JP5803670B2 - 板状部材の移送装置及び吸着パッド - Google Patents
板状部材の移送装置及び吸着パッド Download PDFInfo
- Publication number
- JP5803670B2 JP5803670B2 JP2011524098A JP2011524098A JP5803670B2 JP 5803670 B2 JP5803670 B2 JP 5803670B2 JP 2011524098 A JP2011524098 A JP 2011524098A JP 2011524098 A JP2011524098 A JP 2011524098A JP 5803670 B2 JP5803670 B2 JP 5803670B2
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- JP
- Japan
- Prior art keywords
- plate
- protrusion
- suction pad
- transfer device
- protective sheet
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/6838—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping with gripping and holding devices using a vacuum; Bernoulli devices
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67784—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations using air tracks
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
- B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
- B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
- B65G49/061—Lifting, gripping, or carrying means, for one or more sheets forming independent means of transport, e.g. suction cups, transport frames
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
- B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
- B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
- B65G49/063—Transporting devices for sheet glass
- B65G49/064—Transporting devices for sheet glass in a horizontal position
- B65G49/065—Transporting devices for sheet glass in a horizontal position supported partially or completely on fluid cushions, e.g. a gas cushion
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
- B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
- B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
- B65G49/067—Sheet handling, means, e.g. manipulators, devices for turning or tilting sheet glass
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G2249/00—Aspects relating to conveying systems for the manufacture of fragile sheets
- B65G2249/04—Arrangements of vacuum systems or suction cups
- B65G2249/045—Details of suction cups suction cups
Description
3: 吸着装置
30: 吸着パッド
35: ベース部
36: ストッパ
37: スカート部
38: 凹陥状内面
39: 突起
371:開口端面
B: 保護シート
P: ガラス板
b0: 穿孔
b1: 切れ目
Claims (6)
- 吸着パッドを介して作用する負圧により板状部材を吸着保持した状態で、前記板状部材を移送する板状部材の移送装置であって、
前記吸着パッドはその内面に突起を有し、
前記板状部材の表面に重ねられた保護シートを負圧により吸着したとき、前記突起が前記保護シートを貫通すると共に、前記保護シートの前記突起による貫通部分の周囲に通気部が形成され、該通気部を介して前記板状部材に作用する負圧により前記板状部材を前記保護シートと共に吸着保持し、
前記吸着パッドは、その内面から開口端面側へ延びるストッパを備えており、該ストッパは、前記突起の先端部を越え前記開口端面よりも手前の位置まで延びていることを特徴とする板状部材の移送装置。 - 前記突起は多角錐形状をなし、該多角錐形状の稜線が切刃を構成すると共に、該多角錐形状の各錐面がそれぞれ、隣り合う前記稜線を結ぶ平面より凹状をなすことを特徴とする請求項1に記載の板状部材の移送装置。
- 前記突起は円錐形状をなすと共に、その円形断面の一部に溝を有することを特徴とする請求項1に記載の板状部材の移送装置。
- 前記吸着パッドは、真空源に接続されるベース部と、該ベース部から椀状に延びて開口端面を形成するスカート部とを備え、前記突起が、前記ベース部に設けられていることを特徴とする請求項1〜3のいずれか1項に記載の板状部材の移送装置。
- 前記吸着パッドは、真空源に接続されるベース部と、該ベース部から椀状に延びて開口端面を形成するスカート部とを備え、前記突起が、前記ベース部と前記スカート部との境界近傍に設けられていることを特徴とする請求項1〜3のいずれか1項に記載の板状部材の移送装置。
- 前記突起が、金属製であることを特徴とする請求項1〜5のいずれか1項に記載の板状部材の移送装置。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2011524098A JP5803670B2 (ja) | 2010-06-07 | 2011-06-06 | 板状部材の移送装置及び吸着パッド |
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2010130010 | 2010-06-07 | ||
JP2010130010 | 2010-06-07 | ||
JP2011524098A JP5803670B2 (ja) | 2010-06-07 | 2011-06-06 | 板状部材の移送装置及び吸着パッド |
PCT/JP2011/062938 WO2011155443A1 (ja) | 2010-06-07 | 2011-06-06 | 板状部材の移送装置及び吸着パッド |
Publications (2)
Publication Number | Publication Date |
---|---|
JPWO2011155443A1 JPWO2011155443A1 (ja) | 2013-08-01 |
JP5803670B2 true JP5803670B2 (ja) | 2015-11-04 |
Family
ID=45098050
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2011524098A Active JP5803670B2 (ja) | 2010-06-07 | 2011-06-06 | 板状部材の移送装置及び吸着パッド |
