, transfer, or discharging devices of particular kinds or types
    • B65G47/90—Devices for picking-up and depositing articles or materials
    • B65G47/91—Devices for picking-up and depositing articles or materials incorporating pneumatic, e.g. suction, grippers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25B—TOOLS OR BENCH DEVICES NOT OTHERWISE PROVIDED FOR, FOR FASTENING, CONNECTING, DISENGAGING OR HOLDING
    • B25B11/00—Work holders not covered by any preceding group in the subclass, e.g. magnetic work holders, vacuum work holders
    • B25B11/005—Vacuum work holders
    • B25B11/007—Vacuum work holders portable, e.g. handheld
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/6838—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping with gripping and holding devices using a vacuum; Bernoulli devices
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S901/00—Robots
    • Y10S901/30—End effector
    • Y10S901/40—Vacuum or mangetic

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Manipulator (AREA)
JP2011218831A 2011-10-03 2011-10-03 真空吸着装置 Pending JP2013078810A (ja)

Priority Applications (6)

Application Number Priority Date Filing Date Title
JP2011218831A JP2013078810A (ja) 2011-10-03 2011-10-03 真空吸着装置
US13/607,983 US8960749B2 (en) 2011-10-03 2012-09-10 Vacuum suction apparatus
TW101133253A TWI538791B (zh) 2011-10-03 2012-09-12 真空吸附裝置
KR1020120104947A KR102083919B1 (ko) 2011-10-03 2012-09-21 진공흡착장치
CN2012103777357A CN103029985A (zh) 2011-10-03 2012-09-28 真空吸取设备
DE102012019327A DE102012019327A1 (de) 2011-10-03 2012-10-02 Vakuumsaugvorrichtung

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2011218831A JP2013078810A (ja) 2011-10-03 2011-10-03 真空吸着装置

Publications (2)

Publication Number Publication Date
JP2013078810A true JP2013078810A (ja) 2013-05-02
JP2013078810A5 JP2013078810A5 (enExample) 2013-08-15

Family

ID=47878739

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2011218831A Pending JP2013078810A (ja) 2011-10-03 2011-10-03 真空吸着装置

Country Status (6)

Country Link
US (1) US8960749B2 (enExample)
JP (1) JP2013078810A (enExample)
KR (1) KR102083919B1 (enExample)
CN (1) CN103029985A (enExample)
DE (1) DE102012019327A1 (enExample)
TW (1) TWI538791B (enExample)

Cited By (5)

* Cited by examiner, † Cited by third party
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JPWO2016021239A1 (ja) * 2014-08-07 2017-05-25 日本バイリーン株式会社 通気性シート
WO2019130740A1 (ja) * 2017-12-27 2019-07-04 株式会社Sumco 吸着チャック
CN110146239A (zh) * 2019-05-16 2019-08-20 沈阳飞机工业（集团）有限公司 一种弹性试验夹具及使用方法
JP2021115677A (ja) * 2020-01-28 2021-08-10 株式会社ナノテム パッドユニット、真空チャック装置及びワーク搬送装置
JP2025158258A (ja) * 2024-04-04 2025-10-17 アサヒ繊維工業株式会社 吸着プレート及びその製造方法

