JP2009289908A - 半導体装置及びその製造方法 - Google Patents
半導体装置及びその製造方法 Download PDFInfo
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- JP2009289908A JP2009289908A JP2008139680A JP2008139680A JP2009289908A JP 2009289908 A JP2009289908 A JP 2009289908A JP 2008139680 A JP2008139680 A JP 2008139680A JP 2008139680 A JP2008139680 A JP 2008139680A JP 2009289908 A JP2009289908 A JP 2009289908A
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- wiring
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- insulating layer
- semiconductor device
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- 239000004065 semiconductor Substances 0.000 title claims abstract description 452
- 238000000034 method Methods 0.000 title claims description 79
- 238000004519 manufacturing process Methods 0.000 title claims description 42
- 239000000758 substrate Substances 0.000 claims abstract description 119
- 229920005989 resin Polymers 0.000 claims abstract description 97
- 239000011347 resin Substances 0.000 claims abstract description 97
- 239000011162 core material Substances 0.000 claims abstract description 80
- 239000000835 fiber Substances 0.000 claims abstract description 60
- 238000007789 sealing Methods 0.000 claims description 62
- 238000012545 processing Methods 0.000 claims description 29
- 239000010410 layer Substances 0.000 description 476
- 239000010408 film Substances 0.000 description 71
- 239000000463 material Substances 0.000 description 63
- 229910052751 metal Inorganic materials 0.000 description 34
- 239000002184 metal Substances 0.000 description 34
- 239000011295 pitch Substances 0.000 description 29
- 239000000853 adhesive Substances 0.000 description 22
- 230000001070 adhesive effect Effects 0.000 description 22
- 238000012986 modification Methods 0.000 description 21
- 230000004048 modification Effects 0.000 description 21
- 230000015572 biosynthetic process Effects 0.000 description 20
- 229910000679 solder Inorganic materials 0.000 description 17
- 238000000465 moulding Methods 0.000 description 16
- 238000007772 electroless plating Methods 0.000 description 14
- 239000004744 fabric Substances 0.000 description 14
- 239000011521 glass Substances 0.000 description 14
- 238000005530 etching Methods 0.000 description 13
- 239000011888 foil Substances 0.000 description 11
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 9
- 239000011229 interlayer Substances 0.000 description 9
- 239000010949 copper Substances 0.000 description 8
