JP4883627B2 - クッションシート付ウエハ収納容器 - Google Patents
クッションシート付ウエハ収納容器 Download PDFInfo
- Publication number
- JP4883627B2 JP4883627B2 JP2007013230A JP2007013230A JP4883627B2 JP 4883627 B2 JP4883627 B2 JP 4883627B2 JP 2007013230 A JP2007013230 A JP 2007013230A JP 2007013230 A JP2007013230 A JP 2007013230A JP 4883627 B2 JP4883627 B2 JP 4883627B2
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- Prior art keywords
- wafer
- cushion sheet
- semiconductor wafer
- self
- storage container
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000003860 storage Methods 0.000 title claims description 24
- 235000012431 wafers Nutrition 0.000 claims description 237
- 239000004065 semiconductor Substances 0.000 claims description 111
- 238000001179 sorption measurement Methods 0.000 claims description 65
- 238000003825 pressing Methods 0.000 claims description 21
- 239000002861 polymer material Substances 0.000 claims description 12
- 230000000274 adsorptive effect Effects 0.000 claims description 8
- 229920001971 elastomer Polymers 0.000 claims description 6
- 238000012546 transfer Methods 0.000 claims description 6
- JOYRKODLDBILNP-UHFFFAOYSA-N Ethyl urethane Chemical compound CCOC(N)=O JOYRKODLDBILNP-UHFFFAOYSA-N 0.000 claims description 5
- 238000000034 method Methods 0.000 claims description 3
- 230000008569 process Effects 0.000 claims description 3
- 238000012545 processing Methods 0.000 claims description 3
- 238000010030 laminating Methods 0.000 claims description 2
- 241000252254 Catostomidae Species 0.000 claims 1
- 230000008878 coupling Effects 0.000 description 14
- 238000010168 coupling process Methods 0.000 description 14
- 238000005859 coupling reaction Methods 0.000 description 14
- 230000004048 modification Effects 0.000 description 10
- 238000012986 modification Methods 0.000 description 10
- 239000000463 material Substances 0.000 description 8
- 239000010410 layer Substances 0.000 description 6
- 229920000139 polyethylene terephthalate Polymers 0.000 description 4
- 239000005020 polyethylene terephthalate Substances 0.000 description 4
- 239000000126 substance Substances 0.000 description 4
- 230000002411 adverse Effects 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 239000000806 elastomer Substances 0.000 description 3
- 229920000642 polymer Polymers 0.000 description 3
- 239000006260 foam Substances 0.000 description 2
- -1 polyethylene terephthalate Polymers 0.000 description 2
- NIXOWILDQLNWCW-UHFFFAOYSA-N acrylic acid group Chemical group C(C=C)(=O)O NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 229920001577 copolymer Polymers 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 238000003780 insertion Methods 0.000 description 1
- 230000037431 insertion Effects 0.000 description 1
- 239000004816 latex Substances 0.000 description 1
- 229920000126 latex Polymers 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
- 229920003023 plastic Polymers 0.000 description 1
- 229920005668 polycarbonate resin Polymers 0.000 description 1
- 239000004431 polycarbonate resin Substances 0.000 description 1
- 229920000728 polyester Polymers 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
- H01L21/67346—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders characterized by being specially adapted for supporting a single substrate or by comprising a stack of such individual supports
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