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FR2997031B1 (fr) * 2012-10-23 2016-07-01 Bel Fromageries Dispositif de prehension d'au moins un produit deformable.
JP6186124B2 (ja) * 2012-12-14 2017-08-23 東京応化工業株式会社 搬送アーム、搬送装置および搬送方法
DE102013201247B4 (de) * 2013-01-25 2018-03-22 J. Schmalz Gmbh Flächensauggreifer
JP6127728B2 (ja) * 2013-05-30 2017-05-17 三星ダイヤモンド工業株式会社 脆性材料基板の搬送ヘッド
JP6163881B2 (ja) * 2013-05-30 2017-07-19 三星ダイヤモンド工業株式会社 脆性材料基板の搬送ヘッド
TWI520258B (zh) * 2013-09-27 2016-02-01 華亞科技股份有限公司 起吊裝置及自動化搬運系統
DE102013017728B4 (de) * 2013-10-23 2015-05-07 Beumer Gmbh & Co. Kg Sauggreifvorrichtung
CN103640912B (zh) * 2013-12-02 2016-01-20 中国航天科技集团公司第五研究院第五一三研究所 一种纳米薄膜转运工装
JP6331656B2 (ja) * 2014-04-28 2018-05-30 三星ダイヤモンド工業株式会社 脆性材料基板の搬送方法及び搬送装置
CN104096980B (zh) * 2014-06-26 2016-01-20 长春光华微电子设备工程中心有限公司 激光切割真空吸附平台
US9435937B2 (en) * 2014-07-15 2016-09-06 Apple Inc. System for assembling optical films for displays
NL2014635B1 (en) * 2015-04-14 2017-01-20 Vmi Holland Bv Gripper, gripper assembly and method for gripping a tire component.
US9993925B2 (en) * 2015-08-25 2018-06-12 The Boeing Company End effector apparatus and methods for handling composite structures
US9917000B2 (en) * 2015-10-01 2018-03-13 Infineon Technologies Ag Wafer carrier, method for manufacturing the same and method for carrying a wafer
CN105398932A (zh) * 2015-12-18 2016-03-16 合肥加亦信息科技有限公司 带防滑吸盘的机械手吊具
US20180015618A1 (en) * 2016-07-15 2018-01-18 Georgia Tech Research Corporation Topologically and mechanically adaptive reversible attachment systems and methods
TW201808651A (zh) * 2016-09-07 2018-03-16 台灣格雷蒙股份有限公司 可撓性基板剝離裝置
EP3296239B1 (de) * 2016-09-20 2023-02-01 Hans-Jürgen Kasprich Greiferanordnung zum erfassen von teigstücken oder backwaren
KR101749997B1 (ko) * 2017-01-17 2017-06-22 주식회사 21세기 Mlcc 적층용 상부금형
NL2018244B1 (en) * 2017-01-27 2018-08-07 Suss Microtec Lithography Gmbh Endeffektor
CN106672619A (zh) * 2017-02-15 2017-05-17 苏州迈瑞微电子有限公司 塑封料转运设备及方法
US10632596B2 (en) 2017-05-30 2020-04-28 James Alan Buckus Apparatus for binding to a surface and method of use thereof
JP2019010692A (ja) * 2017-06-29 2019-01-24 日本電産サンキョー株式会社 産業用ロボットのハンドおよび産業用ロボット
US11227787B2 (en) * 2017-07-14 2022-01-18 Industrial Technology Research Institute Transfer support and transfer module
US20190039838A1 (en) * 2017-08-03 2019-02-07 Soft Robotics, Inc. Robotic gripper for handling meat products
CN107642607B (zh) * 2017-08-16 2020-02-21 Oppo广东移动通信有限公司 治具、密封组件的安装结构及其分离方法
TWI634969B (zh) * 2017-11-10 2018-09-11 大銀微系統股份有限公司 真空吸附平台
TWI638759B (zh) * 2018-04-17 2018-10-21 威光自動化科技股份有限公司 異形薄片物件的負壓吸附器
CN110544661A (zh) * 2018-05-29 2019-12-06 普因特工程有限公司 微led转印头及利用其的微led转印系统
US10625428B2 (en) * 2018-06-26 2020-04-21 Amazon Technologies, Inc. End effector with selectively deformable interface
CN110648956A (zh) * 2018-06-27 2020-01-03 普因特工程有限公司 微发光二极管转印头
CN108995200B (zh) * 2018-08-28 2023-06-30 莱芜钢铁集团有限公司 气体提取式薄膜铺设装置及方法
KR102560167B1 (ko) * 2018-10-04 2023-07-25 코닝 인코포레이티드 디본딩 서포트 장치 및 이를 이용한 디본딩 방법
DE102018126684A1 (de) * 2018-10-25 2020-04-30 J. Schmalz Gmbh Sauggreifer
CN110394713A (zh) * 2019-06-18 2019-11-01 上饶市东腾光学有限公司 一种光学镜片冷加工固定盘
EP4034374A1 (en) * 2019-09-23 2022-08-03 NIKE Innovate C.V. Manufacturing systems for applying materials to articles of apparel and methods of using the same
CN111546363B (zh) * 2020-04-13 2021-10-15 清华大学 多功能自适应可控粘附软体机械手
US11660761B2 (en) * 2020-09-24 2023-05-30 Gm Global Technology Operations, Llc Flexible robotic system using end-effector with pass-through suction modules
US11826904B2 (en) * 2020-11-25 2023-11-28 The Boeing Company End effector, system and method for picking up and placing an object
FR3129865A1 (fr) * 2021-12-02 2023-06-09 Safran Nacelles Préhenseur de patch à forte pégosité
CN114523090A (zh) * 2022-01-25 2022-05-24 烟台路通精密科技股份有限公司 一种大型薄壁件的浸渗方法及装置
JP2023144341A (ja) * 2022-03-28 2023-10-11 Smc株式会社 吸着盤
IT202200015504A1 (it) * 2022-07-22 2024-01-22 Clevertech S P A Apparato per impilare strati di contenitori
KR102696239B1 (ko) 2023-10-31 2024-08-19 주식회사 남경 흡착 베이스
WO2025202966A1 (en) * 2024-03-28 2025-10-02 Sacmi Tech S.P.A. Handling device for substantially flat ceramic articles