- 239000000945 filler Substances 0.000 description 8
- 230000001681 protective effect Effects 0.000 description 8
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 6
- 229910052710 silicon Inorganic materials 0.000 description 6
- 239000010703 silicon Substances 0.000 description 6
- 239000011889 copper foil Substances 0.000 description 5
- 239000012792 core layer Substances 0.000 description 5
- 239000011159 matrix material Substances 0.000 description 5
- 230000000052 comparative effect Effects 0.000 description 4
- 229910052802 copper Inorganic materials 0.000 description 4
- 238000009713 electroplating Methods 0.000 description 4
- 230000006870 function Effects 0.000 description 4
- 239000010931 gold Substances 0.000 description 4
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 3
- 229910052737 gold Inorganic materials 0.000 description 3
- 238000010438 heat treatment Methods 0.000 description 3
- 238000007689 inspection Methods 0.000 description 3
- 230000002093 peripheral effect Effects 0.000 description 3
- 238000007747 plating Methods 0.000 description 3
- 238000003825 pressing Methods 0.000 description 3
- 238000007493 shaping process Methods 0.000 description 3
- 229920001187 thermosetting polymer Polymers 0.000 description 3
- 239000010409 thin film Substances 0.000 description 3
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- 229910000577 Silicon-germanium Inorganic materials 0.000 description 2
- 239000000654 additive Substances 0.000 description 2
- 229910045601 alloy Inorganic materials 0.000 description 2
- 239000000956 alloy Substances 0.000 description 2
- 239000013078 crystal Substances 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 230000002950 deficient Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000003912 environmental pollution Methods 0.000 description 2
- 238000013100 final test Methods 0.000 description 2
- 238000009413 insulation Methods 0.000 description 2
- 230000003071 parasitic effect Effects 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 238000012546 transfer Methods 0.000 description 2
- LEVVHYCKPQWKOP-UHFFFAOYSA-N [Si].[Ge] Chemical compound [Si].[Ge] LEVVHYCKPQWKOP-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 229910052797 bismuth Inorganic materials 0.000 description 1
- JCXGWMGPZLAOME-UHFFFAOYSA-N bismuth atom Chemical compound [Bi] JCXGWMGPZLAOME-UHFFFAOYSA-N 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 239000003822 epoxy resin Substances 0.000 description 1
