201106444 、發明說明： 【發明所屬之技術領域】 本發明係關於一種基板吸附裝置；具體·而言，本發明係關 於一種基板吸附裝置防塵設計。 【先前技術】 液晶顯示器（Liquid Crystal Display，LCD)、電漿顯示器 (Plasma Display panei’ PDP)等裝置的製程中常使用機械手 #等设備來搬運基板。機械手臂常藉由裝置於其上的真空吸盤 以吸附的方式m定住承餘其上的基板，待搬運至適當的位置 之後再將基板從真空吸盤上釋放開來。真空吸盤吸附物品的原 理是利用了當讀與物品之聰持真空時，其壓力小於外界的 大氣壓力’使得吸盤與物品之間產生相對的吸力而產生吸附物 品的效果。 —圖1A為習知機械手臂搬運基板的示意圖。如圖u所示， 每個機械手臂1上設有多個真㈣盤2，真空吸盤2將放置於 其上的玻璃基板3吸附固定後托起搬運。如圖1B所示，習知 月，工吸盤包含基座j、真空吸盤密封環2、真空吸盤概塾3 及真空吸盤襯墊上蓋4。真空吸盤襯塾3及真空吸盤襯塾上蓋 ㈣l間隙Gl使得空氣中的粉塵等雜物藉此侵入真空吸盤的 :、此雜會累積不少雜物，甚而影響真空吸盤的作動。 二而如圖ic所示，真空吸盤在作動時’真空吸盤觀塾3會 而使它與真空吸盤襯塾上蓋4之間的間隙變大為&，使得 4 嬝 201106444 农、入更加合易。尤其是在搬運麵等易碎材質基板的過 ，難免會產生碎雜落’很容胃對真心聽的作動產生影 曰進而〜響吸盤與被吸附的基板之間的真空度，嚴重時甚至 會造成真空吸盤無法吸附基板。 【發明内容】 ^明之目的在於無—種基板吸崎置，改善上述先前 技術中的問題防止粉塵或碎屑等雜物的侵人而濟其吸力。 附裝置包含基座、彈性密封環、酬盤及錐 套。基座包含頂板，頂板上形成凹陷部，凹陷部的 周緣上形成-朝向凹陷部中心突伸的凸緣；彈性密封環設置於 Γ部2觸触置於·㈣環上，包含—部分位於凹陷 1 有—吸附面突出於頂板外，藉由吸附盤可使彈性密封 賴縮而相2於基座而移動；錐餘雅具有窄口緣及寬 2 ’其中乍口緣連接於吸附盤，當吸附盤壓迫彈性密封 時，同時會帶動窄口緣對錐管狀彈性襯套壓 、而生形變，見口緣則可滑動地貼合於頂板上凹陷部的外. =r凸緣間之_ ’防止一雜物侵 【實施方式】 本發明提供-種基板吸附裝置。在較佳實施例中，本發明 之基板吸附裝置係應用於各種需要利用真運 板元件的_，糾㈣婉、购爾設 201106444 中’將此基板吸附裝置設置於無塵室的機械手臂上，用以進行 玻璃基板的吸附與搬運。 圖2A為本發明基板吸附裝置的一實施例的示意圖。圖2B 為圖2A所示基板吸附裝置實施例的爆炸圖，圖2C則為圖2A 所不的基板吸附裝置實施例的剖視圖。如圖2β、圖2C所示， 此基板吸附裝置包含基座10、彈性密封環2〇、吸附盤3〇及錐 管狀彈性襯套40。基座10包含頂板11，基座1〇上並有一對 應於頂板11的形狀的陷入’使頂板1丨容納於其中。頂板u 上形成有凹陷部111朝基座10内凹陷，頂板U圍繞凹陷部 111的周緣上形成凸緣112。如圖2B所示，凹陷部hi在頂板 11上形成一圓盤狀陷入。如圖2C所示，凸緣1丨2突出於頂板 11表面，並朝向凹陷部ill中心水平突伸。其中凸緣112的 内徑小於凹陷部111的内徑，使得凹陷部lu的開口的一部份 被凸緣112戶斤遮蔽’形成-穴形空間。在不同實施例中 *如圖 3所示，基座10之上另設置有底盤14，此時包含頂板u之上 蓋13則對應覆蓋在底盤14上。凹陷部Η〗則由上蓋a及底 盤14共同包圍形成。 _ 如圖2C所示，彈性密封環20設置於凹陷部m内，包含 抽氣通道21。吸附盤30設置於彈性密封環2〇上，包含吸附 面3卜錐管壁32、底緣33及外抽氣孔34。吸附面&自凹陷 部111突出於頂板11之表面以供與基板相接觸。錐管壁％自 吸附面31的端緣朝基座1〇的方向向下並往外延伸。底緣犯 係自錐管壁32的底部朝凹陷部lu的側壁的方向向外突伸 出。吸附盤30未作動時，亦即未承載基板時，底緣犯與凹陷 201106444 一定的距離。底緣33的頂面與凸緣112面 _ 4的一内面相對應’其底面則與凹陷部111的 :持一定的距離。其中底緣33的内徑大於吸附面31的外 30 ^ 緣112所勺仅图則大於凸緣112的内徑，使得吸附盤30卡合於凸 緣112所包_凹陷部⑴内，而不會脫_陷部⑴。 窄口’Γ狀彈性觀套4〇的上下兩端分別形成為 *的錐緣42，使得錐管狀彈性襯套40形成一個中 :===3啸娜崎-在本實 作動時，二=其他具有雅的材f。如㈣所示，在未 時錐吕狀彈性襯套40與錐管壁32之 ^亦，狀彈性襯套4()自錐管壁犯再向外張開第一 J ★ ^少轉狀襯㈣與錐烟 ^ 如圖=====f °細在雨施例中， 他材質_ 50,再將錐管畴性襯套H :50下方，其懷5G可物的_環在^ :中：相321的方__射‘= 成，然而在不同實施例中，亦可以車切等方式形成的方式升/ 201106444 -丨如圖2^所不’寬口緣42貼合於頂板11上凹陷部111祕 '’以遮蓋住吸附盤30與凸緣1]t ° 、 中，可將寬口緣42貼合於凸緣112的^不’在較佳實施例 例中，如圖5所示，亦可將寬、2 ;然而在其他實施 頂板11上。 緣貼0於凸緣112外側的 所亍基板吸_£作動時的贼圖。如圖BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a substrate adsorption device; in particular, the present invention relates to a substrate adsorption device dust-proof design. [Prior Art] Devices such as a liquid crystal display (LCD) or a plasma display panei (PDP) are often used to transport substrates by means of robots and the like. The robot arm often holds the substrate on the residual by means of a vacuum chuck mounted thereon, and then releases the substrate from the vacuum chuck after being transported to an appropriate position. The principle of the vacuum chuck sucking the article is to take advantage of the fact that when the reading and the object are held in a vacuum, the pressure is less than the atmospheric pressure of the outside, so that the suction between the sucker and the article produces a relative suction force to produce an adsorbed product. - Figure 1A is a schematic view of a conventional robotic arm carrying substrate. As shown in Fig. u, each of the robot arms 1 is