JP2011142309A - 半導体装置およびその作製方法 - Google Patents
半導体装置およびその作製方法 Download PDFInfo
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- JP2011142309A JP2011142309A JP2010273153A JP2010273153A JP2011142309A JP 2011142309 A JP2011142309 A JP 2011142309A JP 2010273153 A JP2010273153 A JP 2010273153A JP 2010273153 A JP2010273153 A JP 2010273153A JP 2011142309 A JP2011142309 A JP 2011142309A
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- layer
- oxide semiconductor
- insulating layer
- semiconductor layer
- electrode layer
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- 229910000676 Si alloy Inorganic materials 0.000 description 1
- 229910001069 Ti alloy Inorganic materials 0.000 description 1
- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 description 1
- 229910000611 Zinc aluminium Inorganic materials 0.000 description 1
- GDFCWFBWQUEQIJ-UHFFFAOYSA-N [B].[P] Chemical compound [B].[P] GDFCWFBWQUEQIJ-UHFFFAOYSA-N 0.000 description 1
- 229910052783 alkali metal Inorganic materials 0.000 description 1
- 150000001340 alkali metals Chemical class 0.000 description 1
- HXFVOUUOTHJFPX-UHFFFAOYSA-N alumane;zinc Chemical compound [AlH3].[Zn] HXFVOUUOTHJFPX-UHFFFAOYSA-N 0.000 description 1
- 229910000147 aluminium phosphate Inorganic materials 0.000 description 1
- JYMITAMFTJDTAE-UHFFFAOYSA-N aluminum zinc oxygen(2-) Chemical compound [O-2].[Al+3].[Zn+2] JYMITAMFTJDTAE-UHFFFAOYSA-N 0.000 description 1
- 238000004380 ashing Methods 0.000 description 1
- UMIVXZPTRXBADB-UHFFFAOYSA-N benzocyclobutene Chemical compound C1=CC=C2CCC2=C1 UMIVXZPTRXBADB-UHFFFAOYSA-N 0.000 description 1
- 230000002457 bidirectional effect Effects 0.000 description 1
- 229910052810 boron oxide Inorganic materials 0.000 description 1
- 239000005380 borophosphosilicate glass Substances 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 239000001569 carbon dioxide Substances 0.000 description 1
- 229910002092 carbon dioxide Inorganic materials 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 230000003098 cholesteric effect Effects 0.000 description 1
- 229910017052 cobalt Inorganic materials 0.000 description 1
- 239000010941 cobalt Substances 0.000 description 1
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 239000000356 contaminant Substances 0.000 description 1
- WUUZKBJEUBFVMV-UHFFFAOYSA-N copper molybdenum Chemical compound [Cu].[Mo] WUUZKBJEUBFVMV-UHFFFAOYSA-N 0.000 description 1
- 238000002484 cyclic voltammetry Methods 0.000 description 1
- 230000000994 depressogenic effect Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- JKWMSGQKBLHBQQ-UHFFFAOYSA-N diboron trioxide Chemical compound O=BOB=O JKWMSGQKBLHBQQ-UHFFFAOYSA-N 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- AJNVQOSZGJRYEI-UHFFFAOYSA-N digallium;oxygen(2-) Chemical compound [O-2].[O-2].[O-2].[Ga+3].[Ga+3] AJNVQOSZGJRYEI-UHFFFAOYSA-N 0.000 description 1