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JPS60187144U (ja) * 1985-04-18 1985-12-11 ホ−ヤ株式会社 基板真空吸着構造
JPH06126676A (ja) * 1992-09-04 1994-05-10 Sumitomo Metal Mining Co Ltd 吸着保持具及び吸着吊上げ装置
JP2001239488A (ja) * 2000-02-28 2001-09-04 Central Glass Co Ltd 吸着パッド
JP2002144270A (ja) * 2000-11-06 2002-05-21 Myotoku Ltd 吸着ジグ及び被搬送物の搬送方法
JP2004142056A (ja) * 2002-10-25 2004-05-20 Morinaga & Co Ltd 食品吸着装置および食品移送方法
JP2005228829A (ja) * 2004-02-10 2005-08-25 Nagamine Seisakusho:Kk 通気性材料
JP2006175543A (ja) * 2004-12-22 2006-07-06 Matsushita Electric Ind Co Ltd 部品吸着保持部材及び部品実装ヘッド
JP2008251653A (ja) * 2007-03-29 2008-10-16 Sharp Corp 低負荷搬送装置
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JP2010155331A (ja) * 2009-01-05 2010-07-15 Nissan Motor Co Ltd バキューム式吸着装置およびロボットハンド
JP3164417U (ja) * 2010-09-16 2010-11-25 呉羽テック株式会社 不織布製吸着プレート

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Publication number Priority date Publication date Assignee Title
JPS60187144U (ja) * 1985-04-18 1985-12-11 ホ−ヤ株式会社 基板真空吸着構造
JPH06126676A (ja) * 1992-09-04 1994-05-10 Sumitomo Metal Mining Co Ltd 吸着保持具及び吸着吊上げ装置
JP2001239488A (ja) * 2000-02-28 2001-09-04 Central Glass Co Ltd 吸着パッド
JP2002144270A (ja) * 2000-11-06 2002-05-21 Myotoku Ltd 吸着ジグ及び被搬送物の搬送方法
JP2004142056A (ja) * 2002-10-25 2004-05-20 Morinaga & Co Ltd 食品吸着装置および食品移送方法
JP2005228829A (ja) * 2004-02-10 2005-08-25 Nagamine Seisakusho:Kk 通気性材料
JP2006175543A (ja) * 2004-12-22 2006-07-06 Matsushita Electric Ind Co Ltd 部品吸着保持部材及び部品実装ヘッド
JP2008251653A (ja) * 2007-03-29 2008-10-16 Sharp Corp 低負荷搬送装置
JP2009117552A (ja) * 2007-11-05 2009-05-28 Fuji Electric Systems Co Ltd 吸着ステージ
JP2010155331A (ja) * 2009-01-05 2010-07-15 Nissan Motor Co Ltd バキューム式吸着装置およびロボットハンド
JP3164417U (ja) * 2010-09-16 2010-11-25 呉羽テック株式会社 不織布製吸着プレート

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPWO2016021239A1 (ja) * 2014-08-07 2017-05-25 日本バイリーン株式会社 通気性シート
WO2019130740A1 (ja) * 2017-12-27 2019-07-04 株式会社Sumco 吸着チャック
JP2019117873A (ja) * 2017-12-27 2019-07-18 株式会社Sumco 吸着チャック
KR20200087849A (ko) * 2017-12-27 2020-07-21 가부시키가이샤 사무코 흡착 척
KR102340019B1 (ko) * 2017-12-27 2021-12-15 가부시키가이샤 사무코 흡착 척
CN110146239A (zh) * 2019-05-16 2019-08-20 沈阳飞机工业（集团）有限公司 一种弹性试验夹具及使用方法
CN110146239B (zh) * 2019-05-16 2024-04-16 沈阳飞机工业（集团）有限公司 一种弹性试验夹具及使用方法
JP2021115677A (ja) * 2020-01-28 2021-08-10 株式会社ナノテム パッドユニット、真空チャック装置及びワーク搬送装置
JP2025158258A (ja) * 2024-04-04 2025-10-17 アサヒ繊維工業株式会社 吸着プレート及びその製造方法

Also Published As

Publication number Publication date
KR20130036144A (ko) 2013-04-11
TW201332869A (zh) 2013-08-16
US20130082475A1 (en) 2013-04-04
CN103029985A (zh) 2013-04-10
TWI538791B (zh) 2016-06-21
KR102083919B1 (ko) 2020-03-03
DE102012019327A1 (de) 2013-04-04
US8960749B2 (en) 2015-02-24

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