provided with a plurality of true (four) disks 2, and the vacuum chucks 2 are attached and transported by the glass substrate 3 placed thereon. As shown in Fig. 1B, the conventional suction cup includes a base j, a vacuum chuck seal ring 2, a vacuum chuck profile 3, and a vacuum chuck pad upper cover 4. Vacuum suction cup lining 3 and vacuum suction cup lining upper cover (4) L gap Gl makes dust and other impurities in the air invade the vacuum suction cup: This miscellaneous will accumulate a lot of debris, even affecting the operation of the vacuum suction cup. 2. As shown in Figure ic, when the vacuum chuck is actuated, the vacuum suction cup will increase the gap between the vacuum chuck and the vacuum chuck lining cover 4 to & . Especially in the fragile material substrate such as the conveying surface, it is inevitable that there will be debris. The pressure on the stomach will affect the operation of the heart. Then the vacuum between the suction cup and the substrate to be adsorbed will be severe. The vacuum chuck cannot be used to adsorb the substrate. SUMMARY OF THE INVENTION The purpose of the invention is to improve the above-mentioned problems in the prior art by preventing the substrate from being sucked and preventing the intrusion of debris such as dust or debris. The attachment includes a base, an elastomeric seal ring, a reel and a sleeve. The base comprises a top plate, and the top plate forms a recessed portion, the peripheral edge of the recessed portion forms a flange protruding toward the center of the recessed portion; the elastic sealing ring is disposed on the contact portion of the crotch portion 2 on the (four) ring, and the portion is located in the recess 1 Yes—The adsorption surface protrudes from the top of the top plate, and the elastic seal is biased by the suction disc to move the phase 2 to the base; the cone has a narrow edge and a width of 2 ', wherein the edge of the tongue is connected to the adsorption disk, when When the adsorption disc presses the elastic seal, the narrow lip edge is pressed against the tapered tubular elastic bushing to form a deformation, and the edge is slidably attached to the outside of the recessed portion on the top plate. Prevention of a foreign object invasion [Embodiment] The present invention provides a substrate adsorption device. In a preferred embodiment, the substrate adsorption device of the present invention is applied to various robots that need to use the genuine transportation plate components, and the substrate adsorption device is disposed on the robot of the clean room. For the adsorption and handling of glass substrates. 2A is a schematic view of an embodiment of a substrate adsorption device of the present invention. 