- KPUWHANPEXNPJT-UHFFFAOYSA-N disiloxane Chemical class [SiH3]O[SiH3] KPUWHANPEXNPJT-UHFFFAOYSA-N 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 239000003822 epoxy resin Substances 0.000 description 1
- 230000005284 excitation Effects 0.000 description 1
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- 229910001195 gallium oxide Inorganic materials 0.000 description 1
- 229910052736 halogen Inorganic materials 0.000 description 1
- 150000002367 halogens Chemical class 0.000 description 1
- 229910001385 heavy metal Inorganic materials 0.000 description 1
- 150000004678 hydrides Chemical class 0.000 description 1
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 description 1
- 238000003780 insertion Methods 0.000 description 1
- 230000037431 insertion Effects 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 239000000696 magnetic material Substances 0.000 description 1
- 238000000838 magnetophoresis Methods 0.000 description 1
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 1
- 229910052753 mercury Inorganic materials 0.000 description 1
- 229910001507 metal halide Inorganic materials 0.000 description 1
- 150000005309 metal halides Chemical class 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 239000011259 mixed solution Substances 0.000 description 1
- QKCGXXHCELUCKW-UHFFFAOYSA-N n-[4-[4-(dinaphthalen-2-ylamino)phenyl]phenyl]-n-naphthalen-2-ylnaphthalen-2-amine Chemical compound C1=CC=CC2=CC(N(C=3C=CC(=CC=3)C=3C=CC(=CC=3)N(C=3C=C4C=CC=CC4=CC=3)C=3C=C4C=CC=CC4=CC=3)C3=CC4=CC=CC=C4C=C3)=CC=C21 QKCGXXHCELUCKW-UHFFFAOYSA-N 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 229910017604 nitric acid Inorganic materials 0.000 description 1
- 238000010943 off-gassing Methods 0.000 description 1
- 239000012788 optical film Substances 0.000 description 1
- 238000007500 overflow downdraw method Methods 0.000 description 1
- 229910052698 phosphorus Inorganic materials 0.000 description 1
- 239000011574 phosphorus Substances 0.000 description 1
- 239000000049 pigment Substances 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 229920002647 polyamide Polymers 0.000 description 1
- 229920000647 polyepoxide Polymers 0.000 description 1
- 229920006267 polyester film Polymers 0.000 description 1
- 229920005591 polysilicon Polymers 0.000 description 1
- 229920001296 polysiloxane Polymers 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 239000003566 sealing material Substances 0.000 description 1
- 238000001004 secondary ion mass spectrometry Methods 0.000 description 1
- FDNAPBUWERUEDA-UHFFFAOYSA-N silicon tetrachloride Chemical compound Cl[Si](Cl)(Cl)Cl FDNAPBUWERUEDA-UHFFFAOYSA-N 0.000 description 1
