JP2012214376A5 - - Google Patents
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- Publication number
- JP2012214376A5 JP2012214376A5 JP2012123227A JP2012123227A JP2012214376A5 JP 2012214376 A5 JP2012214376 A5 JP 2012214376A5 JP 2012123227 A JP2012123227 A JP 2012123227A JP 2012123227 A JP2012123227 A JP 2012123227A JP 2012214376 A5 JP2012214376 A5 JP 2012214376A5
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- single crystal
- sic
- silicon carbide
- gate contact
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
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- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 claims 11
- 239000013078 crystal Substances 0.000 claims 7
- 239000002184 metal Substances 0.000 claims 6
- 229910010271 silicon carbide Inorganic materials 0.000 claims 6
- 239000000758 substrate Substances 0.000 claims 6
- 238000000034 method Methods 0.000 claims 5
- 229910021421 monocrystalline silicon Inorganic materials 0.000 claims 4
- 238000000859 sublimation Methods 0.000 claims 4
- 230000008022 sublimation Effects 0.000 claims 4
- 230000005669 field effect Effects 0.000 claims 2
- 229910044991 metal oxide Inorganic materials 0.000 claims 2
- 150000004706 metal oxides Chemical class 0.000 claims 2
- 150000004767 nitrides Chemical class 0.000 claims 2
- 229910002704 AlGaN Inorganic materials 0.000 claims 1
- 125000004429 atom Chemical group 0.000 claims 1
- 239000002019 doping agent Substances 0.000 claims 1
- 125000005842 heteroatom Chemical group 0.000 claims 1
- 239000000463 material Substances 0.000 claims 1
- 238000005498 polishing Methods 0.000 claims 1
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US11/101,110 | 2005-04-07 | ||
| US11/101,110 US7422634B2 (en) | 2005-04-07 | 2005-04-07 | Three inch silicon carbide wafer with low warp, bow, and TTV |
Related Parent Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2008505666A Division JP2008535761A (ja) | 2005-04-07 | 2006-04-07 | 歪み、反り、及びｔｔｖが少ない７５ミリメートル炭化珪素ウェハ |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2012214376A JP2012214376A (ja) | 2012-11-08 |
| JP2012214376A5 true JP2012214376A5 (enExample) | 2012-12-20 |
Family
ID=37027682
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2008505666A Pending JP2008535761A (ja) | 2005-04-07 | 2006-04-07 | 歪み、反り、及びｔｔｖが少ない７５ミリメートル炭化珪素ウェハ |
| JP2012123227A Pending JP2012214376A (ja) | 2005-04-07 | 2012-05-30 | 歪み、反り、及びｔｔｖが少ない７５ミリメートル炭化珪素ウェハ |
Family Applications Before (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2008505666A Pending JP2008535761A (ja) | 2005-04-07 | 2006-04-07 | 歪み、反り、及びｔｔｖが少ない７５ミリメートル炭化珪素ウェハ |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US7422634B2 (enExample) |
| EP (1) | EP1871927B1 (enExample) |
| JP (2) | JP2008535761A (enExample) |
| CN (1) | CN101151402B (enExample) |
| TW (1) | TWI330206B (enExample) |
| WO (1) | WO2006108191A2 (enExample) |
Families Citing this family (75)
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2005
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2006
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- 2006-04-07 TW TW095112586A patent/TWI330206B/zh active
- 2006-04-07 EP EP06749958.2A patent/EP1871927B1/en active Active
- 2006-04-07 CN CN2006800108857A patent/CN101151402B/zh active Active
- 2006-04-07 WO PCT/US2006/013757 patent/WO2006108191A2/en not_active Ceased
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2012
- 2012-05-30 JP JP2012123227A patent/JP2012214376A/ja active Pending
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