2B is an exploded view of the embodiment of the substrate adsorption apparatus shown in FIG. 2A, and FIG. 2C is a cross-sectional view of the embodiment of the substrate adsorption apparatus shown in FIG. 2A. As shown in Fig. 2β and Fig. 2C, the substrate adsorbing device comprises a base 10, an elastic sealing ring 2〇, a suction disk 3〇, and a tapered tubular elastic bushing 40. The base 10 includes a top plate 11 having a pair of shackles in the shape of the top plate 11 for receiving the top plate 1 于 therein. The top plate u is formed with a recessed portion 111 recessed toward the inside of the base 10, and the top plate U forms a flange 112 around the circumference of the recessed portion 111. As shown in Fig. 2B, the depressed portion hi is formed in a disk shape on the top plate 11. As shown in Fig. 2C, the flange 1丨2 protrudes from the surface of the top plate 11 and protrudes horizontally toward the center of the recess ill. Wherein the inner diameter of the flange 112 is smaller than the inner diameter of the recessed portion 111 such that a portion of the opening of the recessed portion lu is shielded by the flange 112 to form a cavity. In a different embodiment, as shown in Fig. 3, a chassis 14 is further disposed on the base 10, and the cover 13 is covered on the chassis 14 corresponding to the top plate u. The recessed portion is formed by the upper cover a and the chassis 14 being surrounded by each other. As shown in Fig. 2C, the elastic sealing ring 20 is disposed in the recess m and includes an air suction passage 21. The adsorption disk 30 is disposed on the elastic sealing ring 2, and includes an adsorption surface 3, a cone wall 32, a bottom edge 33, and an outer suction hole 34. The adsorption surface & protrudes from the recessed portion 111 to the surface of the top plate 11 for contact with the substrate. The wall of the tapered tube extends downward from the end edge of the adsorption surface 31 toward the base 1 and extends outward. The bottom edge protrudes outward from the bottom of the tapered tube wall 32 toward the side wall of the recess lu. When the adsorption tray 30 is not actuated, that is, when the substrate is not carried, the bottom edge is a certain distance from the depression 201106444. The top surface of the bottom edge 33 corresponds to an inner surface of the face 112 of the flange 112. The bottom surface thereof is at a certain distance from the recess 111. Wherein the inner diameter of the bottom edge 33 is larger than the outer 30 edge 112 of the adsorption surface 31, and only the inner diameter of the flange 112 is larger than the inner diameter of the flange 112, so that the suction disk 30 is engaged in the recessed portion (1) of the flange 112 without Will take off the trap (1). The upper and lower ends of the narrow mouth 'Γ elastic view sleeve 4 are respectively formed as the * taper edge 42 so that the tapered tubular elastic bushing 40 forms a middle: ===3 Xiao Naqi - in this actual operation, two = Others have elegant materials f. As shown in (4), in the case of the taper-shaped elastic bushing 40 and the tapered pipe wall 32, the elastic bushing 4 () is opened from the taper pipe wall and then opened outwards. (d) with cone smoke ^ as shown in the figure =====f ° fine in the rain application, he material _ 50, then the cone tube domain bushing H: 50 below, its 5G can be _ ring in ^: Medium: the phase __ 射 ' 成 成 然而 然而 , , 2011 2011 2011 2011 2011 2011 2011 2011 2011 2011 2011 2011 2011 2011 2011 2011 2011 2011 2011 2011 2011 2011 2011 2011 2011 2011 2011 2011 2011 2011 2011 2011 2011 2011 2011 2011 2011 2011 2011 2011 2011 The upper recessed portion 111 is configured to cover the suction disk 30 and the flange 1] t°, and the wide lip edge 42 can be attached to the flange 112. In the preferred embodiment, as shown in FIG. As shown, it can also be wide, 2; however, on the other implementation of the top plate 11. The edge of the edge of the flange 112 is sucked by the substrate on the outer side of the flange 112. As shown