- 229920002050 silicone resin Polymers 0.000 description 1
- 238000005477 sputtering target Methods 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
- SFZCNBIFKDRMGX-UHFFFAOYSA-N sulfur hexafluoride Chemical compound FS(F)(F)(F)(F)F SFZCNBIFKDRMGX-UHFFFAOYSA-N 0.000 description 1
- 229960000909 sulfur hexafluoride Drugs 0.000 description 1
- TXEYQDLBPFQVAA-UHFFFAOYSA-N tetrafluoromethane Chemical compound FC(F)(F)F TXEYQDLBPFQVAA-UHFFFAOYSA-N 0.000 description 1
- 230000008646 thermal stress Effects 0.000 description 1
- 229920001187 thermosetting polymer Polymers 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
- FAQYAMRNWDIXMY-UHFFFAOYSA-N trichloroborane Chemical compound ClB(Cl)Cl FAQYAMRNWDIXMY-UHFFFAOYSA-N 0.000 description 1
- 229910052724 xenon Inorganic materials 0.000 description 1
- FHNFHKCVQCLJFQ-UHFFFAOYSA-N xenon atom Chemical compound [Xe] FHNFHKCVQCLJFQ-UHFFFAOYSA-N 0.000 description 1
- 229910052727 yttrium Inorganic materials 0.000 description 1
- VWQVUPCCIRVNHF-UHFFFAOYSA-N yttrium atom Chemical compound [Y] VWQVUPCCIRVNHF-UHFFFAOYSA-N 0.000 description 1
Images
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- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
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- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
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Abstract
【解決手段】絶縁表面を有する基板上にゲート電極層を形成し、ゲート電極層上にゲート絶縁層を形成し、ゲート絶縁層上に酸化物半導体層を形成し、酸化物半導体層上にソース電極層及びドレイン電極層を形成し、酸化物半導体層、ソース電極層、及びドレイン電極層上に酸素を含む絶縁層を形成し、酸素を含む絶縁層上に水素を含む絶縁層を形成した後、熱処理を行うことにより、水素を含む絶縁層中の水素を少なくとも酸化物半導体層に供給することを特徴とする半導体装置の作製方法である。
【選択図】図1
Description
本実施の形態では、本発明の一態様に係る半導体装置が有する、トランジスタの構造について説明する。また、本実施の形態では、トランジスタとして、逆スタガ型トランジスタについて説明する。
次に、半導体装置の構成の一例であるトランジスタ150の作製方法について図2乃至図4を参照して説明する。
本実施の形態では、上記実施の形態に係る半導体装置の構造及び作製方法の他の一例について説明する。また、本実施の形態では、トランジスタとして、トップゲート型トランジスタについて説明する。
まず、本実施の形態で説明する半導体装置の構造の一例であるトランジスタ150について説明する。図6(D)に示すトランジスタ150は、基板100上に酸化物半導体層106aが形成され、酸化物半導体層106a上にソース電極層及びドレイン電極層108a、108bが形成される。ソース電極層及びドレイン電極層108a、108b及び酸化物半導体層106aを覆うように、酸素を含む絶縁層112が形成される。絶縁層112は、ゲート絶縁層として機能する。酸素を含む絶縁層112は、酸化物半導体層106aのチャネルにおいて酸化物半導体層106aに接する。また、絶縁層112上に酸化物半導体層106aと重畳するようにゲート電極層114が形成される。さらに、酸素を含む絶縁層112及びゲート電極層114を覆うように、水素を含む絶縁層116が形成される。水素を含む絶縁層116上には、平坦化膜として機能する絶縁層118が形成されていてもよい。本実施の形態で説明するトランジスタ150は、酸化物半導体層106aに接する酸素を含む絶縁層112と、酸素を含む絶縁層112に接する水素を含む絶縁層116とを有する。なお、基板100と酸化物半導体層106aとの間に、下地膜として機能する絶縁層102を形成してもよい。
次に、半導体装置の構成の一例であるトランジスタ150の作製方法について図6を参照して説明する。
本実施の形態では、上記実施の形態に係る半導体装置の構造及び作製方法の他の一例について説明する。