- 239000000383 hazardous chemical Substances 0.000 description 1
- 230000017525 heat dissipation Effects 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 229920000647 polyepoxide Polymers 0.000 description 1
- 230000008054 signal transmission Effects 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- 239000011800 void material Substances 0.000 description 1
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
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- H01L23/50—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor for integrated circuit devices, e.g. power bus, number of leads
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- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/50—Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the subgroups H01L21/06 - H01L21/326, e.g. sealing of a cap to a base of a container
- H01L21/56—Encapsulations, e.g. encapsulation layers, coatings
- H01L21/561—Batch processing
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- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/28—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection
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- H01L23/3107—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape the device being completely enclosed
- H01L23/3121—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape the device being completely enclosed a substrate forming part of the encapsulation
- H01L23/3128—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape the device being completely enclosed a substrate forming part of the encapsulation the substrate having spherical bumps for external connection
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- H01L24/05—Structure, shape, material or disposition of the bonding areas prior to the connecting process of an individual bonding area
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- H01L24/42—Wire connectors; Manufacturing methods related thereto
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- H01L24/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
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- H01L24/83—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a layer connector
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- H01L24/93—Batch processes
- H01L24/95—Batch processes at chip-level, i.e. with connecting carried out on a plurality of singulated devices, i.e. on diced chips
