JP2012054559A5 - - Google Patents

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Publication number
JP2012054559A5
JP2012054559A5 JP2011191264A JP2011191264A JP2012054559A5 JP 2012054559 A5 JP2012054559 A5 JP 2012054559A5 JP 2011191264 A JP2011191264 A JP 2011191264A JP 2011191264 A JP2011191264 A JP 2011191264A JP 2012054559 A5 JP2012054559 A5 JP 2012054559A5
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JP
Japan
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epitaxial
layer
region
nitride
epitaxial layer
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JP2011191264A
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Japanese (ja)
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JP5907686B2 (ja
JP2012054559A (ja
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Priority claimed from US12/807,336 external-priority patent/US8592292B2/en
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JP2011191264A 2010-09-02 2011-09-02 大面積シリコン基板及びその他の基板上の多層ｉｉｉ族窒化物バッファの成長 Active JP5907686B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US12/807,336 2010-09-02
US12/807,336 US8592292B2 (en) 2010-09-02 2010-09-02 Growth of multi-layer group III-nitride buffers on large-area silicon substrates and other substrates

Publications (3)

Publication Number Publication Date
JP2012054559A JP2012054559A (ja) 2012-03-15
JP2012054559A5 true JP2012054559A5 (enExample) 2014-09-18
JP5907686B2 JP5907686B2 (ja) 2016-04-26

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JP2011191264A Active JP5907686B2 (ja) 2010-09-02 2011-09-02 大面積シリコン基板及びその他の基板上の多層ｉｉｉ族窒化物バッファの成長

Country Status (3)

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US (3) US8592292B2 (enExample)
EP (1) EP2426699B1 (enExample)
JP (1) JP5907686B2 (enExample)

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JP2012084743A (ja) 2010-10-13 2012-04-26 Fujitsu Semiconductor Ltd 半導体装置及び電源装置
US9129827B2 (en) * 2012-04-13 2015-09-08 Intel Corporation Conversion of strain-inducing buffer to electrical insulator
EP2908330B1 (en) * 2012-10-12 2021-05-19 Sumitomo Electric Industries, Ltd. Group iii nitride composite substrate, manufacturing method therefor, and group iii nitride semiconductor device manufacturing method
KR102099841B1 (ko) 2013-06-28 2020-04-13 인텔 코포레이션 선택적 에피택셜 성장된 iii-v족 재료 기반 디바이스
US9978844B2 (en) * 2013-08-01 2018-05-22 Taiwan Semiconductor Manufacturing Co., Ltd. HEMT-compatible lateral rectifier structure
CN105409005B (zh) 2013-08-23 2019-04-02 英特尔公司 在mos晶体管的iv族衬底上沉积的iii-v沟道的高阻层
US10032911B2 (en) 2013-12-23 2018-07-24 Intel Corporation Wide band gap transistor on non-native semiconductor substrate
CN105745759B (zh) * 2013-12-23 2020-03-10 英特尔公司 非同质半导体衬底上的宽带隙晶体管及其制造方法
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US20150372096A1 (en) * 2014-06-20 2015-12-24 Ishiang Shih High Electron Mobility Transistors and Integrated Circuits with Improved Feature Uniformity and Reduced defects for Microwave and Millimetre Wave Applications
US11158575B2 (en) * 2018-06-05 2021-10-26 Macom Technology Solutions Holdings, Inc. Parasitic capacitance reduction in GaN-on-silicon devices

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