裝置作動時，譬如將基板丨⑻放置於吸附. 使㈣^附時，可藉由吸_30向下擠卿性密封環2〇 =Τ*縮而朝凹陷部111的底部移動而= 細陷=‘==：_：纖，域緣33的底· '接觸為止。此外，當吸附盤30受力i 使^維時，會同時帶動窄口緣41壓追錐管狀彈性襯套40 屋縮而變形；鮮狀彈性襯套4G義變形時，寬口緣4 =^^貼合的表面上作贿神動，此時錐管狀彈性# 套40與錐官壁32之間的央角也相應地改變。 如圖6所不’當彈性密封環2〇受吸附盤％擠壓而陷入凹 陷部⑴内時，寬口緣42自錐管壁％向外張開一第二角度 ^尹第—角度AzA於未作動前的第—角度ϋ此可知錐 g狀彈性襯套40與錐管壁32之間的摩擦在作動後不會變大。 當吸附盤3G岭力消失時，彈性_賴會朝向凹陷部⑴ 的底部的反方向移動㈣復到原位置，同時管狀彈性觀套4〇 會產生-個回彈相復，使得寬口緣犯與錐㈣％之間 回復到原先的夹角，即第一角度1。When the device is actuated, for example, the substrate 丨 (8) is placed on the adsorption. When the (4) is attached, the sealing ring 2 〇=Τ* can be squeezed downward by the suction _30 to move toward the bottom of the depressed portion 111. = '==:_: Fiber, the bottom of the domain edge 33 · 'Contact. In addition, when the suction disk 30 is subjected to the force i, the narrow lip 41 is simultaneously driven to press the tapered elastic bushing 40 to be deformed and deformed; when the fresh elastic bushing 4G is deformed, the wide lip 4 = ^ The british surface is brittle, and the central angle between the cone-shaped elastic layer #40 and the cone-shaped wall 32 is also changed accordingly. As shown in Fig. 6, when the elastic sealing ring 2 is squeezed by the suction disk to be trapped in the recessed portion (1), the wide lip 42 is opened outward from the cone wall % by a second angle ^ Yin - angle AzA The first angle before the actuation is made, it is understood that the friction between the tapered g-shaped elastic bushing 40 and the tapered tube wall 32 does not become large after the actuation. When the 3G ridge force of the adsorption disk disappears, the elasticity _ will move toward the opposite direction of the bottom of the recessed portion (1) (4) to return to the original position, and the tubular elastic viewing sleeve will produce a rebound and reciprocal Return to the original angle between the cone (four)%, that is, the first angle 1.
S 201106444 附放置;系錯由抽吼的方式造成真空，使吸附盤吸 陷部111;綱、:板。如圖6所示’基座10上包含連通於凹 in 12; _封環2_成—抽氣通⑱ =内f氣孔12 ;吸附盤3°上的外抽氣孔34則與抽氣通 =相連通。換言之，内抽氣孔12經由抽氣通道Μ貫通至 .抽威=。當基板吸職置作鱗，產生—吸力自吸附面 的外抽氣孔34抽氣’以吸附放置於吸附盤3〇上的基板。S 201106444 Attached; the fault is caused by twitching to create a vacuum, so that the suction disk is sucked into the portion 111; As shown in Fig. 6, the pedestal 10 is connected to the concave in 12; the _ sealing ring 2_ into - the venting passage 18 = the inner venting hole 12; the outer venting hole 34 on the suction disk 3 is connected to the venting air = Connected. In other words, the inner air vent 12 is penetrated to the air through the air suction passage. When the substrate is sucked into a scale, suction is generated from the outer suction hole 34 of the adsorption surface to adsorb the substrate placed on the adsorption tray 3〇.