- H01L24/97—Batch processes at chip-level, i.e. with connecting carried out on a plurality of singulated devices, i.e. on diced chips the devices being connected to a common substrate, e.g. interposer, said common substrate being separable into individual assemblies after connecting
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- H01L25/04—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes the devices not having separate containers
- H01L25/065—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes the devices not having separate containers the devices being of a type provided for in group H01L27/00
- H01L25/0657—Stacked arrangements of devices
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- H01L25/10—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes the devices having separate containers
- H01L25/105—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes the devices having separate containers the devices being of a type provided for in group H01L27/00
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- H01L2224/056—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof
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- H01L2224/056—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof
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Abstract
【解決手段】配線基板2は、複数のボンディングリード2cが形成された上面2aと複数のランド2dが形成された下面2cを有し、配線基板2のコア材2fの上下面2fa、2fb側のそれぞれにおいて、複数の配線層2gと複数の絶縁層2hが交互に形成された多層配線基板である。ボンディングリード2cは、最上層の配線層2g1の一部、ランド2dは最下層の配線層2g6の一部でそれぞれ構成される。絶縁層2hは繊維及び樹脂を含有する第2絶縁層2hpと、第2絶縁層2hpよりも繊維の含有量が少ない第3絶縁層2haとを有する。第2絶縁層2hpは、コア材2fの上下面2fa、2fb側にそれぞれ形成され、第3絶縁層2haは、第2絶縁層2hpを介してコア材2fの上下面2fa、2fb側にそれぞれ形成され、配線層2g1及び配線層2g6は、第3絶縁層2ha上に形成されている。
【選択図】図4
Description
複数のパッドが形成された主面を有し、前記配線基板の上面上に搭載された半導体チップと、
前記半導体チップの前記複数のパッドと前記配線基板の前記複数のボンディングリードとをそれぞれ電気的に接続する複数の導電性部材と、
前記配線基板の前記複数のランドにそれぞれ接続された複数の外部端子と、を含み、
前記配線基板は、前記配線基板の上面側に位置する上面と前記配線基板の下面側に位置する下面とを有するコア材を備え、
前記配線基板は前記コア材の前記上下面側のそれぞれにおいて、複数の配線層と複数の絶縁層が交互に形成された多層配線基板であり、
前記複数のボンディングリードは、前記複数の配線層のうちの最上層の配線層の一部で構成され、
前記複数のランドは、前記複数の配線層のうちの最下層の配線層の一部で構成され、
前記コア材は、繊維及び樹脂を含有する第1絶縁層であり、
前記複数の絶縁層は、繊維及び樹脂を含有する第2絶縁層と、前記第1絶縁層及び前記第2絶縁層のそれぞれよりも繊維の含有量が少ない第3絶縁層とを有し、
前記第2絶縁層は、前記コア材の前記上下面側にそれぞれ形成され、
前記第3絶縁層は、前記第2絶縁層を介して前記コア材の前記上下面側にそれぞれ形成され、
前記最上層の配線層及び前記最下層の配線層のそれぞれは、前記第3絶縁層上に形成されているものである。
本願において、実施の態様の記載は、必要に応じて、便宜上複数のセクション等に分けて記載するが、特にそうでない旨明示した場合を除き、これらは相互に独立別個のものではなく、記載の前後を問わず、単一の例の各部分、一方が他方の一部詳細または一部または全部の変形例等である。また、原則として、同様の部分は繰り返しの説明を省略する。また、実施の態様における各構成要素は、特にそうでない旨明示した場合、理論的にその数に限定される場合および文脈から明らかにそうでない場合を除き、必須のものではない。