まず、本実施の形態で説明する半導体装置の構造の一例であるトランジスタ150について説明する。図7(D)に示すトランジスタ150は、基板100上にゲート電極層101aが形成され、ゲート電極層101a上にゲート絶縁層102が形成される。ゲート絶縁層102上に、チャネル形成領域として酸化物半導体層106aが形成され、酸化物半導体層106a上にソース電極層及びドレイン電極層108a、108bが形成される。ソース電極層及びドレイン電極層108a、108b、並びに酸化物半導体層106a上に、酸素を含む絶縁層112が形成される。酸素を含む絶縁層112は、酸化物半導体層106aのバックチャネルにおいて酸化物半導体層106aに接する。酸素を含む絶縁層112上に、酸化物半導体層106aと重畳するように、ゲート電極層114が形成され、該ゲート電極層114を覆うように、水素を含む絶縁層116が形成される。水素を含む絶縁層116上には、平坦化膜として機能する絶縁層118が形成されてもよい。本実施の形態で説明するトランジスタ150は、酸化物半導体層106aに接する酸素を含む絶縁層112と、酸素を含む絶縁層112に接する水素を含む絶縁層116とを有することを特徴とする。
次に、半導体装置の構成の一例であるトランジスタ150の作製方法について図7を参照して説明する。
本実施の形態では、上記実施の形態に係る半導体装置の作製方法の他の一例について説明する。
本実施の形態では、水素を供給してオン電流及び電界効果移動度を向上させたトランジスタを作製し、該トランジスタを画素部、さらには駆動回路に用いて表示機能を有する半導体装置(表示装置ともいう)を作製する場合について説明する。また、駆動回路の一部または全部を、画素部と同じ基板上に一体形成し、システムオンパネルを形成することができる。
半導体装置の一形態に相当する発光表示パネル(発光パネルともいう)の外観及び断面について、図9を用いて説明する。図9は、第1の基板上に形成された水素が供給された酸化物半導体層を含むトランジスタ及び発光素子を、第2の基板との間にシール材によって封止した、パネルの平面図であり、図9(B)は、図9(A)のH−Iにおける断面図に相当する。
半導体装置の一形態として電子ペーパーの例を示す。
本明細書に開示する半導体装置は、さまざまな電子機器(遊技機も含む)に適用することができる。電子機器としては、例えば、テレビジョン装置(テレビ、またはテレビジョン受信機ともいう)、コンピュータ用などのモニタ、デジタルカメラ、デジタルビデオカメラ、デジタルフォトフレーム、携帯電話機(携帯電話、携帯電話装置ともいう)、携帯型ゲーム機、携帯情報端末、音響再生装置、パチンコ機などの大型ゲーム機などが挙げられる。
101 導電層
102 絶縁層
106 酸化物半導体層
108 導電層
112 絶縁層
113 絶縁層
116 絶縁層
114 ゲート電極層
118 絶縁層
150 トランジスタ
101a ゲート電極層
106a 酸化物半導体層
108a ドレイン電極層
580 基板
581 トランジスタ
583 絶縁層
584 絶縁層
587 電極層
588 電極層
594 キャビティ
595 充填材
596 基板
2700 電子書籍
2701 筐体
2703 筐体
2705 表示部
2707 表示部
2711 軸部
2721 電源
2723 操作キー
2725 スピーカ
2800 筐体
2801 筐体
2802 表示パネル
2803 スピーカー
2804 マイクロフォン
2805 操作キー
2806 ポインティングデバイス
2807 カメラ用レンズ
2808 外部接続端子
2810 太陽電池セル
2811 外部メモリスロット
3001 本体
3002 筐体
3003 表示部
3004 キーボード
3021 本体
3022 スタイラス
3023 表示部
3024 操作ボタン
3025 外部インターフェイス
3051 本体
3053 接眼部
3054 操作スイッチ
3055 表示部(B)
3056 バッテリー
3057 表示部(A)
4001 基板
4002 画素部
4003 信号線駆動回路
4004 走査線駆動回路
4005 シール材
4006 基板
4008 液晶層
4010 トランジスタ
4011 トランジスタ
4013 液晶素子
4014 絶縁層
4015 接続端子電極
4016 端子電極
4018 FPC
4019 異方性導電層
4020 絶縁層
4021 絶縁層
4030 画素電極層
4031 対向電極層
4032 絶縁層
4040 導電層
4501 基板
4502 画素部
4505 シール材
4506 基板
4507 充填材
4509 トランジスタ
4510 トランジスタ
4511 発光素子
4512 電界発光層
4513 電極層
4514 保護絶縁層
4515 接続端子電極
4516 端子電極
4517 電極層
4519 異方性導電層
4520 隔壁
4540 導電層
4541 絶縁層
4544 絶縁層
590a 黒色領域
590b 白色領域
9600 テレビジョン装置
9601 筐体
9603 表示部
9605 スタンド
9607 表示部
9609 操作キー
9610 リモコン操作機
4503a 信号線駆動回路
4504a 走査線駆動回路
4518a FPC
Claims (14)
- 絶縁表面を有する基板上にゲート電極層を形成し、
前記ゲート電極層上にゲート絶縁層を形成し、
前記ゲート絶縁層上に酸化物半導体層を形成し、
前記酸化物半導体層上にソース電極層及びドレイン電極層を形成し、
前記酸化物半導体層、前記ソース電極層、及び前記ドレイン電極層上に絶縁層を形成し、
前記絶縁層上に水素を含む絶縁層を形成した後、加熱処理を行うことにより、前記水素を含む絶縁層中の水素を少なくとも前記酸化物半導体層に供給することを特徴とする半導体装置の作製方法。 - 請求項1において、前記絶縁層の形成後、該絶縁層上であり、且つ前記ゲート電極層と重なる領域にバックゲート電極を形成することを特徴とする半導体装置の作製方法。
- 絶縁表面を有する基板上にゲート電極層を形成し、
前記ゲート電極層上にゲート絶縁層を形成し、
前記ゲート絶縁層上に酸化物半導体層を形成し、
前記酸化物半導体層の一部上に、チャネル保護層として機能する絶縁層を形成し、
前記酸化物半導体層及び前記絶縁層上に、ソース電極層及びドレイン電極層を形成し、
前記絶縁層、前記ソース電極層、及び前記ドレイン電極層上に、水素を含む絶縁層を形成した後、加熱処理を行うことにより、前記水素を含む絶縁層中の水素を少なくとも前記酸化物半導体層に供給することを特徴とする半導体装置の作製方法。 - 絶縁表面を有する基板上に酸化物半導体層を形成し、
前記酸化物半導体層上にソース電極層及びドレイン電極層を形成し、
前記酸化物半導体層、前記ソース電極層、及び前記ドレイン電極層上に、ゲート絶縁層として機能する絶縁層を形成し、
前記絶縁層上にゲート電極層を形成し、