- B65D85/00—Containers, packaging elements or packages, specially adapted for particular articles or materials
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
- B65D85/00—Containers, packaging elements or packages, specially adapted for particular articles or materials
- B65D85/30—Containers, packaging elements or packages, specially adapted for particular articles or materials for articles particularly sensitive to damage by shock or pressure
- B65D85/38—Containers, packaging elements or packages, specially adapted for particular articles or materials for articles particularly sensitive to damage by shock or pressure for delicate optical, measuring, calculating or control apparatus
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
- H01L21/6735—Closed carriers
- H01L21/67369—Closed carriers characterised by shock absorbing elements, e.g. retainers or cushions
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
- H01L21/6735—Closed carriers
- H01L21/67379—Closed carriers characterised by coupling elements, kinematic members, handles or elements to be externally gripped
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Mechanical Engineering (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Packaging Frangible Articles (AREA)
Description
図2はクッションシート付ウエハ収納容器の全体構成を示しており、円盤状に形成された極薄の半導体ウエハWを載せて保持するための複数のウエハ載置トレイ1が、水平な状態で上下に重ね合わされて配置されている。なお図2には、複数重ね合わされたウエハ載置トレイ1の一部を途中で分離した状態が図示されている。重ね合わされた複数のウエハ載置トレイ1の上下両端に取り付けられたベーストレイ2には、図示されていない機械的インターフェイス装置と結合させるための結合溝3が形成されている。
5 載置クッション(ウエハ載置クッションシート)
5A 自己吸着部
5B 非吸着部
13 底面
15 押付クッション(ウエハ押付クッションシート)
30 搬送チャック
W 半導体ウエハ
W′ 半導体ウエハの外縁位置
Claims (13)
- 半導体ウエハを一枚ずつ載せて保持するための複数のウエハ載置トレイが重ね合わされて、上記各ウエハ載置トレイに載せられた半導体ウエハがそのウエハ載置トレイとその上側に隣接して重ね合わされたウエハ載置トレイとの間に形成される内側空間内に収納された状態になり、上記各ウエハ載置トレイ上面の半導体ウエハ載置位置に弾力性のあるウエハ載置クッションシートが配置されたクッションシート付ウエハ収納容器において、
上記ウエハ載置クッションシートの表面に、上記半導体ウエハに対して着脱自在に吸着される自己吸着部が形成されると共に、上記半導体ウエハに対して吸着されることなく分離した状態を保つ非吸着部が上記半導体ウエハの外縁部の一部又は全部に面する位置に形成されていることを特徴とするクッションシート付ウエハ収納容器。 - 上記非吸着部が、上記半導体ウエハより小さな径の円形状に形成された上記自己吸着部の周囲を囲む状態に形成されている請求項1記載のクッションシート付ウエハ収納容器。
- 上記非吸着部が、上記ウエハ載置クッションシートの外縁部に面する位置において複数領域に分かれて形成されている請求項1記載のクッションシート付ウエハ収納容器。
- 上記自己吸着部が、上記半導体ウエハに面する位置において複数領域に分かれて形成されている請求項1又は3記載のクッションシート付ウエハ収納容器。
- 上記非吸着部の表面が上記自己吸着部と同面位置に形成されている請求項1ないし4のいずれかの項に記載のクッションシート付ウエハ収納容器。
- 上記非吸着部が、吸着性のないシートを上記自己吸着部の表面に積層して形成されている請求項1ないし4のいずれかの項に記載のクッションシート付ウエハ収納容器。
- 上記非吸着部が、上記自己吸着部の表面の一部を非吸着性に加工して形成されている請求項1ないし4のいずれかの項に記載のクッションシート付ウエハ収納容器。
- 上記非吸着部が、上記自己吸着部の表面の一部に凹凸加工を施して形成されている請求項7記載のクッションシート付ウエハ収納容器。
- 上記自己吸着部が多数の微細吸盤により形成されていて、上記微細吸盤を上記半導体ウエハに押し付けることにより上記微細吸盤と上記半導体ウエハとが吸着固定された状態になる請求項1ないし8のいずれかの項に記載のクッションシート付ウエハ収納容器。
- 上記自己吸着部が、弾力性を有する発泡エラストマー系高分子材料、発泡ゴム系高分子材料、又は発泡ウレタン系高分子材料により形成されている請求項9記載のクッションシート付ウエハ収納容器。
- 上記自己吸着部の一部又は全部が、上記半導体ウエハを上記ウエハ載置クッションシートから取り外す際に上記半導体ウエハを吸着する搬送チャックの外縁より内側位置に形成されている請求項1ないし10のいずれかの項に記載のクッションシート付ウエハ収納容器。
- 上記ウエハ載置クッションシートが上記ウエハ載置トレイに対し着脱可能に設けられている請求項1ないし11のいずれかの項に記載のクッションシート付ウエハ収納容器。
- 上記半導体ウエハを上記ウエハ載置クッションシートに対して押し付けるための弾力性のあるウエハ押付クッションシートが上記ウエハ載置トレイの裏面側に配置されている請求項1ないし12のいずれかの項に記載のクッションシート付ウエハ収納容器。
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2007013230A JP4883627B2 (ja) | 2007-01-24 | 2007-01-24 | クッションシート付ウエハ収納容器 |
KR1020097012123A KR101445345B1 (ko) | 2007-01-24 | 2008-01-18 | 쿠션 씨트가 부착된 웨이퍼 수납용기 |
DE112008000239T DE112008000239T5 (de) | 2007-01-24 | 2008-01-18 | Waferbehälter mit Polsterungsschicht |
PCT/JP2008/050623 WO2008090820A1 (ja) | 2007-01-24 | 2008-01-18 | クッションシート付ウエハ収納容器 |