まず、図1乃至図3を用いて、本実施の形態1の半導体装置(半導体集積回路装置)10の概略構成を説明する。
本実施の形態2の半導体装置20は、図38に示すように、半導体チップ1の主面1aが配線基板24の上面2aと対向するように、導電性部材である複数のバンプ電極21を介して配線基板24の複数のボンディングリード24cと半導体チップ1の複数のパッド1cとをそれぞれ電気的に接続するものである。
前記実施の形態1、2では、配線基板2、24の上面2a上に1つの半導体チップ1が搭載された半導体装置10、20について説明したが、近年では、半導体装置の高機能化に伴い、1つの半導体装置内に、演算処理回路を有するマイコン系の半導体チップ(マイコンチップ)と、メモリ回路を有するメモリ系の半導体チップ(メモリチップ)とを混載することで、1つのシステムを構築するSIP(System In Package)型の半導体装置が検討されている。
前記実施の形態3では、1つの半導体装置内にマイコンチップ31とメモリチップ32を混載することで1つのシステムを構築するSIP型の半導体装置30について説明したが、本実施の形態4では、マイコンチップ31とメモリチップ32を別々の半導体装置40、50で製造しておき、最終的に一方の半導体装置40上に他方の半導体装置50を積層し、電気的に接続する、所謂、POP(Package On Package)型の半導体装置60について説明する。
1a 主面(第1主面)
1b 裏面(第1裏面)
1c パッド(第1パッド、電極)
1cSIG パッド(インタフェース用パッド)
1cVdd パッド(電源電位用パッド)
1cGND パッド(基準電位用パッド)
2 配線基板(基板)
2a 上面(表面、第1の面)
2b 下面(裏面、第2の面)
2c ボンディングリード(ワイヤ接続用リード、第2ボンディングリード)
2cSIG ボンディングリード(インタフェース用ボンディングリード)
2cIIF ボンディングリード(内部インタフェース用ボンディングリード)
2cVdd ボンディングリード(電源電位用ボンディングリード)
2cGND ボンディングリード(基準電位用ボンディングリード)
2d ランド(第1ランド)
2e バンプ電極(外部端子)
2f コア材(コア層、第1絶縁層)
2fa 上面(第3の面)
2fb 下面(第4の面)
2fc 貫通孔(ビア、スルーホール)
2fd 配線(スルーホール配線)
2fe 樹脂(スルーホール充填用樹脂)
2g 配線層
2g1 配線層(チップ搭載面配線層)
2g2 配線層(第2上面側配線層)
2g3 配線層(第1上面側配線層)
2g4 配線層(第1下面側配線層)
2g5 配線層(第2下面側配線層)
2g6 配線層(裏面配線層)
2h 絶縁層
2hp 絶縁層(第2絶縁層、第2絶縁膜)
2hpSH 開口部(第2絶縁層用開口部)
2ha 絶縁層(第3絶縁層、第3絶縁膜)
2haSH 開口部(第3絶縁層用開口部)
2j、2k 配線(金属膜)
2m 樹脂膜(ソルダレジスト膜、保護膜)
2CL クロック信号用の配線パターン
2SIG 第1配線パターン(信号用配線パターン)
2Vdd 第2配線パターン(電源電位用配線パターン)
2GND 第3配線パターン(基準電位用配線パターン)
3 接着材
4 ワイヤ(導電性部材、第2導電性部材)
4a ボール部
5 封止体(封止樹脂)
5a 樹脂
6 基材(第1絶縁層、第2絶縁層、第3絶縁層)
7 シード層(金属薄膜)
8 レジスト膜
9 開口部
10、20、30、60、61、62、64 半導体装置
11、36、42、53 配線基板(多数個取り配線基板)
11a 上面
11b 下面
11c 製品形成領域(デバイス形成領域)
11d ダイシング領域
11e チップ搭載部
12 成形金型
12a 上型(第1金型)
12b 下型(第2金型)
12c キャビティ
12ca 側面
12d ゲート部
12e エアベント部
12f 真空吸着孔
13 ダイシングテープ
14 ダイシングブレード
15 マザーボード(実装基板)
16 金属膜(電解めっき膜)
21 バンプ電極(導電性部材、第1導電性部材、突起状電極)
22 半田(導電性部材)
23 アンダーフィル樹脂(封止樹脂、第1封止体)
24 配線基板(基板)
24c ボンディングリード(フリップチップ接続用リード、第1ボンディングリード)
24cIIF ボンディングリード(内部インタフェース用第1ボンディングリード)
25 ヒートステージ
26 ツール(治具)
31 マイコンチップ(第1半導体チップ)
31a 主面(第1主面)
31b 裏面(第1裏面)
31c パッド(第1パッド、電極)
31cVdd パッド(電源電位用パッド)
31cGND パッド(基準電位用パッド)31cGND
31cIIF パッド(内部インタフェース用パッド、電極)
31cOIF パッド(外部インタフェース用パッド、電極)
32、63 メモリチップ(第2半導体チップ)
32a 主面(第2主面)
32b 裏面(第2裏面)
32c パッド(第2パッド、電極)
32cIIF パッド(内部インタフェース用パッド、電極)
32cVdd パッド(電源電位用パッド)
32cGND パッド(基準電位用パッド)
33 外部機器(外部LSI)
34 配線基板(基板)
35 接着材
37 ノズル
40 半導体装置(第1半導体装置)
41 配線基板(第1配線基板、マイコンチップ用配線基板)
41c ランド(電極、第2ボンディングリード)
41cIIF ランド(内部インタフェース用第2ボンディングリード)
41cVdd ランド(電源電位用第2ボンディングリード)
41cGND ランド(基準電位用第2ボンディングリード)
50 半導体装置(第2半導体装置)
51 配線基板(第2配線基板、メモリチップ用配線基板)
