CN103029985A - 真空吸取设备 - Google Patents

真空吸取设备 Download PDF

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Publication number
CN103029985A
CN103029985A CN2012103777357A CN201210377735A CN103029985A CN 103029985 A CN103029985 A CN 103029985A CN 2012103777357 A CN2012103777357 A CN 2012103777357A CN 201210377735 A CN201210377735 A CN 201210377735A CN 103029985 A CN103029985 A CN 103029985A
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CN
China
Prior art keywords
workpiece
suction
vacsorb
negative pressure
equipment
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN2012103777357A
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English (en)
Chinese (zh)
Inventor
深野喜弘
樱井修三
染谷雅彦
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SMC Corp
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SMC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
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Publication of CN103029985A publication Critical patent/CN103029985A/zh
Pending legal-status Critical Current

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/6838—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping with gripping and holding devices using a vacuum; Bernoulli devices
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
    • B65G47/74—Feeding, transfer, or discharging devices of particular kinds or types
    • B65G47/90—Devices for picking-up and depositing articles or materials
    • B65G47/91—Devices for picking-up and depositing articles or materials incorporating pneumatic, e.g. suction, grippers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25B—TOOLS OR BENCH DEVICES NOT OTHERWISE PROVIDED FOR, FOR FASTENING, CONNECTING, DISENGAGING OR HOLDING
    • B25B11/00—Work holders not covered by any preceding group in the subclass, e.g. magnetic work holders, vacuum work holders
    • B25B11/005—Vacuum work holders
    • B25B11/007—Vacuum work holders portable, e.g. handheld
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S901/00—Robots
    • Y10S901/30—End effector
    • Y10S901/40—Vacuum or mangetic

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Manipulator (AREA)
CN2012103777357A 2011-10-03 2012-09-28 真空吸取设备 Pending CN103029985A (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2011-218831 2011-10-03
JP2011218831A JP2013078810A (ja) 2011-10-03 2011-10-03 真空吸着装置

Publications (1)

Publication Number Publication Date
CN103029985A true CN103029985A (zh) 2013-04-10

Family

ID=47878739

Family Applications (1)

Application Number Title Priority Date Filing Date
CN2012103777357A Pending CN103029985A (zh) 2011-10-03 2012-09-28 真空吸取设备

Country Status (6)

Country Link
US (1) US8960749B2 (enExample)
JP (1) JP2013078810A (enExample)
KR (1) KR102083919B1 (enExample)
CN (1) CN103029985A (enExample)
DE (1) DE102012019327A1 (enExample)
TW (1) TWI538791B (enExample)

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CN103640912A (zh) * 2013-12-02 2014-03-19 中国航天科技集团公司第五研究院第五一三研究所 一种纳米薄膜转运工装
CN104210847A (zh) * 2013-05-30 2014-12-17 三星钻石工业股份有限公司 脆性材料基板的搬送头
CN104512723A (zh) * 2013-09-27 2015-04-15 华亚科技股份有限公司 起吊装置及自动化搬运系统
CN105035761A (zh) * 2014-04-28 2015-11-11 三星钻石工业股份有限公司 脆性材料基板的搬送方法及搬送装置
CN105398932A (zh) * 2015-12-18 2016-03-16 合肥加亦信息科技有限公司 带防滑吸盘的机械手吊具
CN106672619A (zh) * 2017-02-15 2017-05-17 苏州迈瑞微电子有限公司 塑封料转运设备及方法
CN107642607A (zh) * 2017-08-16 2018-01-30 广东欧珀移动通信有限公司 治具、密封组件的安装结构及其分离方法
CN107791660A (zh) * 2016-09-07 2018-03-13 台湾格雷蒙股份有限公司 可挠性基板剥离装置
CN108995200A (zh) * 2018-08-28 2018-12-14 莱芜钢铁集团有限公司 气体提取式薄膜铺设装置及方法
CN109074957A (zh) * 2017-01-17 2018-12-21 21世纪株式会社 Mlcc层叠用上模
CN109205301A (zh) * 2017-06-29 2019-01-15 日本电产三协株式会社 工业用机器人的手及工业用机器人
CN110386457A (zh) * 2018-04-17 2019-10-29 威光自动化设备（南京）有限公司 异形薄片物件的负压吸附器
CN110394713A (zh) * 2019-06-18 2019-11-01 上饶市东腾光学有限公司 一种光学镜片冷加工固定盘
CN110648956A (zh) * 2018-06-27 2020-01-03 普因特工程有限公司 微发光二极管转印头
CN111546363A (zh) * 2020-04-13 2020-08-18 清华大学 多功能自适应可控粘附软体机械手
CN111771272A (zh) * 2017-12-27 2020-10-13 胜高股份有限公司 吸附卡盘
CN114248082A (zh) * 2020-09-24 2022-03-29 通用汽车环球科技运作有限责任公司 使用带有直通抽吸模块的端部执行器的柔性机器人系统
CN114523090A (zh) * 2022-01-25 2022-05-24 烟台路通精密科技股份有限公司 一种大型薄壁件的浸渗方法及装置
WO2025202966A1 (en) * 2024-03-28 2025-10-02 Sacmi Tech S.P.A. Handling device for substantially flat ceramic articles

