TWI538791B - 真空吸附裝置 - Google Patents

真空吸附裝置 Download PDF

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Publication number
TWI538791B
TWI538791B TW101133253A TW101133253A TWI538791B TW I538791 B TWI538791 B TW I538791B TW 101133253 A TW101133253 A TW 101133253A TW 101133253 A TW101133253 A TW 101133253A TW I538791 B TWI538791 B TW I538791B
Authority
TW
Taiwan
Prior art keywords
adsorption
workpiece
sheet
disposed
negative pressure
Prior art date
Application number
TW101133253A
Other languages
English (en)
Chinese (zh)
Other versions
TW201332869A (zh
Inventor
深野喜弘
櫻井修三
染谷雅彥
Original Assignee
Ｓｍｃ股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ｓｍｃ股份有限公司 filed Critical Ｓｍｃ股份有限公司
Publication of TW201332869A publication Critical patent/TW201332869A/zh
Application granted granted Critical
Publication of TWI538791B publication Critical patent/TWI538791B/zh

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
    • B65G47/74—Feeding, transfer, or discharging devices of particular kinds or types
    • B65G47/90—Devices for picking-up and depositing articles or materials
    • B65G47/91—Devices for picking-up and depositing articles or materials incorporating pneumatic, e.g. suction, grippers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25B—TOOLS OR BENCH DEVICES NOT OTHERWISE PROVIDED FOR, FOR FASTENING, CONNECTING, DISENGAGING OR HOLDING
    • B25B11/00—Work holders not covered by any preceding group in the subclass, e.g. magnetic work holders, vacuum work holders
    • B25B11/005—Vacuum work holders
    • B25B11/007—Vacuum work holders portable, e.g. handheld
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/6838—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping with gripping and holding devices using a vacuum; Bernoulli devices
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S901/00—Robots
    • Y10S901/30—End effector
    • Y10S901/40—Vacuum or mangetic

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Manipulator (AREA)
TW101133253A 2011-10-03 2012-09-12 真空吸附裝置 TWI538791B (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2011218831A JP2013078810A (ja) 2011-10-03 2011-10-03 真空吸着装置

Publications (2)

Publication Number Publication Date
TW201332869A TW201332869A (zh) 2013-08-16
TWI538791B true TWI538791B (zh) 2016-06-21

Family

ID=47878739

Family Applications (1)

Application Number Title Priority Date Filing Date
TW101133253A TWI538791B (zh) 2011-10-03 2012-09-12 真空吸附裝置

Country Status (6)

Country Link
US (1) US8960749B2 (enExample)
JP (1) JP2013078810A (enExample)
KR (1) KR102083919B1 (enExample)
CN (1) CN103029985A (enExample)
DE (1) DE102012019327A1 (enExample)
TW (1) TWI538791B (enExample)

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CN107642607B (zh) * 2017-08-16 2020-02-21 Oppo广东移动通信有限公司 治具、密封组件的安装结构及其分离方法
TWI634969B (zh) * 2017-11-10 2018-09-11 大銀微系統股份有限公司 真空吸附平台
JP6881284B2 (ja) * 2017-12-27 2021-06-02 株式会社Sumco 吸着チャック
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Also Published As

Publication number Publication date
KR20130036144A (ko) 2013-04-11
TW201332869A (zh) 2013-08-16
US20130082475A1 (en) 2013-04-04
JP2013078810A (ja) 2013-05-02
CN103029985A (zh) 2013-04-10
KR102083919B1 (ko) 2020-03-03
DE102012019327A1 (de) 2013-04-04
US8960749B2 (en) 2015-02-24

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