51a 上面
51b 下面
51c ボンディングリード
51d ランド(第2ランド)
52 バンプ電極(半導体装置接続用導電性部材)
65 配線基板(基板)
80、80a、80b シード層
81 配線パターン
82 めっき膜
L1 幅
L2 配置間隔
PL 矢印
Claims (18)
- 複数のボンディングリードが形成された上面、及び前記上面とは反対側に位置し、複数のランドが形成された下面を有する配線基板と、
複数のパッドが形成された主面を有し、前記配線基板の上面上に搭載された半導体チップと、
前記半導体チップの前記複数のパッドと前記配線基板の前記複数のボンディングリードとをそれぞれ電気的に接続する複数の導電性部材と、
前記配線基板の前記複数のランドにそれぞれ接続された複数の外部端子と、を含み、
前記配線基板は、前記配線基板の上面側に位置する上面と前記配線基板の下面側に位置する下面とを有するコア材を備え、
前記配線基板は、前記コア材の前記上下面側のそれぞれにおいて、複数の配線層と複数の絶縁層が交互に形成された多層配線基板であり、
前記複数のボンディングリードは、前記複数の配線層のうちの最上層の配線層の一部で構成され、
前記複数のランドは、前記複数の配線層のうちの最下層の配線層の一部で構成され、
前記コア材は、繊維及び樹脂を含有する第1絶縁層であり、
前記複数の絶縁層は、繊維及び樹脂を含有する第2絶縁層と、前記第1絶縁層及び前記第2絶縁層のそれぞれよりも繊維の含有量が少ない第3絶縁層とを有し、
前記第2絶縁層は、前記コア材の前記上下面側にそれぞれ形成され、
前記第3絶縁層は、前記第2絶縁層を介して前記コア材の前記上下面側にそれぞれ形成され、
前記最上層の配線層及び前記最下層の配線層のそれぞれは、前記第3絶縁層上に形成されていることを特徴とする半導体装置。 - 請求項1記載の半導体装置であって、前記複数の配線層は、前記コア材の前記上下面側のそれぞれにおいて、3層ずつ形成されていることを特徴とする半導体装置。
- 請求項2記載の半導体装置であって、前記第1絶縁層の厚さは、前記第2絶縁層の厚さよりも厚く、
前記第2絶縁層の厚さは、前記第3絶縁層の厚さよりも厚いことを特徴とする半導体装置。 - 請求項3記載の半導体装置であって、前記半導体チップの前記主面には、外部機器から供給された信号(入出力(I/O)データ)を変換する演算処理回路が形成されており、
前記複数のパッド(電極)は、前記演算処理回路と電気的に接続され、前記外部機器から供給された前記信号が入力される第1のインタフェース用パッドと、前記演算処理回路と電気的に接続され、前記演算処理回路にて変換された信号が出力される第2のインタフェース用パッドと、前記外部機器から供給された電源電位が入力される電源電位用パッドと、前記外部機器から供給された基準電位が入力される基準電位用パッドとを有し、
前記複数の配線層は、前記信号が流れる第1配線パターンと、前記電源電位が流れる第2配線パターンと、前記基準電位が流れる第3配線パターンとを有し、
前記第1配線パターン、前記第2配線パターン及び前記第3配線パターンのそれぞれは、前記最上層の配線層及び前記最下層の配線層では、前記第2配線パターン及び前記第3配線パターンの総面積よりも前記第1配線パターンの総面積の方が大きくなるように、前記最上層の配線層及び前記最下層の配線層以外の配線層では、前記第1配線パターンの総面積よりも前記第2配線パターンの総面積、又は前記第3配線パターンの総面積の方が大きくなるように、形成されていることを特徴とする半導体装置。 - 請求項4記載の半導体装置であって、前記半導体チップは、前記主面が前記配線基板の前記上面と対向するように、前記配線基板の前記上面上に搭載され、
前記半導体チップの前記複数のパッドと前記配線基板の前記複数のボンディングリードは、複数のバンプ電極を介してそれぞれ電気的に接続されていることを特徴とする半導体装置。 - 請求項5記載の半導体装置であって、前記半導体チップの前記主面と前記配線基板の前記上面との間には、前記複数のバンプ電極を封止する封止体が形成されていることを特徴とする半導体装置。
- 請求項4記載の半導体装置であって、前記半導体チップは、前記主面と反対側に位置する裏面が前記配線基板の前記上面と対向するように、前記配線基板の前記上面上に搭載され、
前記半導体チップの前記複数のパッドと前記配線基板の前記複数のボンディングリードは、複数のワイヤを介してそれぞれ電気的に接続されていることを特徴とする半導体装置。 - 請求項7記載の半導体装置であって、前記配線基板の前記上面上には、前記半導体チップ及び前記複数のワイヤを封止する封止体が形成されていることを特徴とする半導体装置。
- 複数の第1ボンディングリードおよび前記複数の第1ボンディングリードの周囲に配置された複数の第2ボンディングリードが形成された上面、及び前記上面とは反対側に位置し、複数のランドが形成された下面を有する配線基板と、
複数の第1パッドが形成された第1主面、及び前記第1主面とは反対側に位置する第1裏面を有し、前記第1主面が前記配線基板の前記上面と対向するように、前記配線基板の上面上に搭載された第1半導体チップと、
複数の第2パッドが形成された第2主面、及び前記第2主面とは反対側に位置する第2裏面を有し、前記第2裏面が前記第1半導体チップの前記第1裏面と対向するように、前記第1半導体チップ上に搭載された第2半導体チップと、
前記第1半導体チップの前記複数の第1パッドと前記配線基板の前記複数の第1ボンディングリードとをそれぞれ電気的に接続する複数の第1導電性部材と、
前記第2半導体チップの前記複数の第2パッドと前記配線基板の前記複数の第2ボンディングリードとをそれぞれ電気的に接続する複数の第2導電性部材と、
