TWI516429B - 板狀構件運送裝置以及吸附墊 - Google Patents

板狀構件運送裝置以及吸附墊 Download PDF

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Publication number
TWI516429B
TWI516429B TW100119874A TW100119874A TWI516429B TW I516429 B TWI516429 B TW I516429B TW 100119874 A TW100119874 A TW 100119874A TW 100119874 A TW100119874 A TW 100119874A TW I516429 B TWI516429 B TW I516429B
Authority
TW
Taiwan
Prior art keywords
plate
protrusion
protective sheet
adsorption pad
shaped member
Prior art date
Application number
TW100119874A
Other languages
English (en)
Chinese (zh)
Other versions
TW201200443A (en
Inventor
小山範男
橋本隆志
Original Assignee
日本電氣硝子股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日本電氣硝子股份有限公司 filed Critical 日本電氣硝子股份有限公司
Publication of TW201200443A publication Critical patent/TW201200443A/zh
Application granted granted Critical
Publication of TWI516429B publication Critical patent/TWI516429B/zh

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67784—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations using air tracks
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/061—Lifting, gripping, or carrying means, for one or more sheets forming independent means of transport, e.g. suction cups, transport frames
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/063—Transporting devices for sheet glass
    • B65G49/064—Transporting devices for sheet glass in a horizontal position
    • B65G49/065—Transporting devices for sheet glass in a horizontal position supported partially or completely on fluid cushions, e.g. a gas cushion
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/067—Sheet handling, means, e.g. manipulators, devices for turning or tilting sheet glass
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/6838—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping with gripping and holding devices using a vacuum; Bernoulli devices
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2249/00—Aspects relating to conveying systems for the manufacture of fragile sheets
    • B65G2249/04—Arrangements of vacuum systems or suction cups
    • B65G2249/045—Details of suction cups suction cups

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Physics & Mathematics (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Manipulator (AREA)
  • Sheets, Magazines, And Separation Thereof (AREA)
  • Re-Forming, After-Treatment, Cutting And Transporting Of Glass Products (AREA)
  • Joining Of Glass To Other Materials (AREA)
  • Securing Of Glass Panes Or The Like (AREA)
TW100119874A 2010-06-07 2011-06-07 板狀構件運送裝置以及吸附墊 TWI516429B (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2010130010 2010-06-07

Publications (2)

Publication Number Publication Date
TW201200443A TW201200443A (en) 2012-01-01
TWI516429B true TWI516429B (zh) 2016-01-11

Family

ID=45098050

Family Applications (2)

Application Number Title Priority Date Filing Date
TW100119874A TWI516429B (zh) 2010-06-07 2011-06-07 板狀構件運送裝置以及吸附墊
TW104135159A TWI530447B (zh) 2010-06-07 2011-06-07 板狀構件運送裝置

Family Applications After (1)

Application Number Title Priority Date Filing Date
TW104135159A TWI530447B (zh) 2010-06-07 2011-06-07 板狀構件運送裝置

Country Status (5)

Country Link
JP (1) JP5803670B2 (ja)
KR (1) KR102043656B1 (ja)
CN (1) CN102870204B (ja)
TW (2) TWI516429B (ja)
WO (1) WO2011155443A1 (ja)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6470331B2 (ja) * 2017-03-13 2019-02-13 株式会社東芝 把持ツール、把持システム、および把持性能の評価方法
JP7148105B2 (ja) * 2017-09-20 2022-10-05 株式会社ハーモテック 吸引装置
JP6353969B1 (ja) * 2017-11-29 2018-07-04 株式会社ユー・エム・アイ 搬送具と搬送方法と搬送具ユニット
JP6970431B2 (ja) * 2017-11-29 2021-11-24 三星ダイヤモンド工業株式会社 基板搬出装置
KR102560167B1 (ko) 2018-10-04 2023-07-25 코닝 인코포레이티드 디본딩 서포트 장치 및 이를 이용한 디본딩 방법
CN113249882A (zh) * 2020-02-11 2021-08-13 Juki株式会社 拾取头及输送装置
CN111470317B (zh) * 2020-04-13 2021-09-07 广州大学 一种具有自清洁吸盘机械手的餐具分拣机
KR102279857B1 (ko) * 2020-10-08 2021-07-22 (주)하이엠시 초경합금을 접합한 디젤 엔진용 타펫의 개량된 제조방법
CN114516536A (zh) * 2020-11-19 2022-05-20 日本电产三协（浙江）有限公司 吸附垫和工业用机器人
KR102344896B1 (ko) * 2021-05-31 2021-12-30 씰테크 주식회사 언더필 형성 방법, 이를 적용한 반도체 패키지의 제조 방법 및 언더필 공정용 이형 필름

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5930703Y2 (ja) * 1979-10-18 1984-09-01 幸男 石田 シ−ト状食品の吸液切目形成具
JPS6011860U (ja) 1983-07-05 1985-01-26 マツダ株式会社 シ−トベルト装置
JPH01264798A (ja) * 1988-04-11 1989-10-23 San Pearl:Kk 細孔を有する容器の製造方法
JPH0513911U (ja) * 1991-06-07 1993-02-23 三菱マテリアル株式会社 ホツパー用袋カツター
JP3297019B2 (ja) * 1999-03-12 2002-07-02 信越化学工業株式会社 真空吸着方法及び真空吸着装置
JP2004136926A (ja) 2002-10-17 2004-05-13 Nippon Sheet Glass Co Ltd 合紙付き湾曲ガラス板の移載方法および合紙付き湾曲ガラス板の移載装置
JP2004153157A (ja) 2002-10-31 2004-05-27 Seiko Epson Corp 真空ピンセット及び半導体ウェハ搬送方法
JP2005075482A (ja) 2003-08-28 2005-03-24 Nippon Electric Glass Co Ltd ガラス板梱包方法及びガラス板梱包装置
JP4297829B2 (ja) * 2004-04-23 2009-07-15 リンテック株式会社 吸着装置
US8001959B2 (en) * 2005-11-14 2011-08-23 Heat Wave Technologies, Llc Self-heating container

Also Published As

Publication number Publication date
TW201200443A (en) 2012-01-01
WO2011155443A1 (ja) 2011-12-15
JP5803670B2 (ja) 2015-11-04
CN102870204B (zh) 2016-02-03
JPWO2011155443A1 (ja) 2013-08-01
KR102043656B1 (ko) 2019-11-12
KR20130086114A (ko) 2013-07-31
CN102870204A (zh) 2013-01-09
TW201604109A (zh) 2016-02-01
TWI530447B (zh) 2016-04-21

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