圖7為圖2A所示的基板吸附裝置中的吸附面的俯視圖。如 圖7所示’吸附面31.上除了形成有外抽氣孔34以外，在外抽 乳孔34周圍形成多個内凸脊311，並在吸附面31的外緣形成 外凸脊312。外凸脊31為環狀，當外抽氣孔34抽氣吸附基板 時可防止外面的空氣進入吸附面31 ;多細凸脊犯有間 斷地環繞_纽34峨置，使得吸_ 31上岐氣能通過 不同内凸脊311之間的間隙而進入外抽氣孔3 4。 本發明已由上述相關實施例加以描述，然而上述實施例僅 為實施本發明之範例^必需指㈣是，已揭露之實施例並未限 制本發明之範圍。相反地，.包含於申請專利範圍之精神及範圍 之修改及均等設置均包含於本發明之範圍内。 【圖式簡單說明】 圖1A為習知機械手臂搬運基板的示意圖； 圖1B為習知真空吸盤的剖視圖； 圖1C為習知真空吸盤作動時的剖視圖； 圖2A為本發明基板吸附裝置的一實施例的示意圖; 201106444 圖2B為圖2A所示基板吸附裝置實施例的爆炸圖； 圖2C為圖2A所示的基板吸附裝置實施例的剖視圖； 圖3為圖2A所示的基板吸附裝置中的基板的另一實施例剖视 圖， 圖4A為圖2A所示的基板吸附裝置中的錐管狀彈性襯套的固定 方式的另一實施例爆炸圖； 圖4B為圖4A所補基板吸附裝置的實施例的剖視圖； 圖5為圖2A所示的基板吸喊置+ 狀雜襯套 實施例剖視圖； 圖6為圖2A所示的基板吸附裝置作動時的剖視圖. 圖7為圖2A所示的基板吸附裝置中的吸附面的俯視圖。 【主要元件符號說明】 10基座 11頂板 111凹陷部 112凸緣 12内抽氣孔 13上蓋 14底盤 20彈性密封環 21抽氣通道 30吸附盤 31吸附面 201106444 311内凸脊 312外凸脊 32錐管壁 321環狀凹槽 33底緣 34外抽氣孔 40錐管狀彈性襯套 41窄口緣 • 42寬口緣 50環片 1GQ基板Fig. 7 is a plan view showing an adsorption surface in the substrate adsorption device shown in Fig. 2A. As shown in Fig. 7, in addition to the outer suction holes 34, a plurality of inner ridges 311 are formed around the outer suction holes 34, and outer ridges 312 are formed on the outer edge of the adsorption surface 31. The outer convex ridge 31 is annular, and when the outer air suction hole 34 sucks and sucks the substrate, the outer air can be prevented from entering the adsorption surface 31; the fine convex ridge is intermittently surrounded by the 纽 纽 34, so that the suction _ 31 is suffocating The outer suction holes 34 can be entered through the gap between the different inner ridges 311. The present invention has been described by the above-described embodiments, but the above-described embodiments are merely examples for implementing the invention. It is to be understood that the four embodiments are not intended to limit the scope of the invention. On the contrary, the modifications and equivalents of the spirit and scope of the invention are included in the scope of the invention. BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1A is a schematic view of a conventional robotic arm carrying substrate; FIG. 1B is a cross-sectional view of a conventional vacuum chuck; FIG. 1C is a cross-sectional view of a conventional vacuum chuck; FIG. Figure 2B is an exploded view of the substrate adsorption device embodiment of Figure 2A; Figure 2C is a cross-sectional view of the substrate adsorption device embodiment of Figure 2A; Figure 3 is a substrate adsorption device of Figure 2A FIG. 4A is an exploded view of another embodiment of a fixing manner of a tapered tubular elastic bushing in the substrate adsorbing device shown in FIG. 2A; FIG. 4B is a substrate adsorbing device of FIG. 4A; Figure 5 is a cross-sectional view of the embodiment of the substrate squeezing + splicing bush shown in Figure 2A; Figure 6 is a cross-sectional view of the substrate absorbing device shown in Figure 2A. Figure 7 is a view of Figure 2A A top view of the adsorption surface in the substrate adsorption device. [Main component symbol description] 10 pedestal 11 top plate 111 recessed portion 112 flange 12 inner venting hole 13 upper cover 14 chassis 20 elastic sealing ring 21 suction passage 30 suction disk 31 adsorption surface 201106444 311 inner ridge 312 outer ridge 32 cone Tube wall 321 annular groove 33 bottom edge 34 outer suction hole 40 tapered tubular elastic bushing 41 narrow edge • 42 wide lip 50 ring piece 1GQ substrate