前記第1半導体チップの前記第1主面と前記配線基板の前記上面との間に形成され、前記複数の第1導電性部材を封止する第1封止体と、
前記第1半導体チップ、前記第2半導体チップ、及び前記複数の第2導電性部材を封止するように、前記配線基板の前記上面上に形成された第2封止体と、
前記配線基板の前記複数のランドにそれぞれ接続された複数の外部端子と、を含み、
前記配線基板は、前記配線基板の上面側に位置する上面と前記配線基板の下面側に位置する下面とを有するコア材を備え、
前記配線基板は前記コア材の前記上下面側のそれぞれにおいて、複数の配線層と複数の絶縁層が交互に形成された多層配線基板であり、
前記複数の第1ボンディングリード及び前記複数の第2ボンディングリードは、前記複数の配線層のうちの最上層の配線層の一部で構成され、
前記複数のランドは、前記複数の配線層のうちの最下層の配線層の一部で構成され、
前記コア材は、繊維及び樹脂を含有する第1絶縁層であり、
前記複数の絶縁層は、繊維及び樹脂を含有する第2絶縁層と、前記第1絶縁層及び前記第2絶縁層のそれぞれよりも繊維の含有量が少ない第3絶縁層とを有し、
前記第2絶縁層は、前記コア材の前記上下面側にそれぞれ形成され、
前記第3絶縁層は、前記第2絶縁層を介して前記コア材の前記上下面側にそれぞれ形成され、
前記最上層の配線層及び前記最下層の配線層のそれぞれは、前記第3絶縁層上に形成されていることを特徴とする半導体装置。 - 請求項9記載の半導体装置であって、前記複数の配線層は、前記コア材の前記上下面側のそれぞれにおいて、3層ずつ形成されていることを特徴とする半導体装置。
- 請求項10記載の半導体装置であって、前記第1絶縁層の厚さは、前記第2絶縁層の厚さよりも厚く、
前記第2絶縁層の厚さは、前記第3絶縁層の厚さよりも厚いことを特徴とする半導体装置。 - 請求項11記載の半導体装置であって、前記第1半導体チップの前記第1主面には、外部機器から供給された信号(入出力(I/O)データ)を変換する演算処理回路が形成されており、
前記第2半導体チップの前記第2主面には、メモリ回路が形成されており、
前記複数の第1パッドは、前記演算処理回路と電気的に接続され、前記外部機器から供給された前記信号が入力される第1のインタフェース用パッドと、前記演算処理回路と電気的に接続され、前記演算処理回路にて変換された信号が出力される第2のインタフェース用パッドと、前記外部機器から供給された電源電位が入力される電源電位用パッドと、前記外部機器から供給された基準電位が入力される基準電位用パッドとを有し、
前記複数の配線層は、前記信号が流れる第1配線パターンと、前記電源電位が流れる第2配線パターンと、前記基準電位が流れる第3配線パターンとを有し、
前記第1配線パターン、前記第2配線パターン及び前記第3配線パターンのそれぞれは、前記最上層の配線層及び前記最下層の配線層では、前記第2配線パターン及び前記第3配線パターンの総面積よりも前記第1配線パターンの総面積の方が大きくなるように、前記最上層の配線層及び前記最下層の配線層以外の配線層では、前記第1配線パターンの総面積よりも前記第2配線パターンの総面積、又は前記第3配線パターンの総面積の方が大きくなるように、形成されていることを特徴とする半導体装置。 - 以下の工程を含むことを特徴とする半導体装置の製造方法;
(a)複数のボンディングリードが形成された上面、および前記上面とは反対側に位置し、複数のランドが形成された下面を有する配線基板を準備する工程;
(b)主面、前記主面に形成された複数のパッド、前記複数のパッドにそれぞれ接続された複数のバンプ電極、及び前記主面とは反対側に位置する裏面を有する半導体チップを、前記主面が前記配線基板の上面と対向するように、前記配線基板の上面上に搭載する工程;
(c)前記配線基板及び前記半導体チップに熱を加えた状態で、前記半導体チップの前記裏面を治具で押圧し、前記複数のバンプ電極と前記複数のボンディングリードとをそれぞれ電気的に接続する工程;
(d)前記配線基板の前記複数のランドに複数の外部端子をそれぞれ接続する工程;
ここで、
前記配線基板は、前記配線基板の上面側に位置する上面と前記配線基板の下面側に位置する下面とを有するコア材を備え、
前記配線基板は前記コア材の前記上下面側のそれぞれにおいて、複数の配線層と複数の絶縁層が交互に形成された多層配線基板であり、
前記複数のボンディングリードは、前記複数の配線層のうちの最上層の配線層の一部で構成され、
前記複数のランドは、前記複数の配線層のうちの最下層の配線層の一部で構成され、
前記コア材は、繊維及び樹脂を含有する第1絶縁層であり、
前記複数の絶縁層は、繊維及び樹脂を含有する第2絶縁層と、前記第1絶縁層及び前記第2絶縁層のそれぞれよりも繊維の含有量が少ない第3絶縁層とを有し、
前記第2絶縁層は、前記コア材の前記上下面側にそれぞれ形成され、
前記第3絶縁層は、前記第2絶縁層を介して前記コア材の前記上下面側にそれぞれ形成され、
前記最上層の配線層及び前記最下層の配線層のそれぞれは、前記第3絶縁層上に形成されていることを特徴とする半導体装置の製造方法。 - 請求項13記載の半導体装置の製造方法であって、前記複数の配線層は、前記コア材の前記上下面側のそれぞれにおいて、3層ずつ形成されていることを特徴とする半導体装置の製造方法。
- 請求項14記載の半導体装置の製造方法であって、前記第1絶縁層の厚さは、前記第2絶縁層の厚さよりも厚く、
前記第2絶縁層の厚さは、前記第3絶縁層の厚さよりも厚いことを特徴とする半導体装置の製造方法。 - 請求項15記載の半導体装置の製造方法であって、前記半導体チップの前記主面には、外部機器から供給された信号(入出力(I/O)データ)を変換する演算処理回路が形成されており、
