JP2008508744A5 - - Google Patents

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JP2008508744A5
JP2008508744A5 JP2007524857A JP2007524857A JP2008508744A5 JP 2008508744 A5 JP2008508744 A5 JP 2008508744A5 JP 2007524857 A JP2007524857 A JP 2007524857A JP 2007524857 A JP2007524857 A JP 2007524857A JP 2008508744 A5 JP2008508744 A5 JP 2008508744A5
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precursor
gas
carrier
inlets
inlet
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JP5519105B2 (ja
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JP2007524857A 2004-08-02 2005-07-29 化学気相成長の方法及び化学気相成長リアクタ用のガス供給システム Expired - Fee Related JP5519105B2 (ja)

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US59817204P 2004-08-02 2004-08-02
US60/598,172 2004-08-02
PCT/US2005/026891 WO2006020424A2 (en) 2004-08-02 2005-07-29 Multi-gas distribution injector for chemical vapor deposition reactors

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JP2008508744A JP2008508744A (ja) 2008-03-21
JP2008508744A5 true JP2008508744A5 (enExample) 2008-09-11
JP5519105B2 JP5519105B2 (ja) 2014-06-11

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US (2) US20060021574A1 (enExample)
JP (1) JP5519105B2 (enExample)
KR (1) KR101309334B1 (enExample)
CN (2) CN101090998B (enExample)
TW (1) TWI319783B (enExample)
WO (1) WO2006020424A2 (enExample)

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