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FR2997031B1 (fr) * 2012-10-23 2016-07-01 Bel Fromageries Dispositif de prehension d'au moins un produit deformable.
JP6186124B2 (ja) * 2012-12-14 2017-08-23 東京応化工業株式会社 搬送アーム、搬送装置および搬送方法
DE102013201247B4 (de) * 2013-01-25 2018-03-22 J. Schmalz Gmbh Flächensauggreifer
JP6163881B2 (ja) * 2013-05-30 2017-07-19 三星ダイヤモンド工業株式会社 脆性材料基板の搬送ヘッド
DE102013017728B4 (de) * 2013-10-23 2015-05-07 Beumer Gmbh & Co. Kg Sauggreifvorrichtung
CN104096980B (zh) * 2014-06-26 2016-01-20 长春光华微电子设备工程中心有限公司 激光切割真空吸附平台
US9435937B2 (en) * 2014-07-15 2016-09-06 Apple Inc. System for assembling optical films for displays
KR102256834B1 (ko) * 2014-08-07 2021-05-26 니혼바이린 가부시기가이샤 통기성 시트
NL2014635B1 (en) * 2015-04-14 2017-01-20 Vmi Holland Bv Gripper, gripper assembly and method for gripping a tire component.
US9993925B2 (en) * 2015-08-25 2018-06-12 The Boeing Company End effector apparatus and methods for handling composite structures
US9917000B2 (en) * 2015-10-01 2018-03-13 Infineon Technologies Ag Wafer carrier, method for manufacturing the same and method for carrying a wafer
US20180015618A1 (en) * 2016-07-15 2018-01-18 Georgia Tech Research Corporation Topologically and mechanically adaptive reversible attachment systems and methods
EP3296239B1 (de) * 2016-09-20 2023-02-01 Hans-Jürgen Kasprich Greiferanordnung zum erfassen von teigstücken oder backwaren
NL2018244B1 (en) * 2017-01-27 2018-08-07 Suss Microtec Lithography Gmbh Endeffektor
US10632596B2 (en) 2017-05-30 2020-04-28 James Alan Buckus Apparatus for binding to a surface and method of use thereof
US11227787B2 (en) * 2017-07-14 2022-01-18 Industrial Technology Research Institute Transfer support and transfer module
US20190039838A1 (en) * 2017-08-03 2019-02-07 Soft Robotics, Inc. Robotic gripper for handling meat products
TWI634969B (zh) * 2017-11-10 2018-09-11 大銀微系統股份有限公司 真空吸附平台
CN110544661A (zh) * 2018-05-29 2019-12-06 普因特工程有限公司 微led转印头及利用其的微led转印系统
US10625428B2 (en) * 2018-06-26 2020-04-21 Amazon Technologies, Inc. End effector with selectively deformable interface
KR102560167B1 (ko) * 2018-10-04 2023-07-25 코닝 인코포레이티드 디본딩 서포트 장치 및 이를 이용한 디본딩 방법
DE102018126684A1 (de) * 2018-10-25 2020-04-30 J. Schmalz Gmbh Sauggreifer
CN110146239B (zh) * 2019-05-16 2024-04-16 沈阳飞机工业（集团）有限公司 一种弹性试验夹具及使用方法
EP4034374A1 (en) * 2019-09-23 2022-08-03 NIKE Innovate C.V. Manufacturing systems for applying materials to articles of apparel and methods of using the same
JP2021115677A (ja) * 2020-01-28 2021-08-10 株式会社ナノテム パッドユニット、真空チャック装置及びワーク搬送装置
US11826904B2 (en) * 2020-11-25 2023-11-28 The Boeing Company End effector, system and method for picking up and placing an object
FR3129865A1 (fr) * 2021-12-02 2023-06-09 Safran Nacelles Préhenseur de patch à forte pégosité
JP2023144341A (ja) * 2022-03-28 2023-10-11 Smc株式会社 吸着盤
IT202200015504A1 (it) * 2022-07-22 2024-01-22 Clevertech S P A Apparato per impilare strati di contenitori
KR102696239B1 (ko) 2023-10-31 2024-08-19 주식회사 남경 흡착 베이스
JP2025158258A (ja) * 2024-04-04 2025-10-17 アサヒ繊維工業株式会社 吸着プレート及びその製造方法