前記複数のパッドは、前記演算処理回路と電気的に接続され、前記外部機器から供給された前記信号が入力される第1のインタフェース用パッドと、前記演算処理回路と電気的に接続され、前記演算処理回路にて変換された信号が出力される第2のインタフェース用パッドと、前記外部機器から供給された電源電位が入力される電源電位用パッドと、前記外部機器から供給された基準電位が入力される基準電位用パッドとを有し、
前記複数の配線層は、前記信号が流れる第1配線パターンと、前記電源電位が流れる第2配線パターンと、前記基準電位が流れる第3配線パターンとを有し、
前記第1配線パターン、前記第2配線パターン及び前記第3配線パターンのそれぞれは、前記最上層の配線層及び前記最下層の配線層では、前記第2配線パターン及び前記第3配線パターンの総面積よりも前記第1配線パターンの総面積の方が大きくなるように、前記最上層の配線層及び前記最下層の配線層以外の配線層では、前記第1配線パターンの総面積よりも前記第2配線パターンの総面積、又は前記第3配線パターンの総面積の方が大きくなるように、形成されていることを特徴とする半導体装置の製造方法。 - 請求項16記載の半導体装置の製造方法であって、前記(c)工程の後、かつ前記(d)工程の前に、前記熱を加えた状態で、前記半導体チップの前記主面と前記配線基板の前記上面との間に樹脂を供給し、前記複数のバンプ電極を封止する封止体を形成することを特徴とする半導体装置の製造方法。
- 以下の工程を含むことを特徴とする半導体装置の製造方法;
(a)複数の第1ボンディングリードおよび前記複数の第1ボンディングリードの周囲に配置された複数の第2ボンディングリードが形成された上面、及び前記上面とは反対側に位置し、複数のランドが形成された下面とを有する配線基板を準備する工程;
(b)複数の第1パッドが形成された第1主面、及び前記第1主面とは反対側に位置する第1裏面を有する第1半導体チップを、前記第1主面が前記配線基板の前記配線基板の上面と対向するように、前記配線基板の上面上に搭載する工程;
(c)前記配線基板及び前記半導体チップに熱を加えた状態で、前記半導体チップの前記裏面を治具で押圧し、前記複数のバンプ電極と前記複数の第1ボンディングリードとをそれぞれ電気的に接続する工程;
(d)複数の第2パッドが形成された第2主面、及び前記第2主面とは反対側に位置する第2裏面を有する第2半導体チップを、前記第2裏面が前記第1半導体チップの前記第1裏面と対向するように、前記第1半導体チップ上に搭載する工程;
(e)前記第2半導体チップの前記複数の第2パッドと前記配線基板の前記複数の第2ボンディングリードとをそれぞれ電気的に接続する工程;
(f)前記配線基板の前記複数のランドに複数の外部端子をそれぞれ接続する工程;
ここで、
前記配線基板は、前記配線基板の上面側に位置する上面と前記配線基板の下面側に位置する下面とを有するコア材を備え、
前記配線基板は前記コア材の前記上下面側のそれぞれにおいて、複数の配線層と複数の絶縁層が交互に形成された多層配線基板であり、
前記複数の第1ボンディングリード及び前記複数の第2ボンディングリードは、前記複数の配線層のうちの最上層の配線層の一部で構成され、
前記複数のランドは、前記複数の配線層のうちの最下層の配線層の一部で構成され、
前記コア材は、繊維及び樹脂を含有する第1絶縁層であり、
前記複数の絶縁層は、繊維及び樹脂を含有する第2絶縁層と、前記第1絶縁層及び前記第2絶縁層のそれぞれよりも繊維の含有量が少ない第3絶縁層とを有し、
前記第2絶縁層は、前記コア材の前記上下面側にそれぞれ形成され、
前記第3絶縁層は、前記第2絶縁層を介して前記コア材の前記上下面側にそれぞれ形成され、
前記最上層の配線層及び前記最下層の配線層のそれぞれは、前記第3絶縁層上に形成されていることを特徴とする半導体装置の製造方法。
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KR20140131172A (ko) * | 2013-05-03 | 2014-11-12 | 삼성전자주식회사 | 반도체 소자 제조 방법 |
KR102008153B1 (ko) | 2013-05-03 | 2019-10-21 | 삼성전자 주식회사 | 반도체 소자 제조 방법 |
JP2015179880A (ja) * | 2015-07-03 | 2015-10-08 | ルネサスエレクトロニクス株式会社 | 半導体装置及び電子装置 |
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Also Published As
Publication number | Publication date |
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CN101593736B (zh) | 2013-06-05 |
TW201010025A (en) | 2010-03-01 |
TWI458057B (zh) | 2014-10-21 |
CN101593736A (zh) | 2009-12-02 |
US8383456B2 (en) | 2013-02-26 |
JP5001903B2 (ja) | 2012-08-15 |
US8159057B2 (en) | 2012-04-17 |
US20090294945A1 (en) | 2009-12-03 |
US20120208322A1 (en) | 2012-08-16 |
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