Country Status (5)
Country | Link |
---|---|
JP (1) | JP5803670B2 (ja) |
KR (1) | KR102043656B1 (ja) |
CN (1) | CN102870204B (ja) |
TW (2) | TWI516429B (ja) |
WO (1) | WO2011155443A1 (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US11642794B2 (en) * | 2017-09-20 | 2023-05-09 | Harmotec Co., Ltd. | Suction device |
Families Citing this family (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP6470331B2 (ja) * | 2017-03-13 | 2019-02-13 | 株式会社東芝 | 把持ツール、把持システム、および把持性能の評価方法 |
JP6970431B2 (ja) * | 2017-11-29 | 2021-11-24 | 三星ダイヤモンド工業株式会社 | 基板搬出装置 |
JP6353969B1 (ja) * | 2017-11-29 | 2018-07-04 | 株式会社ユー・エム・アイ | 搬送具と搬送方法と搬送具ユニット |
KR102560167B1 (ko) | 2018-10-04 | 2023-07-25 | 코닝 인코포레이티드 | 디본딩 서포트 장치 및 이를 이용한 디본딩 방법 |
CN113249882A (zh) * | 2020-02-11 | 2021-08-13 | Juki株式会社 | 拾取头及输送装置 |
CN111470317B (zh) * | 2020-04-13 | 2021-09-07 | 广州大学 | 一种具有自清洁吸盘机械手的餐具分拣机 |
KR102279857B1 (ko) * | 2020-10-08 | 2021-07-22 | (주)하이엠시 | 초경합금을 접합한 디젤 엔진용 타펫의 개량된 제조방법 |
CN114516536A (zh) * | 2020-11-19 | 2022-05-20 | 日本电产三协(浙江)有限公司 | 吸附垫和工业用机器人 |
KR102344896B1 (ko) * | 2021-05-31 | 2021-12-30 | 씰테크 주식회사 | 언더필 형성 방법, 이를 적용한 반도체 패키지의 제조 방법 및 언더필 공정용 이형 필름 |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5662900U (ja) * | 1979-10-18 | 1981-05-27 | ||
JPH01264798A (ja) * | 1988-04-11 | 1989-10-23 | San Pearl:Kk | 細孔を有する容器の製造方法 |
JPH0513911U (ja) * | 1991-06-07 | 1993-02-23 | 三菱マテリアル株式会社 | ホツパー用袋カツター |
JP2000263484A (ja) * | 1999-03-12 | 2000-09-26 | Shin Etsu Chem Co Ltd | 真空吸着方法及び真空吸着装置 |
JP2009515785A (ja) * | 2005-11-14 | 2009-04-16 | ヒート ウェイヴ テクノロジーズ リミテッド ライアビリティ カンパニー | 改良型自己発熱容器 |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6011860U (ja) | 1983-07-05 | 1985-01-26 | マツダ株式会社 | シ−トベルト装置 |
JP2004136926A (ja) | 2002-10-17 | 2004-05-13 | Nippon Sheet Glass Co Ltd | 合紙付き湾曲ガラス板の移載方法および合紙付き湾曲ガラス板の移載装置 |
JP2004153157A (ja) | 2002-10-31 | 2004-05-27 | Seiko Epson Corp | 真空ピンセット及び半導体ウェハ搬送方法 |
JP2005075482A (ja) | 2003-08-28 | 2005-03-24 | Nippon Electric Glass Co Ltd | ガラス板梱包方法及びガラス板梱包装置 |
JP4297829B2 (ja) * | 2004-04-23 | 2009-07-15 | リンテック株式会社 | 吸着装置 |
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2011
- 2011-06-06 CN CN201180022261.8A patent/CN102870204B/zh active Active
- 2011-06-06 WO PCT/JP2011/062938 patent/WO2011155443A1/ja active Application Filing
- 2011-06-06 KR KR1020127023034A patent/KR102043656B1/ko active IP Right Grant
- 2011-06-06 JP JP2011524098A patent/JP5803670B2/ja active Active
- 2011-06-07 TW TW100119874A patent/TWI516429B/zh active
- 2011-06-07 TW TW104135159A patent/TWI530447B/zh active
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5662900U (ja) * | 1979-10-18 | 1981-05-27 | ||
JPH01264798A (ja) * | 1988-04-11 | 1989-10-23 | San Pearl:Kk | 細孔を有する容器の製造方法 |
JPH0513911U (ja) * | 1991-06-07 | 1993-02-23 | 三菱マテリアル株式会社 | ホツパー用袋カツター |
JP2000263484A (ja) * | 1999-03-12 | 2000-09-26 | Shin Etsu Chem Co Ltd | 真空吸着方法及び真空吸着装置 |
JP2009515785A (ja) * | 2005-11-14 | 2009-04-16 | ヒート ウェイヴ テクノロジーズ リミテッド ライアビリティ カンパニー | 改良型自己発熱容器 |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US11642794B2 (en) * | 2017-09-20 | 2023-05-09 | Harmotec Co., Ltd. | Suction device |
Also Published As
Publication number | Publication date |
---|---|
WO2011155443A1 (ja) | 2011-12-15 |
JPWO2011155443A1 (ja) | 2013-08-01 |
CN102870204A (zh) | 2013-01-09 |
TW201200443A (en) | 2012-01-01 |
CN102870204B (zh) | 2016-02-03 |
KR20130086114A (ko) | 2013-07-31 |
TW201604109A (zh) | 2016-02-01 |
TWI530447B (zh) | 2016-04-21 |
KR102043656B1 (ko) | 2019-11-12 |
TWI516429B (zh) | 2016-01-11 |
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