前記絶縁層及び前記ゲート電極層上に、水素を含む絶縁層を形成した後、加熱処理を行うことにより、少なくとも前記水素を含む絶縁層中の水素を前記酸化物半導体層に供給することを特徴とする半導体装置の作製方法。 - 請求項1乃至4のいずれか一項において、前記加熱処理は、150℃以上450℃以下であることを特徴とする半導体装置の作製方法。
- 請求項1乃至5のいずれか一項において、前記水素を含む絶縁層は、シランと窒素を含む気体を用いてCVD法により形成される半導体装置の作製方法。
- 絶縁表面を有する基板上にゲート電極層を形成し、
前記ゲート電極層上にゲート絶縁層を形成し、
前記ゲート絶縁層上に酸化物半導体層を形成した後、第1の加熱処理により前記酸化物半導体層中の水素濃度を低減し、
前記酸化物半導体層上にソース電極層及びドレイン電極層を形成し、
前記酸化物半導体層、前記ソース電極層、及び前記ドレイン電極層上に酸素を含む絶縁層を形成した後、第2の加熱処理により前記酸化物半導体層に酸素を供給し、
前記酸素を含む絶縁層上に水素を含む絶縁層を形成した後、第3の加熱処理を行うことにより、前記水素を含む絶縁層中の水素を少なくとも前記酸化物半導体層に供給することを特徴とする半導体装置の作製方法。 - 請求項7において、前記酸素を含む絶縁層の形成後、該酸素を含む絶縁層上であり、且つ前記ゲート電極層と重なる領域にバックゲート電極を形成することを特徴とする半導体装置の作製方法。
- 絶縁表面を有する基板上にゲート電極層を形成し、
前記ゲート電極層上にゲート絶縁層を形成し、
前記ゲート絶縁層上に酸化物半導体層を形成した後、第1の加熱処理により前記酸化物半導体層中の水素濃度を低減し、
前記酸化物半導体層の一部上に、チャネル保護層として機能する酸素を含む絶縁層を形成した後、第2の加熱処理により前記酸化物半導体層に酸素を供給し、
前記酸化物半導体層及び前記酸素を含む絶縁層上に、ソース電極層及びドレイン電極層を形成し、
前記酸素を含む絶縁層、前記ソース電極層、及び前記ドレイン電極層上に水素を含む絶縁層を形成した後、第3の加熱処理を行うことにより、前記水素を含む絶縁層中の水素を少なくとも前記酸化物半導体層に供給することを特徴とする半導体装置の作製方法。 - 絶縁表面を有する基板上に酸化物半導体層を形成した後、第1の加熱処理により前記酸化物半導体層中の水素濃度を低減し、
前記酸化物半導体層上にソース電極層及びドレイン電極層を形成し、
前記酸化物半導体層、前記ソース電極層、及び前記ドレイン電極層上に、ゲート絶縁層として機能する酸素を含む絶縁層を形成した後、第2の加熱処理により前記酸化物半導体層に酸素を供給し、
前記酸素を含む絶縁層上にゲート電極層を形成し、
前記酸素を含む絶縁層及び前記ゲート電極層上に、水素を含む絶縁層を形成した後、第3の加熱処理を行うことにより、少なくとも前記水素を含む絶縁層中の水素を前記酸化物半導体層に供給することを特徴とする半導体装置の作製方法。 - 請求項7乃至10のいずれか一項において、
前記第1の加熱処理は、400℃以上750℃以下であり、
前記第2の加熱処理は、200℃以上450℃以下であり、
前記第3の加熱処理は、150℃以上450℃以下であることを特徴とする半導体装置の作製方法。 - 請求項7乃至11のいずれか一項において、前記水素を含む絶縁層は、シランと窒素を含む気体を用いてCVD法により形成される半導体装置の作製方法。
- 絶縁表面を有する基板上にゲート電極層と、
前記ゲート電極層上にゲート絶縁層と、
前記ゲート絶縁層上に酸化物半導体層と、
前記酸化物半導体層上にソース電極層またはドレイン電極層と、
前記酸化物半導体層上に接する、酸素を含む絶縁層と、
前記酸素を含む絶縁層上に接する、水素を含む絶縁層と、を有する半導体装置。 - 請求項13において、前記水素を含む絶縁層は、窒化シリコン層または窒化酸化シリコン層である半導体装置。
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JP2016178324A (ja) | 2016-10-06 |
JP2015164207A (ja) | 2015-09-10 |
JP2024019219A (ja) | 2024-02-08 |
US8420553B2 (en) | 2013-04-16 |
JP6106312B2 (ja) | 2017-03-29 |
JP2021040161A (ja) | 2021-03-11 |
TW201347050A (zh) | 2013-11-16 |
JP5100906B2 (ja) | 2012-12-19 |
JP6309125B2 (ja) | 2018-04-11 |
TWI532102B (zh) | 2016-05-01 |
JP2012248858A (ja) | 2012-12-13 |
JP5938118B2 (ja) | 2016-06-22 |
TWI529811B (zh) | 2016-04-11 |
US8946097B2 (en) | 2015-02-03 |
US20110133179A1 (en) | 2011-06-09 |
JP6805305B2 (ja) | 2020-12-23 |
KR20120106786A (ko) | 2012-09-26 |
TW201137986A (en) | 2011-11-01 |
JP7004471B2 (ja) | 2022-01-21 |
JP2018078307A (ja) | 2018-05-17 |
KR101511076B1 (ko) | 2015-04-10 |
JP2019220705A (ja) | 2019-12-26 |
JP2022031573A (ja) | 2022-02-18 |
JP6606160B2 (ja) | 2019-11-13 |
WO2011070892A1 (en) | 2011-06-16 |
KR20130092631A (ko) | 2013-08-20 |
JP2017135394A (ja) | 2017-08-03 |
US20130237013A1 (en) | 2013-09-12 |
JP5731180B2 (ja) | 2015-06-10 |
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