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JPH06126676A (ja) * 1992-09-04 1994-05-10 Sumitomo Metal Mining Co Ltd 吸着保持具及び吸着吊上げ装置
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CN101529577A (zh) * 2006-10-18 2009-09-09 琳得科株式会社 固定夹具及芯片的拾取方法以及拾取装置
JP4746579B2 (ja) * 2007-03-29 2011-08-10 シャープ株式会社 低負荷搬送装置

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JP4746579B2 (ja) * 2007-03-29 2011-08-10 シャープ株式会社 低負荷搬送装置
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Cited By (27)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104210847A (zh) * 2013-05-30 2014-12-17 三星钻石工业股份有限公司 脆性材料基板的搬送头
CN104210847B (zh) * 2013-05-30 2017-08-25 三星钻石工业股份有限公司 脆性材料基板的搬送头
CN104512723A (zh) * 2013-09-27 2015-04-15 华亚科技股份有限公司 起吊装置及自动化搬运系统
CN103640912B (zh) * 2013-12-02 2016-01-20 中国航天科技集团公司第五研究院第五一三研究所 一种纳米薄膜转运工装
CN103640912A (zh) * 2013-12-02 2014-03-19 中国航天科技集团公司第五研究院第五一三研究所 一种纳米薄膜转运工装
CN105035761A (zh) * 2014-04-28 2015-11-11 三星钻石工业股份有限公司 脆性材料基板的搬送方法及搬送装置
CN105035761B (zh) * 2014-04-28 2019-01-04 三星钻石工业股份有限公司 脆性材料基板的搬送方法及搬送装置
CN105398932A (zh) * 2015-12-18 2016-03-16 合肥加亦信息科技有限公司 带防滑吸盘的机械手吊具
CN107791660A (zh) * 2016-09-07 2018-03-13 台湾格雷蒙股份有限公司 可挠性基板剥离装置
CN109074957B (zh) * 2017-01-17 2020-03-20 21世纪株式会社 Mlcc层叠用上模
CN109074957A (zh) * 2017-01-17 2018-12-21 21世纪株式会社 Mlcc层叠用上模
CN106672619A (zh) * 2017-02-15 2017-05-17 苏州迈瑞微电子有限公司 塑封料转运设备及方法
CN109205301A (zh) * 2017-06-29 2019-01-15 日本电产三协株式会社 工业用机器人的手及工业用机器人
CN109205301B (zh) * 2017-06-29 2020-11-17 日本电产三协株式会社 工业用机器人的手及工业用机器人
CN107642607A (zh) * 2017-08-16 2018-01-30 广东欧珀移动通信有限公司 治具、密封组件的安装结构及其分离方法
CN107642607B (zh) * 2017-08-16 2020-02-21 Oppo广东移动通信有限公司 治具、密封组件的安装结构及其分离方法
CN111771272B (zh) * 2017-12-27 2023-12-05 胜高股份有限公司 吸附卡盘
CN111771272A (zh) * 2017-12-27 2020-10-13 胜高股份有限公司 吸附卡盘
CN110386457A (zh) * 2018-04-17 2019-10-29 威光自动化设备（南京）有限公司 异形薄片物件的负压吸附器
CN110648956A (zh) * 2018-06-27 2020-01-03 普因特工程有限公司 微发光二极管转印头
CN108995200A (zh) * 2018-08-28 2018-12-14 莱芜钢铁集团有限公司 气体提取式薄膜铺设装置及方法
CN110394713A (zh) * 2019-06-18 2019-11-01 上饶市东腾光学有限公司 一种光学镜片冷加工固定盘
CN111546363A (zh) * 2020-04-13 2020-08-18 清华大学 多功能自适应可控粘附软体机械手
CN114248082A (zh) * 2020-09-24 2022-03-29 通用汽车环球科技运作有限责任公司 使用带有直通抽吸模块的端部执行器的柔性机器人系统
CN114248082B (zh) * 2020-09-24 2024-03-08 通用汽车环球科技运作有限责任公司 使用带有直通抽吸模块的端部执行器的柔性机器人系统
CN114523090A (zh) * 2022-01-25 2022-05-24 烟台路通精密科技股份有限公司 一种大型薄壁件的浸渗方法及装置
WO2025202966A1 (en) * 2024-03-28 2025-10-02 Sacmi Tech S.P.A. Handling device for substantially flat ceramic articles

Also Published As

Publication number Publication date
KR20130036144A (ko) 2013-04-11
TW201332869A (zh) 2013-08-16
US20130082475A1 (en) 2013-04-04
JP2013078810A (ja) 2013-05-02
TWI538791B (zh) 2016-06-21
KR102083919B1 (ko) 2020-03-03
DE102012019327A1 (de) 2013-04-04
US8960749B2 (en) 2015-02-24

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Application publication date: 20130410