US12/499,520 US7819252B2 (en) | 2007-01-24 | 2009-07-08 | Wafer container with cushion sheet |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2007013230A JP4883627B2 (ja) | 2007-01-24 | 2007-01-24 | クッションシート付ウエハ収納容器 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2008181987A JP2008181987A (ja) | 2008-08-07 |
JP4883627B2 true JP4883627B2 (ja) | 2012-02-22 |
Family
ID=39644397
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2007013230A Expired - Fee Related JP4883627B2 (ja) | 2007-01-24 | 2007-01-24 | クッションシート付ウエハ収納容器 |
Country Status (5)
Country | Link |
---|---|
US (1) | US7819252B2 (ja) |
JP (1) | JP4883627B2 (ja) |
KR (1) | KR101445345B1 (ja) |
DE (1) | DE112008000239T5 (ja) |
WO (1) | WO2008090820A1 (ja) |
Families Citing this family (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20100224517A1 (en) * | 2009-03-03 | 2010-09-09 | Haggard Clifton C | Disk separator device |
US9224627B2 (en) * | 2011-02-16 | 2015-12-29 | Texchem Advanced Products Incorporated Sdn Bhd | Single and dual stage wafer cushion and wafer separator |
SG11201505757VA (en) * | 2013-02-11 | 2015-09-29 | Achilles Corp | A tray for a wafer with tape frame |
US20150044619A1 (en) * | 2013-08-07 | 2015-02-12 | International Business Machines Corporation | Carrier for Ultra-Thin Substrates and Method of Use |
JP6478377B2 (ja) * | 2014-08-05 | 2019-03-06 | 藤森工業株式会社 | 収納トレイ |
TWI664130B (zh) * | 2016-01-29 | 2019-07-01 | 旺矽科技股份有限公司 | 晶圓匣 |
US10573545B2 (en) * | 2016-06-28 | 2020-02-25 | Murata Machinery, Ltd. | Substrate carrier and substrate carrier stack |
US10643876B2 (en) * | 2016-06-28 | 2020-05-05 | Murata Machinery, Ltd. | Substrate carrier and substrate carrier stack |
KR20180001999A (ko) * | 2016-06-28 | 2018-01-05 | 테크-샘 아게 | 개선된 기판 스토리지 및 프로세싱 |
JP6990873B2 (ja) * | 2017-03-31 | 2022-02-03 | アキレス株式会社 | 半導体ウェハ容器 |
TWI760258B (zh) * | 2020-08-12 | 2022-04-01 | 大立鈺科技有限公司 | 可伸縮收納機構以及可供該可伸縮收納機構容置的收納盒 |
CN112811006A (zh) * | 2021-02-03 | 2021-05-18 | 京东方科技集团股份有限公司 | 一种显示面板的容纳装置 |
CN113428507B (zh) * | 2021-07-01 | 2023-02-07 | 业成科技(成都)有限公司 | 托盘组件 |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2910684B2 (ja) * | 1996-07-31 | 1999-06-23 | 日本電気株式会社 | ウエハー容器 |
WO2002083522A1 (en) | 2001-04-10 | 2002-10-24 | Brooks Ray G | Ic wafer cushioned separators |
JP2003168731A (ja) | 2001-12-03 | 2003-06-13 | M B K Micro Tec:Kk | 基板トレー、基板トレー敷設用シート及び基板収納方法 |
JP4329536B2 (ja) * | 2003-12-26 | 2009-09-09 | アキレス株式会社 | 半導体ウェハーの収納具 |
JP4903429B2 (ja) * | 2005-12-05 | 2012-03-28 | ミライアル株式会社 | 載置トレイ及び薄板保持容器 |
WO2008013153A1 (fr) * | 2006-07-25 | 2008-01-31 | Miraial Co., Ltd. | Réceptacle pour tranche muni d'une feuille d'amortissement |
JP4838818B2 (ja) | 2008-01-18 | 2011-12-14 | ミライアル株式会社 | クッションシート付ウエハ収納容器 |
-
2007
- 2007-01-24 JP JP2007013230A patent/JP4883627B2/ja not_active Expired - Fee Related
-
2008
- 2008-01-18 DE DE112008000239T patent/DE112008000239T5/de not_active Withdrawn
- 2008-01-18 KR KR1020097012123A patent/KR101445345B1/ko not_active IP Right Cessation
- 2008-01-18 WO PCT/JP2008/050623 patent/WO2008090820A1/ja active Application Filing
-
2009
- 2009-07-08 US US12/499,520 patent/US7819252B2/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
WO2008090820A1 (ja) | 2008-07-31 |
JP2008181987A (ja) | 2008-08-07 |
DE112008000239T5 (de) | 2010-01-14 |
US20090266740A1 (en) | 2009-10-29 |
KR20090117696A (ko) | 2009-11-12 |
US7819252B2 (en) | 2010-10-26 |
KR101445345B1 (ko) | 2014-09-29 |
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